DYNASERVDIRECT DRIVEAC SERVO DRIVES

Certified forISO9001 andISO14001

JQA-EM0202JQA-0422

Proposing positioning solutions to support the latest manufacturing equipment

10 N∙m and 20 N∙m models with a thickness of 42 mm40 N∙m model with a thickness of 62 mm

Built-in absolute encoder

Flat Profile Models: DR5H00

Absolute Model: DB5C

2

High absolute accuracy of ±15 arc seconds (DM1A,DM1B*)

High resolution of 4,096,000 pulses/rev (DM1A)

Large center aperture of 150 mm (DR1A, DR5A)High speed (DR5 )High torque up to max. 500 N∙m (DR5A)

ϕ

Large Center Aperture, High-speed, and High-torque Models: DR1 , DR5

High-accuracy and High-resolution Models: DM1

*: Except the DM1B-006

Direct Drive DYNASERV

3

High accuracy

Why use a direct-drive motor? (Comparison with a conventional AC servomotor)

The load is mounted directly to the motor, so the motor accuracy becomes the equipment accuracy, which

contributes greatly to increasing the equipment accuracy.

Furthermore, there is no drop in efficiency due to the presence of a reduction gear or other parts, which helps to

save energy.

The motor’s compact size also enables reducing the equipment size, which helps to reduce both the design

process time and maintenance costs.

The desired operation angle and number of divisions can easily be set, simply by changing the command values.

Example) Index table

DYNASERV

DR5H00

Index table

Reduction gear + encoder

Coupling

AC servomotor

Encoder

Compact equipment

size saves space

Direct-drive motor Conventional AC servomotor

High accuracy

Maintenance-free

Reduced design process time

No backlash or play

f

Energy saving

DM1A

Outer RotorOuter RotorOuteOuter RotoRotorThe outside of

the motor rotates.

High resolution of up to 4,096,000 divisions per revolution.

This is equivalent to 1.5 µm at the tip of a 1,000 mm arm. Absolute

accuracy of ±15 arc seconds, repeatable accuracy of ±1 arc second.

The magnetic circuit uses the hybrid method (magnetic bias method).

This allows achievement of powerful torque at low current and reduces

unnecessary heat generation, which contributes greatly to energy savings.

Low Heat Generation and

Energy Saving

Employs I-PD control that is ideal for direct-drive motors.

High servo stiffness enables remaining motionless even when

subjected to external force.

Resistant to External

Force

Accurate Positioning

Direct DriveDirect Drive DYNASERV

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DYNASERV’s high accuracy becomes the equipment accuracy.The motor force can be directly transmit-ted, and there is no drop in efficiency due to the presence of a reduction gear or other parts.

When a machining accuracy of less than 5 µm is required, please contact your Yaskawa representative.

Direct Drive

Rotation is supported by cross roller bearings, so minimal dust is produced, enabling achievement of Class 10 cleanliness (10 or fewer dust particles of diameter 0.5 µm per 1 cubic feet).

Clean Structure

The hybrid method (magnetic bias method) magnetic circuit achieves powerful torque at low current.In addition, low heat generation is also a major feature of DYNASERV, which suppresses drops in efficiency due to heat generation and other factors.

High Energy Efficiency

Models can be selected with an accuracy of up to 5 µm for axial and radial run-out of the load-mounting surface.

Precision Machining Accuracy

Large center apertureThis is a very convenient structure that enables passing of wiring, a shaft, a laser or other items through the center of the motor.

Convenient Large Center Aperture

Load-mounting surface

Absolute accuracy: ±15 arc secondsRepeatable accuracy: ±1 arc secondResolution: 4,096,000 pulses/revPositioning can be performed in pulse units.

Large center aperture: 150 mmϕ

0.30

10

30

50

00.5 0.8

Particle diameter ( m)

Qua

ntity

(P

artic

les/

ft3

・min

ute)

μ

Permanent magnet flux

Electromagnet flux

Winding

Permanent magnet

Stator

Rotor

Teeth

Axial run-out

Radial run-out

Measurement standard for run-out (axial and radial) accuracy

DM1A

DM1A

DR1ADR5A

The inside of the motor is maintenance-free.

Cross roller bearing

RotorThe outside rotates.

Direct Drive

5

The highly-efficient magnetic circuit (hybrid method) reduces motor heat generation and has a high duty, enabling continuous operation. For this reason, DYNASERV is widely used in semiconductor-related equipment. Feed-forward adjustment also enables adjustment time to be shortened and shot yield increased, which helps to greatly improve takt time.

Reasons why customers around the world choose DYNASERV

DM1A

DB5C-005 DB5C-010 DB5C-015

High Accuracy, High Resolution and High Stiffness

Contributes to energy saving

Low Heat Generation and Improved Takt Time Save Energy

Flexible Response to Design Changes

The working range such as the number of divisions or arms can be changed, simply by adjusting the command values.

Easier-to-use Motors

Built-in absolute encoderMotors equipped with an absolute position detection function are also available.

Dedicated Drivers

Dedicated intelligent drivers for DYNASERVThese intelligent drivers aim to enhance control perfor-mance and operability. The built-in auto tuning function enables automatic setting of the optimum servo param-eters according to the load inertia, and various field networks are also supported.

High accuracy

Absolute accuracy: ±15 arc secondsRepeatable accuracy: ±1 arc second

High resolution

Encoder resolution: 4,096,000 pulse/rev

High stiffness

I-PD control

The high-resolution encoder enables highly accurate positioning. In addition, high holding force when stopped makes DYNASERV ideal for applications that require positioning accuracy when stopped.

The motor directly supports the load.

Intelligent Driver DrvG /DrvP

4 kW Class2 kW Class500 W ClassDB5C

DM1A

DR5ADR5E

DR1ADR1E

The use of special high-stiffness bearings (cross roller bearings) increases the resistance to dis-placement and provides excellent load capacity. The motor can also directly support the load.

High Displacement Stiffness and Superior Load Capacity

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DM1A(100 N·m)

DM1B(15 N·m)

DM1C(4 N·m)

DR5H00(20 N·m)

DR5H00(40 N·m)

DR1A(50 N·m)

DR5A(500 N·m)

DB5C(15 N·m)

Convenient ToolA convenient support tool is provided for startup, servo adjustment and maintenance.

Extensive Product InformationNumerous technical materials and other information required for motor and driver operation are available.

Contact SupportContact your Yaskawa representative for inquiries ranging from estimates to troubleshooting.

Extensive Lineup of Over 45 Models

With compact models, slim-type models and large high-output models, the DYNASERV series offers choices well suited to the user’s intended applications.For details, refer to the lineup on page 10.

Conscientious Service and Support

Support for Various Field Networks

Supports high-speed pulse interfaces, MECHATROLINK- , CC-Link and PROFIBUS-DP.

Support for Overseas Standards

UL, CE and KC can also be supported.For more information, contact your Yaskawa sales representative or sales agent.

7

Ready!

ConnectionDYNASERV is connected to a computer in which the support tool is installed.

Auto-tuningThe auto-tuning function is used to oscillate the motor, measure the load inertia and load mass, and automatically set the parameters.

Auto filterThe auto filter function measures the frequency response characteristics (FFT measurement), monitors the servo adjustment status, and automatically sets the mechanical resonance suppression filter.

Other useful and convenient functions are also provided.Other useful and convenient functions are also provided.

To further increase the servo stiffnessThe servo stiffness can be set by setting the servo adjustment parameters.This enables adjustment while checking the actual motor status.

To shorten the adjustment timeManual fine adjustment of the feed-forward amount helps to shorten the adjustment time.

A wizard-format support tool helps users navigate through motor startup.This allows even novice users to perform motor adjustment tasks.

Start of operation

The servo stiffness can be adjusted and set by cursor operations.

The feed-forward amount can be finely adjusted manually.

Startup and Servo Adjustment

When More Detailed Servo Adjustment is RequiredWhen More Detailed Servo Adjustment is Required

This tool helps to shorten equipment startup and adjustment times.

Dedicated DYNASERV Support Tool

A convenient support tool is provided for startup, servo adjustment and maintenance.

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For more information, contact your Yaskawa sales representative or sales agent.For a list of sales offices in each district, check the “Contact” page at

http://www.e-mechatronics.com/en/index.html

Oscilloscope function capable of simultaneously measuring 4 channelsA 4-channel oscilloscope function is provided that can monitor all parameters.This enables complete comprehension of the motor operation.The acquired waveforms can be stored in files for use in analysis.

Motor-less operation functionOperation simulations can be performed using only the support tool and driver.This is convenient for debugging control operation with upper equipment, such as during device startup.

Multiple language supportJapanese, English and Chinese (both simplified and traditional Chinese characters) are supported.The display language can easily be changed.

Downloading of user dataParameters can be downloaded and copied.This eliminates the need to adjust each unit separately when manufacturing multiple devices with the same structure.

Error log displayAn error log with up to 16 errors can be displayed.In addition, selecting a displayed error number shows a detailed explanation of that error.

Even More Detailed and Convenient

Maintenance and Troubleshooting

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Extensive Lineup

DM1A

DM1B

DM1C

DR5H00

DR1A

DR1E

DR1B

DR5A

DR5E

DR5B

DR5C

DB5C

264

158160

116

224

264

205

145150

264

205

150

107

107

58

25

25

50

150

76

56

150

76

56

26

26

Moto

r Model

4 5 6 8 10 15 20 30 40 45 50 60 70 100Diamet

er

（mm）Cen

ter Apert

ure D

iamete

r

(mm)

Maximum Output Torque (N･m)

High-accuracy and High-resolution Models

Absolute Models

Large Center Aperture, High-speed, and High-torque Models

Flat Profile Models

An extensive lineup supports selection of

the ideal motor for the user’s equipment.

DM1A-050 DM1A-100

DM1B-006 DM1B-015 DM1B-030 DM1B-045 DM1B-060

DM1C-004

DR1A-050

DR1A-100DR5H00-010 DR5H00-020 DR5H00-040

DR1E-030 DR1E-070 DR1E-100

DR5E-100

DB5C-005 DB5C-010 DB5C-015

DR1B-008 DR1B-015 DR1B-030 DR1B-045 DR1B-060

DR5B-030 DR5B-050 DR5B-070

DR5C-005 DR5C-010 DR5C-015

10

High accuracy and high resolution

Built-in optical encoder

Excellent torque-to-weight ratio

Aluminum chassis type

Large center aperture: DR1A, DR5A (Max. 150 mm)

High-speed type: DR5

High-torque type: DR5A (Max. 500 N∙m)

Built-in magnetic encoder

Wide output torque range: DR1A (50 N∙m to 400 N∙m)

Wide variety of models: DR1E (7 models)

Slim shape with low height

Built-in magnetic encoder

Built-in absolute encoder

High-speed type

1.2

2.42.5

2.5

3.6

0.8/1.01.2/1.8

1.22.4

2.4

2.0

4.0

5.0

6.0

6.0

±1

±1±3

±3

±0.4

±3

±3

±3

±3

±4

±5

±5

±5

Max

imum

Spee

d

(rps)

Repea

table

Accur

acy

(arc

sec)

4,096,000

2,621,440

2,621,440

3,407,872

1,638,400

1,228,800

1,015,808

851,968

638,976

557,056

425,984

425,984

Encoder

Res

olutio

n

(puls

e/re

v)

Features

±15

±15±20±60

±20±60

±80

±30

±45

±45

±45

±90

±90

±150

±150

Absolut

e Acc

urac

y

(Typ

.) (a

rc se

c)

130 150 160 200 220 250 300 400 500

Direct Drive

DYNASERV

ϕ

DM1A-150 DM1A-200

DR1A-150 DR1A-200 DR1A-300 DR1A-400

DR1E-130 DR1E-160 DR1E-220 DR1E-250

DR5A-300 DR5A-400 DR5A-500

11

μ

Examples of Applications

Roll to Roll

DYNASERV supports the latest manufacturing equipment.

High-accuracy positioning increases equipment performance

High-accuracy feed on the order of several mNo backlash, and reduced torsion and response delaySpace-saving, simple configurationReduced design process time and maintenance costs

High-function Film

Increased bonding accuracyCan be used in clean environmentsImproved takt time and design process time

Smartphones

LED inspection equipment

Secondary Batteries

Handler for IC test system

Supports variable indexing and design changesHigh-accuracy positioning and higher inspection levelsImproved takt time Achieves faster test process times and high-speed transportation.

Semiconductors

LED

DYNASERV directly drives the roll.

Positioning accuracy ±6 m

Crystalline solar cell electrode forming equipment

Touch panel glass bonding equipment

Reduced shadow loss (increased printing accuracy)Easy setup changes (cell size changes)Improved takt time and simple configuration

Photovoltaic Solar Cells

Improved takt time and accuracyReduced effects of temperature and dust

Camera

Electrode forming (Al)

Electrode forming (Ag)

Electrode forming (solder)Firing furnace

(fire-through)

800mm

μ

12

Reduced size (space saving) and cost Concentrates the transport functions of two units into a single unit

Improved takt timeExample of improvement: 180° operating time shortened from 0.35 s to 0.25 s

Cycle time 1.8 s (improvement of 10%)

Enables improved takt time and saving of space

DYNASERV also plays an active role in the following fields

Recording Media

Large-scale astronomical telescopes

Low heat generation and high stiffnessHigh-accuracy rotational positioningEnvironmental resistance and optimization of wiring

Science

Space savingSupports design changesReduced equipment design process timeImproved takt time

Electronic component transportation equipment and robots

Electronic ComponentsDVD spattering equipment

Disk import from manufacturing line

Transportation of imported disks to vacuum chamber

Machine tool transportation

Transportation from previous process

Dynamic steering tester

Increased reproducibility of evaluation results

Automotive

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DVD bonding equipment

DYNASERV’s high servo stiffness is ideal for applications needing to remain motionless after stopping.

Variable indexingReduced design process timeImproved takt timeIncreased bonding accuracy

Highly reliable automated linesImproved takt timeReduced equipment design process timeSupports design changes

Assembly lines

Increased cutting accuracy and higher yieldImproved takt timeClamp or brake mechanism not required

High stiffness and high torqueSpace saving

Clean applications

Recording Media

Wafer dicing equipment

Machine Tools

SemiconductorsServo press

Machine Tools

Examples of Applications

14

μ

DYNASERV reduces costs

CVD and PVD spattering equipmentIncreased accuracy

Reduced mechanical interference with

vacuum chambers during transportation

Shorter cycle timesSimultaneous transportation of multiple

high-load panels

Cost reductionReduced number of parts

Vacuum chamber

High-speed transport and high-accuracy positioning

Electrode forming equipmentLCD Scriber

LCD

High stiffnessIncreased yieldReduced number of parts

Semiconductors

Increased machining accuracy and higher yieldImproved takt time

Variable indexingReduced design process timeSupports larger indexing table sizesImproved takt time Increased printing accuracy and higher yield

Semiconductors

Offset CD and DVD printers

Recording Media

Scribing linearity: within 20 µm/1,000 mm

Turning: 90°/s

1 pixel

Alignment and repeating motion between 0 and 90°

90° operating time: 0.4 s or lessRepeatable accuracy: ±6 m (±3 arc seconds) or less at a distance of 400 mm from the rotation center

Printing table

Wafer

15

DIRECT DRIVEDYNASERV

LITERATURE NO. CHEP S800001 51A

14-7-11Published in Japan September 2014 14-5 0 -1

In the event that the end user of this product is to be the military and said product is to be employed in any weapons systems or the manufacture thereof, the export will fall under the relevant regulations as stipulated in the Foreign Exchange and Foreign Trade Regulations. Therefore, be sure to follow all procedures and submit all relevant documentation according to any and all rules, regulations and laws that may apply.

Specifications are subject to change without notice for ongoing product modifications and improvements.

© 2014 YASKAWA ELECTRIC CORPORATION. All rights reserved.

YASKAWA ELECTRIC CORPORATION

IRUMA BUSINESS CENTER (SOLUTION CENTER)480, Kamifujisawa, Iruma, Saitama 358-8555, JapanPhone 81-4-2962-5151 Fax 81-4-2962-6138http://www.yaskawa.co.jp

YASKAWA AMERICA, INC.2121 Norman Drive South, Waukegan, IL 60085, U.S.A.Phone 1-800-YASKAWA (927-5292) or 1-847-887-7000 Fax 1-847-887-7310http://www.yaskawa.com

YASKAWA ELÉTRICO DO BRASIL LTDA.Avenida Piraporinha 777, Diadema, São Paulo, 09950-000, BrazilPhone 55-11-3585-1100 Fax 55-11-3585-1187http://www.yaskawa.com.br

YASKAWA EUROPE GmbHHauptstrasse 185, Eschborn 65760, GermanyPhone 49-6196-569-300 Fax 49-6196-569-398http://www.yaskawa.eu.com

YASKAWA ELECTRIC KOREA CORPORATION9F, Kyobo Securities Bldg., 26-4, Yeouido-dong, Yeongdeungpo-gu, Seoul, 150-737, KoreaPhone 82-2-784-7844 Fax 82-2-784-8495http://www.yaskawa.co.kr

YASKAWA ELECTRIC (SINGAPORE) PTE. LTD.151 Lorong Chuan, #04-02A, New Tech Park 556741, SingaporePhone 65-6282-3003 Fax 65-6289-3003http://www.yaskawa.com.sg

YASKAWA ELECTRIC (THAILAND) CO., LTD.252/125-126 27th Floor,Tower B Muang Thai-Phatra Complex Building,Rachadaphisek Road, Huaykwang, Bangkok 10310, ThailandPhone 66-2693-2200 Fax 66-2693-4200http://www.yaskawa.co.th

YASKAWA ELECTRIC (CHINA) CO., LTD.22F, One Corporate Avenue, No.222 Hubin Road, Huangpu District, Shanghai 200021, ChinaPhone 86-21-5385-2200 Fax 86-21-5385-3299http://www.yaskawa.com.cn

YASKAWA ELECTRIC (CHINA) CO., LTD. BEIJING OFFICERoom 1011, Tower W3 Oriental Plaza, No.1 East Chang An Ave.,Dong Cheng District, Beijing 100738, ChinaPhone 86-10-8518-4086 Fax 86-10-8518-4082

YASKAWA ELECTRIC TAIWAN CORPORATION9F, 16, Nanking E. Rd., Sec. 3, Taipei 104, TaiwanPhone 886-2-2502-5003 Fax 886-2-2505-1280http://www.yaskawa-taiwan.com.tw