Ibex nanotechnology symposium presentation oct. 2007

transcript

Nano SymposiumIbex EngineeringOctober 31, 2007

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Agenda

• About Ibex • Mechanical Considerations

in Nano Positioning applications

• Examples of Nano Positioning In Industry

The Science Of Precision Motion

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Introduction

• Precision Stage Manufacturer• Forte

– Micron and under– Cross roller stages

• We make Nano technology easy

The Science Of Precision Motion

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Ibex History

• Founded By Andre Perrin in 1999• Background – Metrology System• Formed the company to fill a gap

by providing non-standard precision motion control platforms

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What We Look For When Designing A High Precision Stage

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When Reviewing a Nano Application

• Basic Engineering– Project scope– Specification review– Engineering challenges

relative to the spec– Component sizing– Materials– Control

• Who, what, where, and how • Feedback compatibility

The Process

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The Decision Driver

• Accuracy and Repeatability– Length of Travel

• Straightness/Flatness • Roll, Pitch and Yaw

– Envelope– Load and load position– Multi-axis Compounding– Environment

• Materials• Finish

Basic Engineering

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Concept Review

Accuracy• The closeness of agreement between the

results of a measurement and the true value of the object being measured.

Repeatability• Under Identical conditions how well a

system can return to one commanded location– Unidirectional– Bi-Directional

Basic Engineering

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Encoder Resolution doesn’t define the Accuracy of a Complete System

1. Pitch2. Roll3. Yaw4. Flatness5. Straightness 6. Scale

The combined interacting effects of all contributing factors must be analyzed before total system precision can be determined.

Mechanical Concepts

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Basic Engineering

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Concept Review

• If Straightness/Flatness is critical to application– Then what will the stage be mounted to….

• This Very important!!!

Basic Engineering

1 mm shim

4 M wide, 1.5 M tall

All Granite

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Concept Review

• Envelope

Basic Engineering

Nothing is for freeELECTROMATE

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Determine position and state of the load

• Orientation of the Load– Bearings– Materials– Abbe Error

• Vibration - Work• Speed & loading

– Settling

Basic Engineering

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Specifications Drive Bearing Choice

• Bearing type– Crossed Roller

• Anti-Creep considerations– Profile Rails

• Precision/preload– Air bearing

• Size • Orientation• Cost

Basic Engineering

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Contact Area

• Bearing Stiffness review

Basic Engineering

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Crossed Roller Review

• Bearing– Anti-Creep Considerations– Materials

Basic Engineering

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Air Bearings Review

• Air Bearings– High pressure = less deformation– No friction = no heat– Precision parts– Control Flatness and Straightness

Basic Engineering

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Velocity Control Considerations

• Ball Screws• Lead Error• Ball entering and exiting the return tube

• Profile Rails• Ball entering and exiting the return tube• Seal Drag

• Best – Linear Servo (Piezo or Ironless)– Air Bearing or Crossed Rollers

Basic Engineering

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Environment other Error Causing Factors

• Thermal expansion errors • Feedback Position• Cosine errors• Abbé offsets

Basic Engineering

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Environment

Basic Engineering

Temperature

Thermal Expansion• Stainless Screw = 12ppm/deg C• Aluminum = 23 ppm/deg. C• 3 degree rise makes a 100mm screw grow 7

microns

• Areas of concern– Type of motor and associated duty– Temperature swing of the environment– Adjacent equipment ELECTROMATE

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Feedback

• Feedback type– Linear

• Digital vs Analog– Scale Type – Typically

20um grating

• Tape• Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C

– Rotary– Interferometer

Basic Engineering

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Feedback – Cosine Error

Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage.

Basic Engineering

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Abbé errors result from a positioning measuring device (typically a linear encoder) being offset from the point of work (end-effector) due to mechanical errors

Basic Engineering

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Concept Review

Other Considerations• Structural Stiffness

– What are we mounting too– Vibration dampening– The building and traffic

• Wire Management• Controls

– Features based relative to the end goal– Mapping, Notch filtering, Adaptive tuning for

variable inertias, Sin-Cosine inputs….

Basic Engineering

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A World Of Choice

Custom and OEM Built Motion Platforms

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System Technologies and Configurations

• Positioning stages– X,Y,Z, Theta– Z-Wedges– Goniometer– Gantries– Various compound stages– Granite Stages– Assemblies

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• Bearing Technologies– Air Bearings– Crossed Roller– Recirculating Ball

• Round and Profile– Cam Rollers

• Screw Technologies– Precision Ground – Precision Rolled / Standard Rolled– Lead/acme

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• Controls– ACS-Tech80– Galil– Yaskawa– Trio– PLC….

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–Motor Technologies– Nano Motion– Rotary

• Stepper • Servo

– Linear Servo• Nippon Pulse• Yaskawa• Technotion

– Integrated Lead/acme motorsELECTROMATE

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The Markets We Serve

• Biomedical/Pharmaceutical• Life Sciences

– Cell Imaging…..• Medical Device • Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense….

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National Labs / Research

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Kinematics Systems

5 and 6 Degrees of freedomMultiple sizes and configurations.

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High and Ultra High VacuumIbex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors.

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Gantry and Granite

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The Sciences

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Multi Axis Nano Stages

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Metrology

Metrology Platforms

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Metrology

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Exotic Platforms

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Life Sciences - OEM Builds

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Semiconductor

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Semiconductor

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Medical OEM’s

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Rotary – Nano and Direct Drive Servo

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Custom Applications

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All mechanical designs are created in 3D

IBEX is a Fully Integrated Company –

From 3D Design

Design To MFG

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Fully Integrated Manufacturing From SolidWorks

To Master Cam CAD/CAM

From 3D Design – To Mastercam

Design To MFG

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Fully Integrated CNC Mills

Mastercam to Machine Centers

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From Assembly to QA

In House Measuring Systems• Laser Interferometer – 1nm res• Auto Collimator• Laser Rotary Calibrator

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Thank You!

• For allowing our organization to present today

• We look forward to the partnership

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Ibex nanotechnology symposium presentation oct. 2007

Technology