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20-04-23
Challenge the future
DelftUniversity ofTechnology
Design of the actuator for the EUV full flex illuminatorIn cooperation with ASML
Ruipan Chen, MSc. Department: PME , Specialisation: MSD
2
Contents
• Introduction: full flex illuminator
• What is a flex illuminator ?
• What is a full flex illuminator ?
• Actuator design: linear hybrid actuator
• Actuator requirements & building volume
• Actuator configuration
• Working principle
• Simulation results
• Stiffness analyses: parallel guiding
• Summary
Confidential
3
Contents
• Introduction: full flex illuminator
• Actuator design: linear hybrid actuator
• Stiffness analyses: parallel guiding
• Summary
Confidential
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What is a Flex illuminator ?
Tiltable mirror elements
Confidential
FlexRay changes illumination modes
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A Full Flex illuminator is made to generate unlimited patterns
Conventional
Annular
Dipole
Quadrupole
Confidential
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A single element and its manipulator
• Mirror can tilt around two axes Z and Y.
• This is realized by manipulating the two vertical rods.
• The actuator mover is connected to these rods
• Driving force: ±2 [N] (for the illuminator)
• Stroke : ±2 [mm]
full flex illuminator
Confidential
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Contents
• Introduction: full flex illuminator
• Actuator design: linear hybrid actuator
• Stiffness analyses: parallel guiding
• Summary
Confidential
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Actuator requirements
• Building volume: 60mm×36mm×6mm per actuator
• Linear actuator for mechatronic feedback system
• Driving force: ±2 [N]
• Stroke: ±2 [mm]
• Dissipation < 5 Watts per actuator
The design goal
Confidential
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Reluctance force of a iron pole-pairLinear hybrid actuator
Virtual work principle to determine the tangent force Fx. It is proportional to the flux squared.
Confidential
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Working principleLinear hybrid actuator
Flux increased in airgap 1 and 3, decreased in 2 and 4. A net force is generated.
Confidential
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Analytical modellingLinear hybrid actuator
Permanent magnet Voltage source + resistanceCurrent-carrying coils Voltage sourceAirgap reluctances Resistance.
Confidential
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Analytical modelingLinear hybrid actuator
Assumptions: - No saturation - simplified 2-D airgap reluctance (no leakage flux, no fringing flux). Iron reluctance is neglected.
Confidential
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2-D FEM resultsOersted
Confidential
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01
2
-100
-50
0
50
100
-3
-2
-1
0
1
2
3
Displacement x [mm]
Full Flex Actuator (config b) Drive Force
Coil current [Aturn]
Driv
ing
For
ce F
x [N
]
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3-D FEM resultsANSYS workbench
With an input current of 150 [A*turn] (corresponding to a dissipation of 4.3 [W]), the actuator is able to give a driving force of 2.3 [N] at the neutral position and 2.1 [N] at the end of the stroke.
Confidential
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Contents
• Introduction: full flex illuminator
• Actuator design: linear hybrid actuator
• Stiffness analyses: parallel guiding
• Summary
Confidential
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Three stiffnesses of the mechanismStiffness analyses
• Stiffness of the illuminator: positive• Stiffness of the parallel guiding: positive• Normal force on parallel guiding: negative
Confidential
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The negative stiffness lower the total driving stiffness! The required driving force becomes 1.58 [N] with the help of the normal force.
Energy method
Confidential
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Contents
• Introduction: full flex illuminator
• Actuator design: linear hybrid actuator
• Stiffness analyses: parallel guiding
• Summary
Confidential
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Summary
• Linear
• low inherent stiffness
• Low driving stiffness
• Easy water cooling
- stator is equipped with coils and magnet.
Cooling facility can be made easy.
• No contamination to the vacuum
- clear mechanical clearance
- magnets and coils are in one enclosure
Merits of the actuator
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Backup slides
-2-1
01
2
-100
-50
0
50
100
-3
-2
-1
0
1
2
3
Displacement x [mm]
Full Flex Actuator (config b) Drive Force
Coil current [Aturn]
Driv
ing
For
ce F
x [N
]
Confidential
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Backup slides
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01
2
-100
-50
0
50
100
40
42
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46
48
50
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Displacement x [mm]
Full Flex Actuator (config b) Normal Force
Coil current [Aturn]
Nor
mal
For
ce F
y [N
]
Confidential