1
Pre
cisi
on
Im
ag
ing
Mu
ltil
ayer
Op
tics
for
So
ft X
-Ra
y a
nd
Ex
trem
e
Ult
rav
iole
t R
an
ges
Inst
itu
te f
or
Ph
ysic
s of
Mic
rost
ruct
ure
s R
AS
, G
SP
-105
Niz
hn
y N
ovg
oro
d,
Ru
ssia
Nik
ola
yI.
Ch
kha
lo, N
iko
lay
N. S
ala
shch
enko
Nan
oan
d G
iga C
hall
enges
in
Ele
ctro
nic
s, P
hoto
nic
s an
d R
enew
ab
le E
ner
gy
Mosc
ow
-Z
elen
ogra
d, R
uss
ia, S
epte
mb
er 1
2-1
6, 2011
22
OU
TL
INE
1.
Wh
at
is t
he
op
tics
an
d m
ost
ser
iou
s
PR
OB
LE
MS
wh
en C
HA
RA
CT
ER
IZIN
G a
nd
MA
NU
FA
CT
UR
ING
th
e o
pti
cs
2.
La
test
DE
VE
LO
PM
EN
TS
in
th
e fi
eld
of
inte
rest
are
con
du
ctin
g i
n I
PM
RA
S
3.
Ap
pli
cati
on
s th
e o
pti
cs i
n s
cien
ce a
nd
tech
no
log
y
4.
Co
ncl
usi
on
3
Mo
tiv
ati
on
I.U
sin
g s
ho
rt w
av
elen
gth
fo
r
ach
iev
ing
na
no
met
er s
cale
sp
ace
res
olu
tio
n
Sp
ace
res
olu
tio
n o
f a
len
s
wh
ere
NA
is a
nu
mer
ical
aper
ture
, λ
is a
wav
elen
gth
,α
–h
alf
of
a an
ex
it a
per
ture
ang
le a
nd
nis
a r
efra
ctio
n i
nd
ex.
λ=
193 n
m δ
x≈
100 n
m
In t
he
XE
UV
wav
elen
gth
ran
ge
λ=
2-
20
nm
δx
<<
10
0 n
m
(λ=
3n
mN
A=
0.3
δ
x≈
6 n
m)
2α
αsi
nn
NA
⋅=
2/
)/(
61
.0
λλ
δ≈
⋅=
NA
x
4
Dou
ble
p
att
ern
ing
Dou
ble
exp
osi
ng
Imm
ersi
on
Siz
e R
edu
ctio
n L
ith
og
rap
hy
Ten
s of
sup
erfl
uou
s p
rod
uct
ion
op
erati
on
on
a c
hip
are
rem
oved
!
“A
des
ign
er k
now
s h
e h
as
ach
iev
ed p
erfe
ctio
n n
ot
wh
en t
her
e is
noth
ing l
eft
to a
dd
, b
ut
wh
en t
her
e is
noth
ing l
eft
to t
ak
e aw
ay.”
-A
nto
ine
de
Sain
t-E
xu
per
y
Lit
hog
rap
hy
at
13
.5 n
m(6
.7 n
m)
5
Ima
gin
g o
pti
cs f
or
spec
tra
l ra
nge
of
2-6
0 n
m
PR
OB
LE
MS
!
Ind
ex o
f R
efr
act
ion
n≅ ≅≅≅
1an
d a
tten
uati
on
len
gth
l~
0.0
1-5
µm
wid
e
ran
ge
λ<
3 n
m
λ<
0.5
nm
wid
e r
ange
Op
era
tin
g
sp
ectr
al
ran
ge
wid
e
ran
ge
~100 µ
100 m
m
wid
e
range
wid
e
range
Fo
cu
s
len
gth
hig
h
mo
dera
te
low
low
NA
Mu
ltil
ayer
op
tics
Fre
sn
el
zo
ne p
late
s
Refr
active le
nses
Mirro
r and C
ap
illary
optics
Kin
d o
f o
pti
cs
4321#N
an
om
ete
r scale
re
so
luti
on
Usab
ilit
yfo
r so
ft
X-r
ays
yes
yes
yes
yes
yes
no
only
in h
ard
X
-ra
y r
egio
nyes
6
Mu
ltil
ay
er i
nte
rfer
ence
str
uct
ure
s fo
r sp
ectr
al
ran
ge
of
2-6
0 n
m
N=
20-1
000
N=
200-5
00
λϑ
=si
n2
d3
01
2/
÷=
≅λ
dnm
Nd
d/
1/
<δ
%2.
0/
<d
dδ
Ty
pic
al
mu
ltil
ay
er
mir
rors
pro
du
ced
in I
PM
RA
S. M
ore
than
20 p
air
s of
dif
fere
nt
mate
rials
is d
eposi
ted
on
fla
t
or
curv
ed
sub
stra
tes
wit
h
dia
met
ers
from
a
few
up
to 3
00 m
m
Mu
ltil
ay
er I
nte
rfer
ence
Str
uct
ure
Req
uir
emen
ts t
o t
he
dep
osi
tio
n p
roce
ss a
re F
AN
TA
ST
IC
7
Th
e p
rese
nt
lev
el o
f m
ult
ila
yer
no
rma
l-
inci
den
ce o
pti
cs
�In
flu
ence
on
ref
lect
ion
of
inte
rfa
cia
l tr
an
siti
on
lay
ers
in
mu
ltil
ay
er s
tru
ctu
res
r ≈ ≈≈≈
r 0·e
xp(-
2π
2σ
2/d
2)
σsh
ou
ld b
e a
t a
lev
el o
f 0.1
-0.2
nm
,w
hic
h i
ncl
ud
esro
ug
hn
ess
an
d m
ixin
g o
f th
e la
yer
mate
ria
ls
So
th
e p
rob
lem
of
incr
easi
ng
of
the
refl
ecti
on
coef
fici
ents
an
d m
ov
ing
to
wa
rds
the
sho
rter
wa
ve-
len
gth
s is
a p
rob
lem
of
INT
ER
FA
CE
S!!
!!
24
68
10
12
14
16
18
20
22
0,0
0,1
0,2
0,3
0,4
0,5
0,6
0,7
0,8
C
r/S
c
C
r/C
L
a/B
M
o/B
e
W
/Si
exp
er.
R
u/Y
Z
r/A
l
Reflectivity
Wavele
ng
th, n
m
8
Req
uir
emen
ts t
o t
he
surf
ace
sh
ap
e an
d r
ou
gh
nes
s of
the
mir
rors
MS
FR
sc
att
eri
ng
10
-61
x1
0-5
1x1
0-4
10
-31
0-2
10
-11
00
10
11
02
10
3
Sp
ace
fre
qu
en
cie
s, µ
m-1
14
/λ
≤o
bj
RM
ST
he
Mare
ssh
al
crit
erio
non
lim
itin
g a
ber
rati
on
)1
4/(
1N
RM
Sλ
≤S
hap
e acc
ura
cy i
nN
-mir
ror
syst
ems
Forλ=
3n
m a
nd
N=
2 R
MS
obj≈
0.2
nm
an
d R
MS
1 ≈
0.1
4n
m
9
Pro
ble
ms
wit
h t
rad
itio
na
l ap
pro
ach
es t
o c
hara
cter
ize
the
surf
ace
pro
per
ties
Com
mer
ciall
y a
vail
ab
le
inte
rfer
om
eter
s w
arr
an
t
mea
sure
men
t acc
ura
cy o
f
surf
ace
sh
ap
e at
a l
evel
of
RM
S1 ≈
20-3
0n
m
21
8
34
56
7
10
-4
10
-3
1
0-2
0.1
1 1
0
100
ν, m
cm
-1
10
-3
10
-5
10
-7
10
-9
10
-11
PSD1D, mcm3
21
8
34
56
7
10
-4
10
-3
1
0-2
0.1
1 1
0
100
ν, m
cm
-1
10
-3
10
-5
10
-7
10
-9
10
-11
PSD1D, mcm3P
SD
1D
fu
nct
i-
on
so
f S
iO2
sub
stra
te
mea
sure
d
in
IPM
R
AS
(1
)
an
d
Rig
ak
u(2
-
8)
by
d
iffe
ren
t
meth
od
s:
1
–
XR
DS
an
d
AF
M,
2 –
AF
M,
3
–8
–
Zy
go
inte
rfe
ren
ce
mic
rosc
op
e w
ith
ma
gn
ific
ati
on
1.2
5x
, 4
–2
.5x
, 5
–5
x,
6 –
10
x, 7
–20
x a
nd
8 –
40
x.
1.
Lim
itin
g r
an
ge ν
2*10
-2-1
02 µ
-1
2.
On
ly f
lat
surf
ace
s
10
Key
tec
hn
olo
gie
s re
qu
ired
fo
r m
an
ufa
ctu
rin
g a
nd
cha
ract
eriz
ati
on
of
the
op
tics
�S
up
er p
oli
shin
g o
f su
bst
rate
s an
dm
etro
logy o
f su
rface
rou
gh
nes
s
in l
ater
al s
cale
s of
1 n
m –
1 m
mw
ith s
ensi
tivit
y (
qu
ali
ty)
r.m
.s.≈
0.1
nm
�In
terf
erom
etry
for
mea
sure
men
t of
wav
e fr
ont
aber
rati
ons
of
lens
and o
pti
cal
elem
ents
wit
h p
reci
sion
R.M
.S.≈
0.1
nm
�P
hysi
cal
met
hod
s of
corr
ecti
on
(fi
nis
hin
g)
of
op
tica
l su
rface
s
wit
h p
reci
sion
R.M
.S.≈
0.2
-0.4
nm
�D
eposi
tion
an
d p
reci
sion
ref
lect
om
etry
of
mult
ilay
er m
irro
rs o
n
subst
rate
s w
ith c
urv
edsu
rfac
e sh
ape
and w
ith a
dia
met
er u
p t
o a
few
hundre
ds
of
mm
�D
eform
ati
on
-fre
e m
ou
nti
ng
of
the
pre
cisi
on o
pti
cal
elem
ents
into
met
alli
c fr
ames
11
Su
per
po
lish
ing
an
d r
ou
gh
nes
s.T
he
bes
t m
easu
red
res
ult
s on
effe
ctiv
e ro
ugh
nes
s σ
effin
sp
ectr
al
ran
ge
of ∆ν=
0.0
2-6
4 µ
-1of
sup
er p
oli
shed
su
bst
rate
s fr
om
dif
fere
nt
man
ufa
ctu
rers
0.6
2S
i w
afer
fro
m S
outh
-Eas
t A
sia
0.2
0S
ap
ph
ire
(IC
RA
S, M
osc
ow
)
0.5
3Z
erodur
(Edm
und I
ndust
rial
Opti
cs)
0.3
6C
r/S
c M
LS
on S
i(I
PM
RA
S, N
.No
vgoro
d)
0.3
3Q
uar
tz(G
ener
al O
pti
cs)
0.3
8Q
uar
tz (
Kom
posi
t, M
osc
ow
)
0.3
7Q
uar
tz(G
ener
al O
pti
cs)
0.2
2S
i w
afe
r fr
om
Sou
th-E
ast
Asi
a
0.4
3S
i (G
ener
al O
pti
cs)
σef
f, n
mM
ate
ria
l
12
Ph
oto
of
vacu
um
inte
rfer
om
eter
Ch
ara
cter
iza
tio
n a
ber
rati
on
s an
d s
urf
ace
sh
ap
e o
f th
e o
pti
cs.
Inte
rfer
om
eter
wit
h d
iffr
act
ion
ref
eren
ce w
ave
≈0
,25
µ
N.I
. C
hk
halo
, et
al.
A s
ou
rce
of
a r
efer
ence
sph
eric
al
wave
base
d o
n a
sin
gle
mode
opti
cal
fiber
wit
h a
narr
ow
ed e
xit
ap
ertu
re.
RS
I V
. 79. 033107. 2008.
Ex
per
imen
tal
setu
p f
or
stu
dy
ing
the
wav
e fr
on
t d
efo
rmati
on
s of
the
sou
rces
of
sph
eric
al
wave.
(λ=
530
нм
)
RM
S,
nm
IPM
RA
S
AL
S,
Ber
kel
ey
NA
0.3
0.1
30
.07
0.0
2
0.7
0.4
0.2
0.0
8
0.4
0.3
0.2
0.1
13
PD
I In
terf
erom
eter
Ion
-bea
m e
tch
ing f
aci
lity
Su
rface
map
aft
er c
orr
ecti
ng
Su
rface
map
bef
ore
corr
ecti
ng
Co
rrec
tin
g p
roce
du
re
Ion
gu
n
Mask
Pro
cess
ed
sam
ple
14
14
Co
nca
ve
asp
her
ic m
irro
r
Co
nv
exasp
her
ic m
irro
r
Bes
t ch
ara
cter
isti
cs o
f o
pti
cs m
an
ufa
ctu
red
in
IP
M R
AS
.
Pro
ject
ive
ob
ject
ive
(NA
=0
.3)
for
EU
V l
ith
ogra
ph
er
PV
= 8
9.6
nm
RM
S=
17
.8n
mA
s-p
rep
are
d s
urf
ace
Aft
er 2
7th
corr
ecti
ng
PV
= 7
.7n
m
RM
S=
0.9
nm
15
15
Ref
eren
ce s
ph
eric
al
mir
ror
wit
h N
A=
0.2
5fo
r
cha
ract
eriz
ati
on
of
ob
ject
ives
As-
pre
pare
dZ
YG
O r
efer
ence
:
P-V
=42.6
nm
, R
MS
=7.3
nm
Aft
er12-t
hco
rrec
tin
g:
P-V
=6.7
nm
, R
MS
=0.6
nm
Inte
rfer
om
eter
Ob
ject
ive
Ref
eren
ce m
irro
r
16
Ap
pli
cati
on
th
e O
pti
cs i
n S
cien
ce
an
d T
ech
no
log
y
17
18
�M
ult
ilay
er o
pti
cs a
nd
ap
pa
ratu
s f
or
cha
ract
eriz
ati
on
pla
sma d
isch
arg
e E
UV
rad
iati
on
so
urc
es a
nd
op
tics
co
nta
min
ati
on
�F
ree-
sta
nd
ing m
ult
ilay
er f
ilte
rs f
or
XE
UV
sp
ectr
osc
op
y a
nd
Sp
ectr
al
Pu
rity
Fil
ters
cu
ttin
g l
on
g-w
av
elen
gth
ra
dia
tio
n w
ith
hig
h w
ith
sta
nd
ab
ilit
yto
hea
t lo
ad
s
in α
-a
nd
β-
ma
chin
e
�P
rop
ose
d n
ew w
av
elen
gth
6.X
nm
fo
r n
ext
gen
erati
on
EU
VL
(2
008
)
Main
Con
trib
uti
on
s of
IPM
RA
S i
nto
th
e A
SM
L E
UV
Lit
hogra
ph
y D
evel
op
men
ts
In-b
and
ref
lect
om
ete
rfo
r m
easu
rem
ent
of
refl
ecti
vit
y l
oss
es d
ue
to
con
tam
inat
ion
an
d f
ilte
r tr
ansp
aren
cy
In-b
and
con
tou
r-ad
apte
d
det
ecto
r: L
ook
ing
at
the
EU
V s
ou
rce
thro
ug
h a
“s
pec
tral
win
do
w o
f m
ult
i-m
irro
r E
UV
L o
pti
cs”
SP
Ffo
rα
-
an
d β
-to
ols
T13.5
>7
0%
Top
er>
80
0º
C
19
19
A s
tan
d o
f E
UV
-lit
hog
rap
her
wit
h a
des
ign
ed r
eso
luti
on
of
30
nm
(I
PM
RA
S)
�D
esig
ned
res
olu
tio
n2
7 n
m
�F
ield
of
vie
w o
n a
mask
3× ×××
3 m
m2
�D
emag
nif
icati
on
5× ×××
Ob
ject
ives
�D
emo
nst
rati
on
th
at
in
Ru
ssia
th
ere
exis
t
un
iqu
e te
chn
olo
gie
s fo
r
dev
elo
pin
g E
UV
na
no
lith
og
rap
hy
�A
sta
nd
fo
r
dev
elo
pm
ent
an
d
op
tim
iza
tio
n
ph
oto
resi
sts
for
13
.5 n
m
20
Mo
tiva
tion
II.
Usi
ng
a r
eso
nan
ce c
ha
ract
er o
f in
tera
ctio
n
of
the
XE
UV
ra
dia
tio
n w
ith
a m
att
er i
n a
co
mb
ina
tio
n
wit
h n
an
om
eter
-sca
le r
eso
luti
on * A
n a
dva
nta
ge
in u
sing
of
nan
om
eter
-
scal
e re
solu
tion
opti
cs i
s fo
rced
by a
reso
na
nce
ch
ara
cter
of
inte
ract
ion
of
the
XE
UV
radia
tion
wit
h a
ma
tter
. D
ue
to l
ow
sca
tter
ing
, lo
w a
bso
rpti
on
bef
ore
and
str
on
g a
bso
rpti
on
bel
low
ab
sorp
tio
n e
dg
es, w
e ca
n s
tud
y t
hic
k,
>10
µ, b
iolo
gic
al
(org
an
ic)
sam
ple
s
wit
h a
hig
h a
bso
rpti
on
con
tra
stof
pro
tein
s (c
arb
on
).
*P
rese
nce
of
stro
ng a
bso
rpti
on
ju
mp
s d
ecre
ase
the
requ
ired
ill
um
inati
on
do
seb
y
a fe
w o
rder
s of
mag
nit
ud
e. I
t m
ean
s th
at n
ot
ha
rd X
-rays,
not
elec
tron
s, o
nly
soft
X-r
ays
allo
w s
tud
yin
g e
ven
liv
ing
bio
log
ical
cell
s, o
r obse
rvin
g n
an
om
eter
-siz
ed
org
an
ics
in a
th
ick
mat
rix
.
21
Vie
win
g s
pin
str
uct
ure
s w
ith
so
ft X
-ra
y m
icro
scop
y
Images
rec
ord
ed a
t 15n
m s
pati
al
reso
luti
on
of
the
dom
ain
evolu
tion
in
(Co
0.8
3C
r 0.1
7) 8
7P
t 13
all
oy
fil
m a
s fu
nct
ion
of
ap
pli
ed m
agn
etic
X-r
ay m
icro
sco
py o
f th
e do
mai
n
confi
gu
rati
on f
or
the
ON
/OF
F s
wit
ch
sett
ings.
Pet
er F
isch
er.V
iew
ing s
pin
str
uct
ure
s
wit
h s
oft
X-r
ay m
icro
scopy
.M
ater
ials
today
. (2
010).
V.1
3. N
. 9.
Pp. 14-2
2.
22
22
Ex
tra
terr
estr
ial
XE
UV
ast
ron
om
y.
Th
e T
ES
IS
pro
ject
(P
.N. L
ebed
evP
hIA
S)
Ph
oto
gra
ph
s of
the
mir
rors
for
the
SE
C
010
20
30
40
50
0.0
0
0.0
5
0.1
0
0.1
5
Microns
Rad
ius, m
m
Op
tica
l sc
hem
e of
the
tele
scop
e
Ph
oto
of
the
Su
n a
t λ=
30.4
nm
, ta
ken
wit
h a s
ate
llit
e
Coro
nas-
Ph
oto
n(2
009).
Res
olu
tion
1.8
”
Fo
r d
evel
op
ing
Pro
ject
AR
KA
th
e re
solu
tio
n
0.1
8”
An
asp
her
ical
pro
file
23
Con
clu
sion
1.
Dif
fract
ion
qu
ali
ty X
EU
V o
pti
cs o
pen
s u
p n
ew p
oss
ibil
itie
s in
nan
o-l
ith
ogra
ph
y a
nd
mic
rosc
op
y, in
basi
c p
hysi
cs o
f
non
lin
ear
med
ium
s an
d n
an
o-e
lect
ro-m
agn
etis
m.
2.
Sta
te-o
f-th
e-art
tec
hn
olo
gie
s of
gro
win
g m
ult
ilayer
mir
rors
an
d s
ub
stra
te m
an
ufa
ctu
rin
g a
llow
solu
tion
a n
um
ber
of
the
men
tion
ed a
bove
task
s.
3.
Th
e m
ain
pro
ble
ms
slow
ing d
ow
n w
ide
usi
ng o
f th
e op
tics
are
lim
itin
g c
ap
ab
ilit
ies
of
the
poin
t d
iffr
act
ion
in
terf
erom
etry
for
test
ing h
igh
-NA
asp
her
ical
op
tics
an
d r
elati
vel
y p
oor
surf
ace
rou
gh
nes
s o
f su
bst
rate
s an
d i
nte
rface
s in
sh
ort
-dM
LS
.
4.
Worl
d l
evel
lab
ora
tory
tec
hn
olo
gie
s an
d i
nst
rum
enta
tion
for
man
ufa
ctu
rin
g a
nd
ch
ara
cter
izati
on
of
dif
fract
ion
qu
ali
ty
imagin
g o
pti
cs f
or
XE
UV
ran
ge
are
dev
elop
ed i
n I
PM
RA
S.
24
MA
NY
TH
AN
KS
for
YO
UR
AT
TE
NT
ION
!!!