Post on 04-May-2018
transcript
1
The F series comprises pneumaticdrive bellows pumps designed foruse in semiconductor manufactur-ing processes. Iwaki pneumaticdrive bellows pumps were intro-duced to the market over 10 yearsago; since then we have activelydeveloped and improved productsin step with rapidly changing mar-ket needs. Over 20 models ofpumps are available. Their qualityand performance are recognizedand highly rated by device manu-facturers all over the world.
Not only pumps, but peripheraldevices such as controllers, damp-eners and liquid chemical supplysystems have been developed toaugment a well rounded portfolioof quality equipment for wetprocess and surface preparation.
For Ultrapure Chemical Delivery in Semiconductor Processing
Guideline for Pump Selection
Series
Series
Series
Series
-20T
Series
High Pressure Durability and Long Life Attained by Using Thick Bellows
Safely Transfer Liquid Chemicalsof Temperatures Between 10˚C and 180˚C
Energy Saving Design to Consumea Lesser Amount of Air
Safely Transfer Liquid Chemicalsof Temperatures Between 20˚C and 180˚C
Pneumatic Drive Bellows Pump with Non-metallic Body
Two Types for CirculatingMedium Temperature Liquid
Pneumatic drive bellows pumps series
2
Rich Assortment of PumpsThe F series includes more than 20 modelsranging from FW-H, the most powerful ofthe series, capable of transferring high-tem-perature and high-pressure liquid to FZ withits non-metallic structure. Customers canchoose the most suitable ones for their uses.
Contamination-free Design All the wetted parts are made of fluororesinwhich is highly resistant to chemical attackand heat. Fiercely corrosive liquids are safe-ty transfer with less particle matter beingproduced.
Sensor-drive SystemThe pump is driven by a built in stroke sen-sor located away from the liquid path. Theoperation is reliable and the pumps functionwith stability even at low stroke rates.
Built-in Leak SensorAs standard equipment, all the models haveleak sensors which are ensured to reactpromptly if the bellows are damaged.
Note: Leak sensor is option for FZ
Enhanced AccessoriesDampeners, controllers and other accessorieshave been improved and refined. Their useminimizes particle production and extendsthe life of the bellows.
Note: In order to extend the life of the bellows, the useof the SC controller or the FD driver is recommended.For further information, see the description on page 10.
Max. discharge capacityL/minMax. air consumptionNL/min
Max. air supply pressureMPaTemperature range˚C
80
0.5
82010 to 100
40
0.5
480
10 to 180
5 to 100
20 to 180
5 to 100
5 to 100
22
0.3
200
200
0.2
40
22
0.3
250
40
0.4
200
3
Chemical supply equipment■�
FWPneumatic drive bellows pump
PD-W/PDA-WDampener
Filter To use point
SC-2/FD-2Controller/Driver
Supply tank
IWAKI uses its extensive experience and advanced pump technology to meet the needsof chip manufactures for Wafer wet-bench, chemical supply equipment and CMP. IWAKI provides a complete line of pumps and systems.
NH4OH, H2O2, HCL, HF, H2SO4
F seriesPneumatic drive bellows pump
Filter
APD-3-BController
PD-H/PD-WDampener
■200/300mm wafer wet-bench
SC-1/SC-2Controller
CFD-8T-BChemical fluid dispensing pump
Pneumatic drive bellows pumps series
4
CMP slurry supply equipment■�
Silicon wafer
CMPmachine
SC-2 Controller
EH/W-PHpH controlElectromagnetic metering pump
Chemical liquids
CMP chemical
Mixing tank Supply tank
CMP-05CMP pump
CMD-05Dampener
AC-1/FD-1,FD-2Controller/Driver
AC-1/FD-1,FD-2Controller/Driver
PD-W/PDA-WDampener
DIW NH4 H2O2
CMP-50CMP pump
CMD-50Dampener
FWPneumaticdrive bellows pump
Pneumatic drive bellows pumpsFW series
Mixed-liquidcirculation/Transfer CleaningCleaning
(Batch process)Cleaning
(Single wafer)
Chemicalsupply
equipment
Chemicalreplenishingequipment
ModelWafer wet-bench CMP process
Pneumatic drive bellows pumpsFW-H series
Pneumatic drive bellows pumpsFF series
Pneumatic drive bellows pumpsFF-H series
Pneumatic drive bellows pumpsFZ-20T
Pneumatic drive bellows pumpsFA series
Chemical fluid dispensing systemCFD series
Application
5
Model
Liquid temperature range
Max. stroke speed
Pump connection size
Max. discharge capacity
Max. air supply pressure
Max. air consumption
Supply air connection size
FW-20
10 to 100
120
ø19 X ø16PFA tube
ø19 X ø16PFA tube
20
0.2 to 0.5
330
Rc1/4
FW-20H
10 to 100
120
20
0.2 to 0.5
101 to 150
0.15 to 0.3
151 to 180
0.15 to 0.2
330
Rc1/4
FW-40
10 to 100
80
40
0.2 to 0.5
480
Rc3/8
FW-40H
120
40
200 140
10 to 100
0.2 to 0.5
101 to 150
0.15 to 0.3
151 to 180
0.15 to 0.2
480 300 220
Rc3/8
FW-80
10 to 80
80
ø25 X ø22PFA tube
ø25 X ø22PFA tube
80
0.2 to 0.5
820
Rc1/2
˚C
spm
L/min
MPa
NL/min
Note: Max. discharge capacity shows when pumping clear water at 20˚C.
Specifications
Robust Bellows Design Advances High Pressure Performance and Service Life
•The adoption of thick bellows enables the pump to discharge liquid under pressure ashigh as 0.45 MPa maximum. Moreover, the bellows have three or four times as long alife as a diaphragm. Thus, the downtime can be substantially reduced.
•In addition to its use in feeding chemical liquid, the FW series specified for highpressure and medium temperature (10 to 100˚C) is usable in a cleaning system and forthe circulation of CMP slurry liquid and the FW-H series for high pressure and hightemperature (10 to 180˚C) is usable as a circulation pump in a cleaning system.
•The fitting portions for suction anddischarge are of PFA tubular struc-ture formed integrally. This pre-vents particles from accumulatingand allows joints available on themarket to be used.
•When connected to a special con-troller, the discharge can be con-trolled and monitored easily.
Pump headValveValve caseBellows
PTFE(Tube : PFA)PTFEPTFEPTFE
1234
1
24
3
Construction and Materials
FW-40/40HFW-20/20H FW-80
NL/m
in
MPa
L/min
NL/m
in
MPa
L/min
NL/m
in
MPa
L/min
Performance curvesDischarge capacityDischarge pressure
Air consumption
0.3
0.4
0.2
0.1
20 40 8060
600
200
400
500
100
700
300
10 2015 255
80
200
40
240
120
280
160
0.1
0.4
0.3
0.2
0.3
0.4
0.2
0.1
400
240
80
160
560
480
320
20 4030 5010
0.5MPa
0.4MPa
0.3MPa
0.2MPa
0.5MPa
0.4MPa
0.3MPa
0.2MPa
0.5MPa
0.4MPa
0.3MPa
0.2MPa
0.5MPa
0.4MPa
0.3MPa
0.2MPa
0.5MPa
0.4MPa
0.3MPa
0.2MPa
0.5MPa
0.4MPa
0.3MPa
0.2MPa
FW-20
FW-20H
Pneumatic drive bellows pumps series
6
Model
Liquid temperature range
Max. stroke speed.
Pump connection size
Max. discharge capacity
Max. air supply pressure
Max. air consumption
Supply air connection size
FF-10BT/CT
B type : 5 to 100 C type : 5 to 50*
120
1/2 PFA tube
10
0.3
90
Rc1/4
FF-20BT/CT
3/4 PFA tube
22
180
FF-10HT
1/2 PFA tube
10
80
20 to 180
120 80
0.2
FF-20HT
3/4 PFA tube
20
150
Rc1/4 Rc3/8
FF-40HT
ø25 X ø22PFA tube
40
200
˚C
spm
L/min
MPa
NL/min
* The cylinder of the "B" type is made of aluminum and tetrafluororesin and that of the "C" type is of PVC.Note: Max. discharge capacity shows when pumping clear water at 20˚C.
Specifications
Energy Saving Design to Consume Less Air
•The FF series are specified for use with medium temperature liquids (The PVCcylinder type: 5 to 50˚C; Al cylinder type: 5 to 100˚C) and the FF-H series aredesigned to handle a wide range of chemical liquids ranging from ordinary tempera-tures to high temperatures (20 to 180˚C).
•The liquid end parts are made entirely from fluororesin and free from contaminationas they are designed so as to use neither rubber nor metal. As the bellows are com-pletely welded with the body of the FF-H series, there is no leakage due to heatcycles. The dead volume of air is minimized for saving the consumption of air.
•The packing of the pump shaft canbe replaced with a new one easily,without disassembling the pump.
•The suction port and dischargeport are of PFA tubular structure inthe FF-H series. For the FF series, atubular structure type and pumpattached with special fitting areavailable.
•When connected to a special con-troller, the discharge can be con-trolled and monitored easily.
Pump headValveValve case
Bellows
PTFE(Tube : PFA)PFAFF:PTFEFF-H:PFAPTFE
123
4
1
24
3
Construction and Materials
0.30
0.20
0.10
0.25
0.35
0.15
0.05
0.20
0.10
0.25
0.15
0.05
10
50
100
150
10 205 152 4 6 8 12
100
20
60
80
40
0.3MPa
0.3MPa
0.2MPa
0.2MPa
0.2MPa
0.15MPa
0.2MPa
0.15MPa0.15MPa
0.15MPa
0.3MPa
0.3MPa
0.2MPa
0.2MPa
0.2MPa0.2MPa
0.2MPa
0.2MPa
0.15MPa
0.15MPa
0.15MPa0.15MPa
FF-20/20HFF-10/10H
10 20 30 40
50
200
100
150
0.10
0.04
0.08
0.06
0.02
0.12
0.16
0.14
FF-40H
NL/m
in
MPa
L/min
NL/m
in
MPa
L/min
NL/m
in
MPa
L/min
0.18
Performance curvesDischarge capacityDischarge pressure
Air consumption
0.15MPa0.15MPa
FF-20
FF-20H
7
Model
Specifications
Liquid temperature range
Max. stroke speed
Pump connection size
Max. discharge capacity
Max. air supply pressure
Max. air consumption
Supply air connection size
FZ-20T
5 to 100
130
3/4PFA tube
22
0.3
250
Rc 3/8
˚C
spm
L/min
MPa
NL/min
Note: Max. discharge capacity shows when pumping clear water at 20˚C.
Pneumatic Drive Bellows Pump with Non-metallic Body
•The chemical fluid path, the air chamber and pump housing are constructed of inertfluororesins. The pumped liquid does not contact metal anywhere; air borne andprocess contamination are eliminated. Welded bellows design will not leak even withheat cycle operation. Integral tube connections prevents accumulation of particles andis compatible with a variety of ports. This prevents particles from accumulating andallows connection with joints available on the market.
•When connected to a special con-troller, the discharge can be con-trolled and monitored easily.
Pump headValveValve caseBellows
PTFE(Tube : PFA)PFAPTFEPTFE
1234
1
2
4 3Construction and Materials
FZ-20T
NL/m
in
MPa
L/min
Performance curvesDischarge capacityDischarge pressure
Air consumption
10 15 20 255
0.20
0.10
0.25
0.05
0.15
100
200
150
250
50
0.3MPa
0.3MPa
0.2MPa0.2MPa
0.15MPa0.15MPa
FZ-20T
Pneumatic drive bellows pumps series
8
Model
Liquid temperature range
Max. stroke speed
Pump connection size
Max. discharge capacity
Max. air supply pressure
Max. air consumption
Supply air connection size
FA-2E
5 to 100
150
Rc1/8
2
0.4
50
Rc1/4
FA-40VEW
80
Rc1
40
200
Rc3/8
˚C
spm
L/min
MPa
NL/min
Specifications
Note: Max. discharge capacity shows when pumping clear water at 20˚C.
Two Models for Circulating Medium Temperature Liquid
•There are two standardized models; the FA-2E, a lateral type for a low flow rate, andthe FA-40VEW, a vertical type for a high flow rate. The FA-2E employs a spray sys-tem for single wafer processing while the FA-40VEW is suitable for cleaning 200/300mm wafers.
•H-shaped thick bel-lows are used(Only FA-40VEW). They have excellentresistance to high pres-sure and a long life towithstand continuouslong-time operation.
•When connected to aspecial controller, thedischarge can be con-trolled and monitoredeasily.
Pump headValveValve case
Bellows
PTFEPFAFA-2E : PFAFA40VEW : PTFEPTFE
123
4
1
1 2
2
4
4
3
3
Construction and Materials
FA-40VEWFA-2E
FA-2E
NL/m
in
MPa
L/min
Performance curves
FA-40VEW
NL/m
in
MPa
L/min
Discharge capacityDischarge pressure
Air consumption
0.30
0.20
0.10
1.0 2.00.5 1.5
10
20
30
40
0.30
0.40
0.20
0.10
4020 5010 30
100
200
300
0.4MPa0.4MPa
0.4MPa
0.3MPa
0.2MPa
0.15MPa
0.1MPa
0.4MPa
0.3MPa
0.2MPa
0.3MPa0.3MPa
0.2MPa
0.2MPa0.15MPa
0.1MPa
FA-40VEW
FA-2E
•These are controllers specially made forthe F series pumps. Each controller cancontrol three pumps simultaneously. TheModel SC-1 is for the FF, FF-H, FZ andFA pumps and the SC-2 is for the FW andFW-H pumps.
•Owing to their function of fixed flow ratecontrol, the discharge of the pump is keptat a fixed level even when the dischargepressure of the pump changes due to filterclogging so as to maintain stable circula-tion/filtration.
•The range of pump pulsation is heldalways to a minimum level by automaticcontrol of the pressure of the air fed to thedampener. Thus, on-the-spot adjustment ofpressure is no longer necessary.
•Since the difference in pressures in andout of the bellows is kept to a minimumvalue despite a change in the pump load onthe discharge side, the life of the bellows isextended.
9
•Pump pressure can be automaticallyadjusted to minimum pulse pressureregardless of a change in the discharge ofthe pump likely to be caused by the clog-ging of a filter. Particles are hindered frompassing through filters and pipes are pro-tected from vibrations.
•Downtime can be reduced because thereis no need of on-the-spot adjustment ofpressure.
•Installation in existing facilities or equip-ment is possible.
•Having no automatic pressure adjustmentmechanism.
Model
Liquid temperature range
Pulsation pressure range
Supply air connection size
Applicable pumps
Max.enclosed air pressure
Connection size
Wet end material
PDA-10HPD-10H
FF-10FF-10H
1/2"PFA Tube
PDA-20HPD-20H
20 to 180
0.04 or less
Rc1/4
FF-20FF-20H
0.3
3/4"PFA Tube
PTFE/PFA
PDA-40HPD-40H
FA-40VEWFF-40H
0.4
1"PFA Tube
˚C
MPa
MPa
PDA-20W
FW-20FW-20H
ø19X ø16PFA Tube
PDA-40W
10 to 180
0.06 or less
Rc1/4
FW-40FW-40H
0.5
ø25X ø22PFA Tube
PTFE/PFA
PDA-80W
FW-80
PD-20W
FW-20
ø19X ø16PFA Tube
PD-40W
10 to 100 10 to 80
0.06 or less
Rc1/4
FW-40
0.5
ø25X ø22PFA Tube
PTFE/PFA
PD-80W
FW-80
Note 1: The damper cannot be used at a pressure above the level specified for the pump. Note 2: The range of pulse pressures depends on conditions of usage. For further information, please call us.
Specifications
Automatic DampenersPDA-H/PDA-W
DampenersPD-H/PD-W
Bellows
Pin
Valve ball(suction side)
Valve ball(exhaust side)
Air INAir OUT
Slider
Cylinder
Spring pin
IN Out
Construction
Note : Above illustration shows PDA-H
Pump ControllerSC-1/SC-2
Model
Specifications
Power consumption
Ambient temperature for operation
Power voltage
Ambient humidity for operation
Dimensions in mm
Model
24VA or less
0 to 55˚C
DC24V ±10%
Corrosive gas is not permited
W210 x D180 x H110
Ext
erna
l inp
utE
xter
nal o
utpu
t
Command for flow rate switching, start, alarm reset, output ignoring low pressure alarm
Input signal : Potential free or transistor open collector, ON voltage : 3 V or less,OFF voltage : 18 V or more
Leak alarm/defective pump operation alarm, liquid pres-sure upper/middle/lower limit alarms, total account alarm, ready output
Output mode : NPN transistor open collector, Switching capacity : DC 24V 0.4A
PDA-20W
PD-10H
SC-1
Pneumatic drive bellows pumps series
10
Pump DriverFD-1/FD-2
Pump ControllerAC-1
Quick Exhaust ValveQEV
•Pump drivers FD-1/2 are low-cost dri-vers. The FD-1 is for the FF, FF-H, FZ andFA pumps and the FD-2 for the FW andFW-H pumps.
•As its fixed stroke rate control functionenables the pump to operate with a fixednumber of strokes regardless of a change inthe pump load on the discharge side, a sta-ble discharge is maintained. Since it isalso possible to keep the differential pres-sure always at a minimum value, the life ofthe bellows is extended.
•The length of time (reference time)required for one shot of the pump can beset. A time-up alarm is output when thepump operates more quickly than the refer-ence time so as to make one aware of thedefective operation of the pump.
•In the event damage is caused to the bel-lows, a leak alarm is output to bring thepump to an emergency stop.
•This is an inexpensive type controller forthe F series pumps.
•Upon receiving a signal from the pump'sbuilt-in stroke sensor, the controller reli-ably activates the solenoid.
•It functions to output an alarm in case thepump stops or the bellows are damaged.
•When the quick exhaust valve is mountedbetween a pump and a solenoid, the sole-noid is protected from corrosion caused byreturned air. In the event the bellows aredamaged, the valve is useful to preventchemical liquid fromsprouting out of thetank into the air andfrom splashing onto theair side.
Model
Specifications
Power consumption
Ambient temperature for operation
Power voltage
Ambient humidity for operation
Dimensions in mm
Model
24VA or less
0 to 60˚C
AC100V ±10% 50/60 Hz
Corrosive gas is not permited
W144 x D146 x H72
Model
Specifications
QEV-8V
QEV-10V
QEV-15V
Connection size
Rc1/4
Rc3/8
Rc1/2
Applicable models
FW-20/20H, FF-10/10HFF-20/20H, FA-2
FW-40/40H, FF-40H, FA-40
FW-80
Model
Specifications
Power consumption
Ambient temperature for operation
Power voltage
Ambient humidity for operation
External starting signal
Leak alarm/time-up alarm
External stroke rate variable/ switching signal
External stroke rate variable/switching signal
Maximum pump stroke ratesetting/switching
Dimensions in mm
Model
24VA or less
0 to 55˚C
DC24V ±10%
Corrosive gas is not permited
AUTO : Relay contact
Input resistance: Variable0 to 100% at 0 to 5 k�
AUTO: Relay contact, Contact ON/Variable by external signal, Contact OFF/ Variable by volume
4-stage changes by dipswitch (80, 120, 150 and200 spm)
Relay contact output
W120 x D120 x H40
Ext
erna
l inp
ut
Externaloutput
Note: DC24V type is also available on request.
CFD/APD
Chemical FluidDispensing System
•The Iwaki chemical fluid dispensingsystem, made up of a pump (CFD) and acontroller (APD), is capable of meter-ing and supplying, in addition tohydrochloric acid solutions and hydro-fluoric acid solutions, ammonia waterwhich has a high vapor pressure, and ahydrogen peroxide solution whichtends to produce bubbles, with highprecision.
•Two types are available; the pneu-matic valve type CFD-8T/APD-3 andthe ball valve type CFD-8T-B/APD-3B.Note: The pneumatic valve is excluded from thespecifications.
Model
Liquid temperature range
Max. stroke rate
Pump connection port diameter
Max. discharge capacity
Max. discharge pressure
Supplied air pressure
CFD-8T/8T-B
20 to 60
30
PFA1/4 tube
8
0.05
0.15 to 0.3
˚C
spm
L/min
MPa
MPa
Wet-end part materialNote1 : Max. discharge capacity shows when pumping clear water at 20˚C.Note 2 : The leak sensor, which is an optional item, can be attached.
Note: Power consumption does not include the load on the alarm connection side.PTFE/PFA
Specifications for pump
Model
Power consumption
Ready output / Time-up alarm
Dimensions in mm
Power supply voltage
Starting input
Setting of shot number
APD-3
20VA or less
Photocoupler opencollector
W230 x D180 x H90
DC24V±10%
Potential free or transistor open collector
by means of ten key
NPN transistor open collector
by means ofdigital switch
APD-3-BSpecifications for controller
FD-2
AC-1 QEV-8V
APD-3-B
•One APD controller can drivethree CFD pumps. The amountof liquid to be supplied by each
pump can be set as desired(The number of shots canbe set between 0 to 99.)
CFD-8T-B
Pneumatic drive bellows pumps series
IWAKI CO.,LTD.
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U.S.A.AustraliaSingaporeIndonesiaMalaysiaTaiwan ThailandHong KongChinaChina
( )Country codes• Actual pumps may differ from the photos. • Specifications and dimensions are subject to change without prior notice. • For futher details please contact;
Printed in Japan 3000.5.99
Model A B C D E F G H J
346 458 218 221 105 140 22 90 182
434 542 240 250 140 180 25.5 102 220
266 361 188 191 84 114 14.5 82 154
288 400 218 221 105 140 20 91 182
431 533 240 250 140 180 23.5 97
I
112
130
97
112
130 220
FW-20/20H
FW-40/40H
463 600 302 317 185 240 27 119.5 317158.5FW-80FF-10/10H
FF-20/20H
FF-40H
(B)A 10
F
G
(100)
EI
J
(100
)
6
D
H
C
5
91
308344
288 105145188(100)
206
182
(100
)
20
10
(150)φ233
240184 220
545
274
(460
)88
4-φ18
5110
2
(192)149
610250
(96) 50
4-M6
Dimensions in mm
FW/FF series
FZ-20T FA-2E
FA-40VEW
Model A B C114 115 40144 133 50160 205 60204 273 80
10204080
Model A B C148 215 33188 255 36208 323 38
204080
PDA-W
PDAPD-HPD-W
A
Air�IN
INOUTC
B
9
100
Air�OUT
A100 100
INOUT
B
C
11Air�OUT
AIr�IN
Australia
GermanyItalyDenmarkFrance
SwitzerlandU.K.SwedenFinland
AustriaNorwayHollandSpain
U.S.A.
SingaporeIndonesiaMalaysiaTaiwan
ThailandHong KongChinaKorea
IWAKI World-Wide Network
Thorough quality-control mea-sures and constant pursuit ofefficiency have helped Iwakiestablish a suprerior produc-tion system.
ISO9001�JQA-1173
IWAKI SAITAMA PLANT IWAKI MIHARU PLANT