Controlled Catalysis for CNT Growth at ARL

Fe(NO3)3 Solution Catalyst Thin Metal Film Catalysts

~ 100 g Fe(NO3)3 /mL IPA

~ 25 g Fe(NO3)3/mL IPA

0.7nm Ni stripes on SiO2

1.5nm Ni/10nm Al/500nm SiO2 selected area CNT growth

on silicon substrate

1nm Ni encapsulated by 500nm SiO2, exposed by

cracking

Ni stripe

SiO2

SiO2

Ni

Si

CNT

CNTs on Ni

CNTs

Photolithographically Defined CNT-FETs

CNT-FET devices have been demonstrated using the following approach:

• CVD-grown SW-CNTs• Cr/Au contacts• 500 nm SiO2

• n++ Si substrate for backside gating

1

2

3

4

5

6

7

8

AB

CD

CNT FET Pattern

CNT027A, Device A, Fingers 2-3

10-17-06 Initial Testing 10-20-06 Under vacuum

CNT027A, Device B, Fingers 2-3

10-17-06 Initial Testing 10-20-06 Under vacuum