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Printed Sensors Technology:Design, Manufacturing Process and Applications
Dr. S. Fricke
Singapore, 27.07.2017
Copyright 2017 CSEM | AMF’17 | Dr. S. Fricke | Page 1
Content
• Introduction CSEM
• Motivation
• Introduction and sensing principles
• Sensor developments and implementations based on printing
• Summary
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Our mission
Development and transfer of microtechnologies to the industrial sector – in
Switzerland, as a priority – in order to reinforce its competitive advantage.
Cooperation agreements with established companies
Creation of start-ups
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Technology platforms to foster innovation
Integration & packaging
Printableelectronics
Bio-surface engineering
Design & process
Nano-surface engineering
Scientific instrumentation
Medicaltechnologies
Automation
Energysystems
Emerging & thin-film PV
PV cells& Modules
Vision systems
System-on-chip
Wireless
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Printed Sensors… Why?!
• Increasing number of sensors in our world.
Main contributor: The Smartphone
• What is missing for the next big thing? IoT-Sensors?
• Low cost, mass manufacturable sensors with
communication interface and large area
manufacturability.
• Printed sensors are complementary, they will not replace
MEMS sensors in a smartphone
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Printing Technologies and Materials
• Non-contact printing technologies e.g.
• Ink-jet printing
• Aerosoljet printing
• Screen-printing
• Slot-die Coating
• Contact printing technologies e.g.
• Gravure printing
• Flexography printing
• Nano-imprinting
• Conductors
• Metals (Ag, Cu, Au, Pt,..)
• Semiconductors
• Organic, Inorganic (PEDOT,
P3HT, Si,…)
• Dielectrics
• Organic, Inorganic (PS, PMMA,
BCB, Oxides…)
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Printed memory based on ferroelectric capacitors
• In 2011, Thinfilm together with PARC
announced a working prototype of the world's
first printed non-volatile memory device
addressed with complementary organic circuits,
the organic equivalent of CMOS circuitry
R. C. G. Naber, K. Asadi, P. W. M.
Blom, D. M. de Leeuw, “Organic Non-
volatile Memory Devices Based on
Ferroelectricity,” Adv. Mater. 2010, 22,
933–945.
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Components, devices,… realized by printing
• Electric discrete components:
• Wirings, bus bars, electrodes• Resistors• Inductors• Antennas• Capacitors
• Active electronic devices:
• (Photo-)Diodes• Transistors• OLEDs• Solar cells.
• Memory devices
• Ferroelectric capacitors
• Energy storage
• Batteries
• Sensors
• Physical, chemical
• Flexible Hybrid Systems
• Printing + SMD
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…also printed Sensors build on known sensing principles
• Capacitive
• Resistive
• Inductive
• Amperometric
• Voltametric
• Impedance
• Thermoelectric
• Piezoresistive
• Piezoelectric
• Photoelectric
• Pyroelectric
• Resonant
• Optical
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Physical: Printed Temperature Sensors
• Inkjet printed Ag RTD on PET (PTC)
• TCR: 6.52·10-4 °C-1
• Screen-printed Wheatstone Bridge of NTC (ATO) and
PTC materials on PEN
• 0.54 V/°C @ 48Vin
• Screen-printed Si nanoparticles (NTC) and Ag electrodes
printed on e.g. paper (PST Sensors Ltd.)
• logarithmic temperature coefficient 2000 ± 100K
(T: 20 – 60°C)
F. Molina-Lopez et al.
A. Aliane et al.
D.T. Britton et al.
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Physical: Printed Pressure Sensors
• Capacitive: CNT-doped PDMS
electrodes on PDMS, by soft-litho-
graphy and blade coating
• Piezoresistive: Screen-printing of Ag electrodes and
Carbon ink as piezoresistive layer on PU.
Woo et al.
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Physical: Printed Pressure Sensors cont.
• Piezoelectric: PVDF:TrFE, Carbon,
Ag and PEDOT:PSS electrodes
screen-printed on PET.
• OTFTs: Inkjet-printed Ag on PET,
vapor-phase coating of Parylene,
TIPS pentacene drop-casted
M. Zirkl et al.
P. Cosseddu et al.
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Physical: Printed Strain Sensors
• Resistive: Ag on structural Al parts by aerosoljet
printing
• Piezoresistive: Aerosoljet printed PEDOT:PSS on
Kapton substrate
• Gauge factor 0.53
I. Wirth et al.
B. Thompson et al.
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Physical: Printed Strain Sensors cont.
• Piezoresistive: Screen-printing of
CNT-AgNP paste on silicone
• Ratio of CNT in the paste tunes strain
sensitivity and temperature insensitivity
• Sensitivity ∼59%/Pa in linear regime
S. Harada et al.
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Physical: Printed Photodetectors
• Photodiodes: Fully inkjet printed Ag,
PEDOT:PSS, P3HT:PCBM
• Passive Matrix Imager: inkjet printed
P3HT:PCBM. 128dpi demonstrated, 512dpi
under development
• Active Matrix Imager: ISORG building manufacturing site
in Limoges (France)
G. Azzellino et al.
ISORG
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Chemical: Electrochemical Sensors
• Electrical Read-out:Voltametry, Amperometry or
Impedance-Spectrocsopy
• Principal: Functionalization with Antibodies
• Sensing: glucose, pH, lactate, cancer biomarkers..
• screen-printed sensors with Ag, C, AgCl, Au,
electrodes have reached mass-production
G.C. Jensen et al.
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Chemical: Electrochemical Sensors cont.
• Inkjet printed Au NP electrodes on Kapton
• cancer biomarker interleukin-6 (IL-6) in serum
• Gravure-printed Ag NP electrodes on PET
• mercury sulfide (HgS), lead sulfide
(PbS), D-proline and sarcosine
B.B. Narakathu et al.
G.C. Jensen et al.
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Chemical: Printed Ion Sensors
• Ion Selective Electrode (ISE): Screen-printing of ion-
selective membrane (and Ag epoxy)
• Fully screenprinted Ag, Au, graphite on polyester
• Lead detection by stripping voltametry down to
2 µg/l
H.D. Goldberg et al.
S. Laschi et al.
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Chemical: Printed Ion Sensors cont.
a) OFET: Semiconductor exposed OFET
b) Ion-sensitive OFET (ISOFET): Insulator exposed OFET
c) Organic electrochemical transistor (OECT): Insulator
dielectric replaced by electrolyte
• OECT humidity sensor on PE
coated paper using PEDOT:PSS as
organic semiconductor and Nafion
as electrolyte
J.T. Mabeck et al.D. Nilson et al.
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Chemical: Printed Gas Sensors
• Au and Pd decorated carbon-nanofibres on
Kapton. Inkjet printed Ag electrodes and heater.
• Ammonia and NO2 sensor
S. Claramunt et al.
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Printed Sensors vs. MEMS Sensors
• Rigid package, silicone glue, rigid die
with SiN membrane and glass socket
• Cross-sensitivities minimized by
thermo-mechnical decoupling
• Mounting SMD
• Local measurement
• PU foil bendable, stetchable
• Cross-sensitive to bending,
stretching, Temperature
• Mounting on surfaces
• Mapping
BOSCH Automotive
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Printed Sensors vs. MEMS Sensors
• Rigid package, silicone glue, rigid die
with SiN membrane and glass socket
• Cross-sensitivities minimized by
thermo-mechnical decoupling
• Mounting SMD
• Local measurement
• PU foil bendable, stetchable
• Cross-sensitive to bending,
stretching, Temperature
• Mounting on surfaces
• Mapping
BOSCH Automotive
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Summary
• Printed Sensors have been demonstrated with many sensing principles
• Very different levels of maturity, some are commercialized, some are lab prototypes
• Shelf and operating lifetime strongly depends the materials used.
• Strong potential in chemical and biological sensors for point-of-care diagnostics and
disposable sensors
• The integration into systems and making use of the unique properties of the sensors
is key to success.
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Outlook
• Flexible Hybrid (Opto-)Electronics in health, consumer, automotive,... markets
• Edge processing will be included in a hybrid approach
• Large area sensing on walls, floors, roofs
• Disposable patches for surveillance
• Flexible smart patches to monitor health parameters
• Implantable flexible sensors and electrodes