MEMS TECHNOLOGYMEMS TECHNOLOGY

BYS.APPA RAO

MEMS: micro-electro-mechanical systems

Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.

INTRODUCTION

Same as the process steps used for making conventional electronic circuits

MEMS PROCESSPowerPoint

FABRICATION PROCESS: FABRICATION PROCESS:

CHEMICAL DEPOSITION Chemical vapour deposition

PHYSICAL DEPOSITION Sputtering

DEPOSITION:

  Application of photo resist Optical exposure to print an image of the mask

onto the resist Immersion in an aqueous developer solution to

dissolve the exposed resist

LITHIOGRAPHY:

ETCHING:ETCHING:

•DRY ETCHING

•WET ETCHING

Materials are the basic things required to develop micro sensors

Metals Polymers Ceramic materials Semiconductors Composite materials

MATERIALS FOR MEMS:

Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices

MICRO MACHINING TECHNOLOGY:

BULK micromachining:

SURFACE micromachining:

LIGA process:

TYPES OF MICROMACHINING:

MEMS ACCELEROMETRER: MEMS ACCELEROMETRER:

CONVENTIONAL ACCELEROMETER SENSOR

• Made of bulky and heavy metal parts• Require high operating voltage/current• Needs careful maintenance • Highly expensive not throwaway type

PIEZO-RESISTIVE ACCELEROMETER:

LAYOUT OF THE RESISTOR:

MASKS that are used 4 ACCELEROMETER:

FABRICATION PROCESS:

Contd….

INTERFACE ELECTRONIC CKT

MEMS ACCELEROMETER

ADVANTAGES:

Significantly lower manufacturing costs

Small inertial mass

Particularly realized in the area of: – sensors – signal switching

TECHNICAL LIMITATIONS:

Imprecise fabrication methods

Expensive and complex packaging

CAD Design tool inaccuracies

APPLICATIONS:

Accelerometers in consumer electronics devices such as game controllers

Communications

biotechnology

FUTURE:

As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives.

It has the potential to change our daily life as much as computer

THANK YOU!!!

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