Give your Microscope a Hand - IMECefug.imec.be/EFUG2012_03_Smith.pdfRoTip Rotate and watch from all...

Post on 09-Mar-2021

0 views 0 download

transcript

Give your Microscope a Hand

Recent Advances in Handling & Characterizing Materials and Electronics from Micro to Nano Scale

EFUG Workshop, Cagliari

Oct 1st, 2012 Andrew J. Smith

Give your microscope a hand!

Finger Tips for the Nano World

Up to 12 probes in SEM/FIB in a few seconds

Nano Workshop

Soldering Laser Welding

Lathe

Grip Nano Objects

Lift Out Shuttle

3 Lift Outs in 12 min

RoTip Rotate and watch from all Angles

SemGlue Pull Nano Objects

Force Sensor Tensile and Forging Experiments

Spring Table with Analysis SW Nanomechnical Characterization

E5AT Eucentric 5 Axis Stage EBSD, ECCI

EBSD, ECCI

Gas Injection System EBID and Charge Compensation

Prober Shuttle

Heating Stub Heating Tip

Cryo Tip Holder

Active Potential Contrast Courtesy of Frank Zachariasse, Philips Nijmegen

EBAC Electron Beam Absorbed Current

Electron Beam Induced Current EBIC Live Imaging

Micro Four Point Probe M4PP

Sheet Resistance

Ease of Use Automatic Parking, Cable Drumm

iPad Control

Thank you