1

Tecnologia CMOS

I passi principali per la realizzazione

di transistori a canale n e a canale p

2p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

input

outputGND VDD

3

input

outputGND VDD

p substrate

n-wellp+p+ p+n+n+ n+

+SiO2

+SiO2

4

p substrate

SiO2

photoresist

n-well mask

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

5

p substrate

SiO2

photoresist

n-well

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

6

p substrate

n-well

Nitride

active mask

photoresist

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

7

p substrate

channel stop mask

n-well

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

8

p substrate

n-well

n-well mask

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

9

p substrate

n-well

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

10

p substrate

n-wellgate oxide

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

11

p substrate

n-well

polysilicon

mask

polysilicon

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

12

p substrate

n-welln+n+ n+

p substrate

n-well

n+ mask

gates

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

13

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

p+ mask

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

14

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

15

contact mask

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

16

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

metal1 mask

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

17

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

l w

l R =

t w= RS

l w

= R

l w t

input

outputGND VDD

18

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

19

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

20

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

input

outputGND VDD

21

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+

22

p substrate

n-wellp+p+ p+

p substrate

n-welln+n+ n+