70445EN 01 MaintenanceManual C2000iB,C4000iB(Unprotected)

MAINTENANCE MANUAL

B-70445EN/01

For Europe

FANUC LASER C2000*-MODEL B

FANUC LASER C4000*-MODEL B

x No part of this manual may be reproduced in any form. x All specifications and designs are subject to change without notice.

The products in this manual are controlled based on Japans Foreign Exchange and

Foreign Trade Law. The export from Japan may be subject to an export license by the

government of Japan.

Further, re-export to another country may be subject to the license of the government of

the country from where the product is re-exported. Furthermore, the product may also be

controlled by re-export regulations of the United States government.

Should you wish to export or re-export these products, please contact FANUC for advice.

In this manual we have tried as much as possible to describe all the various matters.

However, we cannot describe all the matters which must not be done, or which cannot be

done, because there are so many possibilities.

Therefore, matters which are not especially described as possible in this manual should be

regarded as impossible.

B-70445EN/01 SAFETY PRECAUTIONS

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SAFETY PRECAUTIONS

This manual contains precautions, which must be observed during

operation and maintenance of the laser oscillator to ensure the safety

of the operator and maintenance personnel and prevent damage to the

oscillator.

Maintenance involves a variety of risks and, therefore, must be

conducted by those personnel who have sufficiently trained in

maintenance and safety.

Besides the laser oscillator, the laser machining system contains a

machine, power magnetics cabinet, servo system, CNC, and operator's

panel. This manual describes the laser oscillator. For a description of

notes other than those on the oscillator, refer to the corresponding

manuals, supplied by the machine tool builder and FANUC.

Contents

DEFINITION OF WARNING, CAUTION, AND NOTE ................s-2

WARNINGS AND CAUTIONS ON EXPOSURE...........................s-3

WARNINGS AND CAUTIONS ON MAINTENANCE ..................s-5

WARNINGS AND CAUTIONS ON HANDLING ..........................s-6

WARNINGS AND CAUTIONS ON MACHINING ........................s-8

SAFETY PRECAUTIONS B-70445EN/01

s-2

DEFINITION OF WARNING, CAUTION, AND NOTE

To ensure the safety of maintenance personnel (referred to as users)

and prevent damage to the machine, this manual indicates each

precaution on safety with "Warning" or "Caution" according to its

severity.

Supplementary information is indicated by "Note".

Read the contents of each "Warning", "Caution", and "Note" before

attempting to use the oscillator.

WARNING

Applied when there is a danger of the user being injured or when there is a danger of both the user being injured and the equipment being damaged if the approved procedure is not observed.

CAUTION

Applied when there is a danger of the equipment being damaged, if the approved procedure is not observed.

NOTE

Notes are used to indicate supplementary information other than Warnings and Cautions.

x Read this manual carefully, and store it in a safe place.


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WARNINGS AND CAUTIONS ON EXPOSURE

WARNING

1 It is extremely dangerous to expose your eyes to direct, scattered, or reflected CO2 laser light. Always wear protective glasses while the laser is operating.

Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately.

2 Do not turn on the laser oscillator while a panel is removed or a door is open.

Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO2 laser radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately.

Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents.

3 Surround the laser-machining tool with a fence made of a material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence.

The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser.

Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO2 laser radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately.

4 If the laser oscillator is operated with a panel open, ultraviolet radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight.

Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately.

5 The laser beam shall be no higher than average eye height. Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laser- absorbing material at the end of the beam path to absorb the beam's energy.

A CO2 laser beam is directional and has a high energy density. Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately.


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WARNING

6 If there is a possibility of being exposed to CO2 laser radiation exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing.

Otherwise, there is a danger of being burnt. 7 The oscillator is fitted with a red semiconductor laser to

indicate the approximate position of invisible CO2 laser beam. Do not look directly at the semiconductor laser beam. Otherwise, your eyes may be injured.

NOTE

1 Warning labels are affixed to those parts of the laser oscillator where there is a danger of exposure to laser radiation. Observe the precautions given on the labels.

2 During installation or maintenance necessitating the opening of an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised.

3 Laser products shall conform to the regulations laid down in the laser safety standard, including that stipulating control using a key.

The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key.

Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator.

The shutter shall be unlocked only while a beam is being output. Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on.

The laser oscillator is equipped with a warning light as an option. The warning light blinks while discharge is in progress or whenever laser radiation is possible.

While the warning light is blinking, pay careful attention to laser radiation and high voltages.


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WARNINGS AND CAUTIONS ON MAINTENANCE

WARNING

1 A high voltage of 3 to 4 kV0-p is applied to some places in the laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock.

2 Before daily inspection, the replacement of a maintenance part or maintenance, open the main circuit breaker and turn the power supply off (double power-off).

To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Before turning on the power during maintenance if absolutely necessary, take measures for safety.

3 The gas circulating system in the oscillator becomes very hot.

Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt.

4 The oscillator contains cooling fan units. Although the fan units are fitted with a finger guard, to prevent injury, keep your hands well away from the fans.


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WARNINGS AND CAUTIONS ON HANDLING

WARNING

1 The oscillator output mirror and focusing lens on the machining head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands if it is damaged.

Inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case.

If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water.

If you accidentally inhale ZnSe dust or debris, seek medical advice immediately.

2 If the laser oscillator must be moved, entrust the work to the machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident.

When the machine tool builder is not available to move the oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator.

3 Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. 1) Flammable gases such as oxygen can cause a fire or

explosion. 2) Toxic gases can harm operators during maintenance. 3) Organic gases can degrade machining performance. 4) High-pressure gases can damage a panel or the

cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing,

remove a panel for ventilation. The installation room must be also well ventilated.

To purge the oscillator housing, use purified, low-pressure air or nitrogen.

4 Those who use a cardiac pacemaker must avoid maintenance and inspection work during the discharge of the oscillator because the electromagnetic waves generated during the discharge may affect the operation of the pacemaker.

If you feel sick or out of condition, either immediately leave the spot or stop operation.


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CAUTION

1 The oscillator is controlled according to the CNC internal parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged.

2 Use laser gas with the specified correct composition ratios. If you use laser gas with different specifications by mistake,

performance degradation or an alarm will result. In the worst case, the oscillator may be damaged.

3 If storing the laser oscillator for a long time or leaving it unused for a long time, drain the inside of the oscillator. Otherwise, corrosion and clogging may result.

Also drain the oscillator if it is likely to freeze in winter. If it freezes, the water piping and cooling system components will be damaged.

NOTE

Do not discard a used output mirror or focusing lens together with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company.


s-8

WARNINGS AND CAUTIONS ON MACHINING

WARNING

1 Do not look at the machining point without eye protection. Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness.

If your eyes are accidentally exposed to laser light, seek medical advice immediately.

2 Before attempting to machine any material for the first time, consult with the manufacturer of the material.

Some materials generate toxic gases when cut or drilled by a laser beam.

Should you accidentally inhale any toxic gas, seek medical advice immediately.

3 The workpiece becomes very hot during machining. Never touch the workpiece with your bare hands. Otherwise, you may be burnt.

4 During machining, extremely hot chips are likely to be generated.

Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started.

5 Some materials may burn or explode when laser machined. Before attempting to machine any material for the first time, consult with the manufacturer of the material, to prevent the danger of fire of or the possibility of operator injury.

NOTE

1 Do not place any flammable material (such as paper, cloth, or wood) near the workpiece table.

2 Keep a fire extinguisher beside the unit.

B-70445EN/01 PREFACE

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PREFACE

Contents of the manual This manual consists of the following chapters and appendixes:

Chapter 1 : Safety for Laser Handling

Chapter 1 describes the warning labels affixed to the optical

paths in the oscillator, and warnings, cautions and notes on high

voltages, high temperatures, and toxicity.

Chapter 2 : Internal Structure

Chapter 2 describes the structure and operation of the laser

oscillator.

Chapter 3 : Installation

Chapter 3 describes the installation and checking of the laser

oscillator.

Chapter 4 : Maintenance

Chapter 4 describes daily maintenance and periodic maintenance.

Chapter 5 : Troubleshooting

Chapter 5 describes the actions to be applied in the event of a

fault occurring in the laser oscillator.

Chapter 6 : Oscillator Connections

Chapter 6 describes the internal connections of the electrical

system, cooling system, and gas system.

Chapter 7 : Units

Chapter 7 describes how to replace and adjust internal units of

the laser oscillator.

Chapter 8 : Laser Optical System

Chapter 8 describes how to clean, replace, and align the optical

components of the laser oscillator.

Chapter 9 : Laser Software Function

Chapter 9 describes the software functions for controlling the

laser oscillator.

Appendix

A. External View of Laser Oscillator

B. Specifications

C. Error Code List

D. Diagnosis Screen Information

E. Parameter List

F. Control Sequences in Laser Oscillator

G. Installing Gas Fittings and Water Fittings

H. External Gas Leakage Recording Table

I. Glossary

PREFACE B-70445EN/01

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Applicable models This manual covers the following models. The following

abbreviations may be used in the text of this manual.

Model Abbreviation

FANUC LASER C2000i -MODEL B C2000i-B

FANUC LASER C4000i -MODEL B C4000i-B

Related manuals The following manuals are available for the FANUC LASER

C2000i/C4000i-MODEL B

DESCRIPTIONS B-63662EN

CONNECTION MANUAL B-63663EN

OPERATORS MANUAL B-63664EN

MAINTENANCE MANUAL B-63665EN

FANUC Series 16i-LB

PARAMETER MANUAL B-63670EN

OPERATORS MANUAL B-70444ENFANUC LASER

C2000i/C4000i-MODEL B MAINTENANCE MANUAL

(this manual)

B-70445EN

B-70445EN/01 PREFACE

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B-70445EN/01 TABLE OF CONTENTS

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TABLE OF CONTENTS

SAFETY PRECAUTIONS............................................................................s-1

DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-2

WARNINGS AND CAUTIONS ON EXPOSURE ..................................................... s-3

WARNINGS AND CAUTIONS ON MAINTENANCE ............................................... s-5

WARNINGS AND CAUTIONS ON HANDLING....................................................... s-6

WARNINGS AND CAUTIONS ON MACHINING..................................................... s-8

PREFACE....................................................................................................p-1

1 SAFETY FOR LASER HANDLING .........................................................1

1.1 LASER BEAM................................................................................................ 2

1.2 HIGH VOLTAGE............................................................................................ 5

1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION).................................. 8

1.4 FIRE .............................................................................................................. 8

1.5 TOXIC FUME................................................................................................. 8

1.6 HIGH TEMPERATURE.................................................................................. 9

1.7 WARNING LABELS..................................................................................... 12

1.8 HIGH-PRESSURE GAS .............................................................................. 20

1.9 KEY CONTROL........................................................................................... 20

1.10 SHUTTER LOCK......................................................................................... 21

1.11 EMERGENCY STOP BUTTON ................................................................... 21

1.12 WARNING LIGHT (OPTIONAL) .................................................................. 21

2 INTERNAL STRUCTURE......................................................................22

2.1 OUTLINE ..................................................................................................... 23

2.2 INTERNAL STRUCTURE............................................................................ 25

3 INSTALLATION ....................................................................................31

3.1 INSTALLATION PROCEDURE ................................................................... 32

3.2 OSCILLATOR CONNECTIONS................................................................... 38 3.2.1 Laser Gas................................................................................................................38

3.2.1.1 Laser gas specification....................................................................................... 38

3.2.1.2 Gas pipe ............................................................................................................. 38

3.2.1.3 Leakage in external piping................................................................................. 39

3.2.1.4 Replacing the laser gas cylinder ........................................................................ 39

3.2.2 Cooling Water ........................................................................................................40 3.2.2.1 Specification of the cooling water ..................................................................... 40

3.2.2.2 Pure water supply unit ....................................................................................... 40

3.2.2.3 Cooling water piping ......................................................................................... 40

3.2.2.4 Anticorrosive ..................................................................................................... 41

3.2.2.5 Cleaning agent ................................................................................................... 41

TABLE OF CONTENTS B-70445EN/01

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3.2.2.6 Antifreezing solution ......................................................................................... 42

3.2.3 Electrical Connections............................................................................................43 3.2.3.1 NC-to-oscillator connection and power supply cable connection ..................... 43

3.2.3.2 Details of safety circuit ...................................................................................... 48

3.3 DETAILS OF CHECKING............................................................................ 50 3.3.1 Power Supply Checking .........................................................................................50

3.3.1.1 Checking the power supply ............................................................................... 50

3.3.1.2 Phase rotation .................................................................................................... 50

3.3.1.3 Setting the frequency of the power supply of the hour meter............................ 50

3.3.1.4 Measurement of voltage of DC power supply unit............................................ 50

3.3.1.5 Checking the jumper pins .................................................................................. 52

3.3.1.6 Checking the Interface PCB signals .................................................................. 52

3.3.2 External Laser Gas Piping Leakage Check (Clamp Test) ......................................53

3.3.3 Checking Cooling Water ........................................................................................54

3.3.4 Check for Leakage within the Oscillator................................................................54

3.3.5 Locating Internal Leakage......................................................................................55

3.3.6 Discharge Aging.....................................................................................................56

3.3.7 Oscillation Characteristics......................................................................................57

3.3.8 Discharge Margin Check........................................................................................58

3.3.9 Power Supply Margin Check (Pulse Check) ..........................................................59

3.3.10 Beam Mode Check .................................................................................................59

3.4 PREPARATION PRIOR TO SHIPMENT ..................................................... 62 3.4.1 Packing for Transportation.....................................................................................63

3.4.2 Removing Cooling Water.......................................................................................64

4 MAINTENANCE ....................................................................................65

4.1 DAILY INSPECTION ................................................................................... 66

4.2 PERIODIC MAINTENANCE ........................................................................ 67

4.3 DETAILS OF MAINTENANCE..................................................................... 69 4.3.1 Turbo Blower Oil ...................................................................................................70

4.3.1.1 Check method .................................................................................................... 70

4.3.1.2 Replenishment method ...................................................................................... 71

4.3.1.3 Replacement method.......................................................................................... 71

4.3.1.4 Storage and expiration date ............................................................................... 72

4.3.2 Exhaust Pump Oil...................................................................................................73 4.3.2.1 Check method .................................................................................................... 73

4.3.2.2 Replacement method.......................................................................................... 73

4.3.3 Exhaust Pump Filter ...............................................................................................74 4.3.3.1 Replacement method.......................................................................................... 74

4.4 MAINTENANCE PARTS.............................................................................. 75

5 TROUBLESHOOTING ..........................................................................79

5.1 TROUBLESHOOTING PROCEDURE......................................................... 80

5.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN...................... 81

5.3 MAJOR FAULTS ....................................................................................... 111 5.3.1 Laser Power Supply Alarm Display .....................................................................111

5.3.2 Power Supply Cannot Be Switched Off Using LCD/MDI Switch.......................112

5.3.3 Power Supply Cannot Be Switched On Using LCD/MDI Switch .......................112

5.3.4 Laser Output Just after Switch On Is Low ...........................................................112

5.3.5 Display of Fluctuating Laser Output on LCD ......................................................113


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5.3.6 Circuit Breaker for Cooling Fan, Solenoid Valve, and Stabilized Power Supply

Trips .....................................................................................................................113

5.3.7 Electromagnetic Contactor of Exhaust Pump Trips Thermally............................113

5.3.8 Main Breaker Trips ..............................................................................................114

5.3.9 Excessive Laser Gas Consumption ......................................................................114

5.3.10 Inverter Alarm Display.........................................................................................115

6 OSCILLATOR CONNECTIONS..........................................................118

6.1 ELECTRICAL CONNECTIONS ................................................................. 119

6.2 COOLING WATER PIPING ....................................................................... 121

6.3 GAS PIPING..............................................................................................123

7 UNITS..................................................................................................126

7.1 INPUT UNIT............................................................................................... 127

7.2 LASER POWER SUPPLY UNIT ................................................................ 131 7.2.1 Replacement Method............................................................................................131

7.2.1.1 Replacing the power supply unit ..................................................................... 131

7.2.1.2 Replacing a high-speed diode.......................................................................... 132

7.2.1.3 Replacing an FET module PCB....................................................................... 133

7.2.2 Adjustment Method..............................................................................................134 7.2.2.1 Preparation....................................................................................................... 134

7.2.2.2 Base discharge adjustment............................................................................... 134

7.2.2.3 Maximum output adjustment ........................................................................... 135

7.2.2.4 Check ............................................................................................................... 136

7.3 MATCHING BOX....................................................................................... 138 7.3.1 Replacement Method............................................................................................138

7.4 DISCHARGE TUBE................................................................................... 139 7.4.1 Placement Numbers..............................................................................................139

7.4.2 Replacement Method............................................................................................139

7.5 TRIGGER ELECTRODE ........................................................................... 141 7.5.1 Replacement Method............................................................................................141

7.6 TURBO BLOWER...................................................................................... 142 7.6.1 Replacement Method............................................................................................142

7.6.2 Leakage Check and Discharge Aging ..................................................................144

7.6.3 Adjusting the Oil Level Detection Signal ............................................................144

7.7 INVERTER................................................................................................. 145 7.7.1 Checking the Parameters ......................................................................................145

7.7.2 Replacement Method of Inverter..........................................................................154

7.7.3 Replacement Method of the Cooling Fan in the Inverter .....................................156

7.8 EXHAUST PUMP ...................................................................................... 158 7.8.1 Replacement Method............................................................................................158

7.8.2 Parts of Exhaust Pump .........................................................................................158

7.9 GAS CONTROLLER (C4000i-B) ............................................................... 159 7.9.1 Configuration .......................................................................................................159

7.9.2 Replacement Method............................................................................................161 7.9.2.1 Replacing the charge unit ................................................................................ 161

7.9.2.2 Replacing the exhaust unit............................................................................... 161


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7.9.3 Adjustment Method..............................................................................................162 7.9.3.1 Setting the gas supply pressure switch ............................................................ 162

7.9.3.2 Setting the atmospheric pressure switch .......................................................... 162

7.9.3.3 Operating the gas supply pressure switch and atmospheric pressure switch ... 163

7.9.3.4 Adjusting the exhaust unit (adjusting the laser gas consumption)................... 167

7.10 PRESSURE CONTROLLER (C2000i-B) ................................................... 168 7.10.1 Configuration .......................................................................................................168

7.10.2 Adjustment Method..............................................................................................169

7.11 EXHAUST CONTROLLER (C2000i-B)...................................................... 170 7.11.1 Configuration .......................................................................................................170

7.11.2 Replacement Method............................................................................................171

7.11.3 Adjustment Method (Adjusting the Laser Gas Consumption) .............................171

7.12 REPLACING THE WATER DISTRIBUTION UNIT .................................... 172 7.12.1 Replacement Method............................................................................................172

7.12.2 Replacement of the Parts of Flow Switch ............................................................174

7.12.3 Adjusting the Flow Sensor ...................................................................................175

7.13 SHUTTER UNIT ........................................................................................ 176 7.13.1 Replacement Method............................................................................................176

7.13.1.1 Replacing the shutter unit ................................................................................ 176

7.13.1.2 Replacing the shutter mirror ............................................................................ 176

7.13.1.3 Replacing the shutter switch (thermal and photoelectric switches) ................. 177

7.14 BEAM ABSORBER.................................................................................... 178 7.14.1 Replacement Method............................................................................................178

7.14.2 Adjusting the Position ..........................................................................................178

7.15 GUIDE LASER (SEMICONDUCTOR LASER)........................................... 179 7.15.1 Replacement Method............................................................................................179

7.16 FAN UNIT .................................................................................................. 180 7.16.1 Replacing a Fan Unit ............................................................................................180

7.16.2 Attaching and Detaching a Cable to and from the Terminal Block .....................180

7.16.3 Replacing a Fan-assisted Radiator........................................................................181

7.17 POWER SENSOR UNIT............................................................................ 182 7.17.1 Replacement Method............................................................................................182

7.17.2 Adjustment Method..............................................................................................182

7.18 REPLACING THE DEW SENSOR ............................................................ 182 7.18.1 Replacement Method............................................................................................182

7.19 PCB ........................................................................................................... 183 7.19.1 Replacing the Interface PCB ................................................................................183

7.19.2 Replacing the 24V Power Supply ........................................................................183

7.19.3 Replacing the Input Control PCB.........................................................................183

7.19.4 Replacing the Turbo PCB.....................................................................................184

7.19.5 Replacing the Intermediate PCB B.......................................................................184

7.20 OIL MIST DECOMPOSING ELEMENT ..................................................... 185 7.20.1 Replacement Method............................................................................................185

7.21 GAS DUST COLLECTOR UNIT ................................................................ 186 7.21.1 Cleaning ...............................................................................................................186

7.22 LOW TEMPERATURE SENSOR UNIT ..................................................... 187 7.22.1 Replacement Method............................................................................................187


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7.23 OXYGEN SENSOR UNIT......................................................................... 188 7.23.1 Replacement Method (C4000i-B) ........................................................................188

7.23.2 Replacement Method (C2000i-B Short Optical Path Length Type) ....................188

7.23.3 Replacement Method (C2000i-B Long Optical Path Length Type).....................188

7.24 HIGH-SPEED I/O UNIT ............................................................................. 190 7.24.1 Replacement Method of FSSB PCB.....................................................................190

7.24.2 Replacement Method of I/O MODULE UNIT.....................................................190

7.24.3 Replacement Method of FSSB I/O MODULE EXTENSION UNIT...................191

8 LASER OPTICAL SYSTEM ................................................................192

8.1 LASER OPTICAL PARTS.......................................................................... 193

8.2 CLEANING AND REPLACING THE OPTICAL PARTS............................. 194 8.2.1 Cleaning and Replacing the Output Coupler and Rear Mirror.............................195

8.2.2 Cleaning and Replacing the Folding Mirrors .......................................................197

8.2.3 Cleaning and Replacing the Beam Folding Unit ..................................................198

8.3 ALIGNMENT OF THE RESONATOR ........................................................ 200 8.3.1 Alignment Procedure for Adjusting All Mirrors ..................................................202

8.3.1.1 Preparation....................................................................................................... 202

8.3.1.2 Adjustment method.......................................................................................... 202

8.3.2 Alignment Procedure during Installation after Transportation.............................204 8.3.2.1 Preparation....................................................................................................... 204


8.3.3 Alignment Procedure at Mirror Cleaning Time ...................................................206 8.3.3.1 Preparation....................................................................................................... 206


8.4 OBTAINING A MAXIMUM POWER........................................................... 207 8.4.1 Preparation............................................................................................................207

8.4.2 Procedure..............................................................................................................208

8.5 POWER CALIBRATION METHOD............................................................ 210 8.5.1 Setting a Power Input Compensation Coefficient ................................................210

8.5.2 Using the Power Probe .........................................................................................211

8.6 ALIGNMENT OF THE BEAM FOLDING UNIT

(C2000i-B, C4000i-B SHORT OPTICAL PATH LENGTH TYPE) .............. 213

8.7 ALIGNMENT OF THE GUIDE LASER....................................................... 215

9 LASER SOFTWARE FUNCTION........................................................216

9.1 MAINTENANCE SCREEN......................................................................... 217 9.1.1 Overview ..............................................................................................................217

9.1.2 Method of Operation ............................................................................................217

9.1.3 Display Information .............................................................................................218 9.1.3.1 Compensation coefficient history display........................................................ 218

9.1.3.2 Parts run time display ...................................................................................... 219

9.1.3.3 Discharge-related alarm history display .......................................................... 220

9.1.3.4 Laser alarm history screens.............................................................................. 221

9.1.3.5 Pulse power feedback screens ......................................................................... 222

9.1.3.6 Power sensor time constant measurement screen ............................................ 222

9.1.3.7 Leak check screen............................................................................................ 223

9.1.3.8 Laser tuning screen .......................................................................................... 225

9.1.3.9 Command of running beam internally with shutter closed .............................. 227


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9.1.3.10 Input and output of saved maintenance data.................................................... 227

9.2 AUTOMATIC AGING................................................................................. 229 9.2.1 Overview ..............................................................................................................229


9.2.3 Manual Operation.................................................................................................230

9.2.4 Automatic Aging Function Setting Screen...........................................................230

9.3 AUTOMATIC LEAKAGE CHECK .............................................................. 233 9.3.1 Overview ..............................................................................................................233


9.3.3 Operation of the Leakage Check Function...........................................................234

9.4 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL

OUTPUT ESTIMATION METHOD............................................................. 235 9.4.1 Overview ..............................................................................................................235

9.4.2 Data Table ............................................................................................................235 9.4.2.1 Method of registration ..................................................................................... 235

9.4.2.2 Data table structure .......................................................................................... 236

9.4.3 Compensation for Power Sensor Response Speed ...............................................237 9.4.3.1 Time constant measurement method................................................................ 237

9.4.4 Bell-shaped Filter for Power Feedback Gain .......................................................239

9.5 WARMING-UP FUNCTION ....................................................................... 240 9.5.1 Overview ..............................................................................................................240

9.5.2 Method of Setting.................................................................................................240

9.6 PURGE WORKING AFTER ALARM NO.4073 .......................................... 241 9.6.1 Overview ..............................................................................................................241

9.6.2 Function................................................................................................................241

9.7 BASE BIAS MODULATION ....................................................................... 243 9.7.1 Function................................................................................................................243

9.7.2 Setting...................................................................................................................243

9.8 PROCESSING MODE CHANGE FUNCTION ........................................... 244 9.8.1 Outline ..................................................................................................................244

9.8.2 Setting...................................................................................................................244

9.8.3 Operation ..............................................................................................................245 9.8.3.1 Change of processing mode............................................................................. 245

9.8.3.2 In case that laser alarm occurs during the processing mode change................ 246

9.8.3.3 Processing mode change during power calibration ......................................... 246

9.8.3.4 Processing mode change during warm up function ......................................... 246

9.8.3.5 Processing mode change during automatic aging function.............................. 246

9.8.3.6 Processing mode change during beam output.................................................. 247

9.8.3.7 Display of mode change .................................................................................. 247

9.8.3.8 Power calibration ............................................................................................. 247

9.8.3.9 Power calibration coefficient ........................................................................... 247

9.8.3.10 Automatic aging function setting screen ......................................................... 248

9.8.3.11 Laser gas monitor ............................................................................................ 248

APPENDIX

A EXTERNAL VIEW OF LASER OSCILLATOR....................................251

B SPECIFICATIONS...............................................................................254


c-7

C ERROR CODE LIST............................................................................255

D DIAGNOSIS SCREEN INFORMATION ..............................................257

D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 258

D.2 LASER OSCILLATOR STATUS DISPLAY ................................................ 261

E PARAMETER LIST .............................................................................269

E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS.... 270

E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION............................ 279

E.3 PARAMETERS FOR CONTOURING CONDITIONS................................. 280

E.4 PARAMETERS FOR EDGE MACHINING CONDITIONS ......................... 281

E.5 PARAMETERS FOR PIERCING CONDITIONS........................................ 284

E.6 PARAMETERS FOR HIGH-SPEED PIERCING CONDITIONS................. 285

E.7 PARAMETERS FOR POWER CONTROL................................................. 287

E.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING .... 290

E.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION

FUNCTIONS.............................................................................................. 293

E.10 PARAMETERS FOR THE OSCILLATOR.................................................. 295

E.11 PARAMETERS FOR DISCHARGE ........................................................... 299

E.12 PARAMETERS FOR GAS CONTROL (1) ................................................. 301

E.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.......... 304

E.14 PARAMETERS FOR LASER POWER / VOLTAGE DROP ....................... 306

E.15 PARAMETERS FOR POWER TABLE SETTING ...................................... 307

E.16 PARAMETERS FOR AUTOMATIC AGING FUNCTION ........................... 309

E.17 PARAMETERS FOR POWER CONTROL (2) ........................................... 312

E.18 PARAMETERS FOR LASER GAS MIXER FUNCTION ............................ 313

E.19 PARAMETERS FOR GAS PRESSURE CONTROL (2) ............................ 315

E.20 PARAMETERS FOR POWER FEEDBACK BASED ON

THE ACTUAL OUTPUT ESTIMATION METHOD ..................................... 316

E.21 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION ......... 319 E.21.1 Setting for Fine Mode...........................................................................................319

E.21.2 Setting for Alarm Monitor (Alarm No.4125) .......................................................323

E.21.3 Setting for Automatic Aging Function (Fine Mode) ............................................324

F CONTROL SEQUENCES IN LASER OSCILLATOR..........................328

F.1 OUTLINE OF LASER OSCILLATION SEQUENCES ................................ 329

F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................... 331

F.3 TUBE VOLTAGE CONTROL SEQUENCES ............................................. 333


c-8

G INSTALLING GAS FITTINGS AND WATER FITTINGS.....................335

G.1 GAS FITTINGS.......................................................................................... 336 G.1.1 Tightening a Fittings ............................................................................................336

G.1.2 Reinstalling a Fittings...........................................................................................336

G.2 WATER FITTINGS .................................................................................... 337 G.2.1 Tightening a Fittings ............................................................................................337

G.2.2 Reinstalling a Fittings...........................................................................................337

G.3 FITTINGS AND TUBE ORDERING INFORMATION................................. 338

H EXTERNAL GAS LEAKAGE RECORDING TABLE ..........................341

I GLOSSARY.........................................................................................344

B-70445EN/01 1.SAFETY FOR LASER HANDLING

- 1 -

1 SAFETY FOR LASER HANDLING

C2000i-B and C4000i-B produce the rated output laser power of

2000W and 4000W. The CO2 laser beam is the wavelength of 10.6 Pm, far infrared, and is invisible to human eyes.

The adequate care must be taken when CO2 laser is operated, therefore.

When removing the panel, always turn the power source off and

confirm no power is applied to the laser machine.

This oscillator fulfills the requirements of the relevant product safety

standard of EN60825-1:1994+Amendment 2:2001.

Chapter 1, SAFETY FOR LASER HANDLING consists of the

following contents:

1.1 LASER BEAM .............................................................................2

1.2 HIGH VOLTAGE ........................................................................5

1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION) ..........8

1.4 FIRE .............................................................................................8

1.5 TOXIC FUME..............................................................................8

1.6 HIGH TEMPERATURE ..............................................................9

1.7 WARNING LABELS.................................................................12

1.8 HIGH-PRESSURE GAS ............................................................20

1.9 KEY CONTROL ........................................................................20

1.10 SHUTTER LOCK ......................................................................21

1.11 EMERGENCY STOP BUTTON ...............................................21

1.12 WARNING LIGHT (OPTIONAL) ............................................21

1.SAFETY FOR LASER HANDLING B-70445EN/01

- 2 -

1.1 LASER BEAM

Fig.1.1(a)-(b) show the position of panel that laser beam exposure is

occurred without panel.

(1) Potential hazards

Laser oscillator emits CO2 laser beam(10.6 Pm), which is high power and invisible.

x Being directly exposed to the CO2 beam could severely burn you.

x The CO2 beam could bource off your workpiece and burn your eyes or skin.

LASER oscillator have a guide laser. The guide laser beam

is visible (red color) and low power. It is used to ensure that

the CO2 beam is correctly positioned on your workpiece.

x The diode laser beam is not considered harmful to your skin. But if you stared head on into the guide laser beam, it could

harm your eyes.

(2) Safety recommendations

Never expose the eyes and skin to the laser beam. Be careful of

the laser beam when performing the inspection and maintenance.

Do not turn on the power supply to the oscillator when the panel

open and do not drive. It is bleached to radiation of the laser

beam and high voltage.

Do the countermeasure (For instance, installs safety glasses and

the protection gloves) to danger in case of stopped no finish and

nor opening the panel while it energizes the oscillator.

Install beam safety cover after mirror cleaning or replacement.

And if not beam safety cover installation, do not operation and

alignment.

Confirm when it does alignment, the protection pipe (Safety

cover) is installed. If it dose not install the protection pipe, it will

put the finger in the laser beam and there is possibility to do the

burn.

When entering the area exposed to the scattered beam, wear the

safety glasses. Mount the stand made of acrylic resin or any

material which can absorb the CO2 laser beam to protect the

personnel from the scattered beam.

Avoid exposure of any part of your body to the CO2 laser beam.

When testing the beam output, any personnel other than the

maintenance personnel should be out of the working environment.

In designing a material processing machine utilizing laser

oscillator, be sure that the CO2 laser beam goes from laser to the

workpiece only through the enclosed beam delivery system. This

prevents the exposure to laser beam by the operator switch could

otherwise take place. It is absolutely necessary to include the

instructions given here in the manuals of the laser

material-processing machine as a whole, which are to be read.


- 3 -

Fig.1.1(a) Laser beam exposure is occurred without panel as operating (C2000i-B)

Fig.1.1(b) Laser beam exposure is occurred without panel as operating (C4000i-B)


- 4 -

Safety cover Safety cover Discharge tube

Discharge tube

Discharge tube

For Short optical path length type

Safety cover

Beam

Beam

For Long opticalpath length type

Discharge tube

Fig.1.1(c) The position of laser beam delivery (C2000i-B)

Safety cover Discharge tube Discharge tube Safety cover

Discharge tube Discharge tube

Beam


For Long optical path length type

Beam

For Long optical path length type

Beam

Beam


Fig.1.1(d) The position of laser beam delivery (C4000i-B)


- 5 -

1.2 HIGH VOLTAGE

Fig.1.2(a)-(d) show the position of high voltage in oscillator.

1) Potential hazards

There is RF voltage of 3 to 4kVo-p in the cabinet of the laser

oscillator.

There is 200 VAC power in the relay panel, be careful not to

touch the high voltage.

2) Safety recommendations

When it checks the oscillator and exchange the unit, intercept a

main breaker of the oscillator and the power supply. Lock the

breaker to prevent misconnection and display the sign while

working.

Install safety cover after unit replacement or cable connection.

Unless safety cover is installed, never perform operation.

Follow standard industrial safety practices for working with high

voltage.

EXAMPLES

x Do not work on the laser oscillator if you are tired or have taken medicine.

x Do not wear anything metal, like a ring, bracelet, watch, belt buckle, earrings, or keys.

x They might contact high voltage. x Never stand on a wet surface. x Do not touch electrical components in the cabinets with

both hands at once. Keep one hand in a pocket.

Fig.1.2(a) The position of high voltage in C2000i-B (Front, maintenance side).


- 6 -

Fig.1.2(b) The position of high voltage in C2000i-B (Back side).


- 7 -

Fig.1.2(c) The position of high voltage in C4000i-B (Front, maintenance side).

Fig.1.2 (d) The position of high voltage in C4000i-B (Back side).


- 8 -

1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)


CO2 beam is delivery from oscillator. Direct or scattered beam is

exposed.


Mount the safety enclosure made of acrylic resin which can

absorb the laser beam around the working environment.

Mount the interlock switch on the safety enclosure door which

extinguishes the laser beam output when the door is open. Never

perform operation without safety cover of laser machine.

1.4 FIRE


When you work with the laser oscillator or machine, hot

fragments or slag can scatter from your workpiece. The CO2

beam or a reflection of it could ignite flammable material.


The direct or scattered laser beam can ignite flammable materials

such as paper, cloth, and wood. Provide a beam absorber behind

the workpiece and around it during maintenance. The absorber

can be anodized aluminum, graphite or brick. Put a shield

between yourself and the workpiece when the CO2 beam is on.

Even diffuse reflections can harm eyes and skin and may ignite

flammable material.

1.5 TOXIC FUME


Some materials such as certain plastics can emit toxic fume when

they burn under the laser beam.


Install the exhaust system to remove toxic fume from the work

environment.

Consult the manufacturer of the material you are processing to

learn if it creates any fumes when heated or burned.


- 9 -

1.6 HIGH TEMPERATURE

Fig.1.6 (a)-(d) show the position of high voltage in oscillator.


When you touch a part of high temperature, your skin burn.


The pipes of the gas circular system are very a high temperature.

Do not touch pipes, heat exchanger and turbo blower because it

does not do the burn. It is hot immediately after having stopped

driving. After getting cold enough in case of removing, dismount

it.


- 10 -

Fig.1.6(a) The position of high temperature in C2000i-B (Front, maintenance side).

Fig.1.6(b) The position of high temperature in C2000i-B (Back side).


- 11 -

Fig.1.6(c) The position of high temperature in C4000i-B (Front, maintenance side).

Fig.1.6(d) The position of high temperature in C4000i-B (Back side).


- 12 -

1.7 WARNING LABELS

The oscillator uses high voltages and laser beam radiation. Such

hazards are indicated with warning labels attached to the positions

shown in Fig. 1.7(a) to (d). This section describes the warning labels

and their positions.

Fig.1.7(a) Warning label positions (C2000i-B : front view)

Fig.1.7(b) Warning label positions (C2000i-B : back view)


- 13 -

Fig.1.7(c) Warning label positions (C4000i-B : front view)

Fig.1.7(d) Warning label positions (C4000i-B : back view)


- 14 -

Class indication label

Model Maximum Power Laser medium

C2000i-B 3500W CO2/N2/He=5/35/60%

C4000i-B 5000W CO2/N2/He=5/35/60%

Warning logotype

Access label


- 15 -

Label inside the access panel

Lifting method label

Aperture label

Label of non-interlocked protective panel


- 16 -

Identification label

Printed Pattern Model

MODEL TYPE A KVA

C2000i-B C2000 A04B-0813-B322 110 33

C4000i-B C4000 A04B-0815-B332 190 55

Address label

Discharge section label Supply voltage label


- 17 -

Label of over-current protective Label of motor and transformer (C2000i-B)

Label of motor and transformer (C4000i-B)


- 18 -

Label of warning light Maintenance label

Certification label Short-circuit interrupting capacity of main breaker


- 19 -

Label for regulating the atmospheric gases in the oscillator housing

Cooling water and gas maintenance label


- 20 -

1.8 HIGH-PRESSURE GAS

Do not allow any dangerous or high-pressure gas to get into the

oscillator housing. The oscillator cabinet has a hermetic structure

(dustproof and drip-proof), it cannot be ventilated easily.

Flammable gases such as oxygen can cause a fire or explosion.

Toxic gases can harm operators during maintenance. Organic gases

can degrade machining performance. High-pressure gases can damage

a panel or the cabinet, resulting in injury from flying matters.

If such a gas accidentally gets into the oscillator housing, remove a

panel for ventilation. The installation room must be also well

ventilated.

To purge the oscillator housing, use purified low-pressure air or

nitrogen.

1.9 KEY CONTROL

All the laser products have to comply with the various kinds of laser

safety regulations, which include the use of key control. For instance,

FDA PART 1040 PERFORMANCE STANDARDS FOR

LIGHT-EMITTING PRODUCTS, Sec 1040. 10 (f), (4) states: "Each

laser system classified as a Class IIIb or IV laser product shall

incorporate a key-actuated master control. The key shall be removable

and the laser shall not be operable when the key is removed" and

EN60825-1:1994, 4.5 Key control state "Any laser system belonging

to one of the following classes shall incorporate a key operation

master control: Class 4 and Class 3B, except for Class 3B with not

more than five times the AEL of Class 2 in the wavelength range from

400 nm to 700 nm. The key shall be removable and the laser radiation

shall not be accessible when the key is removed."

Because the laser package products offered by FANUC cannot

produce the laser beam as they are in the state of shipment, the system

integrator who incorporates FANUC products into the system, which

generates the laser beam, is obliged to incorporate the master key as

defined by the relevant regulation.


- 21 -

1.10 SHUTTER LOCK

The shutter lock is prepared because it dose not put out the laser beam

by mistake. If you do not put out the beam, lock the shutter.

Use the mechanical switch at shutter lock switch, not electrical

component (Relay)or switching circuit (Transistor, FET).

Use the one with the compulsion dissociation mechanism for the

switch used for the shutter lock circuit and the switch for welding

prevention.

To designer of laser processing machine

1 Use a mechanical switch for the switch used to lock the shutter. Do not use an electric switch (For instance, transistor circuit, etc.). Moreover, use the one with the contact dissociation mechanism to prevent welding for a mechanical switch.

2 Put it in the series of the contact of the emergency stop button in the shutter lock circuit. When the emergency stop switch is pushed, it is necessary to intercept the power supply to the shutter.

1.11 EMERGENCY STOP BUTTON

Press the emergency stop button when it is dangerous and breaks

down. The oscillator is stopped discharging, gas pressure control and

stand by LRDY state.

Use the one with the compulsion dissociation mechanism for the relay

used for the emergency stop circuit and the switch for welding

prevention.

1.12 WARNING LIGHT (OPTIONAL)

Laser oscillator is equipped with the warning light optionally. The

light is flashed during discharging and ready of laser beam emission.

Be careful of laser beam and high voltage.

To designer of laser processing machine

In EN60825-1, it needs the design with the fail safe or redundant for warning equipment. The redundant warning light is needed near the work-point of processing machine. The warning light is prepared for the oscillator. Select this as a warning light more than the second for the fail-safe.

2.INTERNAL STRUCTURE B-70445EN/01

- 22 -

2 INTERNAL STRUCTURE

Chapter 2, INTERNAL STRUCTURE consists of the following

contents:

2.1 OUTLINE...................................................................................23

2.2 INTERNAL STRUCTURE ........................................................25

B-70445EN/01 2.INTERNAL STRUCTURE

- 23 -

2.1 OUTLINE

Fig. 2.1 shows an outline of the structure of the oscillator.

Fig.2.1 Outline of structure

(1) Laser resonator

The resonator consists of an output coupler, a rear mirror, folding

mirrors, discharge tubes, a power sensor unit, etc. Several

discharge tubes are connected in series using folding mirrors,

with an output coupler and a rear mirror placed at the open ends

of the discharge tubes, thus sealing the tubes. The resonator is

fitted with a gas pipe connecting port through which laser gas is

fed into the discharge tubes. A discharge from the electrodes of

the discharge tubes energizes CO2 molecules, which emit light.

This light is amplified by the stimulated emission that takes place

while the light travels back and forth between the output coupler

and the rear mirror. The resonator is capable of converting

electrical energy to optical energy (10.6-Pm single-wavelength laser beam).

(2) Energization power supply

This is a high-frequency power supply of 2 MHz whose output is

controlled by the CNC. It discharges the laser gas flows through

the discharge tubes to energize CO2 molecules.


- 24 -

(3) Laser gas circulating system

A gas circulating system is configured by connecting the

resonator and the fan (turbo blower) with a circulating pipe.

Laser gas runs through the discharge tubes at a speed of 200 m/s

or higher. In this circulating system, a water-cooled heat

exchanger, used to cool the high-temperature gas from the

discharge tubes, is provided at the inlet side of the turbo blower.

At the outlet side of the turbo blower, another water-cooled heat

exchanger is provided to dissipate the compression heat of the

turbo blower.

(4) Pressure control unit

To ensure stable laser output, this controller controls the laser gas

pressure of the laser gas circulating system with commands

issued from the CNC, while exhausting degraded laser gas.

(5) CNC interface

This is the interface of the laser oscillator for connecting to

FANUC Series 16i-L. CNC commands that, control the

operation of the laser oscillator, such as start/stop and laser

output, are input via this interface.

(6) Housing

An enclosure that houses the above components. The housing,

consisting of metal panels, completely encloses the laser

oscillator, thus protecting the operator from exposure to laser

radiation and from high voltages. All panels are screw-fixed and

cannot be removed without an appropriate tool.


- 25 -

2.2 INTERNAL STRUCTURE

This section describes the internal structure of the oscillator more

specifically. Fig.2.2(a) to (d) are internal structural drawing.

Fig.2.2(a) Internal structural drawing (C2000i-B : front view)

Fig.2.2(b) Internal structural drawing (C2000i-B : rear view)


- 26 -

Fig.2.2(c) Internal structural drawing (C4000i-B : front view)

Fig.2.2(d) Internal structural drawing (C4000i-B : rear view)


- 27 -

(1) Output coupler

A transmitting/reflecting mirror, which outputs the laser beam

after it, has been amplified inside the resonator. The output

coupler consists of a ZnSe (zinc selenide) substrate with

dielectric coated.

(2) Rear mirror

A reflecting mirror consisting of a Ge (germanium) substrate

coated with dielectric. The rear mirror is used to reflect the laser

beam within the resonator while transmitting part of the laser

light to the outside to obtain the monitor light for laser output

measurement.

(3) Folding mirror

A mirror with a Si (silicon) substrate coated with dielectric to

reflect the laser beam.

It linearly polarizes the laser beam.

(4) Discharge tube

A pair of Ag (silver) electrodes is metallized on the surface of a

hollow quartz glass tube. A high-frequency discharge between

these electrodes injects electrical energy into the laser gas. Each

electrode is coated with ceramic, preventing it from degrading

and thus improving system reliability.

(5) Trigger electrode

This electrode is capable of pre-discharging outside the laser

oscillation area so that the laser output becomes completely zero

when the beam is off.

(6) Power sensor

An optical sensor, which detects the intensity of the laser beam,

transmitted through the rear mirror, thus enabling monitoring of

the laser, output level.

(7) Oil mist decomposing element

This element is capable of decomposing the organic matter that

gets into the laser gas circulating system, with photocatalytic

effect, using the ultraviolet rays generated from the discharge

tubes.

(8) Laser power supply

This power supply outputs high-frequency power (2 MHz)

according to a specified output with commands from the CNC

and supplies it to the discharge tubes via the matching box.

(9) Matching box

The matching box contains a matching circuit, which ensures that

power is effectively input to the discharge tubes.


- 28 -

(10) Turbo blower

This fan circulates the laser gas in the gas circulating system at

high speed. It rotates at a high speed of 60,000 revolutions per

minute (min-1).

(11) Inverter

This inverter drives the turbo blower. It is responsible for

acceleration/deceleration control and issuing alarms during start

and stop of the blower.

(12) Turbo PCB

This PCB relays overheating and frequency reached signals of

the turbo blower. In addition, it monitors the oil level of the turbo

blower.

(13) Gas dust collection unit

This unit is a cyclone dust collector that removes dust that gets in

the gas circulating system.

(14) Heat exchanger (inlet)

Water-cooled heat exchanger used to cool the laser gas that has

been heated by discharge, before it is drawn into the turbo

blower.

(15) Heat exchanger (outlet)

Water-cooled heat exchanger used to cool the laser gas that has

been heated by compression in the turbo blower, before being

forced into the discharge tubes.

(16) Gas controller (C4000i-B)

This gas controller constantly monitors the gas pressure in each

discharge tube and supplies fresh laser gas to the circulating

system to keep the pressure constant while exhausting degraded

laser gas. It also monitors the supply status of the laser gas, purge

check for the circulating system, and other items and has a

function of adjusting the amount of flow of the gas to be

exhausted. It provides the functions of both the C2000i-B

pressure controller and the exhaust controller.

(17) Pressure controller (C2000i-B)

This gas controller constantly monitors the gas pressure in each

discharge tube and supplies fresh laser gas to the circulating

system to keep the pressure constant while exhausting degraded

laser gas. It also monitors the supply status of the laser gas, purge

check for the circulating system, and other items.

(18) Exhaust controller (C2000i-B)

The exhaust controller is capable of controlling the flow rate of

the gas to be exhausted.


- 29 -

(19) Exhaust pump

This pump is used to vacuum-exhaust laser gas from the gas

circulating system such that its pressure falls to that used for laser

oscillation. In addition, it exhausts part of the degraded gas in the

gas circulating system.

(20) Hour meter

The hour meter records the total number of hours that the laser

oscillator has operated (how many hours the exhaust pump has

operated) to indicate whether maintenance or inspection is

necessary.

(21) Shutter

The shutter is normally closed to keep the laser beam inside, and

can be opened and closed with CNC commands. It is equipped

with a position sensor and a temperature sensor and constantly

monitors the open/close status and the shutter mirror temperature.

(22) Beam absorber

To perform laser oscillation without emitting the laser beam to

the outside, the laser beam is reflected on the shutter mirror and

guided into the beam absorber. The absorber, which is

water-cooled, absorbs the laser beam. The absorber is equipped

with a temperature sensor, which allows the system to constantly

monitor the temperature of the absorber.

(23) Water distributor unit

This unit distributes temperature-regulated external cooling water

to each unit inside the laser oscillator. The unit is equipped with

a flow switch, which allows the system to constantly monitor the

flow rate of the cooling water.

(24) Intermediate PCB B

This PCB relays signals collected into the shutter section, such as

those from the limit switch, absorber temperature sensor, power

sensor, and dew sensor, to the interface PCB.

(25) Input unit

This unit distributes the power supplied to the oscillator to each

unit in the laser oscillator. It also protects each unit from

overcurrents.

(26) Input unit control PCB

This PCB relays contactor open/close signals according to CNC

commands to the input unit.

(27) Interface PCB

This PCB communicates with the CNC via the FANUC I/O

LINK (serial interface).


- 30 -

(28) 24V PSU

This unit supplies DC power (24 VDC) to the interface PCB and

various units.

(29) Dew sensor

This sensor is mounted to the output coupler holder to monitor

the output coupler for condensation. It prevents faults in each

unit from occurring due to condensation.

(30) Guide laser (red semiconductor laser)

A diode laser is overlaid on the same optical axis as a guide beam

for checking the optical axis because the CO2 laser beam is

invisible to the unaided eye. The guide beam is emitted in

synchronization with the mechanical shutter only when the

shutter is closed. The guide laser can be used for roughly

adjusting the optical path of an external optical system and for obtaining a guide for the machining point.

(31) Beam folding unit

This unit extends the optical path length by folding back the laser

beam output from the output coupler in the oscillator and

outputting the beam from the outlet of the oscillator. It consists

of one circular polarization mirror and one zero shift mirror or of

two zero shift mirrors. It is provided in an oscillator of short

optical path length type; it is not provided in an oscillator of long

optical path length type.

(32) Low temperature sensor

This sensor measures the temperature of cooling water. When the

temperature in the laser oscillator is 20 or less in start-up of the oscillator, warm-up driving is executed by software. So it

prevents output power decrease.

(33) Oxygen sensor

This sensor measures oxygen density, so that it prevents that

trouble because of inflow of oxygen as assist gas from machine

tool occurs.

B-70445EN/01 3.INSTALLATION

- 31 -

3 INSTALLATION

Chapter 3, INSTALLATION consists of the following contents:

3.1 INSTALLATION PROCEDURE...............................................32

3.2 OSCILLATOR CONNECTIONS ..............................................38

3.3 DETAILS OF CHECKING........................................................50

3.4 PREPARATION PRIOR TO SHIPMENT.................................62

3.INSTALLATION B-70445EN/01

- 32 -

3.1 INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during

installation.

As soon as the oscillator is delivered, loosen the clamps of the

resonator described in (3) below.

CAUTION If the clamps of the resonator are left fastened for a

long time, the resonator can deform. As a result, a problem such as a failure in beam mode adjustment or insufficient laser output can arise.

(1) Check the environment at the installation location.

[Environmental conditions]

1 Ambient temperature +5 to 30qC 2 Temperature variation 1.1qC /minute maximum 3 Humidity 75% or below (relative humidity)

4 Vibration Acceleration not to exceed 0.05G.

Vibration amplitude not to exceed 5Pm.

5 Atmosphere

Dust must be minimized.

There must be no organic volatile

components. There must be no

flammable gas or dangerous gas such

as oxygen.

(2) Adjust the table horizontally where the oscillator is installed, and

then put the oscillator on, and fix it by the bolts.

(3) Remove resonator and shutter clamps.

The clamp locations are shown in Figs.3.1(a) to (b).


- 33 -

Shutterclamp

Resonatorclamp

Fig.3.1(a) Clamp locations (C2000i-B)

SHUTTER CLAMP

RESONATOR CLAMP RESONATOR CLAMP

Fig.3.1(b) Clamp locations (C4000i-B)


- 34 -

Bolt

Beam cover pipe

Beam flange

Space between beam flange and beam cover pipe

Mirror holder

Safety cover

Shutter unit

Beam cover pipe

Fig.3.1(f) Safety cover for shutter unit Fig.3.1(g) The details of Safety cover

(4) Check the safety cover of shutter unit

The beam flange of the safety cover is fixed with a small space

exists between the beam cover pipe installed in output

mirror holder. Check whether the interference with the beam

flange and the beam cover pipe, and loosening of beam flange

installation bolt . When there are interference of loosening,

adjust and tighten according to procedure below.

(a) In mirror alignment, do it after loosing bolt .

(b) After the alignment, adjust to keep a small space

between the hole of beam flange and the beam cover pipe.

And keep a small space , and fix the beam flange with

bolt .

(5) Check the outsides of units installed in the oscillator as follows:

Check items

1 Check whether any printed circuit boards are loose or removed.

2 Check whether any cables are damaged (such as damaged

sheathing).

3 Check whether any connectors are loose or detached.

4 Check that the discharge tubes are neither cracked nor damaged.

5 Check that the turbo blowers and other units are neither loose nor

missing.

6 Check that the power supply units and matching boxes are neither

loose nor missing.

7 Check that the input unit is neither loose nor missing.

8 Check that the connection to the electrode of each discharge tube is

not loose.


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Check items

9 Check whether any fittings part of the water piping and gas piping is

loose.

10 Check all screw terminals in the units.

11 Check the oil level in the turbo blowers, and check for oil

contamination. (See Subsection 4.3.1 for details.)

12 Check the oil level in the exhaust pump, and check for oil

contamination. (See Subsection 4.3.2 for details.)

(6) Connect the power and signal lines to the oscillator. (See

Subsection 3.2.3 for details.)

Check items

1 Oscillator power cable

2 Grounding cable : less than 10 ohm(Protection class 1 grounding)

3 Signal cable between the CNC and oscillator (or optical fiber)

4 Signal cables

(7) Check the input power supply voltage, frequency and phase

rotation. (See Subsection 3.3.1 for details.)

Also set the frequency of the power supply to the hour meter.

(8) Check the setting of communication jumper pin LINK1 on the IF

PC board. (See Subsection 3.3.1 for details.)

If the communication cable is a metallic cable, insert the jumper

pin LINK1 into JD1; if the communication cable is an optical

fiber cable, insert the jumper pin into the COP side.

(9) Connect the laser gas and cooling water pipes. (See Subsections

3.2.1 and 3.2.2 for details.)

Check items

1 Check the laser gas composition and purity (check whether the

specifications are satisfied).

2 Check the laser gas piping status.

3 Check that there is no gas leakage in the external piping between the

gas cylinder and oscillator.

4 Check the quality of the cooling water (use of tap water passed

through an ion exchanger).

(10) Check the supply gas pressure.

Check that the secondary pressure of the gas regulator is

0.1750.025 MPa.

(11) Turn on the power, then check the operation of the fan motors in

the housing.

The fan motors installed in the oscillator start turning as soon as

the power to the CNC is turned on. Check the operation of each

fan motor. Note, however, that the fan motor installed in the laser

power supply does not start until the oscillator sequence starts the

turbo blower operation.


- 36 -

(12) Check the parameters and setting data.

A parameter table for the laser oscillator is attached to the

oscillator. Some machine builders prepare a parameter table

including parameters for the laser oscillator. If data sheets are not

found, contact the machine tool builder.

(a) On the setting screen of the CNC, set the parameter write

enable state.

(b) Check the parameters, and enter the same values as

specified in the parameter table.

(c) On the setting screen of the CNC, set the parameter write

protected state, and press the reset button.

CAUTION 1 If the oscillator is started with an incorrect

parameter value specified, the oscillator may fail in the worst case. Be particularly careful when entering and checking parameter values.

2 Some parameters may require modification to, for example, suit the operating state of the oscillator or enable maintenance. When parameters are modified, it is recommended that modification history (date, parameters before modification, parameters after modification, and reason for modification) be recorded so that old parameters and invalid parameters are not used.

3 Be careful not to lose the attached data sheets, and keep them safely.

(13) Check that cooling water is supplied normally, and that there is

no water leakage inside the oscillator or at any external

connection points. (See Subsection 3.3.3 for details.)

Check that the temperature of the cooling water is set to 20 to

30C.

(14) Conduct an oscillator vacuum leakage test.

Check the oscillator for any internal leakage.

When performing the leakage check, use the automatic leakage

check function described in Subsection 3.3.4.

If there is internal leakage, locate the leakage according to the

leakage location method described in Subsection 3.3.5. (15) Check that the laser gas pressure is controlled normally.

(a) Set all bits of parameter No. 15025 through parameter No.

15028 to 0 because only the pressure control operation is to

be checked, without causing discharge.

Check that alarm Nos. 4073 and 4078 are not issued. If one

of the alarms is issued, see the solution in Section 5.2, and

take appropriate action.

(b) After completing the checking, reset the changed

parameters to their original settings.

Date post:	11-Oct-2015
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70445EN 01 MaintenanceManual C2000iB,C4000iB(Unprotected)

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