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1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing Research Center Western Michigan University NAMRC 35 May 22, 2007
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Page 1: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

1

Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT)

of silicon carbide (SiC)

John Patten, Director Manufacturing Research Center

Western Michigan University

NAMRC 35 May 22, 2007

Page 2: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

2

Agenda

• Introduction to Silicon Carbide (SiC)• Background of HPPT Research• Background of ceramic simulations• 2-D orthogonal machining simulations

– Simulations of edge turning– Simulation of plunge cutting– Simulations of fly-cutting

• 3-D scratching simulations– Silicon Carbide

• Summary of results• Conclusions and future work

Page 3: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

3

Silicon Carbide – Advanced Engineering Ceramic

• Types of SiC • Properties and applications of SiC• Problems in manufacturing

Page 4: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Research background – HPPT of ceramics

• Define HPPT• HPPT or amorphization of ceramics is responsible for the

ductile behavior of these brittle materials.• HPPT has been identified in Si and Ge, and other materials.• Ductile material removal has been achieved in SiC under

nanometer cutting conditions and phase transformation of chips has been recorded.

• Some factors contributing to ductile material removal at room temperature

– machining depth < tc

– negative rake angle tools with small clearance– sharp edge radius

Page 5: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Developments in simulations of ceramic machining

• Introduce AdvantEdge• Developments in AdvantEdge

– 2-D simulations of Silicon Carbide in the nanometer regime– 2-D simulations of Silicon Carbide using DP model– Newly developed 3-D scratching simulation capability

• Other developments outside AdvantEdge– FEA simulation of polycrystalline alpha-SiC– MD simulations of nanoindentation in SiC

Page 6: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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2-D orthogonal machining simulations of SiC

• Three types of experiments were simulated– Edge turning of SiC– Plunge cutting of SiC– Fly-cutting of SiC

Visualization of 3-D turning operation in 2-D

Page 7: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Typical setup for 2-D orthogonal simulations

Parameters Geometry

Tool

Cutting edge radius, r

Rake angle, α

Clearance angle, β

Workp

iece

Workpiece length, l

Workpiece height, h

Pro

cess

Depth of Cut, feed

Length of Cut, loc

Cutting Speed, v

Width of cut

Coefficient of friction

Page 8: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Material model for simulations of SiC

0..3 12 IJ

The DP yield criterion is given by

κ is given by

ct

ct

..2

J2 is given by

213

232

2212 6

1 J

For a uniaxial state of stress

11 IThus J2 is given by

3

21

2

J

This gives κ of 16.25 GPa and α of -0.375 .

Here, σt = H/2.2 and σc = H

For H=26 GPa, κ becomes 16.25 GPa.

Page 9: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Simulations of edge turning

Page 10: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Edge turning simulations of SiC

Variable Definition Value Workpiece-Tool geometry

tool cutting edge radius 50 nm

tool rake angle 0º & -45º

tool clearance angle 5º & 50º

In-feed/uncut chip thickness(50, 100, 250, 300, 500)

nm

work piece velocity 0.05 m/s

Width of cut 250 µm

Page 11: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Simulation with achieved depth of approx. 220 nm

Note the deflection of workpiece material

Page 12: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from edge turning simulations, 0º rake, 5º clearance

0.45 0.30

1.001.25

3.65

6.00

0.00

2.00

4.00

6.00

100 300 500

Depth (nm)

Cu

ttin

g F

orc

e (N

)

Experiment Simulation

Page 13: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from edge turning simulations, 0º rake, 5º clearance

0.611.00

1.90

0.90

1.75

2.50

0.00

2.00

4.00

6.00

100 300 500

Depth (nm)

Th

rust

Fo

rce

(N)

Experiment Simulation

Page 14: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from edge turning simulations, -45º rake, 5º clearance

1.52.32.3

10.2

0.0

2.0

4.0

6.0

8.0

10.0

12.0

50 250

Depth (nm)

Cu

ttin

g F

orc

e (N

)

Experimental

Simulation

Page 15: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from edge turning simulations, -45º rake, 5º clearance

5.0

9.0

4.8

19.1

0.0

4.0

8.0

12.0

16.0

20.0

50 250

Depth (nm)

Th

rust

Fo

rce

(N)

Experimental

Simulation

Page 16: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

16

Simulations of plunge cutting experiments

Page 17: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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2-D plunge cutting simulations of SiC

• Using a flat nose tool, machining was performed across the wall thickness of a tube of polycrystalline SiC.

Page 18: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Parameters for plunge-cutting simulations of SiC

Parameters Value Unit Geometry

Tool

Cutting edge radius, r 50.0 nm

Rake angle, α -45.0 deg

Clearance angle, β 11 & 0 deg

Workp

iece

& P

roce

ss

Workpiece length, l 3.0 µm

Workpiece height, h 1.0 µm

(Actual ) Depth of Cut, doc

24.0 nm

Width of cut 3.0 mm

Length of Cut, loc 2.0 µm

Cutting Speed, v 5.0 m/s

coefficient of friction, COF 0.1 -

Page 19: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Simulation with achieved depth of 25 nm

Note the deflection of workpiece material

Page 20: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from simulations of SiC

Page 21: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Flycutting experiment

Page 22: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

22

Flycutting experiment setup

Page 23: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Force results from flycutting of SiC

• 4 distinct cuts made• First cut overlapped 6 times• Significant noise generated towards end of the experiment

Page 24: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

24

Results from flycutting of SiC

Page 25: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from cut 1, cut 2 & cut 3

Page 26: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from cut 4

Page 27: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Simulations of flycutting

Page 28: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Simulations of flycutting experiments

Parameters Value Unit Geometry

Tool

Cutting edge radius, r 40.0 nm

Rake angle, α -45.0 deg

Clearance angle, β 5 deg

Wo

rkpie

ce &

Pro

cess

Workpiece length, l 20.0 µm

Workpiece height, h 7.5 µm

In-Feed, feed 61 & 75 nm

Length of Cut, loc 15.0 µm

Cutting Speed, v 0.518 m/s

Friction factor 0.1 -

Method A

Method B

Page 29: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

29

1.16E+11

1.02E+11

1.19E+11 1.17E+11

0.00E+00

2.00E+10

4.00E+10

6.00E+10

8.00E+10

1.00E+11

1.20E+11

1.40E+11

61 nm 75 nm

No

rmal

ized

fo

rce

(N/m

m^

2)

Experiment Simulation

Results of simulations, Method A

Page 30: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results of simulations, Method B

1.162E+111.018E+11

2.47E+11

1.99E+11

0.000E+00

5.000E+10

1.000E+11

1.500E+11

2.000E+11

2.500E+11

3.000E+11

61 nm 75 nm

No

rmal

ized

fo

rce

(N/m

^2)

Experiment Simulation

Page 31: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

31

3-D scratching simulations

Page 32: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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3-D scratching simulations

Page 33: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Setup for 3-D scratching simulation of SiC

Parameters Value Unit Geometry

Programmed Depth (feed) 125 nm

Actual depth, doc 103 nm

Length of Cut, loc 10.0 µm

Cutting Speed, v 0.305 mm/s

Friction factor, µ 0.1, 0.26, 0.6 -

Page 34: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

34

Scratching simulations of SiC

Page 35: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

35

Results from simulation of SiC

Page 36: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

36

Summary of results

• Summary of 2-D orthogonal machining simulations– Simulations agree with experiments for depths close to

100 nm and below.– Pressures at the tool-workpiece interface are greater

than the hardness of the material for these depths.– Workpiece deflection leads to actual depth being smaller

than the programmed depth.

• Summary of 3-D scratching simulations– SiC simulations show thrust forces in good agreement

with the experiment.– SiC simulations show cutting forces that are not in very

good agreement with the experiment.

Page 37: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

37

Conclusions

• Two types of simulations have been presented: 2-D & 3-D

– 2-D orthogonal simulations of SiC produce useful results for depths at or below the DBT depth of the material.

– 2-D simulations create pressures at the tool-workpiece interface that are in agreement with what is expected from the experiments.

– 3-D scratching work shows encouraging results for initial attempts at simulations of ceramic materials for depths below the DBT depth of the materials.

Page 38: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

38

Recent Related Work

• Validation of material models.• Development of analytical model to predict actual depth of

cut for a programmed depth of cut for each material• Predicting behavior of ceramic materials under the brittle

mode.• 2-D flycutting simulation using VAM.• Current effort: 3-D turning simulations using round nose

cutting tools.

Page 39: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

39

Acknowledgements

• National Science Foundation for the research grant• Andy Grevstad and Third Wave Systems for software

support.• Jeremiah Couey and Dr Eric Marsh at Penn State University.• Dr Guichelaar for equipment at the Tribology lab.• Lei Dong at University of North Carolina at Charlotte.

Page 40: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Questions and suggestions

Page 41: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

41

Page 42: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

42

Results from edge turning simulations, -45º rake, 50º clearance

1.71.45

1.23

2.30

0.91.25

3.65

6.00

0

2

4

6

50 100 300 500

Depth (nm)

Cu

ttin

g F

orc

e (N

)

Experiment

Simulation

Page 43: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

43

Scratching simulation of Si

Page 44: 1 Comparison between Experimental & Numerical Results for Single Point Diamond Turning (SPDT) of silicon carbide (SiC) John Patten, Director Manufacturing.

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Results from scratching simulation of Si


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