© 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | About Conax...

© 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com

About Conax Semiconductor

2011


• Division of Conax Technologies LLC

• 55 Year Old Company based in Buffalo, NY, USA

• Fully Integrated, State-of-the-Art Facility featuring some of the most sophisticated manufacturing systems in the industry.

• ISO 9001:2008 certified


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Facilities

Our fully integrated, state-of-the-art ISO 9001:2000 certified production facility in upstate New York features some of the most sophisticated manufacturing systems in the industry.

Complete in-house capabilities include computer-aided engineering, design and manufacturing. We have state-of-the-art equipment for machining, assembly, welding and testing. All Conax Semiconductor products are produced under our stringent quality assurance program.

Home About Us Literature Customers What’s New Contact Us

Product Assurance Capabilities • Calibration Lab • Unholtz-Dickie Vibration System (600lb Table Capacity, 5g’s, to 2000Hz)• Environmental Chambers (Temperature and Humidity Testing) • High Purity Mineral Insulated Cable Fabrication • Leak Testing (Helium Mass Spectrometer with sensitivity to 10-11 scc/sec)• X-ray Capabilities • High Magnification Video Inspection System

Product Development and Analysis Capabilities

We have a wide variety of equipment to support product development efforts and should the need arise, failure and root cause analyses. This equipment includes chambers for accelerated thermal aging and cycling with temperature capabilities to 1700°C, temperature and humidity chambers, high magnification video inspection system and in-house x-ray capabilities to name a few.

We are also located less than 15 minutes from the renowned State University of New York – Buffalo where we routinely access sophisticated analysis tools such as Scanning Electron Microscopy (SEM).

Helium Mass Spectrometer




Laminar Flow Tables – Certified 209E, Class 100

We manufacture a variety of products for the semiconductor industry. Some are required to be manufactured under and packaged for clean room environments. In these cases, we utilize laminar flow tables for assembly and double bag products to allow for a two-step unpacking process as our products move into cleaner environments within the fab prior to installation.

Inside of our specialized semi production unit, we utilize laminar flow tables to assemble those temperature sensors that require this exacting process.

Raw materials used in the construction of these types of thermocouples are only handled with latex-gloved hands. The components are cleaned with semiconductor grade, lint-free isopropyl alcohol wetted wipes.

Laminar Flow Tables

Test and Calibration Lab

Our instruments are tested and calibrated against exacting standards that are traceable to the National Institute of Standards and Testing (NIST) and conform to the latest industry specifications and protocols such as the American Society for Testing and Materials (ASTM).

We have in-house capabilities enabling us to perform NIST traceable calibrations at temperature up to up to 1650°C.

We utilize a state-of-the-art computer controlled data acquisition system that provides computer generated calibration reports, ensuring data accuracy and integrity by eliminating potential human errors in reporting.

Test and Calibration Equipment




Laser Welding Capabilities

We have three welding processes that perform on a daily basis. Two of these processes, Tig and Plasma have been utilized in our production for a number of years.

These welding process produce welding techniques that are faster and better. For example, we can can now precisely form an ungrounded junction on MIMS that are as small as .040” in outside diameter and also form isolated ungrounded junctions on MIMS that are .062” in diameter with 4-wires.

Laser welding also creates a very minimal HAZ (Heat Affected Zone) on thermocouple wires and leaves the junctions with virtually no mechanical stress. This dramatically improves the integrity and life of the products.

Laser Engraving Examples

Conax vs. Competition

Laser Engraving Capabilities

When appropriate, Conax Semiconductor laser engraves serial numbers on each thermocouple connector.

Our competitors routinely provide no serialization, or at best hand-scratch serial numbers onto connectors.

Laser Welding Equipment




Quality Assured Packaging Process

Conax Semiconductor takes all the necessary packaging steps required by the semi industry.

For example, when we package and ship our quartz sheathed thermocouple products, we place all finished thermocouple assemblies inside their unsealed bags into a vacuum chamber. Once evacuated, the chamber is filled with hospital-grade dry-air. This process is then repeated. Following the second drying cycle, the plastic bags are then sealed. Each serial numbered assembly is then placed into a foam padded box for shipment.

Re-sheath and Reclamation Programs for Thermocouples

For customers who wish to reuse the internals of our thermocouple (ex. precious metals), Conax offers a Thermocouple Re-sheath Program that is designed to save money and extend the ROI on your initial purchase.

For those customers who prefer not to reuse their thermocouple internals but would like to save money (and the environment), Conax offers a Precious Metals Reclamation Program. This program provides our customers with credits to be used to offset the cost of new thermocouples.

Same Day Shipment Program

Conax Semiconductor stocks many temperature sensor and sealing gland styles that are ready for same-day shipment. If you need a customized product, Conax will stock these on our shelves as well if you enroll in our Customer Managed Inventory Program (CMI).


Our Website and Literature


Our Focus on the Semiconductor Industry

• Leading supplier of custom designed temperature sensors and compression seal fittings to the Semiconductor Industry for over 30 years.

• Specializing in:– High Temperature Epitaxial thermocouple designs for several

Silicon and Compound Semiconductor process tools– High Temperature Photovoltaic Crystal Growth temperature

sensors, electrode and thermocouple/wire feedthroughs for PV Cell Processing/Coating

– High Temperature Compound Semiconductor Crystal Growth– High Accuracy/High Stability room temperature controls used in

Nanotechnology Research and Development Laboratories– Fiber Optic Feedthroughs used to introduce Fibers into High

Vacuum tools such as EUV Lithography Tools


Partial List of Semiconductor/PV Customers

Allegro Microsystems

Analog Devices

Applied Materials

Axcelis Technologies

Axic

Blue Square Energy

Chartered (Global Foundries)

Fairchild

First Solar

GT Solar

Hemlock Semiconductor

II-VI (eV Products, Endicott Interconnect)

Intel

International Rectifier

IQE-RF

Kayex

Linear

LG Siltron

Maxim Integrated Products

MEMC Electronic Materials

Miasole

Moore Technologies (Moore Semi Parts)

Nanofilm

Nanosolar

Numonyx

On Semiconductor

Osram Opto Semiconductor

Philips Lumileds

Polar Semiconductor

Poongsan Microtec

Power Film

Rainbow Opto

Samsung

Siltronic (Wacker)

SolarWorld

SORAA

SST International

Sumco Phoenix

Sumika

Texas Instruments

TSMC

Veeco Compound Semiconductor

Vishay Siliconix

Willard & Kelsey

Xunlight

Zygo

Resellers selling to unknown customers


Two General Product Groups

• Compression Seal Fittings

• Temperature Sensors


• Conax offers a full line of thermocouples for the 150mm, 200mm and 300mm versions of ASM Epsilon reactor

• Two choices for cost conscious Fabs– Gen 1.0 manufactured using OEM Certified quartz components– Gen 1.1 manufactured from standard-sized quartz tubing with

sensor life 10%-30% longer than OEM standard but at a lower price

• One version for Fabs requiring long life performance– Gen 2.0 designed for 40-160% longer service life over standard

OEM version with no reactor modification needed

Thermocouples for ASM Epsilon® Reactors


Thermocouples for ASM Epsilon® Reactors


One 150/200 ASM Epsilon Customer’s Experience

• Our longer-lasting Gen 2.0 TCs allows our customer to reduce by 50% the number of PMs required solely to change out thermocouples

• Gives them ability to produce more wafers

• Translates into a projected $1 million annual increase in finished product per reactor per year!


Epitaxial Barrel Reactor


Epitaxial Barrel Reactor Calibration TC

Triple-Point Calibration TCs

AMAT P/N Conax P/N

676692 9277-01

676693 9277-02

678582 9277-03

678583 9277-04

678826 9277-05

671097 9277-06

N/A 9277-07

0090-14001 317579-001

N/A 317579-002

90602 316518-001

N/A 316518-003

N/A 318436-001

66534 10-0344-001

Single-Point Calibration TC

1310-01031 C424-1


Centura Epitaxial Reactor Calibration TC

Centura Calibration TCs

AMAT P/N Conax P/N

1150-01015 10-0800-001

1310-01058 10-0800-002

1310-00127 10-0800-003


Ion Implanter TCs

Axcelis Ion Implanter TCs

Axcelis P/N Conax P/N

7435-0011-0001 318441-001

7435-0010-0001 318441-002

? 10-1160-001

? 10-1160-002


Horizontal & VerticalDiffusion/Oxidation Furnaces


Profile TC forHorizontal Diffusion/Oxidation Furnaces


Profile TC forHorizontal Diffusion/Oxidation Furnaces


Profile TC forVertical Diffusion/Oxidation Furnaces


Single and Dual Spike TCs forVertical Diffusion/Oxidation Furnaces


Dual, small diameter TC with Conax machined VCR Seal for high vacuum

application


Dual, small diameter TC with Conax machined KF Flange for high vacuum

application


Bare Junction C-type TC for High

Temp. High

Vacuum


Mini, High Temperature, Bare Junction TC for Fast Response


Heavy Duty Dual Ceramic/Metal Sheath,Dual Sheath Seal, ANSI Flange


Heavy Duty Dual Ceramic/Metal Sheath,Dual Sheath Seal, ANSI Flange


Ceramic Sheath, Dual Seal on Sheath and Bare Wires with Union for fast removal


Bare Junction TC with Quartz Sheath for Vacuum environment with Metal Mounting Bracket


Dual High-Temp TC with Dual Sheath/Wire Seal and Integrated Vacuum Flange


Copper Wire Feedthroughfor HAST IC Testing


Thermocouple Wire Feedthroughfor HAST IC Testing, Chamber Validation


Various Small and Large Diameter Wire Feedthroughs, some transitioning from Solid to

Stranded Wires for Increased Flexibility


Multi-mode, Multi-axis Fiber OpticVacuum Feedthrough


RF Coaxial, Multi-mode, Single-ModeFiber Optic Vacuum Feedthrough

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