Presented toPresented to

SolariaSolaria

11/13/200811/13/2008

VarioProfileVarioProfile

VarioProfileVarioProfile

VarioProfile

Dimensions < 18” X 18” X 12”

Weight ~ 70 lb.

Electrical < 60 VDC

Safety EMO, covers

ElectronicsElectronics

VMP Electronics

Dimensions 7” X 17” X 19” rack

Weight ~ 27 lb.

Electrical 120VAC, 6A

Safety EMO, Start button

Interface USB or Ethernet

Significant VMP capabilitiesSignificant VMP capabilities

Thickness and Flatness measurementsThickness and Flatness measurements– Simultaneous measurements of multiple material Simultaneous measurements of multiple material

layerslayers– Air gaps between sample and 6” diameter Air gaps between sample and 6” diameter

reference glass used to measure flatnessreference glass used to measure flatness Automatic measurement of multiple regionsAutomatic measurement of multiple regions Fast gantry with XYZ capabilityFast gantry with XYZ capability Easy to use GUIEasy to use GUI

Silicon Thickness MapSilicon Thickness Map

Silicon Thickness RepeatabilitySilicon Thickness Repeatability

Flatness MeasurementFlatness Measurement

Principle of operationPrinciple of operation– Measures interference between sample and Measures interference between sample and

reference glassreference glass– Analysis of the air gap is the flatnessAnalysis of the air gap is the flatness

Accuracy, expect < 1umAccuracy, expect < 1um Repeatability < 0.5umRepeatability < 0.5um More work to be done to qualifyMore work to be done to qualify

Air Gap to SiliconAir Gap to Silicon

VarioProfile SpecVarioProfile Spec(preliminary)(preliminary)

Description SpecificationOptical bandwidth 1260nm – 1360nmSilicon thickness range 5 um – 1000 umDigital video camera 640 X 480 pixels, realtimeObjective lens 5X, 0.10NARing illuminator LED, low powerMotorized XYZ Stage Travel 100 mm X 100 mm X 10 mmManual Z focus travel 75 mmXY Stage repeatability +/-5 umStage velocity > 100 mm/sData acquisition time 1 second per measurementThree point alignment Maps to design coordinatesAutomatic measurement Measures a rectangular array of points

Color thickness map Plots rectangular array indicating thickness as a function of XY position

Single point continuous thickness measurement

Move to a position in design coordinates and measure continuously

Survey Output FormatSurvey Output Format

Easy to import Easy to import columnar datacolumnar data

Analysis usingAnalysis using– DataFitDataFit

Regression curve fittingRegression curve fitting

– ExcelExcel Surface plotsSurface plots StatisticsStatistics

– Other?Other?