A First Look at NT9080 Webinar Slides 100408

8/13/2019 A First Look at NT9080 Webinar Slides 100408

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Introduction to the NT9080

April 2010


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2010 Veeco Instruments Inc. NT9080 Surface Metrology System2

Webinar OverviewWebinar Overview

Optical Profiler History

Technology Overview

White Light Interferometry PSI

VSI

NT9080 Introduction and Overview

NT9080 Applications

Summary


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Optical Profiler History


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Veeco Optical-Industrial MetrologyVeeco Optical-Industrial Metrology

Founded as WYKO Optical Inc.

December 1982

Grew from UA Optical Sciences Headquartered in Tucson,

Arizona

Located in the heart of OpticsValley

Merged with Veeco July, 1997 Technology Leadership

Over 60 patents

3 R&D 100 Awards

6 Photonics Circle of ExcellenceAwards

10 generations of WLI products!

The Veeco facility in Tucson, AZ


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The ContourGT Product FamilyThe ContourGT Product Family

GT-K1 GT-X8

Increasing Functionality and Automation

GT-X3


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Technology Overview


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What is White Light Interferometry?What is White Light Interferometry?

Digitized Intensity

Data

Beamsplitter

Detector Array

Illuminator

MicroscopeObjective

Translator

Mirau

Interferometer

LED

Sources

Field

Stop

Aperture

Stop

Sample

Dichroic

Mirror


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Typical Interferometer DiagramTypical Interferometer Diagram

The expanded beamThe expanded beam

exiting from the lightexiting from the light

source is divided by asource is divided by a

Beamsplitter into twoBeamsplitter into twobeamsbeams

One beam is reflectedOne beam is reflected

from the Referencefrom the Reference

Mirror, and the other oneMirror, and the other one

from the Samplefrom the Sample

These two beams areThese two beams are

recombined by therecombined by the

Beamsplitter to interfereBeamsplitter to interfere

The imaging lensThe imaging lens

images the interferogramimages the interferogram

onto the CCD cameraonto the CCD camera

CCDCCD

Sample

ReferenceMirror

Beamsplitter

Test arm

Reference arm

Optical Path Difference (OPD) Difference in optical path lengths that beamstravel in Reference and Test arms

When OPD=0, the brightest fringes are in focus


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Interference Lines are Similar to

Contour Map Lines

Interference Lines are Similar to

Contour Map Lines On a map each dark line

represents a fixedelevation

The spacing in thisimage is 100

Spacing is set by themapmaker

On an interferogrameach line also representsa fixed elevation

Spacing is 1/2 the

wavelength of the light(usually 300nm)

Spacing is set byphysics!

100

300nm


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Two Measurement Modes on the NT9080Two Measurement Modes on the NT9080

Phase ShiftingInterferometry (PSI) Uses monochromatic illumination

and calculates the phase of thesinusoidal fringes

Phase is converted to surfaceheight

Sub-nm noise, 135nm steps or

below Vertical Scanning

Interferometry (VSI) Uses broad spectrum illumination

and calculates the point of best

fringe contrast Best contrast point indicates the

relative surface height Few nm noise, 10mm steps

possible

Data Pits on Compact Disk (PSI)

Gravure Printing Roll (VSI)


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Phase Shifting Interferometry (PSI)Phase Shifting Interferometry (PSI)

PSI Operation Grab Intensity Frames

at 90 degree phase

shifts Calculate Phase Unwrap Phase Calculate Height

31

24)(II

IITan

=

),(42

),(

2),( yx

yxyxHeight

==

( ) ( ) ( )( ) ( )yxIyxI

yxIyxITanyx

,,

,,,

31

241

=

PSI Characteristics

Measure very smooth objectswith high precision

Uses monochromatic (green)light for best fringes

Vertical resolution


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PSI Lowest Noise Floor TechniquePSI Lowest Noise Floor Technique

Subtraction of 2 sequentialmeasurements of SiC Mirrorwith 64 averages on NT9080

0.02nm Ra, 0.7nm PV

Single measurement of SiCmirror with 64 averages onNT9080

0.14nm Ra, 0.2nm deepscratches can be seen


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PSI SummaryPSI Summary

Lowest noise floor

Fastest measurement mode

Limited surfaces can be measured Pixel-to-pixel steps and slopes up to ~135nm height can be

measured

Surfaces must be optically smooth (


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Vertical Scanning Interferometry (VSI)Vertical Scanning Interferometry (VSI)

Rough surfaces, vertical range >135nm to 10mm Utilizes white light

Sees a few fringes where part is in focus

Vertical resolution about 3nm Measurement time depends on scan lengths,

typically 5 to 30 seconds


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Operation of Optical Profiler in White

Light Vertical Scanning

Operation of Optical Profiler in White

Light Vertical Scanning

VSI

Step HeightStandard

Objective isscanned through

focus

Peak of fringecontrast is located

and logged

Height map ofsurface is generated


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VSI SummaryVSI Summary

Versatile measurementtechnique for most anysurface characterization Near-universal measurement mode!

Up to 10mm vertical featurescan be measured

Camera saturation is tolerated More light means more data

feedback

Slower than PSI

3nm noise floor maydominate measurementsof smoother samples

Human Bone Sample

Micro-gear etched in Si


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Making a Surface Measurement is EasyMaking a Surface Measurement is Easy

Place your sample onthe NT9080 samplestage No surface

preparation is required Choose the correct

objectivemagnification for thejob

From 1 to 100x Focus on the sample Choose the proper

measurement mode Set the illumination

level Measure!

Results are justseconds away

Ask for a demo today! Were glad to demo via web

on at your facility We can measure samples at

our facility and provide anapplication report tailored foryour measurement needs


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Introducing: The NT9080


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NT9080 OverviewNT9080 Overview

The NT9080 is an easy-to-use,bench-top 3D surface mappinginstrument that providesdedicated metrology capability

at a cost-effective price forR&D, production, or QA/QCapplications

The NT9080 provides a goodoptical metrology entry point

for 3D non-contact surfacecharacterization, particularly forcustomers who are traditionally2D-based system users

The NT9080 is geared toward

customers who require noautomation capability and havelimited purpose, dedicatedmeasurement requirements


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The NT9080 is Designed to be a

Dedicated Metrology Platform

The NT9080 is Designed to be aDedicated Metrology Platform

1. Fixed 0.55X or 1.0x field of view lens

Fixed FOV lenses multiply themagnification of the selected objective

2. Single Objective Adapter or 4 PositionManual Turret

Add up to 4 objectives and rotate any intoposition manually

3. Manual Z-Axis Focus Easy to use focus knob allows for quick

adjustment of the z-axis

4. Manual 4 Stage

A variety of fixtures can be attached tothe system to properly hold samples

5. Manual Tip-Tilt

Remove tilt in the system for bestmeasurements

5

2

4

1

3


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NT9080 Provides Excellent Performance

and Capability

NT9080 Provides Excellent Performanceand Capability


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Unsurpassed Control & AnalysisSoftwareUnsurpassed Control & AnalysisSoftware

Vision32 industry-leading software

2D and 3D dataanalyses

Over 200 analysis and

visualization tools Unmatched standard

toolkit and application-specific analyses

Access control forproductionenvironments


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NT9080 Applications


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Non-Contact 3D Profiling has MajorAdvantages Over Stylus ProfilometryNon-Contact 3D Profiling has MajorAdvantages Over Stylus Profilometry

Stylus is inherently a two-dimensional technique

WLI is a extremely fast ascompared to stylusprofilometry

Stylus touches the surface!

Minimum feature sizesdetected are determined by

size of stylus tip used

Accurate Ra measurementmust be orthogonal to surfacegrain

Schematic showing the limitations of the stylus due to

the tip size (K J Stout et al 1993)


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Why Ra is Not EnoughWhy Ra is Not Enough

Many engineered surfacesstill call out AverageRoughness (Ra) as thepass/fail criteria

Ra is a 2D measurement andtherefore limited in explainingsurface characteristics

Different height distributionscan exhibit very similar Rafigures leading to misleadingdata conclusions

A more accurate analysis is a3D measurement whichremoves ambiguity and addsdata density

Profiles showing the same Ra with differing heightdistributions. (Surface Texture Analysis TheHandbook,L Mummery 1992)


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Example: Ra cant identify a passingsurfaceExample: Ra cant identify a passingsurface

Problem: Brake Rotor Ra meets specification for bothsurfaces below. One works and one fails rapidly.

Solution: Specify the surfaces with 3D textureparameters like Sdq

Ra: In spec

Sdq: In spec

Ra: In spec

Sdq: High


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Solar Cell Roughness and EfficiencySolar Cell Roughness and Efficiency

Correlatesurfaceroughness

parameters tocell efficiency

0.1796mw/mm 0.1552mw/mm 0.1319mw/mm


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Solar Cell Conductor Trace AnalysisSolar Cell Conductor Trace Analysis

The NT9080s large FOVprovides for a more accuratetopographical image of the Ag

trace

Obtain a more complete

understanding of the Ag tracein less time

Optimize material usage Increase efficiency Decrease costs Volume = 1,648,000 um^3


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Solar Cell Scribing and IsolationSolar Cell Scribing and Isolation

Edge isolation to prevent from shortingbetween front and back surface efficiency improvement

Laser-scribed trench analysis for depth,width to ensure complete isolation

Current leakage is a major source ofefficiency loss

Key metrics: Cleanliness Depth Width Ability to capture edge roughness


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Precision Machining: Wear VolumePrecision Machining: Wear Volume

Quantifymaterialcharacteristics

with wearstudies andquantifymaterial

removal interms ofvolume

Calculatevolume aboveand below thewear scar


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Precision Machining: Wear VisualizationPrecision Machining: Wear Visualization

The regions of wear on asurface are identified andquantified using analyses

such as Bearing Ratio Peak areas that erode first are

quantified

Load bearing surface is

identified Valley areas that would contain

lubricant are quantified


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Surface Roughness MeasurementsSurface Roughness Measurements

Characterizesurfaces from super-smooth to extremely

rough 3D S-parameters

providedirectionality,

periodicity, peaksvs. troughs, etc. Implements new ISO

standard algorithmsand filtering

Quantify stiction andfriction Cylinder wall roughness


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Precision Machining: CorrosionPrecision Machining: Corrosion

Examine surfacefinishes for rate ofcorrosion overlonger time periods

Evaluate surfacespatial frequencychanges with Power

Spectral Density(PSD) analysis

Selectively removeand visualize spatialfrequencies withadvanced digitalfiltering

Y PSD of surface finish

1

10

100

1000

10000

10 100 1000

Spatial Frequency (1/mm)

PSD(mmn

mUncorroded7 hours corroded

14 hours corroded

21 hours corroded

Individual measurements taken a 7 hour intervals


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Corrosion areas detected usingMultiregion AnalysisCorrosion areas detected usingMultiregion Analysis


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Printing ApplicationsPrinting Applications

Paper SurfaceRoughness

Lithography PlateRoughness

Printed GlucoseTester dimensions

and volume


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Medical MeasurementsMedical Measurements

Heart Stent (Inner Surface) Razor Blade Edge Angle

Syringe Surface


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Summary


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The Family of Veeco 3D Optical ProfilersThe Family of Veeco 3D Optical Profilers

The NT9x00 and ContourGTFamily of White Light OpticalProfilers

Low noise floor Up to 92m/sec VSI scans

Large vertical range (10mm)

Self-Calibration Capabilities

High lateral resolution (


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Veeco: Your Metrology SolutionsProviderVeeco: Your Metrology SolutionsProvider

Confocal Metrology: The VCMseries

3D imaging of surfaces withnanometer scale vertical resolution

White Light Interferometers: TheNT and ContourGT Families

3D profiling with angstrom scalevertical resolution

Stylus Profilers: The Dektakseries

Contact based 3D step height withangstrom z-height resolution

Atomic Force Microscopes

Atomic level resolution

Dektak 150 NT-9800

Icon AFMVCM-200A

All Veeco Metrology Systems data can be analyzed with Veecos Vision software platform for display and analysis


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Worldwide Service and SupportWorldwide Service and Support

Worldwide In-Region Service &Support

Quick response, no languagebarriers

Worldwide Inventory of SpareParts in Regions

Drastically reduces instrumentdown-time

Customer Care and Call Centers

Live in APAC

Coming soon to North America andEurope

Dedicated Service Quality Team

Ensures customer satisfactionmeets highest standards

Y W ld id 3D S f M t lYour Worldwide 3D Surface Metrology


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Your Worldwide 3D Surface MetrologyPartner and Community LeaderYour Worldwide 3D Surface MetrologyPartner and Community Leader

Greg Maksinchuk, Product Manager, VeecoInstruments, Inc. --- [email protected]

Recorded Webinars:

www.veeco.com/Profiler-Webinar-Archives

Upcoming Webinars:

www.veeco.com/Profiler-Webinars

WEBINAR INFORMATION

www.veeco.com/NT9080


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THANK YOU!

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A First Look at NT9080 Webinar Slides 100408

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