Post on 26-May-2020
transcript
BELLOWS VALVES
Catalog 4506/USAOctober 2003
Microelectronics Product Line
table of contents
Veriflo Division . . . . . . . . . . . . . . . . . . . 1
P Series Manual Bellows . . . . . . . . 2 - 3
P Series Toggle Bellows . . . . . . . . . 4 - 5
P Series Pneumatic Bellows . . . . . . 6 - 7
P Series High Pressure Bellows . . . 8 - 9
Parker Hannifin Corporation . . . . . . . . 10
Catalog 4506/USAOctober 2003
Parker Hannifin CorporationVeriflo Division250 Canal BoulevardRichmond, CA 94804-0034Telephone 510.235.9590Fax 510.232.7396http://www.veriflo.com
BELLOWSVALVESMicroelectronics Product Line
11 • B E L L O W S VA LV E S
eriflo Division, Parker Hannifin Corporation is a leading manu-
facturer of precision valves,regulators and surface mountcomponents for the controland application of liquids andgases used in the fabricationof semiconductors, as well asin the chemical andpetrochemical industries.
Veriflo has maintained industryleadership over the past 95years through innovativeengineering, manufacturingand by placing a premium onquality customer care.
The division maintains twostate-of-the-art Class 10 CleanRooms at its Richmond, CA,facility and has adopted acorporate wide "LeanManufacturing" philosophy,which is delivering greatervalue to the customer byeliminating wasteful stepsthrough continuous improve-ment activities.
Veriflo Division's two manufac-turing facilities develop andmanufacture applications forthe Semiconductor/High Purityand Instrument/Analyzerindustries.
With the focus of maintainingthe highest industry standards,
Veriflo Division has achievedan ISO 9001 registration atboth its Richmond, CAmanufacturing plant and atits Carson City, NV facility. Thiscertification confirms Veriflo'scommitment to quality andexcellence as recognized bythe international community.
The Instrumentation Group ofParker Hannifin specializes inhigh quality, critical flow com-ponents for world-wide processinstrumentation, ultra-high-purity, medical, analyticaland biopharmaceuticalapplications.
Parker’s Instrumentation Grouphas ten manufacturing plantsand over 300 authorizeddistributor locations aroundthe world to provide localinventory and technicalsupport. Key markets for theInstrumentation Group include:Chemical Process, PowerGeneration, Oil and GasExploration, SemiconductorManufacturing, Biomedical,and Analytical Equipment.
Note: For further information onVeriflo Division and or its productline visit the division web site atwww.veriflo.com. For moreinformation on Parker HannifinCorporation visit the corporation’sweb site at www.parker.com.
VERIFLO DIVISION
V
A Leading ManufacturerOf Precision Valves,
Regulators & SurfaceMount Components
Maintained IndustryLeadership By Placing A
Premium On QualityCustomer Care
P Series Manual Manual Bellows Valve
featuresBottom or Panel mountable.
Minimal PCTFE to reduce outgassing and moisture absorption.
Electropolish surface finishes available at 10 Ra; GP finishes at 20 Ra.
▼▼
▼
Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series manual bellows valve.These valves are multi-purpose packlessexternally pressurized bellows valves thatmay be used in a wide variety of gas orliquid systems.
The P Series manual bellows valve offersclean, reliable operation at full systempressures in either flow direction.
▼▼ materials of construction
WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat. . . . . . . . . . . . PCTFE, Vespel®, Stainless SteelGasket . . . . . . . . . Teflon® Coated Stainless Steel,. . . . . . . . . . . . . . . Nickel with Stainless Steel seat
Non-wettedHandle . . . . . . . . . . . . . . . . . . . . . . . . . . Nylon6/6Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel
operating conditionsPressure Rating . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . 1250 psig (86.9 barg)Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)Vespel® . . . . . -150°F to 400°F (-101°C to 204.4°C)Stainless Steel . -150°F to 600°F (-101°C to 316°C)
surface finishes20 Ra . . . . . . . . . . for A, W or Z type connections10 Ra. . . . . . . . . . . . . . . . . . . . . . . Electropolished
functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . see chart
Design Leak Rateacross the seat. . . . . . . . . . . . . 4 x 10-9 cc/sec He
internal volume0.09 in3 (1.55 cm3)
▼▼
▼
B E L L O W S VA LV E S • 22
Dimensional Drawings
Ordering Information
P Series Manual
4 V P4 K SSV PE
INLET & OUTLETCONNECTION SIZE4 = 1/4"6 = 3/8"8 = 1/2"
Teflon® and Vespel® are registered trademarks of DuPont Company.A-LOK® is a registered trademark of Parker Hannifin Corporation.CPI™ is a trademark of Parker Hannifin Corporation.
- - -
INLET & OUTLETCONNECTION TYPEV1* = Female VacuSeal™V* = Male VacuSeal™VH* = Male VacuSeal™ SwivelBW = Tube StubT3 = Tube Stub (3" Long)W = Socket WeldA = A-LOK®
Z = CPI™
BASIC SERIESP4, P6, P8 = Inline PatternP4A = Angle PatternPT4 = Toggle Inline PatternPT4A = Toggle Angle Pattern
SURFACE FINISH = 20 Ra (Only Available for A, W or Z Type Connections)
PE = 10 Ra Electropolish
MATERIALSSV = 316L Stainless Steel VeriClean
STEM TIP MATERIALK = PCTFEVE = Vespel®
R = Stainless Steel**
* Only available in P4 and P8 versions.** P6R & P8R standard with Tee Handle.
3.60(91.4 mm)OPEN:
3.52(89.4 mm)CLOSED:
2.31(58.7 mm)
.56(14.2 mm)
1/4 FS-MOUTLET
1/4 FS-MINLET
Ø1.81(46 mm)
Ø1.00(25.4 mm)
45˚
(2X 10 - 32 UNF - 2B)
33 • B E L L O W S VA LV E S
ValveSeries
Orifice
P4P4P4
.156
.156
.156
1050100
5.1214.1525.09
Maximum FlowCoefficient, Cv
Cv = .37
Water GPM @@ 70˚F (21˚C)
Pressure DropTo Atmospher
(∆P)
Air SCFM@ 70˚F (21˚C)
P4AP4AP4A
P6P6P6
P8P8P8
.281
.281
.281
.156
.156
.156
.312
.312
.312
Cv = .45
Cv = .73
Cv = .80
1050100
1050100
1050100
6.2317.2120.52
10.1027.9249.50
11.0730.6054.25
1.172.623.70
1.423.184.50
2.315.167.30
2.535.668.00
All Metal Stem Tips (R Stem)
ValveSeries
Orifice
P4P4P4
.156
.156
.156
1050100
5.2614.5425.77
Maximum FlowCoefficient, Cv
Cv = .38
Water GPM @@ 70˚F (21˚C)
Pressure DropTo Atmospher
(∆P)
Air SCFM@ 70˚F (21˚C)
P4AP4AP4A
P6P6P6
P8P8P8
.281
.281
.281
.156
.156
.156
.312
.312
.312
Cv = .47
Cv = .87
Cv = .93
1050100
1050100
1050100
6.5017.9831.87
12.0433.2859.00
12.8735.5763.07
1.202.693.80
1.493.324.70
2.756.158.70
2.946.589.30
Soft Seat Stem Tips (K & VE)
B E L L O W S VA LV E S • 44
P Series Toggle Toggle LeverBellows Valve
features
Bottom or Panel mountable.
Minimal PCTFE to reduce outgassing and moisture absorption.
Electropolish surface finishes available at10 Ra; GP finishes at 20 Ra.
▼▼
▼
Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series toggle bellows valve.These valves provide a quick open andclose operation with positive stem retractionin valve sizes 1/4” thru 1/2” tube.
These externally pressurized bellows valveswill operate in vacuum to 150 psig at 70°Fto handle shut-off control for toxic, ultra-pure, pyrophoric and corrosive media invacuum or pressurized systems.
▼▼
▼ materials of construction
WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . PCTFEGasket . . . . . . . . . Teflon® Coated Stainless Steel
Non-wettedHandle. . . . . . . . . . . . . . . . . . . . . . . . . . . Nylon6/6Pin . . . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel
operating conditionsPressure Rating . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . . 150 psig (10.3 barg)Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)
surface finishes20 Ra . . . . . . . . . . for A, W or Z type connections10 Ra. . . . . . . . . . . . . . . . . . . . . . . Electropolished
functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . see chart
Design Leak Rateacross the seat. . . . . . . . . . . . . 4 x 10-9 cc/sec He
internal volume0.09 in3 (1.55 cm3)
▼▼
Dimensional Drawings
Ordering Information
P Series Toggle
4 V PT4 K SSV PE
INLET & OUTLETCONNECTION SIZE4 = 1/4"6 = 3/8"8 = 1/2"
Teflon® and Vespel® are registered trademarks of DuPont Company.A-LOK® is a registered trademark of Parker Hannifin Corporation.CPI™ is a trademark of Parker Hannifin Corporation.
- - -
INLET & OUTLETCONNECTION TYPEV1* = Female VacuSeal™V* = Male VacuSeal™VH* = Male VacuSeal™ SwivelBW = Tube StubT3 = Tube Stub (3" Long)W = Socket WeldA = A-LOK®
Z = CPI™
BASIC SERIESPT4 = Toggle PatternPT4A = Toggle Angle PatternPT6 = Toggle PatternPT8 = Toggle Pattern
SURFACE FINISH= 20 Ra (Only Available for A, W or Z Type Connections)
PE = 10 Ra Electropolish
MATERIALSSV = 316L Stainless Steel VeriClean
STEM TIP MATERIALK = PCTFE
* Only available in PT4 and PT8 versions.
2.60(66 mm)
4.20(106.7 mm)
2.31(58.7 mm)
.56(14.2 mm)
1/4 FS-MOUTLET
1/4 FS-MINLET
Ø1.00(25.4 mm)
45˚
(2X 10 - 32 UNF - 2B)
55 • B E L L O W S VA LV E S
ValveSeries
Orifice
PT4PT4PT4
.156
.156
.156
1050100
5.2614.5425.77
Maximum FlowCoefficient, Cv
Cv = .38
Water GPM @@ 70˚F (21˚C)
Pressure DropTo Atmospher
(∆P)
Air SCFM@ 70˚F (21˚C)
PT4APT4APT4A
PT6PT6PT6
PT8PT8PT8
.281
.281
.281
.156
.156
.156
.312
.312
.312
Cv = .47
Cv = .87
Cv = .93
1050100
1050100
1050100
6.5017.9831.87
12.0433.2859.00
12.8735.5763.07
1.202.693.80
1.493.324.70
2.756.158.70
2.946.589.30
Soft Seat Stem Tips (K)
B E L L O W S VA LV E S • 66
P Series Pneumatic PneumaticActuated
Bellows Valve
features
Bottom mountable.
Minimal PCTFE to reduce outgassing and moisture absorption.
Electropolish surface finishes available at10 Ra; GP finishes at 20 Ra.
12AC has compact design - 1-1/4” diameter.
360° rotation of actuator for easy installation.
Stem guide out of flow path.
▼▼
▼▼
Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series Pneumatic Actuatedbellows valve.
The P Series bellows valve offers a 360°rotation of the air inlet port for postionpurposes and ease of use. The P Seriesbellows valve provides clean, reliableoperation at full system pressures.
▼▼
▼ materials of construction
WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . PCTFE, Vespel®
Gasket . . . . . . . . . Teflon® Coated Stainless Steel
Non-wettedActuator Body . . . . . . . . . . . . . . . Aluminum 6061Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel
operating conditionsPressure ratings:Normally Closed (11AC, 12AC). . . . . . . . . . . . . . . . Vacuum to 200 psig(14 barg)
Normally Open (11AO, 12AO). . . . . . . . . . . . . . . . Vacuum to 600 psig(41 barg)
Double Acting (11AD, 12AD). . . . . . . . . . . . . . . . Vacuum to 700 psig(48 barg)
Temperature:PCTFE . . . . . . -150°F to 300°F (-101°C to 148.9°C)Vespel® . . . . . -150°F to 400°F (-101°C to 204.4°C)
surface finishes20 Ra . . . . . . . . . . for A, W or Z type connections10 Ra. . . . . . . . . . . . . . . . . . . . . . . Electropolished
functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . see chart
Design Leak Rateacross the seat. . . . . . . . . . . . . 4 x 10-9 cc/sec He
internal volume0.09 in3 (1.55 cm3)
▼▼
▼▼
Dimensional Drawings
Ordering Information
P Series Pneumatic
4 V P4 K SSV PE
INLET & OUTLETCONNECTION SIZE4 = 1/4"6 = 3/8"8 = 1/2"
- - -
INLET & OUTLETCONNECTION TYPEV1* = Female VacuSeal™V* = Male VacuSeal™VH* = Male VacuSeal™ SwivelBW = Tube StubT3 = Tube Stub (3" Long)W = Socket WeldA = A-LOK®
Z = CPI™
BASIC SERIESP4, P6, P8 = Incline PatternP4A = Angle Pattern
SURFACE FINISH= 20 Ra (Only Available for A, W or Z Type Connections)
PE = 10 Ra Electropolish
ACTUATOR11AC, 12AC = Air Operated, Normally Closed11AO, 12AO = Air Operated, Normally Open11AD, 12AD = Air Operated, Double ActingNote: Series 12 Actuator is a compact design at1-1/4" diameter.
MATERIALSSV = 316L Stainless Steel VeriClean
STEM TIP MATERIALK = PCTFEVE = Vespel®
12AC
* Only available in P4and P8 versions.
Teflon® and Vespel® are registered trademarks of DuPont Company.A-LOK® is a registered trademark of Parker Hannifin Corporation.CPI™ is a trademark of Parker Hannifin Corporation.
-
3.19(81 mm)
2.31(58.7 mm)
.56(14.2 mm)
1/4 FS-MOUTLET
1/4 FS-MINLET
Ø1.25(31.6 mm)
Ø1.00(25.4 mm)
45˚
(2X 10 - 32 UNF - 2B)
10-32 UNF-2B
Ø1.00(25.4 mm)
45˚
(2X 10 - 32 UNF - 2B)
2.31(58.7 mm)
1/4 FS-MOUTLET
1/4 FS-MINLET
.56(14.2 mm)
3.28(83.3 mm)
Ø1.87(47.5 mm)
1/8-27 NPTF
12 AC 11 AC
77 • B E L L O W S VA LV E S
ValveSeries
Orifice
PT4PT4PT4
.156
.156
.156
1050100
5.2614.5425.77
Maximum FlowCoefficient, Cv
Cv = .38
Water GPM @@ 70˚F (21˚C)
Pressure DropTo Atmospher
(∆P)
Air SCFM@ 70˚F (21˚C)
PT4APT4APT4A
PT6PT6PT6
PT8PT8PT8
.281
.281
.281
.156
.156
.156
.312
.312
.312
Cv = .47
Cv = .87
Cv = .93
1050100
1050100
1050100
6.5017.9831.87
12.0433.2859.00
12.8735.5763.07
1.202.693.80
1.493.324.70
2.756.158.70
2.946.589.30
Soft Seat Stem Tips (K)
B E L L O W S VA LV E S • 88
P Series HP High PressureBellows Valve
features
Bottom mountable.
Minimal PCTFE to reduce outgassing and moisture absorption.
Electropolish surface finishes available at10 Ra; GP finishes at 20 Ra.
Remote actuation.
▼▼
▼▼
Parker Hannifin Corporation’s Veriflo Divisionpresents the P Series HP Pneumatic bellowsvalve. These valves are multi-purpose pack-less externally pressurized bellows valvesthat may be used in a wide variety of highpressure gas or liquid systems.
The P Series HP Pneumatic bellows valveprovides clean, reliable operation at fullsystem pressures in either flow direction.
▼▼
▼ materials of construction
WettedBody . . . . . . . . . . . . . . . . . . . . 316L Stainless SteelBellows . . . . . . . . . . . . . . . . . . . 321 Stainless SteelBellows Assembly . . . . . . . . . . 316L Stainless SteelSeat . . . . . . . . . . . . . . . . . . . . . . . . PCTFE, Vespel®
Gasket . . . . . . . . . Teflon® Coated Stainless Steel
Non-wettedActuator Body . . . . . . . . . . . . . . . Aluminum 6061Bonnet. . . . . . . . . . . . . . . . . . . 316L Stainless SteelBonnet Nut . . . . . . . . . . . . . . . 316L Stainless Steel
operating conditionsPressure rating. . . . . . . . . . . . . . . . . . . Vacuum to . . . . . . . . . . . . . . . . . . . . . . . 3500 psig (241 barg)
Temperature:PCTFE . . . . . . . . . . . . . . . . . . . . . . -150°F to 150°F. . . . . . . . . . . . . . . . . . . . . . . . . . (-101°C to 66°C)
Vespel® . . . . . . . . . . . . . . . . . . . . . -150°F to 400°F. . . . . . . . . . . . . . . . . . . . . . . . (-101°C to 204.4°C)
surface finishes20 Ra . . . . . . . . . . for A, W or Z type connections10 Ra. . . . . . . . . . . . . . . . . . . . . . . Electropolished
functional performanceFlow Capacity . . . . . . . . . . . . . . . . . . . . . CV = .33
Design Leak Rateacross the seat. . . . . . . . . . . . . 4 x 10-9 cc/sec He
internal volume.22 in3 (.56 cm3)
▼▼
Dimensional Drawings
Ordering Information
P Series HP
4 V1 HP4 K SSV PE
INLET & OUTLETCONNECTION SIZE4 = 1/4"
- - -
INLET & OUTLETCONNECTION TYPEV1 = Female VacuSeal™V = Male VacuSeal™VH = Male VacuSeal™ SwivelBW = Tube StubW = Socket WeldA = A-LOK®
Z = CPI™
BASIC SERIESHP4 = Inline Pattern
SURFACE FINISH= 20 Ra (Only Available for A, W or Z Type Connections)
PE = 10 Ra Electropolish
ACTUATOR14AC = Air Operated, Normally Closed14AO = Air Operated, Normally Open
MATERIALSSV = 316L Stainless Steel VeriClean
STEM TIP MATERIALK = PCTFEVE = Vespel®
14AC -
Teflon® and Vespel® are registered trademarks of DuPont Company.A-LOK® is a registered trademark of Parker Hannifin Corporation.CPI™ is a trademark of Parker Hannifin Corporation.
3.44(87.4 mm)
2.78(70.6 mm)
.44(11.2 mm)
1/4 FS-FOUTLET
1/4 FS-FINLET
Ø2.12(53.8 mm)
Ø1.00(25.4 mm)
45˚
(2X 10 - 32 UNF - 2B)
1.39(35.3 mm)
1/8-27NPT
99 • B E L L O W S VA LV E S
B E L L O W S VA LV E S • 1100
Parker’s CharterTo be a leading worldwide manufacturer of compo-nents and systems for the builders and users of durablegoods. More specifically, we will design, market andmanufacture products controlling motion, flow andpressure. We will achieve profitable growth throughpremier customer service.
Product InformationNorth American customers seeking product infor-mation, the location of a nearby distributor, or repairservices will receive prompt attention by calling theParker Product Information Center at our toll-freenumber: 1-800-C-PARKER (1-800-272-7537). In Europe,call 00800-C-PARKER-H (00800-2727-5374).
The Fluid ConnectorsGroup designs, manufacturesand markets rigid and flexibleconnectors, and associatedproducts used in pneumaticand fluid systems.
The Hydraulics Groupdesigns, produces and marketsa full spectrum of hydrauliccomponents and systems tobuilders and users of industrialand mobile machinery andequipment.
The Automation Groupis a leading supplier of pneu-matic and electromechanicalcomponents and systems toautomation customers world-wide.
The Seal Group designs,manufactures and distributesindustrial and commercialsealing devices and relatedproducts by providingsuperior quality and totalcustomer satisfaction.
The Filtration Groupdesigns, manufactures andmarkets quality filtration andclarification products, provid-ing customers with the bestvalue, quality, technical sup-port, and global availability.
The InstrumentationGroup is a global leader inthe design, manufacture anddistribution of high-qualitycritical flow components forworldwide process instrumen-tation, ultra-high-purity, medi-cal and analytical applications.
About Parker Hannifin CorporationParker Hannifin is a leading global motion-controlcompany dedicated to delivering premier customerservice. A Fortune 500 corporation listed on the NewYork Stock Exchange (PH), our components and sys-tems comprise over 1,400 product lines that controlmotion in some 1,000 industrial and aerospace mar-kets. Parker is the only manufacturer to offer itscustomers a choice of hydraulic, pneumatic, andelectromechanical motion-control solutions. OurCompany has the largest distribution network in itsfield, with over 7,500 distributors serving nearly400,000 customers worldwide.
Instrumentation
Parker Hannifin Corporation6035 Parkland Blvd.Cleveland, Ohio 44124-4141Telephone: (216) 896-3000Fax: (216) 896-4000www.parker.com
Parker Hannifin Corporation
The Aerospace Group isa leader in the development,design, manufacture and ser-vicing of control systems andcomponents for aerospace andrelated high-technology mar-kets, while achieving growththrough premier customerservice.
The Climate & IndustrialControls Group designs,manufactures and markets sys-tem-control and fluid-handlingcomponents and systems torefrigeration, air-conditioningand industrial customersworldwide.
Catalog: 4506LitPN: 25000180Revision: A • 10/03
Parker Hannifin CorporationVeriflo Division250 Canal BoulevardRichmond, CA 94804-0034Telephone 510.235.9590Fax 510.232.7396Web site: http://www.veriflo.com