Micro to Nano Technologies

By: Brent HareLenox laser

March 30, 2004

Micro to Nano Technologies

Micro - Prefix meaning one millionth, 1/1,000,000

Nano – Prefix meaning one billionth, 1/1,000,000,000

The Powers of 10

10+0 1 Meter

10-1 10 Centimeters

10-2 1 Centimeters

10-3 1 Millimeter

10-4 100 Microns

10-5 10 Microns

10-6 1 Micron

10-7 1,000 Angstroms

10-8 100 Angstroms

10-9 1 Nanometer

10-10 1 Angstrom

10-11 10 Pico meters

10-12 1 Pico meter

10-13 100 Fermis

10-14 10 Fermis

10-15 1 Fermi

10-16 0.1 Fermis

10-17 0.01 Fermis

10-18 0.001 Fermis

Current Micro Technologies

Photonics - Optical Apertures and Flow Orifices

Electronics – Semiconductor chips, anodic bonding

MEMS – Micro Electro Mechanical Systems

Communication – Fiber optics, switching interconnects

Biotechnology - cell filtration, drug discovery

Current Nano Technologies

Molecular manufacturing – Precision down to the atomic level

Nanotubes –Building advanced lightweight materials as well as advancements in LCD technologies

Medicine – Devices that will flow through the circulatory system

Nanocomposites – Assisting in vast improvements in material compositions

Electronics – Advanced CMOS and silicon transistor integration with lithography

mms://stream.techtv.com/windows/bigthinkers/2002/bt020225b_165_0.asf

Micro scaling to Nano

Click Picture to watch Nanotechnology movie

http://www.memsoptical.com/prodserv/products/microlensar.htm

Micro - Optics

Ability to drill to ½ micron for half the wavelength

Micromirrors for next generation telescope optics

Micromirrors

Microlens Arrays

http://www.geek.com/procspec/intel/pic2p4-13.htm

Micro - Electro

Pentium 4- Top speed – 3.4ghz Built on a 0.13

micron die 168 million

transistors on 200mm2

http://www.utnl.jp/~mada-lab/research.html

Micro - Chemical

Miniature fuel cells Micro channels Chemical reactors

50 Micron Chemical Reactor

Micro Chemical Channel

Micro Fuel Cell

Photos from Pittcon

Micro Flow Devices

=

Swagelock hasbegun to minaturizeits flow components

3ft. X 4ft.

6in. x 18in.

http://www.memx.com/image_gallery.htm

Micro - Engineering

Micro gears Micro embossing and

stamping Microactuators (Tiny

Motors) Micro-valves

Micro-valves

Micro embossing

Complex Ratchet

http://us.st.com/stonline/prodpres/dedicate/mems/technolo/micro/photo.htm

Micro - Mechanical

Microactuators – tiny motors

http://www.memx.com/image_gallery.htm

Micro Mechincal

World’s smallest steam engine, the pistons are 5 microns

and it actually works

Micro Clutch mechanism, gears are 50 microns

http://www.sensorsmag.com/articles/0700/10/main.shtml

Microfluidics

Capillary uptake Piezoelectric

inkjets Flow sensing Drug dispensing Flow based

separation

Print Cartridges

Lab-On-Chip for DNADetection and Analysis

Micro Canals

http://www.lucent.com

Micro Communications

Full optical switching technologies

Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles Fiber optic switching

e-blox (Scaleable, Interfaceable, Stackable)

Micro to nano interfaces for simple solutions e-blox allows you to build backbones

connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies

Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level

http://www.smalltimes.com/document_display.cfm?document_id=5340

MEMS (Powder Metal Die Casting for building small parts)

The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox

They have the ability to create miniature tools and dies to help build MEMS technologies

Micro Sensor 0.051mm

http://www.solid-edge.com/

Rapid Prototyping

Use of 3D CAD modeling with SolidEdge

3D Scanning Technologies – Use of lasers and optics to scan surface objects

3D Holography Technologies – Holograms for real visualizations

3D CAD Model

http://www.epner.com/electroforming_intro.ssi

Electroforming Technologies

Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel.

http://www.memsnet.org/mems/beginner/etch.html

Etching Technologies

Wet Etching – Dissolves materials with chemicals and the use of masks

Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases

http://www.intel.com/research/silicon/lithography.htm

Lithography Technologies

Lithography is a printing process where image areas and non-image areas are separated chemically

Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light

Piezeo electronics (for micro to nano movement)

Pizeoelectronics are materials that produce an electrical response to a mechanical force.

Can be used in Vibration Monitoring, Imaging

Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control

http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2

First NanoChips

Integrated circuits can be made down to 50nm

50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections)

http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2

Next Generation Nano Lithography

To build chips smaller than 50nm, new lithography technologies must be created – The above technology can use 13nm ultraviolet wavelengths

http://www.sciam.com/article.cfm?chanID=sa002&articleID=000CE8C4-DC31-1055-973683414B7F0000&pageNumber=4&catID=2

Nano Biotechnologies

Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics

Ability to have insulated wires sized at 25nm and 20 microns in length

http://www.lbl.gov/Science-Articles/Archive/images4/nanotubes-model.jpg

Nanotubes Conductive and high-

strength composites Energy storage and

energy conversion devices

Sensors Medical drug delivery

and DNA research Nanometer-sized

semiconductor devices, probes, and interconnects

Nanotubes are built by arrangingseveral atoms in a closed pattern to form an unbelievably small tube