8.13301400_revised_USHIO UX-4 Series_Semicon Taiwan 2011

1

-LED Production Ver.-High Throughput-Large D.O.F.-Simple Mechanism

--LED Production LED Production VerVer..--High ThroughputHigh Throughput--Large D.O.F.Large D.O.F.--Simple MechanismSimple Mechanism

Presentation forUSHIO INC Business Division 1 Exposure BU

USHIO UX-4 SeriesProjection Aligner

USHIOUSHIO UXUX--4 Series4 SeriesProjection AlignerProjection Aligner


1 Company Overview--UUSHIOSHIO Products In TProducts In Taiwanaiwan MarketMarket

2 What is Projection Aligner ?

3 Why is UX-4 Projection Aligner ?-Target of UXTarget of UX--44

4 Performance of UX-4 Projection Aligner--FeatureFeature（（ResolutionResolution、、AlignmentAlignment、、Mark DetectionMark Detection、、Warp Warp wfwf HandlingHandling））

--Throughput & Throughput & Model Line UpModel Line Up

5 Sales Quantity

AgendaAgenda


1 1 Company OverviewCompany Overview--UUSHIOSHIO Products In TProducts In Taiwanaiwan MarketMarket


119.1

20082004 2005 2006 20070204060

80100120140160

（billion yen）

129.2151.4 148.1

120.8

20.1 18.5 19.7 208.9

20001990198019701964

89.1

51.8

15.92.60.7

Consolidated sales

Consolidated operating income

Head OfficeEstablishmentPaid–in capitalGroup CompanyNumber of PersonnelConsolidated salesConsolidated operating incomeConsolidated ordinary income

: Otemachi, Chiyoda-ku, Tokyo: March,1964: 19.6 billion yen: 44: 4,620: 120.8 billion yen: 8.9 billion yen

: 9.9 billion yen

＊As of March 31, 2009

Listed on the First Section of the TSE and OSE

1 1 Company OverviewCompany Overview


USHIO in the World - Location of Group Companies



Business DivisionⅠ

PhotolithoBU

Photon Process BU

UV lampsExcimer lamp/FLAIR heater/Heating equipment

Exposure BU

Extensive exposure equipmentPhoto-alignment equipmentProjection exposure equipment

Cure BU

ODFPhoto-alignment equipmentUV curing equipmentUV photo resist curing and Charge neutralization equipmentCharge erase equipment, etc.

Equipment Unit BU

Spot UV exposure equipmentMultipurpose exposure unitUV intensity meterSpectro-reflectance meter Accumulated UV meterUV intensity meter

PhotolithographyReforming

ELE FLA IR

UV hardening and bonding equipment

Optical measurement and visual inspection

equipment

Production DivisionⅠ

Production DivisionⅡ

Technology & Engineering Division

Business Division Ⅱ

Light as processing energyProcessing



UV Lamp for Lithography

UV lamp for circuit exposure,ａ key for

semiconductor/LCD’s development

Super-high-pressure UV lampWorldShare 80％


Roll to Roll Stepper for TAB and

COF LCD Driver IC Packaging Industry

WorldShare 100％


UX-5 Stepper For PCB Industry

WorldShare 90％

10

1 1 Company OverviewCompany Overview--USHIO TAIWAN,INCUSHIO TAIWAN,INC

EstablishedEstablished：：19871987’’JulyJulyCapitalCapital：：NT$238,000,000NT$238,000,000EmployeeEmployee：：71 per71 perServiceService：：Sales/CS/TSSales/CS/TSOfficeOffice：：Taipei/Taipei/HsinchuHsinchu//

Taichung/TainanTaichung/TainanOrganizationOrganization：：Sales 19 perSales 19 per

CCS/TS 21 perS/TS 21 per


2 2 WhatWhat’’ss ProjectionProjection AlignerAligner


Oval Condenser Mirror

Lamp

1st Plane Mirror

Integrator

2nd Plane Mirror

Condenser Lens

Mask

Projection Lens

Substrate

Off Contact

Mask Damage Free

Yield Up

2 2 WhatWhat’’ss ProjectionProjection AlignerAligner


3 Why is UX3 Why is UX--4 Projection Aligner ?4 Projection Aligner ?--Target of UXTarget of UX--44


Dicing trench ITO

Contact Pad Protect layer

PSS StepperStepper UXUX--44 UXUX--44

UXUX--44 UXUX--44L/S: < 3um L/S: > 5um L/S: > 5um

L/S: > 5umL/S: > 5um


EXCLUSIVE USEDEXCLUSIVE USED


φ4ｲﾝﾁ

ｳｼｵ＋中古 D

台数投資金額台数投資金額

10,000 2 65 2 80

20,000 3 115 4 160

50,000 6 195 9 360

100,000 11 375 16 640

月産（枚）

9602444013100,000

48012230750,000

2406140420,000

160470210,000

投資金額台数投資金額台数

Dｳｼｵ＋中古

φ6ｲﾝﾁ

月産（枚）

Number of Machine & Investment Plan（4 inch – 6 inch）

0

200

400

600

800

1 ,000

10 ,000 30 ,000 50 ,0 00 70 ,0 00 90 ,0 00

φ4ｲﾝﾁ月産（枚）

投資

金額

(M N

TD

)

0

5

10

15

20

25

30

台数

ｳｼｵ＋中古（台数）競合（台数）

ｳｼｵ＋中古（投資金額）競合（投資金額）

0

200

400

600

800

1 ,000

10 ,000 30 ,000 50 ,0 00 70 ,0 00 90 ,0 00

φ6ｲﾝﾁ月産（枚）

投資

金額

(M N

TD

)

0

5

10

15

20

25

30

台数

ｳｼｵ＋中古（台数）競合（台数）

ｳｼｵ＋中古（投資金額）競合（投資金額）



3 Why is UX3 Why is UX--4 Projection Aligner ?4 Projection Aligner ?--Trend of worldwide LED makerTrend of worldwide LED maker


3 Why is UX3 Why is UX--4 Projection Aligner ?4 Projection Aligner ?

NEW MASK SAVED NEW MASK SAVED

YIELD UP SAVED YIELD UP SAVED

HIGH THROUGHPUTHIGH THROUGHPUT

NTD 3.8mil NTD 3.8mil saved / 1 yrsaved / 1 yr

77,760 77,760 layer / 1 layer / 1 mthmth

44””→→66”” INCH ENLARGEINCH ENLARGETotally Effective 2.25 TimesTotally Effective 2.25 Times

AREA CAN BE PRODUCTEDAREA CAN BE PRODUCTED

NTD 37mil NTD 37mil saved / 1 yrsaved / 1 yr((ΦΦ4 inch mask)4 inch mask)

((□□5 inch mask)5 inch mask)


3 Why is UX3 Why is UX--4 Projection Aligner 4 Projection Aligner

NEW MASK SAVED NEW MASK SAVED NTD 3.8mil NTD 3.8mil saved / 1 yrsaved / 1 yr((□□5 inch mask)5 inch mask)

（（PXPX年年産能産能(layer)/(layer)/更換頻率更換頻率））**□□55inchinch光罩價格光罩價格==

777,600 layer/500 layer*777,600 layer/500 layer*ntdntd 2,500=2,500=NTD 3,888,000NTD 3,888,000

YIELD UP SAVED YIELD UP SAVED NTD 37mil NTD 37mil saved / 1 yrsaved / 1 yr((ΦΦ4 inch mask)4 inch mask)

[[（（PXPX年年産能産能((wfwf))））**ΦΦ44inchinch晶粒數晶粒數]*]*光罩光罩汚汚染不良率染不良率**晶粒單價晶粒單價==

[777,600/5*32,412]*0.05*0.15=[777,600/5*32,412]*0.05*0.15=NTD 37,805,357NTD 37,805,357

使用使用UXUX--4 4 一年可節省共一年可節省共NTDNTD 4,1694,169萬萬

11年餘機台價格即可回本年餘機台價格即可回本、、且現用現賺且現用現賺


4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @ResolutionFeature @Resolution


Si PR t:1um

L/S 2/2umL/S 3/3umL/S 4/4umL/S 6/6um

3um L/S Res. Guarantee

L/S 8/8um



Projection

100um Gap

Proximity


OKOK NGNG


Gap10umGap10um Gap30umGap30um Gap50umGap50um

Focus:Focus:--50um50um Just FocusJust Focus FocusFocus：：+50um+50um

+20um

+50um-50um

+20um

Projection

Proximity


OKOK

NGNG


4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @AlignmentFeature @Alignment


Work：Accuracy Test 8 inch Qz wf

Resist：OFPR-800、ｔ=1μm、150mJ/cm2(@UVD-365)

Acuracy Real Data

1枚目

2枚目

3枚目

4枚目

5枚目

基準

2um

P-P=1.69um

Accuracy ±1um

4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @AlignmentFeature @Alignment


Usual Tester

RD

±0.37um±1.16umUsual Polished Distortion

Large Diameter Tester

4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @AlignmentFeature @Alignment Totally Made By USHIO

Full Areas ControlledOnly Spot Areas Controlled

High Accuracy Distortion


4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @Mark DetectionFeature @Mark Detection


画像No.1

明視野照明

照明：halogen100W 80%

画像No.2

暗視野照明

照明：halogen150W 80%

ﾜｰｸ

ｱﾗｲﾒﾝﾄﾏｰｸ

ﾏｽｸﾏｰｸﾜｰｸ

ﾏｰｸ

＜照明方法の変更による改善例＞

低ｺﾝﾄﾗｽﾄも暗視野照明で段差によるﾏｰｸ検出が可能

画像処理技術視認性改善

暗視野照明による低ｺﾝﾄﾗｽﾄの視認性向上


＜ﾏｰｸ認識方法＞

ｱﾗｲﾒﾝﾄﾏｰｸ形状や大きさが安定しない場合ｴｯｼﾞｻｰﾁ法で高認識

画像No.1 ﾊﾟﾀｰﾝ－ﾒﾘｯﾄ－

・ｻｰﾁ再現性が良い (約0.2pxl)

・ｻｰﾁ速度が速い (約5msec)

画像No.2 ｴｯｼﾞｻｰﾁ－ﾒﾘｯﾄ－

・欠けやｺﾞﾐに影響されにくい

・反射率やｻｲｽﾞの変化に強い

画像処理技術視認性改善

不安定な形状にも対応できる独自のｱﾙｺﾞﾘｽﾞﾑ

＊ｴｯｼﾞｻｰﾁはｵﾌﾟｼｮﾝとなります


画像処理技術視認性改善例

ITO膜、レジストの塗布ムラワークの視認性改善実績Before After

レジストの塗りムラや,透明電極

により画像のコントラストが悪い

⇒重ね合わせ精度が悪化!!

マークの視認性が向上し、

重ね合わせ精度±1umを達成!!


4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @Warp Feature @Warp wfwf HandlingHandling


250

300

350

400

450

500

550

600

-100 -50 0 50 100

Y方向位置　[mm]

ﾜｰ

ｸ反

り　

[um

]

250

300

350

400

450

500

550

600

-100 -50 0 50 100

Y方向位置　[mm]

ﾜｰ

ｸ反

り　

[um

]

Before Vaccum

Afetr Vaccum

Example of Cruel Curve

Pasted with Si&Glass (t=600um)

Convex Curve

Before Vaccum

Afetr Vaccum

4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Feature @Warp Feature @Warp wfwf HandlingHandling

Concavity Curve


4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Throughput & Model LineThroughput & Model Line--upup


高精度ﾀｲﾌﾟ高精度&高生産性

B Cｳｴﾊｻｲｽﾞ inch 2 4 4 6

露光エリアφ mm 100 150

解像力 μm 3 3

重ね合せ μm ±1 ±1

ランプ出力 W 1000 2000

露光時間(Typical) sec 3 3 1.5 1.2

装置型式

オプションマスクライブラリ、GEM、インライン対応、ﾊﾞｰｺｰﾄﾞによるﾏｽｸ管理

装置サイズ 2200(W)x1600(D)x2400(H) 2,000kg

500

A低ｺｽﾄﾀｲﾌﾟ

特徴

(1)生産性が非常に高く、投資コストを大幅に抑制できる(2)LED基板の反りウエハの対応実績多数あり(3)既存のPX用マスクを流用可能(4)トラブルシューティング機能によるダウンタイム低減

一括投影露光方式露光方式

5

100

±1

4 Performance of UX4 Performance of UX--4 PJ Aligner4 PJ Aligner--Throughput & Model LineThroughput & Model Line--upup


5 Sales Quantity5 Sales Quantity


Roll Stepper for COF(COF: Package for LCD Driver)

Stepper for WL-CSP

Stepper for FC-BGA / FC-CSP

Over 1200 systems in Market

Aligner for LED/MEMS

5 Sales Quantity5 Sales Quantity

USHIO LIGHTING EDGE TECHNOLOGIES

Ushio Inc. started out in 1964 as a manufacturer of industrial lUshio Inc. started out in 1964 as a manufacturer of industrial light sources and ight sources and has since evolved into a "creator of light" that offers light sohas since evolved into a "creator of light" that offers light source and optical urce and optical systems segments around Expectations of "light" as an systems segments around Expectations of "light" as an effecttheeffectthe development development of an affluent of an affluent societsociet the world as well of use and application as "energy".the world as well of use and application as "energy".

YOU CAN DO WITH USHIOYOU CAN DO WITH USHIO

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8.13301400_revised_USHIO UX-4 Series_Semicon Taiwan 2011

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