1

Status of Vacuum Process Facilities at SSL

16 October 2009Sharon R Jelinsky

Space Sciences Laboratory, UC Berkeley

2

IntroductionIntroduction

• Process Facilities at the Space Sciences Lab shall support the following:— Development of bialkali photo-cathodes on borofloat substrates

— Build prototype small sealed tubes for efficiency and longevity tests

— Develop process for large sealed tubes of the 8” square design

— Provide test systems for performance evaluations

• All Process Facilities are in place for prototype small systems — Equipment is in house for windows of 33mm diameter

• New Facilities are needed for the large systems — An intermediate 4” format process chamber from modifications

— A large 8.6” format process chamber must be built from scratch

—Modifications are necessary to other auxiliary equipment

3

Facilities at SSLFacilities at SSL

SPECIFIC FACITITY READY FOR SMALL MODS FOR LARGE

• Class 100 Assembly Benches yes none

• Precision Wet Cleaning yes none

• Vacuum Baking yes easy

• Plasma Etching yes need larger etcher

• Electrode Evaporation yes moderate

• Hi-Pot Station yes easy

• Helium Leak Checker yes easy

• N2 & Vacuum Storage yes easy

• 4” P-C Process Chambers --- modify existing

• 8.6” P-C Process Chamber --- need larger chamber

• Vacuum Test Chambers yes moderate

4

Small Prototype TubesSmall Prototype Tubes

Small Tube Equipment We Currently Have Ready for Use

• Multiple windows of 33mm diameter for prototype tests

—Borofloat 33

— Fused Silica 7980

• Brazed bodies for 33mm windows

• Micro-channel plates to fit brazed bodies

—Not necessary for relative photo-cathode measurements

• Handling fixtures for 33mm substrates in process chambers

• Cross delay line anodes that can accommodate the small format

• Vacuum flanges with appropriate feed-thrus

• Electrical equipment for performance tests

• Process Facilities all ready and running for the small format

5

33mm System Parts33mm System Parts

Small Tube Parts at SSL• Many windows of 33mm diameter for prototype tests

• Brazed bodies designed for 33mm windows

• Handling fixtures for 33mm substrates in process chambers

6

Process Chamber Small FormatProcess Chamber Small Format

Glass WindowUV Transmissive Window

Photo-Cathode Forming Well Flange

ManipulatorDetector Mount Tube, 4” OD

6” Conflat Detector Loading Flange

Photo-Cathode Forming Well Tube

View Port

CHAMBER DIMENSIONS: 12” DIA. x 30” LONG x 22” HIGH

7

Looking Down In Process TankLooking Down In Process Tank

Window in Holder

Detector Stack on Loading Flange

P-C Forming Well

Manipulator Arm

TRANSFERING WINDOW FROM P-C WELL TO BODY STACK

8

Looking Thru Side View PortLooking Thru Side View Port

Detector Body Stack

Indium Cup

RESTRICTED SPACE FOR MANY STEPS IN PROCESS CHAMBER Photo-Cathode Deposition, Window Transfer, Seal Window-Body Stack

Staging Hook

P-C Forming Well

Window in Holder

Manipulator Arm

9

Processing OvenProcessing Oven

Accommodates Small & Large Format Inside Envelope: 36” x 30” x 25” High

Defines Large Chamber Limits

10

Large Process ChamberLarge Process Chamber

Glass Window

UV Transmissive Window

8.6” Sqr Window

Cathode Chimney

Photo-Cathode Forming Well Flange

8.6” Sqr Brazed Body Build

Mount Standoffs

16.5” Detector Loading Flange

16”D Chamber

OVERALL DIMENSIONS: 30” LONG, 16.5” WIDE, 22” HIGH

11

System DiagnosticsSystem Diagnostics

• SSL Facilities already in place for testing photocathodes or tubes, in situ before and after sealing

• Pinhole mask image below used to test uniformity and distortion

Large System EquipmentLarge System Equipment

• New Large Process Chamber to Accommodate 8.6” Square— Made per SSL design by outside vendor

• New Window Handling/Transfer Fixtures— Design, machine and install in chamber at SSL

• Vacuum Flanges, Valves, Plumbing— Many specialized flanges, electrical feedthrus added at SSL

— Manipulator arm vacuum feedthru

— metal seals vacuum valves to withstand high temp over 300C

• Vacuum Pumps, Controls, Gages— Turbo pump cart for pumping to e-6 torr

— Ion pump system for pumping to e-9 torr

— Associated vacuum controls and gages

• Cart for Process Chamber to support all the above— We have a frame to begin with

12

13

Status of Process ChambersStatus of Process Chambers

• 33mm Format Prototype Process Chamber— Have all parts, fixtures and chamber needed to deposit photocathodes

— Must clean and prep chamber and parts, then begin test runs

• 4” Format Intermediate Process Chamber— Have a chamber that must be modified to fit

— Must design and build fixtures

— Must design and procure windows, bodies and anodes

— Must clean and prep chamber and parts, then begin test runs

• 8.6” Square Large Process Chamber— Must finish the design of process chamber and send out for bid

— Must design and build window transfer system/fixtures and flanges

— Must design and procure windows, bodies and anodes

— Must clean and prep chamber and parts

— Operate process chamber and make test runs

— Build a complete detector (hopefully by due date of June 30, 2010)

14

Precision Wet CleaningPrecision Wet Cleaning

15

Class 100 Assembly BenchesClass 100 Assembly Benches

16

N2 Storage, WelderN2 Storage, Welder

17

Evaporator, Vac Storage, Hi-PotEvaporator, Vac Storage, Hi-Pot

18

Plasma Etcher, EvaporatorPlasma Etcher, Evaporator

19

Leak Checker, Process OvenLeak Checker, Process Oven

20

Pre/Post Process Test SystemsPre/Post Process Test Systems