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SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 1
ESTABLISHED 1966
CATALOG #27
MICROSCOPE STANDS & BASES Table Stands & Custom Bases D102 Microscope Stands Adapters & Accessories
2 3 4
X-Y STAGES Coaxial Knob Stages KL-Series Fine Positioning Stages KM-Series Micrometer Stages Coaxial Knob Measuring Stages KL-Series Measuring Stages KL-Series Motorized Stages
5 6 7 8 9
10
DISK INSPECTION X-Y-THETA STAGES KD-Series Coaxial Knob Stages KD-Series Measuring Stages KDL-Series Motorized Stages
11 12 13
BIOTECH X-Y STAGES Stereo Base Stages KP53 Modular Post Stage M4 Extended Knob Stage KM3 Micrometer Measuring Stage KPL53 Motorized Post Stage KL46 Motorized Stage
14 15 15 16 17 18
Z-AXIS Stages & Measurement Z-Axis Stage Z-Axis Measurement
19 19
MICROSCOPE MOUNTING For Semprex Stages
20
STAGE ACCESSORIES Mask & Wafer Holders Biotech Sample Holders
22 23
DIGITAL READOUTS & METROLOGY Micro-DRO <DISCONTINUED>
Quadra-Chek Metrology DRO
24 25
MOTOR CONTROLLERS & SOFTWARE Servo & Stepper Motor Controllers AMICron Motion Software
26 27
PROBE & PUNCH NEEDLES For Probe Cards & Micro-Punching
28
TABLE OF CONTENTS
Product availability and specifications subject to change without notice. “Semprex” and the “S” logo are registered trademarks of Semprex Corporation. All rights reserved.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
2 CATALOG #27 SEMPREX CORPORATION
Table Stand with 4x4 Stage
MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES
TABLE STANDS • Simple stand consisting of 3.5” riser and base with
4 rubber feet • Provides mobile support for stages up to 8x8 inch
travel • Great for use with stereoscopes on boom stands
PART# DESCRIPTION
10-2301.00 Table Stand for 3-6” Stages
10-2301.80 Table Stand for 8” Stages
Aluminum Base with Component Mounting Holes
Granite Base Integrated with Stage & Post Assembly
CUSTOM BASES • Bases made from precision flat aluminum tool-
ing plate and granite surface plate • Designed and machined to meet customer’s
specific requirements as an integral part of a complete system
• Granite available in standard sizes of 9x12x2, 12x18x3, and 18x24x3 inches
• Aluminum available in sizes up to 24x36 inches and may be black, clear, or hard anodized, nickel plated, or painted
• Shock absorbing rubber feet included • Quoted individually based on size, number of holes,
treatment, and special fixture attachments as re-quired
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 3
D102 Bright-field Stand with Microscope Adapter, Post, and Micrometer Stage
MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES
D102 MICROSCOPE STANDS • Versatile stand providing stable base for micro-
scopes, video systems, and stages • Works with stereo microscopes, focus blocks, and
some compound microscopes • Preferred alternative to inadequate stands sup-
plied with many stereoscopes, allowing inspection of larger and/or heavier samples
• Available with variable 25 watt halogen internal illuminator for transmitted bright-field and/or dark-field backlighting
• Dark-field backlighting option useful in highlighting edges, rough surfaces, defects, etc.
• Available with internal mirror assembly for use with fiber-optic cable and illuminator for higher power bright-field backlighting
• Also available plain (no backlighting)
PART# DESCRIPTION
10-2501.00 D102 Stand, Plain (3-6” stages)
10-2501.80 D102 Stand, Plain (8” stages)
10-2502.00 D102 Bright-Field Stand for use with Fiber-Optic Illuminator (3-6” stages)
10-2502.80 D102 Bright-Field Stand for use with Fiber-Optic Illuminator (8” stages)
10-2503.00 D102 Bright-Field Stand with Variable 25W Halo-gen Illuminator (3-6” stages)
10-2503.80 D102 Bright-Field Stand with Variable 25W Halo-gen Illuminator (8” stages)
10-2504.00 D102 Bright-Field/Dark-Field Stand with Variable 25W Halogen Illuminator (3-6” stages)
10-2504.80 D102 Bright-Field/Dark-Field Stand with Variable 25W Halogen Illuminator (8” stages)
Ordering Notes: 1. A microscope/focus block adapter must be
specified (see page 4, 10-26##.##). For no adapter, use part# 10-2600.00.
2. For stands to be used with fiber-optic illumi-nators, specify diameter of fiber-optic cable output shank.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
4 CATALOG #27 SEMPREX CORPORATION
D102 Stand with 2 Dovetail Posts, Cross-Slider, Single Slider, and 8x8 Stage
D102 Stand and Various Adapters
MICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASESMICROSCOPE STANDS & BASES
D102 SCOPE/FOCUS BLOCK ADAPTERS • Large variety of interchangeable
adapters for stereo microscopes, video systems, and some compound microscopes
• Custom configurations available • To match with stand, specify # as
0 = 3-6” stages 8 = 8” stages
PART# DESCRIPTION
10-2612.#0 Wild M400-450— 25mm Round Post & L-Arm
10-2612.#2 Leica MZ/GZ— L-Arm for 3-hole mount Leica Post
10-2614.#0 Meiji EM Series— 20mm Round Post & L-Arm
10-2614.#1 Meiji FU1000— Rigid Dovetail Post & Adapter
10-2615.#0 Mitutoyo FS60/70— Rigid Dovetail Post & Adapter
10-2616.#0 Nikon SMZ 2-10— 24.5mm Round Post & L-Arm
10-2616.#1 Nikon Focus Block— Rigid Dovetail Post & Adapter
10-2616.#2 Nikon SMZU/1500— 32mm Round Post & L-Arm
10-2616.#3 Nikon Bonder/E-Arm— Rigid Dovetail Post & Adapter
10-2617.#0 Olympus BHMJ— Dovetail Post & 22mm Post Adapter
10-2617.#1 Olympus SZ3— 25mm Round Post & L-Arm
10-2617.#2 Olympus SZH— 32mm Round Post & L-Arm
10-2617.#3 Olympus Modular BX— Rigid Dovetail Post & Adapter
10-2617.#5 Olympus SZ-STB3— 32mm Round Post & L-Arm
10-2618.#0 Zeiss Stereoscopes— 32mm Round Post & L-Arm
10-2623.#1 Nissho— 20mm Round Post & L-Arm
10-2699.#0 Video Post, 24” Knob Adjustable, and Adapter with 1/4-20 Lock Screw (specify camera or lens center distance)
PART# DESCRIPTION
10-2700.## Stop Collar for Round Posts
10-2702.00 Stop Clamp for Dovetail Posts
10-2710.## Upgrade to 16” Round Post (standard post 8-12”)
10-2790.00 Replacement 25W Bulb for D102 BF Stands
10-4707.00 Rigid Dovetail Post, 7” w/Endcap & Mount Holes
10-4714.00 Rigid Dovetail Post, 14” w/Endcap & Mount Holes
10-4718.00 Rigid Dovetail Post, 18” w/Endcap
10-4724.00 Rigid Dovetail Post, 24” w/Endcap
10-4814.00 Generic Post Base w/1” slots for four 1/4 screws
10-4911.00 Dovetail Slider w/Clamp & Attachment Holes
10-4912.00 Cross (90 deg) Dovetail Slider w/Clamps
POSTS & ACCESSORIES • Safety stops and extended length posts • Modular 4-sided dovetail posts provide superb ri-
gidity and strength—very important in high-power applications
• Cross-dovetail slider allows linking of multiple posts • For round post accessories, specify ## as
20=20mm, 24=24.5mm, 25=25mm, 32=32mm
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 5
XXX---Y STAGESY STAGESY STAGES
K300 Stage for Transmitted Light
PART# DESCRIPTION
11-4000.2# M4 Stage, 4x4 X-Y, Transmitted Light w/Glass Insert
11-4002.2# M4 Stage, 4x4 X-Y, Reflected Light
12-6400.n# K64 Stage, 6x4 X-Y, Transmitted Light w/Glass Insert
12-6402.n# K64 Stage, 6x4 X-Y, Reflected Light
12-6600.n# K66 Stage, 6x6 X-Y, Transmitted Light w/Glass Insert
12-6602.n# K66 Stage, 6x6 X-Y, Reflected Light
12-8800.4# K88 Stage, 8x8 X-Y, Transmitted Light w/Glass Insert
12-8802.4# K88 Stage, 8x8 X-Y, Reflected Light
12-1200.4# K300 Stage, 12x10 X-Y, Transm. Light w/Glass Insert
12-1202.4# K300 Stage, 12x12 X-Y, Reflected Light
13-1092.00 Optional Speed Handle for Quick Positioning
Model Top Plate Bottom Plate Glass Thick
A B C D E F
11-400x 10.00 5.88 4.45 7.02 4.5x4.5 1.00
12-6402 10.37 6.97 4.90 6.80 N/A 0.96
12-6600 11.70 9.45 6.60 11.55 6.5x6.5 0.96
12-6602 11.32 8.00 6.60 8.00 N/A 0.96
12-8800 14.95 11.50 7.60 8.00 8.5x8.5 1.17
12-8802 13.20 9.70 6.60 8.00 N/A 1.10
12-1200 18.82 14.00 8.34 12.65 12.5x10.5 1.48
12-1202 18.82 14.00 8.34 12.65 N/A 1.48
12-6400 10.37 6.97 4.90 8.50 6.5x4.25 0.96
COAXIAL KNOB STAGES • High quality stage for manual control applications • Thin cross-section (0.84-1.48") allows stage to eas-
ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems
• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)
Ordering Notes: 1. For bearing style, please specify n as
2 = ball bearings 4 = cross-roller bearings
2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)
3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
4. For mask and wafer accessories, see p.22.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
6 CATALOG #27 SEMPREX CORPORATION
KL300 Leadscrew Stage for Reflected Light
XXX---Y STAGESY STAGESY STAGES
PART# DESCRIPTION
12-6480.#0 KL64 Leadscrew Stage, 6x4 X-Y, Transmitted Light w/Glass Insert
12-6482.#0 KL64 Leadscrew Stage, 6x4 X-Y, Reflected Light
12-6680.#0 KL66 Leadscrew Stage, 6x6 X-Y, Transmitted Light w/Glass Insert
12-6682.#0 KL66 Leadscrew Stage, 6x6 X-Y, Reflected Light
12-8880.40 KL88 Leadscrew Stage, 8x8 X-Y, Transmitted Light w/Glass Insert
12-8882.40 KL88 Leadscrew Stage, 8x8 X-Y, Reflected Light
12-1280.40 KL300 Leadscrew Stage, 12x10 X-Y, Transmitted Light w/Glass Insert
12-1282.40 KL300 Leadscrew Stage, 12x12 X-Y, Reflected Light
Model Top Plate Bottom Plate Glass Thick
A B C D E F
12-6480 8.40 6.97 4.90 6.80 6.5x4.25 0.96
12-6482 8.40 6.97 4.90 6.80 N/A 0.96
12-6680 9.00 9.45 6.57 8.00 6.5x6.5 0.96
12-6682 8.80 8.00 6.57 8.00 N/A 0.96
12-8880 10.80 11.50 7.57 9.70 8.5x8.5 1.17
12-8882 10.80 9.70 6.57 9.70 N/A 1.10
12-1200 15.50 14.00 8.84 14.00 12.5x10.5 1.48
12-1202 15.50 14.00 8.84 14.00 N/A 1.48
KL-SERIES FINE POSITIONING LEADSCREW STAGES • High quality precision stage for high-power manual
control applications • Individual X-Y leadscrew knobs for fine movement
and quick-release handles for rapid positioning • Thin cross-section (0.96-1.48") allows stage to easily
adapt to most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra components bolted to-gether and are subject to assembly inaccuracies)
• Stainless steel ACME lead screws provide fine resolu-tion of 0.05” to 0.083” per revolution
• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)
Ordering Notes: 1. For bearing style, please specify # as
2 = ball bearings 4 = cross-roller bearings
2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
3. For mask and wafer accessories, see p.22.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 7
XXX---Y STAGESY STAGESY STAGES
Ordering Notes: 1. Micrometer adapter included with Stage —
select one for each axis. 2. A stage mount must be specified (see p.20-
21), otherwise D102 hole pattern used.
KM3 Stage with 2” Digital Micrometer Heads
• Low cost precision measuring stage • Special springs pre-load micrometer heads to
provide uniform backlash-free operation • High quality Mitutoyo digital or vernier mi-
crometer heads available • Thin cross-section (0.84") allows stage to easily
adapt to most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra compo-nents bolted together and are subject to as-sembly inaccuracies)
• Bearing slides made from single piece hard-ened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
PART# DESCRIPTION
12-3000.40 KM3 Stage, 3x3 X-Y, Transmitted w/Glass Insert
12-3002.40 KM3 Stage, 3x3 X-Y, Reflected Light
12-3090.40 KM3 Stage, 3” X Only, Transmitted w/Glass Ins.
12-3092.40 KM3 Stage, 3” X Only, Reflected Light
MT-3507.12 Digital Micrometer 1”/25mm, 1µm resolution w/LCD Display (.375” shank)
MT-1641.62 Digital Micrometer 2”/50mm, 1µm resolution w/LCD Display & Precision Knob (18mm shank)
MT-1512.21 Vernier Microm 25mm, 1µm res (12mm shank)
MT-1512.37 Vernier Micrometer 1”, 0.0001” res (.500” shank)
MT-1512.55 Vernier Microm 50mm, 10µm res (12mm shank)
MT-1512.71 Vernier Micrometer 2”, 0.001” res (.500” shank)
KM-SERIES MICROMETER MEASURING STAGES
Model Top Plate Bottom Plate Glass Thick
A B C D E F
12-3000 6.85 5.88 4.60 6.00 3.5x3.5 0.84
12-3002 6.85 5.88 4.60 6.00 N/A 0.84
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
8 CATALOG #27 SEMPREX CORPORATION
XXX---Y STAGESY STAGESY STAGES
K88 Measuring Stage with Rotating Wafer Puck
PART# DESCRIPTION
12-6410.n# K64 Stage, 6x4 X-Y, Transmitted Light w/Glass Insert
12-6412.n# K64 Stage, 6x4 X-Y, Reflected Light
12-6610.n# K66 Stage, 6x6 X-Y, Transmitted Light w/Glass Insert
12-6612.n# K66 Stage, 6x6 X-Y, Reflected Light
12-8810.n# K88 Stage, 8x8 X-Y, Transmitted Light w/Glass Insert
12-8812.n# K88 Stage, 8x8 X-Y, Reflected Light
12-1210.n# K300 Stage, 12x10 X-Y, Transm. Light w/Glass Insert
12-1212.n# K300 Stage, 12x12 X-Y, Reflected Light
Model Top Plate Bottom Plate Glass Thick
A B C D E F
12-6410 10.37 6.97 4.90 8.50 6.5x4.25 0.96
12-6412 10.37 6.97 4.90 6.80 N/A 0.96
12-6610 11.70 9.45 6.60 11.55 6.6x6.5 0.96
12-6612 11.32 8.00 6.60 8.00 N/A 0.96
12-8810 14.95 11.50 7.60 8.00 8.5x8.5 1.17
12-8812 13.20 9.70 6.60 8.00 N/A 1.10
12-1210 18.82 14.00 8.34 12.65 12.5x10.5 1.48
12-1212 18.82 14.00 8.34 12.65 N/A 1.48
• High quality stage for manual measuring applica-tions with encoder resolutions from 20 to 0.5 µm
• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 µm • Unique hardened steel friction drive for backlash-
free operation outlasts rack and pinion systems • Bearing slides made from single piece hardened
steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
• Basic and metrology digital readouts available
Ordering Notes: 1. For resolution, please specify n as:
4 = 5 µm linear encoders 5 = 1 µm linear encoders
2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)
3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
4. For mask and wafer accessories, see p.22. 5. For digital readouts & metrology, see p.24-25.
COAXIAL KNOB MEASURING STAGES
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 9
XXX---Y STAGESY STAGESY STAGES
• Precision stage for high-power manual measuring applications with encoder resolutions up to 0.5 µm
• Individual X-Y leadscrew knobs for fine movement and quick-release handles for rapid positioning
• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes including Leica, Mi-tutoyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 µm • Stainless steel ACME lead screws provide fine reso-
lution of 0.05” to 0.083” per revolution • Single piece hardened steel bearing slides use
cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
• Basic and metrology digital readouts available
KL88 Measuring Stage for Reflected Light
PART# DESCRIPTION
12-6490.#0 KL64 Leadscrew Stage, 6x4 X-Y, Transm. w/Glass
12-6492.#0 KL64 Leadscrew Stage, 6x4 X-Y, Reflected Light
12-6690.#0 KL66 Leadscrew Stage, 6x6 X-Y, Transm. w/Glass
12-6692.#0 KL66 Leadscrew Stage, 6x6 X-Y, Reflected Light
12-8890.#0 KL88 Leadscrew Stage, 8x8 X-Y, Transm. w/Glass
12-8892.#0 KL88 Leadscrew Stage, 8x8 X-Y, Reflected Light
12-1290.#0 KL300 Leadscrew Stg, 12x10 X-Y, Transm. w/Glass
12-1292.#0 KL300 Leadscrew Stage, 12x12 X-Y, Reflected Light
Model Top Plate Bottom Plate Glass Thick
A B C D E F
12-6490 8.40 6.97 4.90 6.80 6.5x4.25 0.96
12-6492 8.40 6.97 4.90 6.80 N/A 0.96
12-6690 9.00 9.45 6.57 8.00 6.5x6.5 0.96
12-6692 8.80 8.00 6.57 8.00 N/A 0.96
12-8890 10.80 11.50 7.57 9.70 8.5x8.5 1.17
12-8892 10.80 9.70 6.57 9.70 N/A 1.10
12-1290 15.50 14.00 8.84 14.00 12.5x10.5 1.48
12-1292 15.50 14.00 8.84 14.00 N/A 1.48
KL-SERIES FINE POSITIONING MEASURING STAGES
Ordering Notes: 1. For resolution, please specify # as:
5 = 1 µm linear encoders 6 = 0.5 µm linear encoders
2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
3. For mask and wafer accessories, see p.22. 4. For digital readouts, see p.24-25.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
10 CATALOG #27 SEMPREX CORPORATION
XXX---Y STAGESY STAGESY STAGES
KL88 Motor Stage for Reflected Light
PART# DESCRIPTION
12-6436.7# KL64 Motor Stage, 6x4 X-Y, Transm. w/Glass
12-6438.7# KL64 Motor Stage, 6x4 X-Y, Reflected Light
12-6636.7# KL66 Motor Stage, 6x6 X-Y, Transm. w/Glass
12-6638.7# KL66 Motor Stage, 6x6 X-Y, Reflected Light
12-8836.7# KL88 Motor Stage, 8x8 X-Y, Transm. w/Glass
12-8838.7# KL88 Motor Stage, 8x8 X-Y, Reflected Light
12-1236.7# KL300 Motor Stage, 12x10 X-Y, Transm. w/Glass
12-1238.7# KL300 Motor Stage, 12x12 X-Y, Reflected Light
Model Top Plate Bottom Plate Glass Thick
A B C D E F
12-6436 8.40 6.97 4.90 6.80 6.5x4.25 0.96
12-6438 8.40 6.97 4.90 6.80 N/A 0.96
12-6636 9.00 9.45 6.57 8.00 6.5x6.5 0.96
12-6638 8.80 8.00 6.57 8.00 N/A 0.96
12-8836 10.80 11.50 7.57 9.70 8.5x8.5 1.17
12-8838 10.80 9.70 6.57 9.70 N/A 1.10
12-1236 15.50 14.00 8.84 14.00 12.5x10.5 1.48
12-1238 15.50 14.00 8.84 14.00 N/A 1.48
KL-SERIES MOTORIZED STAGES
• Precision motorized stage for applications requiring automation and ergonomics
• Joystick and programmable software control • DC servo motors and rotary encoders in closed-loop
system for guaranteed positioning or microstepping motors in open-loop system
• Thin cross-section (0.96-1.48") allows stage to eas-ily adapt to most microscopes
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 µm error in 3000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 µm • Precision stainless steel ACME lead screws provide
fine resolution of 2 mm per revolution • Single piece hardened steel bearing slides use
cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
Ordering Notes: 1. For motor type, please specify # as:
5 = servo, 0.5 µm encoders, 75 mm/sec 7 = stepper, 0.16 µm steps, 20 mm/sec
2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
3. For mask and wafer accessories, see p.22. 4. For controllers and software, see p.26-27.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
WWW.SEMPREX.COM CATALOG #27 11
DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES
KD64 Disk Stage for Transmitted Light
PART# DESCRIPTION
12-9046.2# KD64 Disk Stage, 6x4x360 X-Y-Theta, Transm. Light
12-9048.n# KD64 Disk Stage, 6x4x360 X-Y-Theta, Reflected Light
12-9068.n# KD66 Disk Stage, 6x6x360 X-Y-Theta, Reflected Light
13-9058.05 Hub for 7 mm / 25 mm I.D. Disks
13-9058.30 Hub for 20 mm / 25 mm I.D. Disks
13-9058.40 Hub for 25 mm / 40 mm I.D. Disks
13-9458.00 Vacuum System for Disk Stages w/Valve & Hoses
13-9458.25 Vacuum Hub for 20 mm I.D. Disks (13-9458.00 req’d)
13-9458.35 Vacuum Hub for 25 mm I.D. Disks (13-9458.00 req’d)
13-1092.00 Optional Speed Handle for Quick Positioning
Model Top Plate Bottom Plate Opening Thick
A B C D E F
12-9046 10.37 6.97 4.90 6.80 4.00 1.77
12-9048 10.37 6.97 4.90 6.80 N/A 1.90
12-9068 11.85 8.00 6.60 8.00 N/A 1.90
KD-SERIES COAXIAL KNOB STAGES
• High quality stage for inspection of aluminum, glass and plastic hard disks
• Specially designed rotary axis provides 360 de-grees of precise concentric motion
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems
• Bearing slides made from single piece hardened steel use precision ball or cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)
Ordering Notes: 1. For bearing style, please specify n as
2 = ball bearings 4 = cross-roller bearings
2. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)
3. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
SEMPREX.COM - Your #1 source for Precision Microscope Stages, Microscope Stands, and Probe Needles!
12 CATALOG #27 SEMPREX CORPORATION
DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES
KD64 Measuring Stage for Reflected Light
KD-SERIES COAXIAL KNOB MEASURING STAGES • High quality stage for inspection of aluminum, glass
and plastic hard disks • Specially designed rotary axis provides 360 de-
grees of very precise concentric motion • Proprietary KORE-FRAME links X-Y axes in a single
piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 µm error in 5000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 µm • Unique hardened steel friction drive for backlash-
free operation proven to last much longer than rack and pinion systems
• Bearing slides made from single piece hardened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
• Basic and metrology digital readouts available
Ordering Notes: 1. For measuring axes, please specify * as:
1 = X-Theta (2-axis, includes Y-axis Lock) 3 = X-Y-Theta (3-axis)
2. For resolution, please specify n as: 4 = 5 µm linear & .025º rotary encoder 5 = 1 µm linear & .025º rotary encoder
3. For knob style, please specify # as 0 = rubber, short (1.5”) 1 = rubber, long (2.5”) 2 = large metal, short (1.5”) 3 = large metal, long (2.5”)
4. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern used.
5. For digital readouts, see p.24-25.
Model Top Plate Bottom Plate Opening Thick
A B C D E F
12-9148 10.37 6.97 4.90 6.80 N/A 1.90
12-9168 11.85 8.00 6.60 8.00 N/A 1.90
PART# DESCRIPTION
12-9*48.n# KD64 Disk Stg, 6x4x360 X-Y-Theta, Refl. Light
12-9*68.n# KD66 Disk Stg, 6x6x360 X-Y-Theta, Refl. Light
13-9058.05 Hub for 7 mm / 25 mm I.D. Disks
13-9058.30 Hub for 20 mm / 25 mm I.D. Disks
13-9058.40 Hub for 25 mm / 40 mm I.D. Disks
13-9458.00 Vacuum System for Disk Stages w/Valve, Hoses
13-9458.25 Vacuum Hub 20 mm ID Disks (13-9458.00 req’d)
13-9458.35 Vacuum Hub 25 mm ID Disks (13-9458.00 req’d)
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DISK INSPECTION XDISK INSPECTION XDISK INSPECTION X---YYY---THETA STAGESTHETA STAGESTHETA STAGES
KD88 Motor Stage for Transmitted Light
KDL-SERIES MOTORIZED STAGES
• Precision motorized stage for disk inspection appli-cations requiring automation and ergonomics
• Joystick and programmable software control • DC servo motors and rotary encoders in closed-loop
system for guaranteed positioning • Specially designed rotary axis provides 360 de-
grees of very precise concentric motion • Proprietary KORE-FRAME links X-Y axes in a single
piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Resolution of 0.5 µm X(Y), .025º Theta • Smooth velocities from 6 mm/sec to 75 mm/sec • Linear accuracy is laser calibrated to less than 1
µm error in 3000; flatness and straightness better than 1 in 5000; orthogonality exceeds 1 in 10,000
• Repeatability within 2 µm • Precision stainless steel ACME lead screws provide
fine resolution of 2 mm per revolution • Single piece hardened steel bearing slides use
cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
Ordering Notes: 1. For motorized axes, please specify # as:
2 = X-Theta (2-axis, manual Y-axis w/stop) 4 = X-Y-Theta (3-axis)
2. A stage mount must be specified (see p.20-21), otherwise D102 hole pattern will be used.
3. For controllers and software, see p.26-27.
Model Top Plate Bottom Plate Opening Thick
A B C D E F
12-9248 8.40 6.97 4.90 6.80 N/A 1.90
12-9268 8.80 8.00 6.60 8.00 N/A 1.90
PART# DESCRIPTION
12-9#48.75 KDL64 Mtr Stg, 6x4x360 X-Y-Theta, Reflected Light
12-9#68.75 KDL66 Mtr Stg, 6x6x360 X-Y-Theta, Reflected Light
13-9058.05 Hub for 7 mm / 25 mm I.D. Disks
13-9058.10 Hub for 12 mm / 20 mm I.D. Disks
13-9058.30 Hub for 20 mm / 25 mm I.D. Disks
13-9058.40 Hub for 25 mm / 40 mm I.D. Disks
13-9458.00 Vacuum System for Disk Stages w/Valve & Hoses
13-9458.25 Vacuum Hub for 20 mm I.D. Disks (13-9458.00 req’d)
13-9458.35 Vacuum Hub for 25 mm I.D. Disks (13-9458.00 req’d)
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14 CATALOG #27 SEMPREX CORPORATION
BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES
SBS120 Stage shown on stereo microscope base
STEREO BASE STAGES • High quality manual control stage for use with most
stereo microscope bases with or without internal illuminators
• Special thin cross-section places sample mere milli-meters above light source opening for improved lighting effect (especially for darkfield mode)
• Sample holders available for slides, petri dishes, well plates, and other small parts. Custom holders can be made on request
• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems
• Bearing slides use hardened steel precision ball bearings for smooth, free running, consistent travel
PART# DESCRIPTION
11-0120.00 SBS120 Stage, 120x75 X-Y for Transmitted/Reflected Light Bases, Horizontal Metal Knobs
11-0122.20 SBS122 Stage, 125x80 X-Y for Transmitted Light Bases, Drop-Down Rubber Knobs
Ordering Notes: 1. Stage adaptation to most stereo bases available
(see p.20-21); for microscopes not listed, please specify make & model. In some cases, base must be sent to our factory for retrofitting.
2. For standard sample holders, please provide specifications. For custom sample holders, please provide a drawing and/or sample.
SBS122 Stage
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BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES
M4 Stage for Inverted Microscope
M4 EXTENDED KNOB STAGE FOR INVERTED MICROSCOPES • Low cost, quality stage for precise manual X-Y mo-
tion applications on inverted microscopes • Thin cross-section and offset mount with open sam-
ple area allows unobstructed operation of micro-scope’s controls, high-power objectives, and trans-mitted and reflected lighting
• Unique hardened steel friction drive for backlash-free operation proven to last much longer than rack and pinion systems
• Extended length flexible knob for ergonomic control • Bearing slides made from single piece hardened
steel use precision ball bearings for smooth, free running, consistent travel (other stages use split triangular wires)
• Cross-roller bearings available for extra precision and rigidity
• Travel up to 100x100 mm — depends on micro-scope model.
PART# DESCRIPTION
11-4010.22 M4 Extended Knob Stage f/Inverted Microscope
13-1092.00 Optional Speed Handle for Quick Positioning
Note: Stage adaptation to most inverted microscopes available (see p.20-21); for microscopes not listed, please specify make & model.
KP53 MANUAL POST STAGE • Unique stage for precise manual motion appli-
cations on inverted and upright microscopes • Stage is mounted on post off to one side of mi-
croscope for simple installation and unob-structed operation of microscope’s controls, high-power objectives, and transmitted and reflected lighting
• Post mount provides quick vertical adjustment and X-Y alignment of stage
• Unique hardened steel friction drive for back-lash-free operation proven to last much longer than rack and pinion systems
• Extended flexible knob for ergonomic control • Bearing slides made from single piece hard-
ened steel use precision ball bearings for smooth, free running, consistent travel (other stages use split triangular wires)
• Cross-roller bearings available for extra preci-sion and rigidity
KP53 Stage with Post Mounted to Base Plate
PART# DESCRIPTION
12-5307.14 KP53 Manual Post Stage, 120x90 mm X-Y, w/350 mm Post, Locking Z-Slide, Base Mount, Specimen Adapter
12-5307.54 (same as above, but with Cross-Roller Bearings)
13-1092.00 Optional Speed Handle for Quick Positioning
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BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES
KM3 Stage shown without micrometer heads
• Low cost precision measuring stage • Special springs pre-load micrometer heads to pro-
vide uniform backlash-free operation • High quality Mitutoyo digital or vernier micrometer
heads available • Thin cross-section (0.84") allows stage to easily
adapt to most microscopes including Leica, Mitu-toyo, Nikon, Olympus, and Zeiss
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flat-ness (other stages use 4 extra components bolted together and are subject to assembly inaccuracies)
• Bearing slides made from single piece hardened steel use cross-roller bearings for extra precision and rigidity (other stages use split triangular wires)
PART# DESCRIPTION
12-3005.00 KM3 Stage, 3x3 X-Y, Transmitted w/Glass Insert
MT-3507.12 Digital Micrometer 1”/25mm, 1µm resolution. w/LCD Display (.375” shank)
MT-1641.62 Digital Micrometer 2”/50mm, 1µm resolution w/LCD Display & Precision Knob (18mm shank)
MT-1512.21 Vernier Micrometer 25mm, 1µm res (12mm shank)
MT-1512.37 Vernier Micrometer 1”, 0.0001” res (.500” shank)
MT-1512.55 Vernier Micrometer 50mm, 10µm res (12mm shank)
MT-1512.71 Vernier Micrometer 2”, 0.001” resolution (.500” shank)
KM3 MICROMETER MEAS-URING STAGE FOR INVERTED MICROSCOPES
Ordering Notes: 1. Micrometer adapter included with Stage — specify
one for each axis. 2. Stage adaptation to most inverted microscopes
available (see p.20-21); for microscopes not listed, please specify make & model.
3. For biotech sample holders, see p.23.
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BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES
KPL53 MOTORIZED POST STAGE • Unique stage for automation of biotech appli-
cations on inverted and upright microscopes • Microstepping motors in open-loop system or
DC servo motors and rotary encoders in closed-loop system for guaranteed positioning
• Stage is mounted on post off to one side of mi-croscope for simple installation and unob-structed operation of microscope’s controls, high-power objectives, and transmitted and reflected lighting
• Post mount provides quick vertical adjustment and X-Y alignment of stage
• High quality ball screws provide fine resolution of 2 mm per revolution and recirculating ball nuts are pre-loaded to eliminate backlash
• Bearing slides made from single piece hard-ened steel use precision cross-roller bearings for smooth, free running, consistent travel (other stages use split triangular wires)
PART# DESCRIPTION
12-5367.1# KPL53 Stepper Motor Stage, 120x90 mm X-Y, w/350 mm Post, Locking Z-Slide, Base Mount, & Specimen Adapter
Ordering Notes: 1. For motor type, please specify # as:
4 = stepper, 0.16 µm steps, 20 mm/sec 5 = servo, 0.5 µm enc, 75 mm/sec
2. For biotech sample holders, see p.23. 3. For controllers and software, see p.26-27.
KPL53 Motorized Stage with Post Mounted to Base Plate
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Ordering Notes: 1. For motor type, please specify # as:
4 = stepper, 0.16 µm steps, 20 mm/sec 5 = servo, 1 µm enc, 15 mm/sec
2. Stage adaptation to most inverted microscopes available (see p.20-21); for microscopes not listed, please specify make & model.
3. For biotech sample holders, see p.23. 4. For controllers and software, see p.26-27.
BIOTECH STAGESBIOTECH STAGESBIOTECH STAGES
• Precision motorized stage for biotech applica-tions requiring automation and ergonomics
• Joystick and programmable software control • Microstepping motors in open-loop system or
DC servo motors and rotary encoders in closed-loop system for guaranteed positioning
• Thin cross-section (0.84") allows stage to work with most inverted microscopes
• Proprietary KORE-FRAME links X-Y axes in a single piece of metal for superior orthogonality and flatness (other stages use 4 extra compo-nents bolted together and are subject to as-sembly inaccuracies)
• Linear accuracy is laser calibrated to less than 1 µm error in 2500; flatness and straightness better than 1 in 4000; orthogonality exceeds 1 in 8,000
• Repeatability within 2 µm • Precision stainless steel ACME lead screws
provide fine resolution of 2 mm per revolution • Single piece hardened steel ball bearing slides
provide smooth, free running, consistent travel (other stages use split triangular wires)
• Actual travel depends on microscope model
PART# DESCRIPTION
12-4637.7# KL46 Biotech Motor Stage, up to 120x60mm travel, Transmitted 90mm diameter
KL46 MOTOR STAGE FOR INVERTED MICROSCOPES
KL46 Motorized Stage
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ZZZ---AXIS STAGE & MEASUREMENTAXIS STAGE & MEASUREMENTAXIS STAGE & MEASUREMENT
MODULAR Z-AXIS STAGE • Leadscrew drive stage suitable for focusing and
fine Z-axis adjustment of small microscopes, video systems, stages, and more
• Built-in dovetail slider with clamp provides coarse vertical adjustment
Modular Z-Axis Stage on 14” Post w/Generic Base
Z-AXIS MEASURING SYSTEM
Z-Axis Indicator with Microscope, X-Y Measuring Stage, and 3-Axis Digital Readout
• Linear indicator can be retrofitted to almost any microscope, focus block, or Z-stage for po-sitioning and measurement applications
• 0.1 um resolution • 30 mm travel range • Linear accuracy better than 1 in 30,000 • Use with a digital readout and with or without
any X-Y or X-theta encoded stage for either a 1-axis or 3-axis measuring system
PART# DESCRIPTION
14-3009.80 Z-Axis Linear Indicator, 0.1 um res., 30 mm travel
Ordering Notes: 1. Mounting hardware included—please specify
microscope/focus block make and model. 2. For digital readouts, see p.24-25. 3. In most cases, microscope frame/focus block
must be sent to our factory for retrofitting.
PART# DESCRIPTION
10-3601.00 Modular Z-Axis Leadscrew Stage, 1” Travel, w/Integrated Dovetail Slider & Clamp
10-3631.7# Motorized Modular Z-Axis Leadscrew Stage, 1” Travel, w/Integrated Dovetail Slider & Clamp
10-4707.00 Rigid Dovetail Post, 7” w/Endcap & Mount Holes
10-4714.00 Rigid Dovetail Post, 14” w/Endcap & Mount Holes
10-4718.00 Rigid Dovetail Post, 18” w/Endcap
10-4724.00 Rigid Dovetail Post, 24” w/Endcap
10-4814.00 Generic Post Base w/1” slots for four 1/4” screws
10-2702.00 Stop Clamp for Dovetail Posts
NOTE: For motor type, please specify # as: 5 = servo, 0.5 µm encoder, 15 mm/sec 7 = stepper, 0.16 µm steps, 4 mm/sec
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20 CATALOG #27 SEMPREX CORPORATION
STAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERS
MICROSCOPE MOUNTING FOR SEMPREX STAGES NOTE: Add suffix part# to stage part# when ordering. Stages ordered without suffix# will have Semprex standard D102 or D104 hole pattern in bottom plate. Footnotes in brackets indicate the following: [1] 3x3, 4x4 travel stages only [2] 6x4 travel stages only [3] 6x6 travel stages only [4] 8x8 travel stages only [5] 10x10 travel stages only [6] 12x12 travel stages only [A] Stage requires long knobs [B] For X-Y stages with paddles and disk
stages [C] For X-Y stages without paddles—plain top
(no disk stages) [D] For reflected light stages only [E] For transmitted light stages only [F] Stage requires short knobs [G] For biotech stages only (except SBS series)
P# SUFFIX DESCRIPTION
-CH4 Custom Hole Pattern (drawing required, 2-4 holes)
-CR0 Riser Pedestal for Base Plate [1,2,3,D]
-CS0 Stereo Base Insert Adapter (drawing req’d)
-L100 Leica INM100 Hole Pattern [4]
-L200 Leica INM200 Hole Pattern [4]
-L300 Leica INM300 Hole Pattern [4,5,6,D]
-L301 Leica INM300 Hole Pattern w/Enlarged Cutout in Stage Bottom Plate [4,5,6,E]
-LE0 Leitz Ergolux Spacer [3]
-LE2 Leica DME Hole Pattern [1,2]
-LL0 Leica DM1000 / DM2000 / DM2500 / DM3000 / DML-M Replacement Bracket [1,2,D]
-LL1 Leica DM1000 / DM2000 / DM2500 / DM3000 / DML-M Adapter & Carrier Mod [2,E]
-LM40 Leica DM4000 / DM6000 Spacer & BP Mod [2,F]
-LP88 Reichert Polylite 88 Adapter [4]
-LR0 Leica DMR-M Hole Pattern & Carrier Modification [2,E]
-LR1 Leica DMR-M Replacement Bracket [1,2,D]
-LS0 Leica HL Stereo Base Adaptation [SBS120/122 only]
-LS1 Leica Plain Stereo Bases Adaptation [SBS120 only]
-M110 Mitutoyo FS110 Hole Pattern [3,4,B]
-M111 Mitutoyo FS110 Spacer [3,4,C]
-N082 Nikon Eclipse 80i / 90i Adapter & Carrier Mod. [1,2]
-N100 Nikon Optiphot 100 / M Adapter [1,2]
-N150 Nikon Optiphot 150 Hole Pattern [3,F]
-N151 Nikon Eclipse L150 Adapter & Carrier Mod. [1,2]
-N152 Nikon LV100 / LV150 Adapter & Carrier Mod. [1,2]
-N200 Nikon Optiphot 200 Adapter [4]
-N201 Nikon L200 Adapter [4]
-N300 Nikon Optiphot 300 Adapter [4,6]
-N600 Nikon Eclipse ME600 / E400 Replacemnt Bracket [1,2,D]
-N601 Nikon Eclipse ME600 / E400 Adaptr & Carrier Mod [1,2,E]
-N66 Nikon IC66 Hole Pattern [3,B w/o DIC] [3,C w/DIC] [3,4 w/scope modification, call for quote]
-N67 Nikon IC66 (w/o DIC) Spacer [3,C]
-NI2 Nikon TE2000 Adapter [G]
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THROAT DEPTH A microscope’s throat depth limits the size of stage that can be used. As a general rule, the distance “D” must be at least one inch greater than the Y-axis travel of the stage. Sometimes small stages cannot be used because the mounting bracket is wider than the stage’s bot-tom plate.
WORKING DISTANCE The working distance “W” of a microscope must be large enough to accommodate the stage thickness and any accessories, plus the speci-men thickness, plus the objective lens focal distance.
STAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERSSTAGE MOUNTING ADAPTERS
P# SUFFIX DESCRIPTION
-OA70 Olympus AX70 Replacement Bracket [3,D]
-OB50 Olympus BX40 / BX50 / BX60 Replacemnt Brackt [1,2,D]
-OB51 Olympus BX40 / 50 / 60 Adapter & Carrier Mod [1,2,A,E]
-OH10 Olympus BHM / BHN Adapter [1,2]
-OH20 Olympus BH2 / BHS Adapter [1,2]
-OH21 Olympus BH2MJL Adapter [3]
-OH30 Olympus BH3MJL-T4 Adapter [3,4,5,6]
-OM40 Olympus MX40 / MX51 Spacer [3,F]
-OM50 Olympus MX50 / MX61 Adapter [4]
-OM51 Olympus MX50L / MX61L Adapter [4,6]
-OX70 Olympus IX51 / IX71 / IX81 Adapter [G]
-OC41 Olympus CKX31 / CKX41 Adapter [G]
-OG71 Olympus GX71 Adapter [G]
-OG51 Olympus GX41 / GX51 Adapter [G]
-OS10 Olympus MVX10 Stereo Base Adaptation [SBS120 only]
-ZE0 Zeiss Axiotech Replacement Bracket [1,2,D]
-ZE1 Zeiss Axiotech Adapter & Carrier Modification [1,2,E]
-ZI2 Zeiss Axiovert 100 / 200 Adapter [G]
-ZM2 Zeiss AxioImager Hole Pattern & Carrier Mod [2,A,E]
-ZM3 Zeiss AxioImager Replacement Bracket [1,2,D,F]
-ZP0 Zeiss Axioplan / Axiophot Adapter [1,2,E]
-ZP1 Zeiss Axioplan / Axiophot Replacement Bracket [1,2,D]
-ZR2 Zeiss Axiotron 2 Hole Pattern [3,4,F]
-ZS1 Zeiss Axioskop 1 Hole Pattern [1,2]
-ZS2 Zeiss Axioskop 2 Hole Pattern & Carrier Mod. [2,A,E]
-ZS3 Zeiss Axioskop 2 Replacement Bracket [1,2,D,F]
-ZU0 Zeiss Universal Adapter [1,2]
-ZV0 Zeiss Vario Riser Pedestal [1,2] [3,4 w/scope modifica-tion, call for quote]
MICROSCOPE MOUNTING FOR SEMPREX STAGES NOTE: Add suffix part# to stage part# when ordering. Stages ordered without suffix# will have Semprex standard D102 or D104 hole pattern in bottom plate. Footnotes in brackets indicate the following: [1] 3x3, 4x4 travel stages only [2] 6x4 travel stages only [3] 6x6 travel stages only [4] 8x8 travel stages only [5] 10x10 travel stages only [6] 12x12 travel stages only [A] Stage requires long knobs [B] For X-Y stages with paddles and disk
stages [C] For X-Y stages without paddles—plain top
(no disk stages) [D] For reflected light stages only [E] For transmitted light stages only [F] Stage requires short knobs [G] For biotech stages only (except SBS series)
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STAGE ACCESSORIESSTAGE ACCESSORIESSTAGE ACCESSORIES
MASK & WAFER HOLDERS • Holders support mask/wafers on precision flat
surface • Include cutouts for edge-grip tools or vacuum
wands, allowing easy placement and removal • Multiple holders are easily interchangeable on
one stage using paddle guide set
Standard Mask Paddle
M8 Rotating Puck Paddle, 8” w/6” Add-on
PART# DESCRIPTION
FOR 4” STAGES:
13-4014.00 M4 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)
13-4015.00 M4 Paddle Guide Set, Side Load
13-40##.00 M4 Mask Paddle
13-4033.00 M4 Wafer Paddle, 4” Wafers
13-4233.00 M4 Rotating Puck Paddle, 4” Wafers
13-4243.02 M4 Rot. Vacuum Puck Pad. w/Valve/Hose, 2-4” Wafers
FOR 6” STAGES:
13-6014.00 M6 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)
13-6015.00 M6 Paddle Guide Set, Side Load
13-60##.00 M6 Mask Paddle
13-60nn.00 M6 Wafer Paddle
13-62nn.00 M6 Rotating Wafer Puck Paddle
13-6245.02 M6 Rot. Vacuum Puck Pad. w/Valve/Hose, 4-6” Wafers
13-2031.02 Vacuum Chuck w/Valve/Hose, Knob Rot., 4-6” Wafers
FOR 8” STAGES:
13-8014.00 M8 Paddle Guide Set, Front Load (n/a Mtr/Ldscr Stgs)
13-8015.00 M8 Paddle Guide Set, Side Load (Reflected Stages)
13-8015.10 M8 Paddle Guide Set, Side Load (Transm. Stages)
13-80##.00 M8 Mask Paddle
13-80nn.00 M8 Wafer Paddle
13-82nn.00 M8 Rotating Wafer Puck Paddle
13-8246.02 M8 Rot. Vacuum Puck Pad. w/Valve/Hose, 5-8” Wafers
13-2041.02 Vacuum Chuck w/Valve/Hose, Knob Rot., 5-8” Wafers
FOR 12” STAGES:
13-1214.00 M300 Paddle Guide Set, Front Load
13-1248.02 M300 Rot. Vac. Puck Pad. w/Valve/Hose, 8-12” Wafers
ADDITIONAL ATTACHMENTS:
13-0021.02 Add-on 2” Wafer Guide on 4” Puck
13-0021.03 Add-on 3” Wafer Guide on 4” Puck
13-0021.04 Add-on 4” Wafer Guide on 6” Puck
13-0021.05 Add-on 5” Wafer Guide on 6” Puck
13-0041.05 Add-on 5” Wafer Guide on 8” Puck
13-0041.06 Add-on 6” Wafer Guide on 8” Puck
13-0041.08 Add-on 8” Wafer Guide on 12” Puck
13-1468.00 Paddle Alignment Stop (mounts on stage)
Ordering Notes: 1. For mask size, please specify ## as:
17 = 2.5” (M4-M8) 20 = 4” (M4-M8) 21 = 4.5” (M6-M8) 22 = 5” (M6-M8) 24 = 6” (M6-M8) 26 = 7” (M8)
2. For wafer/puck size, please specify nn as: 33 = 4” (M4-M8) 35 = 6” (M6-M8) 36 = 8” (M8)
3. Order one paddle guide with one or more paddles per stage.
4. Vacuum Chuck mounts directly to stage top plate and includes precision rotation knob.
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STAGE ACCESSORIESSTAGE ACCESSORIESSTAGE ACCESSORIES
BIOTECH SAMPLE HOLDERS • Interchangeable holders drop down into top plate
recess of Semprex biotech stages, bringing sam-ples closer to objective lens for proper focus
• Holders are precision machined from black delrin and will not scratch samples
• Custom holders available per request can be de-signed for a single sample or multiple samples
• Spring clamping option recommended for high pre-cision motorized applications
96 Well Microplate Holder
Two Slide Holder with Spring Clamp
PART# DESCRIPTION
13-5300.12 Plain Solid Insert for SBS120/122 stages
13-5318.01 Single Slide Holder for KP53/KL46/M4 stages
13-5318.31 Single Slide Holder for KM3 stage
13-5318.02 Dual Slide Holder w/Spring Clamp for KP53/KL46/M4
13-5318.32 Dual Slide Holder with Spring Clamp for KM3 stage
13-5318.04 Four Slide Holder for KP53/KL46/M4 stages
13-5330.06 Petri-Dish Holder, 60mm for KP53/KL46/M4 stages
13-5330.36 Petri-Dish Holder, 60mm for KM3 stage
13-5396.00 96 Well Microplate Holder for KP53/KL46/M4 stages
Ordering Notes: 1. For manual biotech stages, see p.14-16. 2. For motorized biotech stages, see p.17-18.
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PC-DRO Metrology Software Main Screen
3 axis Micro-DRO
DIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGY
PART# DESCRIPTION
14-2902.10 Micro-DRO, 2 axis X-Y
14-2902.20 Micro-DRO, 2 axis X-Theta
14-2903.10 Micro-DRO, 3 axis X-Y-Z
14-2903.20 Micro-DRO, 3 axis X-Y-Theta
14-2903.30 Micro-DRO, 3 axis X-Z-Theta
14-2910.00 Optional PC-DRO Metrology Software
MICRO-DRO • Large, bright green LED digits (11 mm) for 1, 2, or 3 axes operation
• Use with encoded Semprex measuring stages or 2-phase 5V TTL encoders (may require adapter)
• Displays in millimeters, inches, and degrees • Individual X, Y, and Z reset buttons • Positive/negative direction toggle • Print button for output of position data directly to
serial port printer • RS232C serial port interface allows for custom soft-
ware development and integration • Low power, vibration free operation (no fans) • 15 watt power supply included • PC-DRO Metrology Software available (see below)
Ordering Notes: 1. Specify X-Y resolution of 10, 5, 1, or 0.5 µm 2. Specify Theta resolution of 0.025° or 0.0125° 3. Specify Z resolution of 1, 0.5, 0.25, or 0.1 µm 4. Custom resolutions available on request
PC-DRO METROLOGY SOFTWARE • Display rectangular or polar coordinates in mil-
limeters, inches, and degrees • Use with Semprex digital readout and Windows
or DOS compatible computer • Functions include: De-Skew, Distance, Radius,
Angle, Roundness, and Concentricity • Absolute and relative coordinate systems • Configure origin and direction • Set linear calibration factors to improve en-
coder accuracy • Save up to 1000 coordinates, add comments,
and import data into spreadsheets • Coordinate statistics include: Average, Maxi-
mum, Minimum, and Standard deviation
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DIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGYDIGITAL READOUTS & METROLOGY
Quadra-Chek 200 DRO
QUADRA-CHEK METROL-
OGY DIGITAL READOUTS
PART# DESCRIPTION
EL-0110.00 QC-110 Basic Digital Readout, 1 axis Z
EL-0111.00 QC-111 Basic Digital Readout, 2 axis X-Theta
EL-0120.00 QC-120 Basic Digital Readout, 2 axis X-Y
EL-0121.00 QC-121 Basic Digital Readout, 3 axis X-Y-Theta
EL-0130.00 QC-130 Basic Digital Readout, 3 axis X-Y-Z
EL-0211.00 QC-211 Metrology Digital Readout, 2 axis X-Theta
EL-0220.00 QC-220 Metrology Digital Readout, 2 axis X-Y
EL-0221.00 QC-221 Metrology Digital Readout, 3 axis X-Y-Theta
EL-0230.00 QC-230 Metrology Digital Readout, 3-axis X-Y-Z
60-0230.04 Calibration Using Segmented Linear Error Correction at 10mm Intervals to NIST traceable laser
EL-0276.91 Keypad with 8-functions
EL-0281.60 Footswitch with 2-functions
• Full featured, multi-axis digital position readout • High visibility backlit 5.7” LCD with large 1/2”
digits • Familiar, intuitive interface conventions sim-
plify repetitive tasks and expedite training • Zero each axis individually • Displays in millimeters, inches, and degrees • Incremental and absolute origins • Segmented linear error correction feature can
be used to greatly improve accuracy of measur-ing stages
• Communication ports allow data to be downloaded to PC, printer, or handheld device
• Two large easy-to-reach hot keys can be pro-grammed to trigger an operator’s most fre-quent data entry steps
• Use with encoded Semprex measuring stages or almost any 2-phase TTL digital or analog en-coders (some connectors additional charge)
• Slender housing requires minimal space and can be tilted for seated or standing operation
• Low power, vibration free operation (no fans) Additional features of Quadra-Chek 200 series:
• Measure Magic® feature accelerates the meas-urement process with tools that automatically complete complex work steps
• Metrology functions include Point, Line, Ra-dius, Circle, Angle with Vertex, Distance, Min/Max Distance between features, Data Cloud, and Intersections
• Unique Geometric Tolerance feature to in-stantly view pass/fail results
• Make repetitive measurement sequences easy for operators by creating step-by-step part pro-grams
• Store measurement data with the ability to view both numerical and graphical results
• Skew function corrects any angular misalign-ment of samples, eliminating need for time consuming mechanical rotary alignment
• Toggle between cartesian (XY) and polar (R-Theta) display coordinates
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26 CATALOG #27 SEMPREX CORPORATION
MOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWARE
ADVANCED SERVO MOTOR CONTROLLER • 2 or 4-axis programmable controller features ad-
vanced closed loop motor-encoder control system • PID filter uses sophisticated math to automatically
compensate for variations in friction and load, pro-ducing exceptionally smooth, accurate velocity and settle times under 1/2 second
• Safety features include obstruction sensing and power overload protection
• Use with Semprex advanced motor stages or with other closed loop DC servo motor-encoder control systems (see input/output below)
• Powerful, user-friendly AMICron motion soft-ware included (see AMICron, p.27)
• Dynamic Link Library (DLL) included for easy programming into new or existing applications
Specifications: Power Input: 110 or 220 VAC, 120 W (internal switch) Motor Output: 24 VDC, 4 A max (standard) 12 VDC, 5 A max (optional) Encoder Input: 2-phase 5 VDC TTL Interface: RS232C (38.4 kbps)
Advanced Motor Controller with Ergonomic Joystick
STEPPER MOTOR CONTROLLER • Versatile 4-axis micro-stepping controller for inde-
pendent and simultaneous axis control • Positive/negative drive sense, multiple acceleration
profiles, backlash correction, & limit switch sensing • Safety features incl. thermal & current protection • Resolution of 1/64 full-step (0.028 deg w/200
step/rev motor) • From 32 Hz to 512 KHz velocity (micro-steps/sec) • Compatible with Image-Pro/Scope-Pro software Specifications: Power Input: +5/+12/-12 VDC from PC Supply Motor Output: 10-28 VDC, 1.4 A x phase current x number axes Interface: PCI Bus
PART# DESCRIPTION
17-2358.00 Advanced 2-axis Servo Motor Controller with AMICron Software (PC w/RS232 required)
EL-5902.00 Ergonomic Joystick for Servo Controller
17-2358.04 Advanced 4-axis Servo Motor Controller with AMICron Software (PC w/RS232 required)
EL-0740.09 OASIS 4i 4-axis Stepper Motor Controller with Stage Cable (PC w/PCI-slot required)
17-0742.02 2-Axis Ergonomic Joystick for Stepper Controller
17-0742.03 3-Axis Ergonomic Joystick for Stepper Controller
17-0746.04 Auto-focus & Video Processing Module
17-2360.10 Adapter, Servo Controller to QC Readout, X-Y
17-2360.20 Adapter, Servo Controlr to QC Readout, X-Theta
17-4760.10 Adapter, Stepper Motor Stg to QC Readout, X-Y
17-4760.20 Adapter, Steppr Mtr Stg to QC Readout, X-Theta
OASIS 4i Microstepping Motor Controller
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MOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWAREMOTOR CONTROLLERS & SOFTWARE
AMICRON MOTION CONTROL SOFTWARE
AMICron Software Main Screen
• Sophisticated stage motion software included with Semprex Advanced Servo Motor Controller
• Manual, programmable, and joystick control of stage movement
• Hand enter absolute and relative position movements
• Set velocity and acceleration from very slow smooth scanning at 6 µm/sec to rapid high speed positioning at 60 mm/sec
• Zero each axis individually or simultaneously • Toggle between polar and rectangular coordi-
nate systems • Display in millimeters, micrometers, inches,
degrees, and sectors • Metrology functions include Distance, Circle
Radius with Center, and Angle with Intersection • De-skew function corrects part misalignment
and compensates axes for linear motion • Maintain up to 4 different origins plus 1 tempo-
rary origin • Store special positions with descriptions in one
of 8 “quick buttons” (i.e. “Load”, “Start”, etc.) • Customize up to 8 joystick button functions • Store up to 5,000 coordinates along with
notes, measurement results, and classifica-tions
• Customize classification text for each of 6 coor-dinate storage buttons
• Save coordinate data on disk to recall at a later date, and import or export data to other appli-cations such as a spreadsheet for further analysis
• Powerful motion sequencer makes repetitive tasks efficient, allowing for automatic relative and abso-lute positioning, timed waits, repeat loops, subrou-tines, operator instruction prompts, and more
• Build a library of commonly used sequences by sav-ing macros to disk, allowing operators to simply “load and go”
• Send ASCII commands to other RS232 communica-tion ports (could be used to trigger other devices such as a camera)
Minimum System Requirements: Windows 9x/NT/2000/XP Computer 16 MB RAM, 4 MB Disk Space One RS232 serial communications port VGA Color Display (at least 800x600 recommended)
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28 CATALOG #27 SEMPREX CORPORATION
PROBE NEEDLESPROBE NEEDLESPROBE NEEDLES
MATERIAL DIAMETER (D) TIP ANGLE (θ) TIP RADIUS (R) *** LENGTH (L)
TYPE P/N INCH P/N DEG P/N INCH P/N INCH P/N
Tungsten 31- .013 0 5* 0 .0001* 0 0.500 1
Carbide .015 1 8 1 .00025 2 0.625 2
Beryllium 33- .020 2 10 2 .0005 3 0.750 3
Copper** .025 3 15 3 .00075 4 0.875 4
Tool Steel 35- .0275 4 18 4 .001 5 1.00 5
.028 5 20 5 .0025 6 1.25 6
Customer 39- .031 6 25 6 .005 7 1.50 7
Supplied 30 7 .0075 8 1.75 8
9 2.00 9
Tolerances >> +/- 0.0002 +/- 0.5 +/- 0.0001 +/- 0.025
* Tungsten Carbide may include either 5 degree tip angle OR .0001” tip radius, but NOT BOTH. All other materials may include NEITHER of these specifications. ** Beryllium Copper minimum diameter is 0.020”. *** For FLAT TIP, specify “.1” at end of part number (i.e. 31-2345 becomes 31-2345.1 ).
PROBE & PUNCH NEEDLES • Finest quality needles available • Special, proprietary machining technique used
to grind needles accurately and consistently • Machine grinding creates smooth, straight sur-
faces (unlike chemical etching which can result in pits and concave surfaces)
• Tungsten carbide and flat tip recommended for punching applications
31-5203 Needle (0.0001 inch radius Tip)
Example Specification 31-2345 = Tungsten Carbide, 0.020 diameter, 15 degree tip angle, 0.00075 tip radius, 1.000 length