Post on 01-Sep-2018
transcript
Nanotechnology is about Nano-Precision
John Randall Ph.D. Vice President
Zyvex Labs
jrandall@zyvexlabs.com
APEC March 2011 Fort Worth
What are the drivers for Human Progress?
• Human Ingenuity
What are the drivers for Human Progress?
• Human Ingenuity
• Materials
What are the drivers for Human Progress?
• Human Ingenuity
• Materials
• Manufacturing Precision
What are the drivers for Human Progress?
Human Ingenuity
• Wheel - 3500 BC
• Ball Bearings – 40 AD
• Steam Engines – 100 AD
• Computing Machines– 1822 AD
Human Ingenuity made practical
• Wheel - 3500 BCChariots – 2500 BC
• Ball Bearings – 40 AD Used in bicycles - 1869
• Steam Engines – 100 AD Newcomb Engine - 1712
• Computing Machines – 1822 AD IBM PC - 1980
New materials and improved manufacturing precision lead to lower cost, higher performing, more efficient, and more reliable products.
Norio Taniguchi’s Precision Chart
Effective nanotechnology: Small is not enough
• Carbon nanotubes are small and have outrageous electrical, thermal, and mechanical properties. – Their assembly and interfacial interaction must have precision to
capture these properties in macroscopic objects.
• High tech leads the charge in remarkable miniaturization of everything. But there is always “Some Assembly Required”. We are still in the dark ages in assembly of small parts which is still principally done by hand. – I will describe an automated, high-precision, micro assembly technology
that will allow downscaling and parallelization for high throughput.
• The ultimate in precision would be a manufacturing process that could make arbitrary 3D structures where we are in control of the position of every atom.
– Science fiction? – Stay tuned.
Graphite
Single-Walled Carbon NanotubesMulti-Walled Carbon Nanotubes
CNT Background
Zyvex’s Technology
• Two distinct functions: – Non-damaging binding– Controlling reactivity
• Binding applicable to SWNTs, MWNTs and other nanostructures
• Reactivity function may be engineered for different uses:– Solution in organic solvents– Adhesion to composite matrix– Solution in water– Sensor applications – Other chemical functionalityFunctionalization technology
The key• Zyvex’s IP protected polymer,
Kentera™ – is the Key– Nanotubes are the
strongest materials known to man and highly conductive
– Kentera enables Zyvex to integrate nanomaterials into composites and provide significant strength-to- weight increases at an affordable cost
Problems we solve • When they need cost effective solutions for
– Molecular technology developments – ½ the weight at 2X the size– Repairs stronger than original construction– Multifunctional materials
applications where we solve them…
Structures Infrastructure Maritime
Comparative Performance• Arovex
Comparative Performance• Arovex
Comparative Performance• Epovex Adhesive HK 100
Transforming assembly manufacturing:
1. Downscaling path 2. Parallel processing 3. Digitization
Micro Assembly
MEMS Fabrication Process
SOI wafer slice
525µm Handle
50µm SCS
2µm BOX
The 3D models are made using our MEMS emulation software: MEMulatorTM
Assembly Operation
1. Detether
4. Place
3. Rotate
2. Pick
The 3D models are made using our MEMS emulation software: MEMulatorTM
TetherEnd-effecter
Device layer
Gripping flexure
Connector Socket
Socket
Microassembly
Microassembly
Parallel Placement
Photon Optic Devices
• Heterogeneous assembly silicon and non- silicon parts
• Unique fiber connectors allow high tolerance placement of fibers and lens
• Integrated micro-motors allow tunable mirrors and gratings
• No epoxy usage
Optical Spectrometer
Charged Particle Optics
8mm Scanning Electron Microscope Column
5mm Rotating Field Mass Spectrometer
Miniaturized Systems
19 inch Equipment Rack 19mm Equipment Rack15,000X smaller volume
Power Bus10um PitchData Bus RF Bus
Electro-Mechanical Connector Slots
Power supplies, clocks, etc.
Chip-Cards
Atomically Precise Manufacturing
• The ability to create perfect structures with absolute precision.
Norio Taniguchi’s Precision Chart
Dr. Tayo AkinwandeDARPA Program Manager
Contract N66001-08-C-2040Supported by DARPA, the State of Texas and Industrial Cost Share.
Total of 14M-USD for 4.5 Years.
Tip Based Nanofabrication Program
Universities:University of Texas at DallasBob Wallace, Yves Chabal, KJ Cho, JF Veyan
University of Illinois at UCJoe Lyding
University of North TexasBrian Gorman, Rick Reidy
University of Texas at AustinS. V. Sreenivasan
University of Central FloridaDennis Deppe
State Agency: N.Texas RCICR. Mike Lockerd
Industry:Zyvex LabsJ. Randall, J. Von Ehr, J. Ballard, R.Saini, J. Owen, S. Manning
IC Scanning Probe InstrumentsNeil Sarkar
General DynamicsTihamer Toth-Fejel
Molecular Imprints Inc.S. V. Sreenivasan
Vought AircraftMartin Wimmer
National Labs: NISTRick Silver, Jason Gorman
Sandia Mike Kanouff
International Collaborators:Univ. New South WalesMichelle Simmons Wolfgang Klesse
University College LondonDavid Bowler
Zyvex Asia Hai Xu, Shi Chen, Lerwen Liu
IMRE (Singapore)Alfred Huan, Johnson Goh, Eric Cox, WeiJie Ong
Your Institution Your name here
Future Collaborators
Atomically Precise Manufacturing: Our Technology Approach
• APM is the integration of two known experimental techniques: – The atomic precision removal of H atoms from a silicon surface– Atomic Layer epitaxy: the deposition of a single layer of Si atoms
• No direct tip manipulation – gas phase material transport
• Scalable process – expands to other material systems
• Not yet fully demonstrated
1nm
Invariant atomically-precise STM tip, with closed loop computer control, inside UHV system, removes H from Si surface with atomic precision
In deposition phase, gaseous SiH2 radicals deposit one Si atom wherever H atom is removed (patterned Atomic Layer Epitaxy)
After each deposition cycle, SiH2 is evacuated and patterning step is repeated to create designed 3D structure
AP H depassivation with STM
Hersam and Lyding UIUC
Butcher and Simmons UNSW
100 nm
“Perfect” Lithography
An unpublished example of perfect patterning by Lyding at Univ of Illinois.
44 H atoms have been removed to form a 1.55 x 4.26nm rectangle.
Blue circles indicate where the H atoms have been removed.
The two additional dangling bonds (missing H atoms) were there prior to the patterning process.
However this is not yet a highly reliable automated process.
Case Study: Atomically Precise Metrology Standards
• A wall of Si – A known number of lattice units wide – A known number of lattice units tall – Long enough to be found by an AFM, SEM, etc.
• Can be sold for > $10,000
Case Study: Life Sciences….
• Structures fabricated to interact in designed ways with specific molecules:
– Ultra high speed DNA sequencing
– Ultra precise molecular filtering
– Designed molecular binding sites
– Designed enzymatic catalysts
Nano Bio
Case Study: DNA Nanopore
• Only nanopores fabricated with atomic precision will be able to read individual bases at speeds required for low cost DNA sequencing enabling: – Genetically tailored drugs– Optimized crops– Rapid identification of evolving
diseases• Current fabrication techniques
have >1nm variation.– However, the tunnel current
readout mechanism is extremely sensitive to distance: a 0.1nm variation in tunneling distance results in ~10X variation in current.
• APM could enable this high value application.
Case Study: Nano Mechanics
• L=W= 89 Atomic layers = 12.1nm
• Minimum feature 9 atomic layers 1.2nm
• Operating Resonant Freq=246GHz
• Extremely High Q
LW
Substrate
ResonatingMass
DriveElectrode
SenseElectrode
Si Bulk Longitudinal Resonator
MEMS Oscillator
AP Structures Polymer
Products• Molecular binding sites• Nanopore membranes• Catalysts• Nanooptical elements • NOT VLSI
Case Study: Master Nanoimprint Templates
Some loss of fidelity: • From Si structure to template• From Master to Daughter • Imprint Process • Pattern Transfer
Cost of AP portion of Specific Products
• DNA Nanopore 2nm pore in membrane with local electrodes for read-out – Requires additional tip induced deposition of
electrodes– Requires additional processing to get pore
over opening • CD Metrology standard for semiconductor
industry • NEMS resonator for low-power High-
Frequency radio– Requires process that includes sacrificial layer
nm nm nm um3 LR % $/um3 Product component Cost/unit Units Total $1000 1000 10 1.0E-02 90% $ 476 DNA Nanopore $ 4.76 200 $952.00
1000 20 20 4.0E-04 0% $2,970 CD Metrology standard $ 1.19 10 $11.88
10 10 4 4.0E-07 0% $2,970 NEMS resonator $ 0.001 10 $0.01