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05 Rotary Stages - pmsupplies.com.cnpmsupplies.com.cn/document/adrt.pdf · Aerotech Ltd., Jupiter...

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Rotary Stages ADRT Series WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720 www.aerotech.com ADRT Series Mechanical-Bearing Rotary Stage Aerotech’s ADRT series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from indexing to high-speed laser machining to precision wafer inspection. Superior Mechanical Design Dual large-diameter bearings are used to maximize performance with respect to wobble, moment stiffness, and repeatability. The large diameter bearings permit large payloads without compromising performance. Brushless Direct Drive To maximize positioning performance, the ADRT series utilizes Aerotech’s S-series brushless, slotless motor. This motor has all the advantages of a brushless direct-drive motor – no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. With its low inherent inertia and optimized motor design, the ADRT is capable of speeds and accelerations that are significantly higher than other competing products. These stages have a lower height profile compared to competing products within given torque ranges. The low inertia and zero backlash make the ADRT the ideal solution for applications requiring frequent directional changes. High torque output, direct-drive brushless servomotor Cog-free design for outstanding velocity stability Outstanding wobble and runout Direct coupled, high-accuracy rotary encoder Large diameter clear aperture Accurate Positioning Line counts range from 3600 to 5400 lines per revolution. When coupled with Aerotech’s MXH series resolution multipliers, resolutions can be as fine as 0.12 arc sec. The motor and high-performance rotary encoder are directly coupled to a common shaft. The absence of gear trains and mechanical couplings means no position errors caused by hysteresis, windup, or backlash. Flexible Configurations Options include a high-precision bearing for improved accuracy, smoothness, and run-out performance. Slip rings and rotary unions are available to ease integration of custom tooling, and a holding brake is available to limit movement of the stage during large impulse loads or when power is removed from the motor. The ADRT is the only rotary table available with integrated “T-slots.” These slots can be used to mount the table horizontally or to attach custom application specific fixtures. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete integrated package.
Transcript

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

ADRT Series Mechanical-Bearing Rotary Stage

Aerotech’s ADRT series direct-drive rotary stages providesuperior angular positioning and velocity control.Applications range from indexing to high-speed lasermachining to precision wafer inspection.

Superior Mechanical DesignDual large-diameter bearings are used to maximizeperformance with respect to wobble, moment stiffness, andrepeatability. The large diameter bearings permit largepayloads without compromising performance.

Brushless Direct DriveTo maximize positioning performance, the ADRT seriesutilizes Aerotech’s S-series brushless, slotless motor. Thismotor has all the advantages of a brushless direct-drivemotor – no brushes to wear, no gear trains to maintain, andhigh acceleration and high speeds. Since it is a slotless,ironless design, there is zero cogging, meaning that there isabsolutely no torque ripple.

With its low inherent inertia and optimized motor design,the ADRT is capable of speeds and accelerations that aresignificantly higher than other competing products. Thesestages have a lower height profile compared to competingproducts within given torque ranges.

The low inertia and zero backlash make the ADRT the idealsolution for applications requiring frequent directionalchanges.

High torque output, direct-drive brushlessservomotor

Cog-free design for outstanding velocitystability

Outstanding wobble and runout

Direct coupled, high-accuracy rotary encoder

Large diameter clear aperture

Accurate PositioningLine counts range from 3600 to 5400 lines per revolution.When coupled with Aerotech’s MXH series resolutionmultipliers, resolutions can be as fine as 0.12 arc sec.

The motor and high-performance rotary encoder aredirectly coupled to a common shaft. The absence of geartrains and mechanical couplings means no position errorscaused by hysteresis, windup, or backlash.

Flexible ConfigurationsOptions include a high-precision bearing for improvedaccuracy, smoothness, and run-out performance. Slip ringsand rotary unions are available to ease integration ofcustom tooling, and a holding brake is available to limitmovement of the stage during large impulse loads or whenpower is removed from the motor.

The ADRT is the only rotary table available with integrated“T-slots.” These slots can be used to mount the tablehorizontally or to attach custom application specificfixtures.

Aerotech manufactures a wide range of servo amplifiersand advanced controllers to provide a complete integratedpackage.

ADRT

Ser

ies

Rota

ry S

tage

s

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series SPECIFICATIONS

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noitoMrorrEtliT )cescra01±/01±(darµ5.84±/5.84±

thgieH mm58 mm531 mm511 mm531 mm081

erutrepA mm31 mm05

noituloseR )cescra81-81.0(darµ3.78-378.0

daoLlaidaR )3( gk01 gk52

daoLlaixA gk51 gk03

deepSdetaR )P-(mpr0051;)S-(mpr0001 mpr006

aitrenI m-gk82000.0 2 m-gk76000.0 2 m-gk973300.0 2 m-gk859400.0 2 m-gk811800.0 2

ssaM gk3.2 gk9.2 gk3.5 gk9.6 gk2.01

hsiniFelbaT taocdraH

egatS ezidonAkcalB

:etoN.slortnochcetoreAdnanoitarbilacseriuqerycaruccaP-.1

.snoitacilppadradnats-nonrosixa-itlumrofyrotcaftlusnoC.tnednepedtniopkrowdnadaolyapsismetsyssixa-itlumfoecnamrofreP.smetsyssixa-elgnisroferasnoitacificepS.2.snoitacilppaelcycytudwolro/dnadeepswolrofelbissopsdaoltnemomregraL.deilppadaollaixamumixamhtiwmpr052tanoitatorsuounitnocraey5nodesabdaoltnemoM.3

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seireSTRDA 551-002-TRDA 581-002-TRDA 061-062-TRDA 081-062-TRDAnoitpOgniraeB )dradnatS(S-/)noisicerP(P-

llatS,tnerruCsuounitnoCA kp

1.5 9.4 9.5 8.5

A smr6.3 5.3 2.4 1.4

epyTrotoM A-96-081-S A-49-081-S A-36-042-S A-38-042-S

egatloVsuB CDV023otpU

ycaruccA )1( )cescra03±/5±(darµ541±/2.42±

ytilibataepeR )cescra6±/3±(darµ1.92±/5.41±

noitoMrorrElaixA mµ6±/03± mµ8±/04± mµ8±/04±

noitoMrorrElaidaR )2( mµ6±/03± mµ8±/04± mµ8±/04±

noitoMrorrEtliT )cescra51±/51±(darµ7.27±/7.27±

thgieH mm551 mm061

erutrepA mm57 mm001

noituloseR )cescra21-21.0(darµ2.85-285.0

daoLlaidaR )3( gk08 gk011

daoLlaixA gk041 gk071

deepSdetaR mpr005 mpr573

aitrenI m-gk199020.0 2 m-gk666720.0 2 m-gk884660.0 2 m-gk66580.0 2

ssaM gk4.31 gk7.61 gk4.52 gk6.03

hsiniFelbaT taocdraH

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ADRT Series SPECIFICATIONS

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

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Axial and Radial Cantilevered Load Capability (ADRT-150-180)

ADRT Series SPECIFICATIONSADRT Series SPECIFICATIONS

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WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

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Axial and Radial Cantilevered Load Capability (ADRT-200-185)

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Axial and Radial Cantilevered Load Capability (ADRT-260-160)

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ADRT Series SPECIFICATIONSADRT Series SPECIFICATIONS

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

ADRT Series DIMENSIONS

ADRT-100

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WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

ADRT-150

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

ADRT Series DIMENSIONS

ADRT-150 Limits/Hardstops

CONFIGURATION CONFIGURATION

-LI+-5 +/- 5 -HS+-10 +/- 10

-LI+-10 +/- 10 -HS+-15 +/- 15

-LI+-20 +/- 20 -HS+-25 +/- 25

-LI+-30 +/- 30 -HS+-35 +/- 35

-LI+-40 +/- 40 -HS+-45 +/- 45

-LI+-45 +/- 45 -HS+-50 +/- 50

-LI+-50 +/- 50 -HS+-55 +/- 55

-LI+-60 +/- 60 -HS+-65 +/- 65

-LI+-70 +/- 70 -HS+-75 +/- 75

-LI+-80 +/- 80 -HS+-85 +/- 85

-LI+-90 +/- 90 -HS+-95 +/- 95

-LI+-100 +/- 100 -HS+-105 +/- 105

-LI+-110 +/- 110 -HS+-115 +/- 115

-LI+-120 +/- 120 -HS+-125 +/- 125

-LI+-130 +/- 130 -HS+-135 +/- 135

ADRT-150 LIMIT OPTION: AVAILABLE TRAVELS

ANGLE

LIMITS HARDSTOPS

ANGLE

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WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series DIMENSIONS

ADRT-200

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

ADRT Series DIMENSIONS

ADRT-200 Limits/Hardstops

CONFIGURATION CONFIGURATION

-LI+-30 +/- 30 -HS+-35 +/- 35

-LI+-20 +/- 20 -HS+-25 +/- 25

-LI+-10 +/- 10 -HS+-15 +/- 15

-LI+-5 +/- 5 -HS+-10 +/- 10

-LI+-40 +/- 40 -HS+-45 +/- 45

-LI+-45 +/- 45 -HS+-50 +/- 50

-LI+-50 +/- 50 -HS+-55 +/- 55

-LI+-60 +/- 60 -HS+-65 +/- 65

-LI+-70 +/- 70 -HS+-75 +/- 75

-LI+-80 +/- 80 -HS+-85 +/- 85

-LI+-90 +/- 90 -HS+-95 +/- 95

-LI+-100 +/- 100 -HS+-105 +/- 105

-LI+-110 +/- 110 -HS+-115 +/- 115

-LI+-120 +/- 120 -HS+-125 +/- 125

-LI+-130 +/- 130 -HS+-135 +/- 135

-LI+-135 +/- 135 -HS+-140 +/- 140

-LI+-140 +/- 140 -HS+-145 +/- 145

-LI+-150 +/- 150 -HS+-155 +/- 155

ADRT-200 LIMIT OPTION: AVAILABLE TRAVELS

LIMITS HARDSTOPS

ANGLE ANGLE

ADRT

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Rota

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WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT-260

ADRT Series DIMENSIONS

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

ADRT Series DIMENSIONS

ADRT-260 Limits/Hardstops

LIMITS HARDSTOPS

CONFIGURATION CONFIGURATION

-LI+-5 +/- 5 -HS+-10 +/- 10

-LI+-10 +/- 10 -HS+-15 +/- 15

-LI+-20 +/- 20 -HS+-25 +/- 25

-LI+-30 +/- 30 -HS+-35 +/- 35

-LI+-40 +/- 40 -HS+-45 +/- 45

-LI+-45 +/- 45 -HS+-50 +/- 50

-LI+-50 +/- 50 -HS+-55 +/- 55

-LI+-60 +/- 60 -HS+-65 +/- 65

-LI+-70 +/- 70 -HS+-75 +/- 75

-LI+-80 +/- 80 -HS+-85 +/- 85

-LI+-90 +/- 90 -HS+-95 +/- 95

-LI+-100 +/- 100 -HS+-105 +/- 105

-LI+-110 +/- 110 -HS+-115 +/- 115

-LI+-120 +/- 120 -HS+-125 +/- 125

-LI+-130 +/- 130 -HS+-135 +/- 135

-LI+-135 +/- 135 -HS+-140 +/- 140

-LI+-140 +/- 140 -HS+-145 +/- 145

-LI+-150 +/- 150 -HS+-155 +/- 155

ADRT-260 LIMIT OPTION: AVAILABLE TRAVELS

ANGLE ANGLE

ADRT

Ser

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Rota

ry S

tage

s

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

www.aerotech.com

ADRT Series Rotary Stage ADRT-100-85 Direct-drive rotary table with 13 mm clear aperture and 0.4 N-m continuous torqueADRT-100-135 Direct-drive rotary table with 13 mm clear aperture and 1.96 N-m continuous torqueADRT-150-115 Direct-drive rotary table with 50 mm clear aperture and 3.6 N-m continuous torqueADRT-150-135 Direct-drive rotary table with 50 mm clear aperture and 6.5 N-m continuous torqueADRT-150-180 Direct-drive rotary table with 50 mm clear aperture and 11.4 N-m continuous torqueADRT-200-155 Direct-drive rotary table with 75 mm clear aperture and 16.9 N-m continuous torqueADRT-200-185 Direct-drive rotary table with 75 mm clear aperture and 24.4 N-m continuous torqueADRT-260-160 Direct-drive rotary table with 100 mm clear aperture and 30.4 N-m continuous torqueADRT-260-180 Direct-drive rotary table with 100 mm clear aperture and 44.5 N-m continuous torque

Stage Bearing Options-S Dual standard-grade bearings-P Dual precision-grade bearings

Shaft Configuration*-50mm 50 mm clear aperture-35mm 35 mm clear aperture*Note: Required for ADRT-150-xxx only

Position Transducer-AS Standard feedback device; 1 Vpp sine wave output; 240 arc-sec resolution on ADRT-200/260; 360 arc-sec

resolution on ADRT-150; final resolution multiplier dependent-X5 Square wave digital output; 12 arc-sec resolution on ADRT-200/260 and 18 arc-sec resolution on ADRT-150-X10 Square wave digital output; 6 arc-sec resolution on ADRT-200/260 and 9 arc-sec resolution on ADRT-150-X25 Square wave digital output; 2.4 arc-sec resolution on ADRT-200/260 and 3.6 arc-sec resolution on ADRT-150-X50 Square wave digital output; 1.2 arc-sec resolution on ADRT-200/260 and 1.8 arc-sec resolution on ADRT-150Note: Digital output encoder signals are synthesized with a 16 MHz clock. Care must be taken to ensure that the encoder sample rate on the controller is at least 16 MHz or higher. Slower clock rates are available on request.

Brake Options*-NO No brake-BK Holding brake*Note: Not available on ADRT-100

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ADRT Series ORDERING INFORMATION

Rotary StagesADRT Series

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720www.aerotech.com

Limits-UNLIMITED Continuous Rotation-LI±x Normally-closed limits at ±x degrees, where x=5/10/20/30/40/45/50/60/70/80/90/100/110/120/130-HS±x Hardstop end of travel at ±x degrees, where x=10/15/25/35/45/50/55/65/75/85/95/105/115/125/135-SRCE Current sourcing limits-HCW Home limit uses clockwise limit (counter clockwise default)-NOP Normally open limit (normally closed default)-24V 24 VDC rated limits

Options-PLOTS Stage accuracy and repeatability documentation; included with -P; optional with -S-HPD 4-pin D-style motor power connector with 25-pin D-style feedback connector. Stage-mounted connectors on

ADRT-150-xxx, ADRT-200-xxx, and ADRT-260-xxx. Strain-relieved 300 mm pigtail cable connection onADRT-100-xxx

-D25 25-pin D-style motor power connector with 25-pin D-style feedback connector. Stage-mounted connectors onADRT-150-xxx, ADRT-200-xxx, and ADRT-260-xxx. Strain-relieved 300 mm pigtail cable connection onADRT-100-xxx

-S Rear shaft seal on ADRT-100-xxx-P Air-purge fitting

ADRT Series ORDERING INFORMATION


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