EISSRev 01/01-06

www.suss.com

Enhanced Image Storage System

USER MANUAL

2

Table of Contents :

1.0 Introduction

2.0 Basic EISS Operation

2.1 Features and Benefit of EISS

2.2 Technical Specification of EISS System

2.3 Power Up

3.0 Visualization

3.1 Image Control Status, Display Modes of

Camera Images

3.2 Toolbar

3.3 Image Settings dialog

3.4 Enhanced Imaging

3.5 Open / Save an Image

4.0 Method of Operation with EISS

5.0 Error Handling ( Common Error )

6.0 Service Functions

6.1 Block diagram EISS

7.0 Appendix

7.1 Init File for EISS

7.2 Spare Parts

7.3 Circuit Diagram

5

5

6

6

7

8

10

12

13

14

14

17

18

18

19

20

20

21

22

3

Chapter Page

illustration 1 : EISS Functions

illustration 2 : EISS Start Screen

illustration 3 : Menu Bar

illustration 4 : Live Image

illustration 5 : Image Control Bar

illustration 6 : Views

illustration 7 : Image Settings

illustration 8 : Open Dialog

illustration 9 : Save Dialog

illustration 10: Remarks

illustration 11: Overview EISS, Cable Wiring

Illustration Contents Page

5

7

8

8

9

9

13

15

16

16

19

4

1.0 Introduction

The Enhanced Image Storage System (EISS) is an electronic visuali-zation unit used for comfortable, reliable and precise aligning of maskand wafer. With its help, the microscope images can be displayed onthe monitor.The EISS system is the result of the uncompromising developmentand years of experience using the digital video control unit (DVCU). With the EISS system all images can be stored and loaded onto andfrom the hard or floppy disks. For precise wafer aligning the maskpattern is stored as the background image (grab image function).Next, the automatically focused live image of the wafer can be alig-ned to the stored mask image. To keep the system maintenance-free, it is not planned or recommen-ded to install other programs on the PC. A network card is included for network integration.

2.0 Basic EISS Operation

The operation refers to the Microsoft Windows rules.The program is for the most part self explaining. The operation is con-trolled by trackball and PC keyboard. The PC keyboard is necessaryfor image storage only. All functions can be enabled with the trackball (integrated into the machine keyboard ) and the menu bar. A double-click on the live image automatically opens the image settings dialog.

illustration 1 : EISS Functions

5

R

6 2.1 Features and Benefit of EISS

SXGA resolution (1280x1024)no flickering electronic contrast and brightness adjustmentadjustment of brightness ratio between stored and live image from 0% to 100% either way (improves visibility of superimposed images)contrast enhancement integration function to increase black and white ratio especially for pattern with very pure contrastimage storage on hard or floppy diskfileserver Data transfer via networkelectronic magnification 1x, 2x, 4x additional to the optical magnificationtrackball control integrated into aligner keyboard (no Windows 2000 knowledge required)17´´ CRT monitor on MA6, 16´´ TFT-flatscreen on MA8PC with operating system Windows 2000

2.2 Technical Specification of EISS System

EISS System :

Size : Height : 216 mm (8.5"): Width : 575 mm (23.6"): Depth : 650 mm (25.6")

Weight : 22kg (48.5 lbs)

Operating System : Windows 2000 Multilanguage versionScreen Resolution : 1280x1024 pixelMains Input : 230V +/- 10% 50/60Hz,

Plug located at machine back panel

Please be advised not to inst all other sof tware nor programs!

2.3 Power Up

The EISS system (PC and the monitor) is connected with a threefoldextension shock proof plug (behind main switch) coming from theMA6/BA6 back panel. Do not connect the PC to another power source.

On power up of the PC the EISS program starts automatically. The startup dialog (ill. 2) enables an optional software update from flop-py disk. Typically this function will be skipped, the EISS applicationstarts automatically without clicking ok after a 3 second pause. The last image settings of contrast and illumination will be reloaded.

illustration 2 : EISS Start Screen

Never switch off PC while booting !!!

Do not plug or unplug connecting cables during operation !!!

The EISS PC should be switched off with the shutdown command under File in the menu bar.

A power down with main switch starts an automatic shutdown sequen-ce by the internal uninteruptible power supply (UPS).

The UPS gives an acoustic signal (permanent beeping). After a savethe message "now it is safe to turn off your PC" is displayed on themonitor. The PC can be switched off now. Please find the On/Offswitch behind the PC door. If not, the UPS will deactivate the PC andMonitor after 2-3 min automatically.

The UPS is not considered nor designed to run a auto shutdownsequence whenever the aligner is switched off. It is designed to main-tain a constant power to the PC or cover sudden power fluctuation inrange of seconds.The UPS is active when power supply < 180VThe complete UPS battery recharge needs about 8 hours time.

7

8 3.0 Visualization

The EISS application is programmed in a multi-language version.Available languages are English, German and France. The preselec-tion is factory set and can be changed by Suss MicroTec service per-sonnel only. The default screen resolution is 1280x1024 pixel on 17´´ CRT moni-tor or 16´´ TFT flatscreen.

The setting of time zone, time and date is only possible over theaccessible operation system (BIOS password : EISS).

The EISS screen is divided in several sections

Title-and menu bar, tool- or symbol bar (icon's),

illustration 3 : Menu Bar

Live-/overlay image

illustration 4 : Live Image

Image control bar of the machine and the help status bar

illustration 5 : Image Control Bar

The tool-, status- and image control bar can be hidden and fade in and out

illustration 6 : View

9

3.1 Image Control Status, Display Modes of

Camera Images

The image control status characterizes the machine condition repres-ented by icons.

TSA microscope active

TSA microscope active

Magnification Low, large field of view

Magnification High, small field of view

Live image

Grabbed image

10

11Representation of the active camera images in the different display modes of the machine

Single field left

Single field right

Splitfield active

Left Mode

Right Mode

Split Mode

Trunc Mode

Camera field of view

field of view 1x

field of view 2x

field of view 4x

* Trunc Mode only with resolution 800x600

12 3.2 Toolbar

Available functions of the toolbar.

open file

automatic safe

save as

trunc

magnification x1

magnification x2

magnification x4

contrast and illumination dialog

Enhanced Image processing

Help

133.3 Image Settings Dialog

When working with the EISS make sure all sliders are in middle posi-tion. First use all the hardware adjustment possibilities like iris, illumi-nation- and focusing potentiometers for best image quality. Then opti-mize with available EISS functions if necessary.Again, the software functions are for fine adjustment and image opti-mizing only.

The image settings dialog contains three functions:

Illumination slider [0 (max) - 1000 (min)]. Default is middle position (500)Contrast slider [0 (max) - 1000 (min)]. Default is middle position (500)Alpha slider [0 (max) - 1000 (min)]. Default is middle position (500)

The histogram graph gives information about the intensity distributionon the video input. An example is shown in illustration 7. Part of thatimage is too dark (graph to far to the left) and should be set with theillumination potentiometer to the middle of histogram graph for thebest results.

Live/Grab Alpha proportion:Live and stored patterns can be balanced out. To hide one orthe other pattern move the slider completely to Live (1000) or Grab (0). The slider is enabled only when an image is stored with the grab image key on the machine keyboard.

Reset:Resets the image setting to the last saved settings.

Close or X :Closes the dialog window and saves the settings.

The PC shutdown saves the adjusted image settings automatically.These will be loaded after a restart.

Depending on the machine configuration in means of TSA or BSAmicroscopes, the image setting dialog window will change its appea-rance accordingly.

illustration 7 : Image Settings

14 3.4 Enhanced Imaging

With the icon Enhanced imaging a computer based illumina-tion- and contrast optimizing is performed. Due to its large data pro-cessing capability the image refreshing rate can be shortened.

Please be aware that this function is of use only for substrates withpoor contrast.

3.5 Open / Save an Image

A click on one of the following icons opens the dialog for loading andsaving.

To load an image click on icon open.

To save an image two icons are available:

save as

autosave

Section D:\ of the harddisk is completely dedicated to image storage.

To create a specific directory structure the button "create folder" canbe used.

The floppy disk A:\ is available for direct Data exchange of a limitednumber of images. For a larger amount of Data transfer it is recom-mend to have a network connection.Please contact your network administrator.

illustration 8 : Open Dialog

To work with the dialog standard Windows functions are available:

Copy:copies a single file or marked blockCut:cuts a single file or marked blockPaste:pastes a single file or marked blockRename:renames a single file Delete:deletes a single file or directory, or marked blockCreate folder:creates a new folderActualize:actualizes/refreshes dialog windowAutosave path:sets autosave path in particular directory and set to autosave0.bmp Close:closes the dialogOpen/Save:opens / saves the selected file

15

illustration 9 : Save Dialog

An example is shown in illustration 9, the autosave path isD:\Oper_RJS\KW26\Autosave0.bmp.

The saved image is a bitmap file ( suffix .bmp, 300Kbyte).Additionally a text file (suffix .txt ) with remark information is createdand stored under the same name. All Data with its image and text information, the illumination-, contrast- and alpha values, as well as the machine specific statusicons are stored in the background.

After clicking the save button, a dialog window for an image remarkappears automatically. The operator can enter specific information.However it is not mandatory to add a remark.

illustration 10 : Remarks

16

174.0 Method of Operation with EISS

The method of EISS operation strongly depends on the variety ofprocesses which can run on the Aligner.

After starting the aligner and the EISS application please make allnecessary adjustments with main function keys.

Select TSA or BSAAdjust illuminationAdjust contrastFocus the images with the focus potentiometersCheck the image settings dialog ( default values )Optimize with the image settings dialog

Temporary image storage with the grab image key from the MA6/BA6 to superimpose mask and wafer pattern possible

Image and data storage on HDD of floppy possible for e.g. process flow documentation

Note :If an image is stored temporary with the grab image key, it is notrecommended to change from TSA to BSA and vice versa. In thiscase the Suss MicroTec Logo is displayed. Reset the previous condition to return to the stored image.

18 5.0 Error Handling ( Common Error )

Item Error / trouble Possible cause / elimination

1 PC does not start Main power disconnectedAfter UPS was active, check power supply condition Main power switch turned offTurn on On/Off switch of PC power supply

2 Dark monitor Turn on EISS PC Turn on monitorCheck VGA connection cableMachine is not turned onCheck all cable connections

3 Grey/white image Check illumination knobs TSA/BSA on front panel and decrease if necessaryCheck image settings for contrast and illumination and decrease if necessary

4 Dark image Check illumination knobs TSA/BSA on front panel and increase if necessary.Check image settings for contrast and illumination and increase if necessary

5 No stored image visible No image stored, check green LED with grab image button on machine keyboard and grab image icon on monitorCenter alpha slider at image setting dialog

6 No signal change of the Data exchange cable (PN: 181725) is missing or not image contol bar connected (SubD-plug: MA6/BA6 real panel/video -

EISS PC: SCSI-connector)

7 PC beeps (acoustic warning) UPS supplies PC power PC shuts downCheck power supply condition and see item 1

8 Cannot start video Camera configuration of the EISS init file does not correlate to connected cameras; e.g. because BSAwas upgraded. Call SUSS service dept.

6.0 Service FunctionsTo guarantee best image quality, please set CCD camera to gain mode manual (M) on the back of the camera itself. Then adjust the sensitivity with the potentiometer right next to it.

6.1 Block Diagram EISS

illustration 11 : Overview EISS, Cable Wiring

Explanation : Connections and Connectors

The PC main power connection is made over the regular power sup-ply of the Aligner

Cable connections Data exchange cable:connect the SCSI plug to the 15pol. SubD plug from the machinecamera cable:connect to the adapter cable framegrabbersupply cable:connect 9pol. SubD plug to distribution board to +24Vfocus control card:insert in electronic rack Slot C11, ( connect SubD25pol plug to the hirose 12pol camera focus line )PS/2 cable keyboard:connect to PS/2 PC keyboardPS/2 cable trackball:connect to PS/2 PC mouseUSV connection cable:connect to COM2 port

19

7.0 Appendix

7.1 Init File for EISS

[AutoSave]AutoSave Start Num=0 start number by autosaveAutoSave Path=D:\ autopath partition D:\

[Cameras]TSA Camera Num=2 [0, default 1, 2]

numbers of cameras

BSA Camera Num=2 [0, 1, default 2] number of cameras

GrabBitmapAtStartup="C:\EVS2\Please Grab Image.bmp" name of Bitmap image Installed Card (c -> Cognex, d -> Data Translation)=d [c, d] = install framegrabber card type

[Window Size]Resolution=1280 [800, default 1280]

/* storage of all necessary image settings under a special profile number

[Profile NR 3]Contrast=128Brightness=128Alpha=128[Profile NR 0]Contrast=128Brightness=128Alpha=128[Profile NR 1]Contrast=128Brightness=128Alpha=128[Profile NR 4]Contrast=128Brightness=128Alpha=128[Profile NR 5]Contrast=128Brightness=128Alpha=128[Profile NR 2]Contrast=128Brightness=128Alpha=128

20

7.2 Spare Parts

Spare Part Name Part Number

EISS PC complete 181722

19´´ housing 181721

Framegrabber DT3132 181718

I/O card Advantech 181720

17 ´´ CRT monitor (1280x1024) 181716

16´´ LCD monitor (1280x1024) 181717

Trackball 181652

6 channel focus control card 181723

Adapter cable framegrabber 181719

Adapter cable focus controller 181729

Data exchange cable MA6/BA6-EISS 181725

Power cable +24V 181726

21

7.3 Circuit Diagram

Focus control microscope adapter

EISS power cable + 24 V

EISS data exchange cable MA6/BA6

Adapter cable frame grabber

6 channel focus control card lower

6 channel focus control card upper

22

23

25

27

29

30

31

SUSS MicroTec Worldwide

ASIA

SUSS MicroTec KK (Japan)GITC 1-18-2, Hakusan, Midori-kuYokohama, Kanagawa, Japan 226-0006Phone (+81)-45-931-5600Fax (+81)-45-931-5601

SUSS MicroTec (Shanghai) Co.,Ltd.580 Nanjing W.RdNanzheng Building Room 606200041 Shanghai PRCPhone (+86) 21-52340432Fax (+86) 21-52340430

SUSS MicroTec (Taiwan) Co., Ltd.8F l11 l No. 81 l Shui-Lee RoadHsin-Chu l 300 l TaiwanPhone (+886)-(3)-5169098Fax (+886)-(3)-5169262

SUSS MicroTec Co., LTD(South and Northeast Asia)3388/92-93 I 25th Floor l Sirinrat BuildingRama IV Road l KlongtoeyBangkok 10110 l ThailandPhone (+66)-(0)-2350 6038Fax (+66)-(0)-2633 5728

EUROPE

SUSS MicroTec Ltd.Hogwood Ind. Estate23, Ivanhoe RoadFinchampstead, WokinghamBerkshire RG40 4QQ l EnglandPhone (+44)-(0) 1189-732144Fax (+44)-(0) 1189-734395

www.suss.com

SUSS MicroTec S.A.Avenue des ColombièresF-74490 Saint Jeoire l FrancePhone (+33)-(0) 4 50 35 83 92Fax (+33)-(0) 4 50 35 88 01

SUSS MicroTec Test Systems GmbHSüss-Strasse 1D-01561 Sacka/Dresden l GermanyPhone (+49)-(0) 35240-73-0Fax (+49)-(0) 35240-73-700

SUSS MicroTec Lithography GmbHSchleissheimer Strasse 90D-85748 Garching/München l GermanyPhone (+49)-(0) 89/3 20 07-0Fax (+49)-(0) 89/3 20 07-162

NORTH AMERICA

SUSS MicroTec Inc.Western Regional Sales Office8240 So. Kyrene Road Suite 101Tempe, AZ 85284-2117 l USAPhone (+1) (480) 557-9370Fax (+1) (480) 557-9371

SUSS MicroTec Inc.228 Suss DriveWaterbury Center, VT 05677 l USAPhone (+1) (802) 244-5181Fax (+1) (802) 244-5103

Cop

yrig

ht b

y S

US

S M

icro

Tec

2005

Thi

s m

anua

l is

subj

ect t

o re

view

and

/or r

evis

ion