Post on 26-Mar-2015
transcript
Mega II: System Diagram
Low Level FloatClosed Fluid
Reservoir
P1
S4S4
S2S2
S2S2
S3S3
S4S4
S5S5
Fill
Wash
Rinse
Drain
Dry
Process Chamber
IACIAC
IONIC ABSORPTION
CHAMBER( )
RES. SENSO
R
S1S1
S1S1
S3S3
S5S5HEAT(option)
NitrogenDryer
High LevelFloat
S1S1
低液位浮标封闭的溶剂槽
P1
S4S4
S2S2
S2S2
S3S3
S4S4
S5S5
注入清洗
漂洗
排泄
干燥
清洗腔室
IACIAC
离子吸附腔室 ( )
电阻率探头
S1S1
S1S1
S3S3
S5S5加热选件氮气干燥
高液位浮标
S1S1
GLOBAL REACH AND ON-SITE SERVICE CAPABILITY
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