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8/13/2019 3.1 FSCSP Assy and Test Process Flow
1/21
Folded, Stacked Chip-Scale Package(FSCSP) Assembly and Test Process
Flow
8/13/2019 3.1 FSCSP Assy and Test Process Flow
2/21
12/13/132 Intel CONFIDENTIAL. Covered by CNDA#33454
Otline
1. Assembly Process Front of Line (FOL)
End of Line (EOL)
2. Test ProcessTest Process Operations (TPO)
Finish Process Operations (FPO)
. Process !ontrols " #onitors
8/13/2019 3.1 FSCSP Assy and Test Process Flow
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12/13/133 Intel CONFIDENTIAL. Covered by CNDA#33454
Assembly Process Flow
FOL EOL
Front of Line
(FOL) Assembly
are stations from
Die Prep to
Internal Visual
Inspection (IVI).
End of Line (EOL)
Assembly
are stations from
Mold to Paca!e
Visual Inspection
(PVI).
8/13/2019 3.1 FSCSP Assy and Test Process Flow
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12/13/134 Intel CONFIDENTIAL. Covered by CNDA#33454
Front-o!-line (FO")
Die Preparation
Modules
Incomin!
"afer Monitor
waer
"afer #a$
"afer
Laminate
%ac!rind
Mount and
De&tape
Die Visual
Inspection
Front&of&Line
Modules
Die Attac'*+*,
"ire %ondInternal Visual
Inspection
!Con""t" o Fl$ Atta%&' De Atta%&'
and De (re"". DA 2/3 " de)endent
on "ta%*n+ %on+,raton orto) )a%*a+e
DA Fl$
A, wre
In&line stores
#ubstrate Prep
Modules
ta)e
",b"trate
-ape Prep
#ubstrate
Mar
#ubstrate
%ae
8/13/2019 3.1 FSCSP Assy and Test Process Flow
5/21
12/13/135 Intel CONFIDENTIAL. Covered by CNDA#33454
#nd-o!-"ine (#O")
Internal Visual
Inspection
-o -est
Flo$
Paca!e Visual
Inspection
End&of&Line
Modules
Pre&Mold
Plasma lean
Post&Mold
ure
Laser Mar (top)
In Mar (bottom)
"older ")&ere"
- l,%all Attac'
/eflo$
Deflu0
#a$
#in!ulationPre&Fold %ae
Pre&Fold
Plasma lean
Pre&Mold
%aeMold
old
Co$)o,nd
!Note0 For
otto$ )a%*a+e
only
Fold Ad'esi1e
Dispense2 Fold
Fold Ad&e"ve
Fold %lister
#creen
Fold ure
8/13/2019 3.1 FSCSP Assy and Test Process Flow
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12/13/13 Intel CONFIDENTIAL. Covered by CNDA#33454
Front-o!-"ine (FO")AFE
INCOIN
ONITO AFE 6A
AFE
LAINATE AC7IND
AFE
O8NT
AFE
DETA(E
DIE 9I68AL
IN6(ECTION
AFEINCOIN
ONITO AFE 6A
AFE
LAINATE AC7IND
AFE
O8NT
AFE
DETA(E
DIE 9I68AL
IN6(ECTION
TA(E (E(
686TATE
A7IN
686TATE
A7E FIL ATTAC:TA(E (E(
686TATE
A7IN
686TATE
A7E FIL ATTAC:
INTENAL 9I68ALINTENAL 9I68AL
DIE ATTAC:DIE (E66IEONDIN6(ECTION ;I9< DIE ATTAC:DIE (E66IEONDIN6(ECTION ;I9 CLEAN
6OLDE
ALL
EFLOALL
ATTAC:
(E OLD A7E
(EOLD
(LA6A
CLEAN OLD
(O6T OLD
C8E
IN7A7/
LA6EA7
(E FOLD A7E
(EFOLD
(LA6A
CLEAN A8TO FOLD
FOLD
AD:E6I9E
C8E
8/13/2019 3.1 FSCSP Assy and Test Process Flow
8/21
12/13/13? Intel CONFIDENTIAL. Covered by CNDA#33454
Test Process Flow
-PO FPO
-est Process
are stations from
%urn&in to #tac
Visual Inspection.
Finis' Process
are stations from
Laser Mar to
Pacin!.
8/13/2019 3.1 FSCSP Assy and Test Process Flow
9/21
12/13/13@ Intel CONFIDENTIAL. Covered by CNDA#33454
$n-stacked Package Testing Flow
%ottom Paca!e
Post %urn&in Lo!ic lass
Assy omponent In1ty
%urn&in
#tac
-op Paca!e
Flas' lass -est
8/13/2019 3.1 FSCSP Assy and Test Process Flow
10/21
12/13/131 Intel CONFIDENTIAL. Covered by CNDA#33454
Test Process Flow
(75 6TAC7IN51OA4D LOAD 184NBIN
1OA4D
8NLOAD
(O6T 184NBIN
ELECT4ICAL
TE6TIN5
(O6T 6TAC7
A66E/1L DIE
TE6T
(4EB6TAC7
1A7E
$ottom Pac%a&e
FP
O
8/13/2019 3.1 FSCSP Assy and Test Process Flow
11/21
12/13/1311 Intel CONFIDENTIAL. Covered by CNDA#33454
Package Stack %odle
#creen Print Pic 2 Place /eflo$
arrier&to&-ray-ray&to&arrier
8/13/2019 3.1 FSCSP Assy and Test Process Flow
12/21
12/13/1312 Intel CONFIDENTIAL. Covered by CNDA#33454
Finish Process Flow
/9A
TO(6IDE
LA6E4/A47DE66ICANT
1A7E496I F9I (AC7
C&
8/13/2019 3.1 FSCSP Assy and Test Process Flow
13/21
12/13/1313 Intel CONFIDENTIAL. Covered by CNDA#33454
FO" Process Controls ' ie Prep'pec Parameter Fre*ency 'amplin& 'i+e
,-# 1/01 is#ech All Fablots /afers per fablot32pts per afer
-afer 'a 1/014 is#ech
!*t 5*ality
All Fablots
'hiftly3 repair3con63 chan&econs*mables
afers per fablot312pts per afer
-afer Laminate 1/01/ is#ech
Lamination5*ality
All Fablots afers per fablot
$ac%&rind3 #o*nt "7etape
1/01128
1/0219
#o*nt Acc*racy
Thic%ness
TT
'hiftly3 repair3con63 chan&econs*mables
afers
/rd&s per afer3afers
7, 1/01:1 is#ech All afers 0/01 !'P3 /*nits
re;ects in a afer *nits re;ectin a lot < 1= , ofthe lot
8/13/2019 3.1 FSCSP Assy and Test Process Flow
14/21
12/13/1314 Intel CONFIDENTIAL. Covered by CNDA#33454
FO" Process Controls ' Tape Prep, A &*'pec Parameter Fre*ency 'amplin& 'i+e
Tape Prep 1/042
is#ech
Tape Placement
All assy lots
Per s*bstrate reel
s*bstrates perma&
?strips per reel
'*bstrate #ar% 1/01/
is#ech
#ar% 5*ality
All assy lots s*bstrates perma&
'*bstrate Pre0ba%e
1/019>
is#ech All assy lots s*bstrates perma&
Film Attach 1/01/
is#ech
Film Placement
'hiftly3 repair3con6ersion3 chan&econs*mables87#
?* per strip32strips
7ie Attach 1/014
is#ech
,nitial dieplacement
'hiftly3 repair3con6ersion
?* per strip32strips
7ie Press 1/01:
is#ech
7ie Placement
'hiftly3 repair3con6ersion3 chan&econs*mables87#
?* per strip32strips
-ire $ond 1/011>
is#ech
-ire ,nte&rity
All assy lots :ires per *nit32*nits
,, 1/0
1??
is#ech All assy lots /=3 all odd strips
8/13/2019 3.1 FSCSP Assy and Test Process Flow
15/21
12/13/1315 Intel CONFIDENTIAL. Covered by CNDA#33454
#O" Process Controls ' %old %ark'pec Paramete
rFre*ency 'amplin& 'i+e
Pre0#old $a%e 1/0
2/1
is#ech All assy lots strips per ma&
Pre0#old Plasma!lean
1/01?>
is#ech All assy lots strips per ma&
#old 1/012
is#ech
-iresay
Temperat*r
e
TransferTime
All assy lots
'hiftly3 repair3con6ersion3cleanin&
1=
?ires per *nit3 1*nit perpanel3 :panels per strip
1:rd&s per chase3 all chases
1 rd& per chase3 all chases
Post #old !*re 1/01?9
is#ech 'hiftly3 repair3con6ersion3cleanin&
strips per ma&
Laser #ar% 1/01//
is#ech
#ar% 7epth
All assy lots
'hiftly3 repair3con6ersion
strips per ma&
:rd&s3 *nits
,n% #ar% 1/019
is#ech All assy lots strips per ma&
8/13/2019 3.1 FSCSP Assy and Test Process Flow
16/21
12/13/131 Intel CONFIDENTIAL. Covered by CNDA#33454
#O" Process Controls + *A Singlation'pec Paramete
rFre*ency 'amplin& 'i+e
$all Attach 1/0
1/281/0242
is#ech All assy lots strips per ma&
@eflo 1/01/
is#ech
TAL
Pea% Temp
Time$eteen
All assy lots
'hiftly3 repair3con6ersion
strips per ma&
1rd&
7efl* 1/01/?
is#ech All assy lots strips per ma&
'in&*lation 1/011?8
1/019
is#ech
'1
'2
OP7 B
OP7 C
All assy lots
'hiftly3 repair3
con6ersion3blade chan&e
1= bottom3 top p%& to P,
2rd&s per *nit3 9*nits3 random
samplin&
8/13/2019 3.1 FSCSP Assy and Test Process Flow
17/21
12/13/131= Intel CONFIDENTIAL. Covered by CNDA#33454
#O" Process Controls ' Fold (!or bottom pkgonly) 'pec Parameter Fre*enc
y'amplin& 'i+e
Pre0Fold $a%e 1/01> is#ech All assy lots 1tray per lot
Pre0Fold Plasma!lean
1/01>1 is#ech All assy lots 1tray per lot
Fold 1/04? Adh -ei&ht
Di& Temp
eater Temp
Pea% Temp
'hiftly3repair3con6ersion3syrin&echan&e
2?rd&s
9rd&s
2rd&s
:rd&sPost Fold !*re 1/01>1 is#ech All assy lots 1tray per lot
P, 1/01118 20
is#ech All assy lots 1=
8/13/2019 3.1 FSCSP Assy and Test Process Flow
18/21
12/13/131? Intel CONFIDENTIAL. Covered by CNDA#33454
TFPO Process Controls'pec Parameter Fre*ency 'amplin& 'i+e
$*rn0in ?021 Elecis#ech 2= of lots 1=
Post
$*rn0in
Lo&ic8'tac%
1/04:Flash !lass>012:
Elecis#ech
!one P*ffPress*re
,np*t 7rop ei&ht
'ort 7rop ei&ht
All lots
-ee%ly
2 trays per lot < middle
and last tray1rd& for ept monitors
'tac% >04> 'tac% ei&ht
Pea% Temp
TAL
'hiftly3 repair3con6ersion3chan&econs*mables
/*nits3 random
:rd&s
:rd&s
', 20 is#ech All lots 1=
P'A7T >01/ Elecis#ech All lots 1=
Laser#ar%
>0224? #ar% 7epth 'hiftly3 repair3con6ersion3chan&econs*mables
:rd&s3 *nits
$a%e $l*# >02?1
!rit19 >022>4
is#ech All lots 1tray
8/13/2019 3.1 FSCSP Assy and Test Process Flow
19/21
12/13/131@ Intel CONFIDENTIAL. Covered by CNDA#33454
TFPO Process Controls'pec Paramete
rFre*ency
'amplin& 'i+e
E5A is#ech
Electrical5*ality
All lots 1= or 1tray per lot
$all,nspection
,!O' >091
@', >0221
is#ech
$all7imensions
Pac%a&e
7imensions
All lots 1=
#5A >09/ is#ech All lots 1=
Pac% >022Tn@
>022>Tray
>022>1$n'
>02294'traPac%
is#ech
Pac%in&5*ality
Peel $ac%Force
All lots 1=
:09inches per reel
8/13/2019 3.1 FSCSP Assy and Test Process Flow
20/21
*ack-p
8/13/2019 3.1 FSCSP Assy and Test Process Flow
21/21
12/13/1321 Intel CONFIDENTIAL. Covered by CNDA#33454
FSCSP Con!igration (.-section)
Lo+%
De 1 ;Fla"&