Survey of MEMS, MOEMS,

Optoelectronic and Other Solid State

DevicesNathaniel J. C. Libatique, Ph.D.nlibatique@gmail.com

OptoelectronicsOptoelectronics

Flash MemoryFlash Memory Laser DiodesLaser Diodes Charge Coupled DevicesCharge Coupled Devices Waveguide ModulatorsWaveguide Modulators Avalanche PhotodetectorsAvalanche Photodetectors High Electron Mobility TransistorsHigh Electron Mobility Transistors MemristorsMemristors

MEMS and MOEMSMEMS and MOEMS

Labs on a chip and MicrofluidicsLabs on a chip and Microfluidics Digital Light ProcessorDigital Light Processor AccelerometersAccelerometers Optical SwitchesOptical Switches Pressure SensorsPressure Sensors

Other DevicesOther Devices

Peltier CoolersPeltier Coolers High Density Magnetic Storage High Density Magnetic Storage

(GMR)(GMR) SQUIDsSQUIDs Chemo-Optoelectronic Sensors: Chemo-Optoelectronic Sensors:

Micro-assaysMicro-assays

HDDsHDDs

http://www.pcworld.com/article/128400/hitachi_introduces_1terabyte_hard_drive.html

Hitachi Introduces 1-Terabyte Hard Drive

Colossal storage reaches new milestone with a drive that holds 1000 gigabytes.Melissa J. Perenson, PC World

Jan 5, 2007 1:00 pm

Hitachi Global Storage Technologies is first to the mat with an announcement of a 1-terabyte hard disk drive. Industry analysts widely expected a 1TB drive to ship sometime in 2007; Hitachi grabbed a head start on the competition by announcing its drive today, just before the largest U.S. consumer electronics show starts next week.

E-InkE-Ink

http://www.eink.com/technology/howitworks.html

MEMSMEMS

http://mems.sandia.gov/gallery/images/m10.jpg

HomeworkHomework

Collect paper(s) focused on a particular Collect paper(s) focused on a particular device and prepare for one or several device and prepare for one or several discussions about its:discussions about its: Function and applicationsFunction and applications Principle of operationPrinciple of operation FabricationFabrication Limits of operation (dimensional limits, Limits of operation (dimensional limits,

fabrication limits, noise floor, speed limits, fabrication limits, noise floor, speed limits, etc)etc)

Potential new applications (e.g. biomedical)Potential new applications (e.g. biomedical)

http://userweb.elec.gla.ac.uk/k/kalna/scheme_pHEMT.gif

HEMTHEMT

• Applications in low noise, high bandwidth applications• Carriers provided in doped AlGaAs• AlGaAs ternary has larger bandgap than GaAs• Conduction in low-impurity InGaAs channel

Flash MemoryFlash Memory

NOR Flash Floating Gate TransistorFloating Gate stores charge and modifies device characteristics

Applications include:• Spectroscopy• WDM communications• Metrology

Tunable LasersTunable Lasers

Sandia MEMS ProcessSandia MEMS Process

Cross-section diagram of the SUMMiT V™ Process layers: 4 structural layers, 1 ground/interconnect layer, and 4 sacrificial oxide layers.

Double Ratchet ActuatorDouble Ratchet Actuator

AutoCAD layout

After Sacrificial Oxide 1 After Sacrificial Oxide 1 EtchEtch

After Sacrificial Oxide 2 After Sacrificial Oxide 2 EtchEtch

After Polysilicon 2 EtchAfter Polysilicon 2 Etch

After Sacrifial Oxide 3 After Sacrifial Oxide 3 EtchEtch

After Polysilicon 3 EtchAfter Polysilicon 3 Etch

After Polysilicon 4 EtchAfter Polysilicon 4 Etch

Final ReleaseFinal Release