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Page 1: 0123 01233456789:456789: 3;8?@A&B’CDEsemicon.jeita.or.jp/STRJ/STRJ/2002/4J4.pdf · Parylene-F ô-C:F: [CF2-(C6H4 ... CMP +™fi PT 8 nm 60 nm 200 nm ... HT ‚RT Cu Cu

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Page 4: 0123 01233456789:456789: 3;8?@A&B’CDEsemicon.jeita.or.jp/STRJ/STRJ/2002/4J4.pdf · Parylene-F ô-C:F: [CF2-(C6H4 ... CMP +™fi PT 8 nm 60 nm 200 nm ... HT ‚RT Cu Cu

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Page 6: 0123 01233456789:456789: 3;8?@A&B’CDEsemicon.jeita.or.jp/STRJ/STRJ/2002/4J4.pdf · Parylene-F ô-C:F: [CF2-(C6H4 ... CMP +™fi PT 8 nm 60 nm 200 nm ... HT ‚RT Cu Cu

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