Post on 17-Apr-2020
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Chamber cleaning end point monitoringfor deposition process
Gas Monitor
IR-422
IR-432
Real time monitoringof key species in the process effluent
Features
Easy optimizationfor cleaning processReduction of clean timeand gas usageLong life timefor chamber components
IR-422
IR-432
Multi gas monitoring Analog / Digitalcommunication
Multi-displayHigh sensitivity Gas cell heating(Support SiF4,CF4/WF6,NF3)only IR-422*
Specification
Model
AO: 0-5VDC, AI: 0-10VDCDO: 4ch, DI: 1ch (Zero)
208V, 84VA 115V, 132VA208V, 94VA
AO: 4-20mADC, AI: 0-10VDCDO: 4ch, DI: 1ch (Zero)
IR-422
SiF4: 100mTorr, CF4: 100mTorr
SUS316L, BaF2, FFKM
NW25 f lange
RS485 (F-Net)
W433×H117.5×D83
3.2kg
WF6:200mTorr, NF3:200mTorr
IR-432
SiF4: 3800mTorr
30mm
20-50℃
SUS316L (Clean S AF type), BaF2, FFKM
NW25 f lange
RS485 (F-Net)
W259×H130×D86
2.8kg
*1:The specifications are guaranteed under HORIBA STEC’s inspection conditions using calibration gas.
±0.5%F.S.
±1%F.S.
±0.5%F.S.(3σ)
±1%F.S./day
SUS304, ZnSe, FFKM
NW50 f lange
1x10-6 Pa・m3/s (He)
300kPa (A)
RS485 (F-Net), RS232C (mini PC)
24VDC, 1.5A
W433×H93×D83
3.8kg
CE, FCC
Meas. gas & full scale
Cell length
Cell set temperature
Heater jacket
Repeatability *1
Linearity *1
Zero noise *1
Zero drift *1
Ambient temperature
Warm-up time
Wetted material
Fitting
Leak rate
Proof pressure
I/O interface
Digital communication
Power supply
Dimensions (mm)
Weight
Certification
SiF4, CF4 WF6, NF3
180℃ 100℃
T/C K-type, Thermostat (Manual reset)
20-35℃
200mm
MFC
MFC
IR-400
MFC for sample line
Valve
Pump
Pressuresensor
Equipment
Dry pump
Settingswitch
MFCfor diluting
MFC
IR-400PV
IR 400PVPV
Plasma
Process chamber
Vacuum pump
Exhaust valve
CapacitanceManometer
Piezo actuator valve
NDIR UnitIntegrated IR-400 Series and a pump
The infrared absorptiometry method employed by IR-400 Series uses the principle of infrared light absorbance.The target gas species in the effluents absorbance is compared to a reference signal to calculate the concentrationof the target species. This double beam method enables long term, stable measurement results.
Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)
PreamplifierLight source
Gas cellPyroelectric infrared detector
Reference
Sample
Optical filter
Sensor element
When sample gas isflowing, outputchanges on samplesensor only
Wavelength
When the sample gasis not flowing,output is the same
Sampledetector
Referencedetector
Abs
orba
nce
Application Example
The optical system is made up of a light source, gas cell and double beam detectors.The stability of the double beam detector has been proven over a period of more than 40 years.
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Support products of exhaust line
IR-400 Series : Chamber cleaning end point monitoring for deposition process
PV Series : Chamber pressure control by N2 ballast control
VG-200 Series : Pressure monitoring of exhaust line
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Gas/Vacuum Monitoring
● Contribute process optimizationof various manufacturing process
● Integrated vacuum pump enable to workunder limited differential pressure condition
● Extra MFC is optional on dilution gas linefor concentration optimization
● Trans portable design
Pressure control
Vapor Concentration Monitor
External dimensions
Related product
For stable material gas supply
p
For stable material gas suIR-300 Series
[Unit: mm]
IR-422 IR-432
(433)
140±0.5210 3030 9271
45
5283
87 117.5
83
46
81
Light sourceunit
Detectorunit
200mm gas cellwith heater jacket 119±1 140±1
(259)DTU connector
External connector
LSU connector
Power supply connector
86±183
RS485 connector
83
65
(24.5)
(22.5)
Thermostat(inside)
130±0.5
Benefits●
●
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Continuous concentration monitoring of precursor
Check precursor concentration while adjustingsupply conditions
Monitor residual quantities of liquid and solidprecursors for better utilization
MFC
Pump
Thermalbath
Bubbler
Back pressureregulator
N2
MOCVDprecursor
IR-300
Measurement example
Please contact HORIBA STEC about WF6,NF3 specification
SiF4,CF4 Specification
Printed in Japan 1706IG13IR4-CE
● The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. ● It is strictly forbidden to copy the content of this catalog in part or in full.● All brand names, product names and service names in this catalog are trademarks or registered trademarks of their respective companies.
http://www.horiba.com/horiba-stec/Please read the operation manual before using this productto ensure safe and proper handling of the product.
HEAD OFFICE 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto, 601-8116 Japan PHONE: (81)75-693-2312 FAX: (81)75-693-2331
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