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© 2004 Swagelok Company
igcigc™ ™ IIIIigcigc™ ™ IIIIModular Surface-mountModular Surface-mount
DesignDesignModular Surface-mountModular Surface-mount
DesignDesign
© 2004 Swagelok Company
Features of Modular Gas Systems Features of Modular Gas Systems Features of Modular Gas Systems Features of Modular Gas Systems • Reduces Space Requirements • Facilitates Easy Assembly and Maintenance• Reduces Inventory
© 2004 Swagelok Company
igcigc™™ IIIIigcigc™™ IIII• Simplifies Design and Assembly• Reduces Potential Leak Points• Reduces Panel Weight• Complies with SEMI-PR3.1• Supported by Local Swagelok Distributors• Competitive Cost of Ownership
© 2004 Swagelok Company
Modular Modular TechnologyTechnology
Modular Modular TechnologyTechnology
(38.9 mm)(38.9 mm)1.53 1.53 in.in.
1.23 1.23 in.in.(31.2 mm)(31.2 mm)
© 2004 Swagelok Company
Open ArchitectureOpen ArchitectureSurface-mount C-ring GasketsSurface-mount C-ring Gaskets
Open ArchitectureOpen ArchitectureSurface-mount C-ring GasketsSurface-mount C-ring Gaskets
3 port3 port 2 port2 port 1 port1 port
Surface-mount SealsSurface-mount Seals
C-ring Gasket AssemblyC-ring Gasket Assembly
For Drop-down componentsFor Drop-down components
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Igc PanelIgc Panel
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Substrate AssembliesSubstrate Assemblies
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Surface-mount Surface-mount ComponentsComponents
© 2004 Swagelok Company
Substrate Flow ComponentsSubstrate Flow Components
Substrate Substrate ChannelChannel
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Substrate AssembliesSubstrate Assemblies
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Igc PanelIgc Panel
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Manifold Flow ComponentsManifold Flow Components
© 2004 Swagelok Company
igcigc™™ II ConstructionII Constructionigcigc™™ II ConstructionII Construction
Mounting ComponentsMounting Components
Base PlateBase Plate
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
Substrate AssemblySubstrate Assembly
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
Surface-mount Surface-mount
ComponentsComponents
© 2004 Swagelok Company
Substrate Flow ComponentsSubstrate Flow ComponentsSubstrate Flow ComponentsSubstrate Flow Components
Drop-downDrop-down
Surface-mountSurface-mount
ConnectorConnector
MFC MFC ConnectorsConnectors
Substrate Substrate
End ConnectorEnd Connector
© 2004 Swagelok Company
Substrate ComponentSubstrate Component
Substrate ClipSubstrate ClipSubstrate ChannelSubstrate Channel
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
Lock-down plateLock-down plate
Substrate ChannelSubstrate Channel
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
C-ring GasketC-ring Gasket
Substrate ChannelSubstrate Channel
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
Surface-mount ComponentSurface-mount Component
Substrate ChannelSubstrate Channel
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
© 2004 Swagelok Company
Substrate LayerSubstrate LayerSubstrate LayerSubstrate Layer
Load Bearing InsertLoad Bearing Insert
© 2004 Swagelok Company
Manifold ChannelManifold Channel
Manifold ComponentManifold Component
Manifold ClipManifold Clip
Manifold LayerManifold LayerManifold LayerManifold Layer
© 2004 Swagelok Company
Manifold AssemblyManifold Assembly
Manifold LayerManifold LayerManifold LayerManifold Layer
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold LayerButt Weld End Butt Weld End
ConnectionConnection
Butt Weld End Butt Weld End
ConnectionConnection
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold Layer
Manifold PortsManifold Ports
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold Layer
Manifold PlugManifold Plug
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold Layer
CapCap
© 2004 Swagelok Company
Manifold ClipManifold Clip
Manifold ComponentManifold Component
Cap ScrewsCap Screws
Manifold ChannelManifold Channel
Substrate ChannelSubstrate Channel
Manifold LayerManifold LayerManifold LayerManifold Layer
© 2004 Swagelok Company
Locating RibLocating Rib
Manifold LayerManifold LayerManifold LayerManifold Layer
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold Layer
Parallel ManifoldParallel Manifold
© 2004 Swagelok Company
Manifold LayerManifold LayerManifold LayerManifold Layer
Parallel ManifoldParallel Manifold
Jumper ComponentJumper Component
© 2004 Swagelok Company
Support LayerSupport LayerSupport LayerSupport Layer
Mid-line Support Mid-line Support
BlockBlock
Foot BlockFoot Block
Foot BlockFoot Block
© 2004 Swagelok Company
AccessoriesAccessoriesAccessoriesAccessories
Cartridge Style Heater ClipCartridge Style Heater Clip
© 2004 Swagelok Company
AccessoriesAccessoriesAccessoriesAccessories
Mass Flow ControllerMass Flow Controller
Conversion PlatesConversion Plates
CapCap
Vertical PortVertical Port
© 2004 Swagelok Company
igcigc™™ IIIIigcigc™™ IIII