AEROTECH - version2.animotion.co.krversion2.animotion.co.kr/PDFfiles/EMTIbroch.pdf · WORLD...

Dedicated to the Science of Motionwww.AEROTECH.com

Automation Solutions for Electronic Manufacturing, Test and Inspection, and Data Storage

AEROTECH

Technically Superior Components Create...

High Volume Manufa

Corporate HeadquartersPittsburgh, PA USA

High Performance Su

A E R O T E C H A T A G L A N C E

Comprehensive Technical Support Services

Award-winning FiberMax®

6-axis nanopositioner

Highest throughput linear motorcartesian gantry systems

Highest performance brushlesslinear and rotary motors

NDrive®A3200

NPaq®

Award-winning Automation 3200 1-32 axis motion, vision and I/O system

ALS1000 serieslinear motor stages

ADRTrotary stagesystem

Custom softwareapplication support

3D models to facilitate faster and moreaccurate system layout

Advanced analytical techniques foroptimization of system geometry

acturing World Wide Service and Support

Aerotech Germany Aerotech UKNew Facility ExpansionPittsburgh, PA USA

ub-Assemblies... and Best-in-Class Sub-Systems.

High speed cylindrical lasercutting systems

Production-proven, large format air-bearing systems for flatpanel and semiconductor applications

Customengineered,vacuum andclean-roomcompatiblesystems

Highly integrated motion sub-systemswith machine frame, display and pack-aged electronics

Worldwide startupservice and onsitetraining

Fully equippedon-site trainingfacilities

Over 100,000 axes installedworldwide

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401 Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-96793720

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Copyright 2004. Information in this catalog is subject to change without notice.

WORLD HEADQUARTERS: Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, USA +1-412-963-7470 Fax: +1-412-963-7459 Aerotech Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK +44-118-9409400 Fax: +44-118-9409401

Aerotech GmbH, Südwestpark 90, 90449 Nürnberg, Germany +49-911-9679370 Fax: +49-911-967937203

www.aerotech.com

H I G H T H R O U G H P U T E L E C T R O N I C M A N U F A C T U R I N G

ComponentInspection

ComponentPlacement

Pick-and-Place/AssemblyWaferSingulation(Dicing)

StencilManufacturing

PC Board Drilling

Turn page for examples of successful projects

SpeedAccuracy

+ Reliability

THROUGHPUT

Aerotech Optimized Solutions


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Aerotech designs and manufactures gantries for many of the largest manufacturers in the world. These systems are perfectlyengineered to provide superior performance in applications as varied as pick-and-place, automated assembly, vision inspection,dispensing stations, and packaging applications. With our extensive experience and broad line of linear and rotary motors, linear-motor-driven and ball-screw stages, advanced controllers and drives, Aerotech can deliver the ideal gantry for your application.

SPECIFICATIONSVelocity to 3 m/s and acceleration to 5 g

Dual Y-axis linear encoders

Optimized mechanical structure for high servo bandwidth

Travel up to 1 m x 1 m

SPECIFICATIONSDriven with brushless linear servomotors

Noncontact linear encoder feedback

Customizable base configuration for handlingsystems

S O L U T I O N S f o r

A S S E M B L Y / P I C K - A N D - P L A C E . . . . . . . . . . . . . . . . . .

SPECIFICATIONSDriven with brushless linear servomotors

Rugged design for 24/7/365 use

Noncontact linear encoders

Customizable Z and theta axes

CUSTOMERTop-five semiconductor and electronics metrologyand inspection equipment manufacturer

Dual Y-axisbrushless linear

servomotors

Optimized mechanicalstructure for highservo bandwidth

CUSTOMERNumber-one global semiconductormanufacturer

Extremely low profile withcustom mounting plate

Optimized cable managementsystem for long life

CUSTOMERWorld-leading cell phone, pager, andsemiconductor manufacturer

Travel up to1.3 m x 1.5 m

Customizable Zand theta axes



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SPECIFICATIONS Large custom granite with through-hole and machine base withintegral controller and drive chassis

High-power X-axis brushless linear servomotor stage

Optimized cable management

Sealed stages permit use in harsh environment

. . . . USED BY THE WORLD’S LEADING MANUFACTURERS

SPECIFICATIONSHigh speed, high acceleration, linear motor drive

Eliminates ball-screw or belt wear and belt slippage problems

Modular design benefits: single-axis actuators easily combined inX-Y, “T” configurations, and gantry assemblies (pictured)

LMA gantry options include dual independent X-axis mountingheads, customized mounting base, and risers

Customizable Zand theta axes

SPECIFICATIONSVelocity to 3 m/s and acceleration to 3 g

Driven with high-power brushless linearservomotors

Noncontact linear encoders

Optional machine base and risers withintegral controller and drive chassis

Travel up to 1 m x 1 m

Optimized machine baseand risers with integral

controller and drive chassis

Through-hole

Customgranite

structure

CUSTOMERLargest independent disk-drivemanufacturer

LMA SERIESLinear motor actuator (single axis and gantry systems)

CUSTOMERLeading United States military/aerospace manufacturer

Integralcontroller anddrive chassis

Sealed stage


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P C B L A S E R D R I L L I N G / S T E N C I L C U T T I N G

Configuration options from length of travel, to XYmotion, to gantry allow for increased flexibility forhandling wide variations in part geometry and size.

Direct-drive mechanics result in increased throughputand higher accuracy/repeatability and lower total cost-of-ownership.

Hard covers and side seals protect bearings and encodersfrom debris introduced during the lasing process.

Optimized stage configuration allows for highacceleration and, along with the A3200 DigitalAutomation Platform tool path optimization, reducescycle times.

laser drilling and stencil cutting applications re uirehigh-performance motion, as well as environmentally-protected stages to withstand the debris generated by thelasing process. Aerotech manufactures a variety ofmechanics to meet these challenges.

ALS5000 “stage” gantry

ALS25000XY

Hard cover providesprotection againstdebris

Side seals protect againststage contamination

Program display shows programline responsible for unacceptablefollowing error

Zoom feature allows detailed analysis of problems

Optimized laser stencil cutting utilizing Automation 3200



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W A F E R S I N G U L A T I O N

Precision integration of the wafer chuckallows for reduced start-up costs

Optional Z and θ mechanics allowfor varying wafer thickness andorientations

Patented braking mechanismprevents dither on rotary axisduring mechanical scribing

Direct-drive technologyguarantees consistentperformance over the life ofthe product

150 - 20 µm die spacing

Large aperture allows foroperations on the top andbottom of the substrate

Open frame ALS3600

Wafer singulation applications present several challenges formotion system and component suppliers. To meet thesechallenges, Aerotech uses our patented technologies as well asour vast experience in developing leading-edge motionsystems and components.

High accuracy, minimized dynamic yaw, and excellentdynamic straightness allow narrow streets for waferdicing.

Scalable mechanics allow wafers from small to large(300 mm).

Minimized planar flatness eliminates the need forautofocus on laser scribing systems.

Environmentally protected stages allow long life andless maintenance.


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Aerotech's NVision toolkit for the Automation 3200 automation platform is designed forrapid prototyping with end users, system integrators, and OEMs in mind.

NVision can be easily applied to any application such as pick-and-place, part identifica-tion, and part measurements [NVision builds on the Matrox Imaging Library (MIL®)].

Standard vision tools such as blob analysis, centroid calculations, edge detection, andgeometrical feature analysis are integrated with the NVision software toolkit.

Using NVision you can quickly set up,test, and save inspection objects with noprogramming necessary.

Our user-friendly pull-down and pop-upvision controls let customers test inspec-tion objects for robust performance.

VISION ASSISTED MOTIONCONTROL and RAPID PROTOTYPEINSPECTION

T O O L S f o r

V I S I O NI N S P E C T I O N


A U T O M A T E D O P T I C A L I N S P E C T I O N

Aerotech has developed many optical inspection solutions, and we apply our expertise to provide a solid, high-performancefoundation for the optical/vision elements. Systems range from high-end linear-motor-driven models packaged with allcontrol elements in an optimized machine base, to modular systems specifically designed for cost-sensitive applications. Zand theta axes can be equipped with your choice of application-specific hardware such as machine vision, pick-and-placemechanics, or transducers.

Velocity to 3 m/s with accelerations to 5 g

Resolutions to 20 nm

Customizable Z and q axes

Optional machine base and risers

Sizes from 100 mm x 100 mm to 1500 mm x 1500 mm Z-axis machine vision



www.aerotech.com


N O N D E S T R U C T I V E T E S T I N G

Aerotech is involved in test and inspec-tion across a wide array of industrieswith applications including s,ultrasonic, eddy current, x-ray, optical,and electronic. All of these applicationsrely on Aerotech s unmatched preci-sion, accuracy, and durability.

Active VibrationIsolation (AVI)

Pictured travel :1800 x 800 x 200 mm

Large opening forEUT or tank

Multi-axis coordinated motion

Linear amplifiers and shieldedcables for low noise emission

Rigid mechanical structure andprecise axis alignments providehighest overall accuracy andrepeatability

Ironless linear motors and slotlessrotary motors provide cog-freemotion for smooth scanning

Position-synchronized outputs fortriggering measurements on the fly

Varying levels of integration frompositioning stages to completemotion systems

Flexible stageconstruction allowsmultiple Z axes

4-axis Coordinate MeasuringMachine (CMM) with integratedelectronics


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D A T A S T O R A G E

COMPONENT MANUFACTURING

Custom finishes for ultra-clean and ESD compliance ensurethe integrity of your process

A wide range of linear amplifiers for low-noise environments

The Automation 3200 32-axis motion, vision, PLC, robotics and I/Odigital automation platform provides complete machine or work-cell control.

ASSEMBLY AND TEST

Rugged construction for 24/7/365 operation

Direct-drive technology eliminates wear items, reducingdowntime and increasing MTBF

Highly-configurable gantries and component solutionsprovide flexibility for machine designers and quickchangeovers for manufacturers

RESEARCH AND DEVELOPMENT

Rotary air-bearings with nanometer asynchronous errormotions allow precise reading/writing of data tracks

Direct-drive linear stages to simulate high bandwidth HSA motions

High stiffness, vertical lift stages allow for variable head flyheights

Aerotech s innovative, industry-leading motion and position control technologies achieve a competitive advantage for ourcustomers, providing a solution for their most demanding component manufacturing, assembly and testing, and research anddevelopment applications. As areal densities and data rates increase, Aerotech has responded by offering motion and positioncontrol solutions with sub-arc-second rotary and nanometer-level linear precision while maintaining the / operationalreliability vital to success in today s industry. ndustry-specific features like S protection and clean-room capabilities arestandard.



www.aerotech.com

ElectrolessNickel Coating

Side seals protectagainst stagecontamination

S O L U T I O N S f o r H E A D G I M B A L A S S E M B L Y ( H G A ) and

H E A D S T A C K A S S E M B L Y ( H S A )

Highly-conductive ultra-clean surfaces reduce damageto heads from ESD

Extremely accurate and repeatable stages guaranteeaccurate part placement for precise alignment of HSA

Automation 3200 vision tools ensure accurate placementof heads to suspension arms


S U S P E N S I O N A R M M A N U F A C T U R I N G

Precision force control makes the ANT series an excellentchoice for gram testing

Submicron resolution/accuracy for small part geometry

Automation 3200 control system with advanced laser firingfunctionality allows for precise cleaning of suspension arms

Highly configurable and customizable mechanical solutions,along with state-of-the-art control offerings, enablemanufacturers to assemble HGA and HSA manufacturingsystems to suit a variety of different processes.

Increased areal density and smaller drive size have resulted inconsiderably smaller suspension arms. To satisfy the needs of theindustry, Aerotech has developed the ANT series linear and angu-lar positioners. These super-precision, direct-drive stages providethe performance and reliability required for 24/7/365 manufactur-ing while minimizing space requirements.

Integral cablemanagement

Optional z-axis

Covers protect againstpart contamination

Large aperture allows for additional tooling

Head Stack Assembly


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N A N O A N D S U B - A R C - S E C O N D P R E C I S I O N S T A G E S

Aerotech s Nano-Translation ANTT stages combine high speed, accuracy, resolution, repeatability, and reliability into anultra-compact package. No other automation tool manufacturer has successfully combined all of these features into a singleproduct offering designed to meet the rigors of a 24/7 manufacturing environment. The Aerotech ANTT stage series is readyto take your manufacturing alignment or test process to the next level.

The Many Advantages of Aerotech Nanopositioners

Modular Mounting Holes forEasy Multi-Axis Assembly

ANT-25Llinear stage

ANT-20Ggoniometer

Compact size

High SpeedOffering 250 mm/s speed at10 nm resolution, ANT nano-translators are several timesfaster than comparablepiezo-based translators

Sub-Arc-Second Resolution

Model Resolution*(arc-sec)

ANT-20G-50 0.0576ANT-20G-90 0.0269ANT-20G-110 0.021ANT-20G-160 0.014

* Assumes a 500x Aerotech MXH MultiplierOutstanding AccuracyAerotech’s patent-pending real time axiscalibration technology allows the highestlevel of stage and system accuracy.

ANT-25L Calibrated Accuracy

-1.0000

-0.8000

-0.6000

-0.4000

-0.2000

0.0000

0.2000

0.4000

0.6000

0.8000

1.0000

0 5 10 15 20 25

Position (mm)

Accu

racy

(micr

ons)

Patented Noncontact, NoncoggingDirect-DriveOur direct-drive technology has excellentin-position stability with no hysteresis orbacklash, enabling accurate and repeat-able nanometer-scale motion.

Performance Enhanced by Supporting Aerotech Technology



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Linear Stages Vertical Lift Stages Linear Actuators

Goniometers Rotary Stages Easily Configured Multi-Axis Assemblies

Ultra-Smooth ControlAerotech linear amplifiers providequiet operation for applications whereamplifier switching noise cannot betolerated.

ANT-20RAPatent Pending

ANT-20G-110 and ANT-20G-160U.S. Patent #6,442,851

ANT-25L and ANT-50LPatents Pending

ANT-25LAPatents Pending

ANT-4VU.S. Patent #5,731,641

6-axis ALS 130 with ANT-20RA andANT-20G-90 and ANT-20G-50

Turnkey Drive and Control Electronics

Smooth Operation

The Automation 3200 is our award winning32-axis digital automation platform.

Choose fromself-containeddrives... ...rack-mount drives... ...or fully integrated

machine frame designs.

A Wide Selection

NLDriveNPaq®


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POWERFUL SOFTWARExtensive suite of development tools

• MOTION® SMC — Software Motion Controller

• CONTROL® SDK — Software Development Kit

• VIEW® HMI — Human-Machine Interface

• LOGIC PLC — Programmable Logic Controller

• VISION VCM — Vision Control Module

odular software architecture permits mixing andmatching of applications to suit the automation processrequirements.

rogrammers can create their own applications withN ontrol S , a collection of Active -basedcomponents.

asy to use out of the box.

A3200 ADVANTAGESHigher throughput due to high-performance control,network, and high-power drivesHigher quality output accuracy and precision due to fullydigital drive and advanced servo algorithms

aster startup and changeover results from fully integratedmotion platform, easy to use setup tools, and extensivediagnostics

ower startup and lifecycle cost due to lower componentcount and reduced engineering timeHigher reliability due to fewer componentsSimplified integration as all major automation componentsare bundled into one platformUser interface flexibility due to local or remote processing

uture roof architecture built on commercially availables running Windows 2 / operating systems

THE INTELLIGENT 32-AXIS MOTION,VISION, PLC, ROBOTICS, & I/O PLATFORM

EXTENSIVE I/O CAPABILITYAll Automation 32 drives and drive aqsare available with an integrated /

ase T thernet interface. This permitsAutomation 32 systems to interact withthird-party I/O boards and s.

EASILY INSTALLED DIGITAL DRIVESFROM 10A-100AAll drives are self-contained with aninternal bus supply. lug them in,make the network connection, andthe unit is ready to go.

PLCEthernet I/O Expansion

Analog and Discrete I/O

Distributed Motion Controlotion control is performed at

the drive level.

IEEE-1394 (FireWire®) INDUSTRY STANDARD, SUPER-HIGH-PERFORMANCE COMMUNICATION NETWORK

DIGITAL DRIVE FEATURESW or linear

Integrated / ase Tthernet

Onboard x65536 encodermultiplication2 kHz position, velocity,and current loopsample rate

Integral powersupply

Sinusoidalcommutation

ocal I/O ports

Soft PLC



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IEEE-1394/FIREWIRE®

ADVANTAGESeterministic architecture maintains consistent

performance updates across all 32 axes3 to times faster than competitive motionnetworks 3.2 Gbps over fiber No system degradation as number of axes increasesVersatile high-speed, low-cost communicationsystem

uture roofommercially available

Nonproprietary architectureOH I compliantInternational standardI - 3 4 standard on s

ROBUST, HIGH-PERFORMANCEMOTION ENGINE CAPABILITIES

oint-to-point motionInterpolated motionVelocity profiling

ulti-block look-aheadlectronically geared motionutter compensationN functionalitylectronic A profilingosition synchronized outputast position capture

High-speed registration

Gantry modeotor controlual loop control

Axis calibrationOrthogonality correction3 error mappingHelical interpolationAutotuning

oordinate transformationsNormalcy, parts rotation,mirroring, and retrace

ubic spline fittinginematics

otion generation and synchronization are centralized at the .otion execution is decentralized at the drives where the servo

loops are closed. A32 operates on any standard desktop orindustrial .

RETROFIT TO EXISTINGMOTORS & DRIVESUse as an integrated systemor interface to existingmotors and drives in a cost-effective retrofit.

Motion Controller

NServo NStep

Robotics

Vision

Any ServoAmplifier

Any StepperDrive

Any Stepper MotorAny Brush or Brushless Servomotor

NPaq®

6-Axis Drive Rack

D I S T R I B U T E D C O N T R O L F R O M A E R O T E C H


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ompared with traditional I card solutions which contain many breakout modules and excessive wiring, thedistributed architecture of the Automation 32 reduces integration time by replacing unnecessary cabling andelectronics with a simple plug-and-play ireWire cable. In addition, many commonly used devices such as encodermultipliers and I/O modules can be integrated into the N rive , further reducing the amount of cabling and panel spacerequired. The elimination of the components and cables means faster integration, lower support costs, and fewer spareparts to manage all designed to make your integration smoother and improve the bottom line.

TRADITIONAL 6-AXIS SOLUTION AUTOMATION 3200 SOLUTIONIndustrial PC with multiple open PCI slots

8-axis control card withencoder expansion

Interfacemodules

Encoder multipliers

Drives

Motors

I/O module

Any P3-800 class computer running Windows®

2000, XP with FireWire® port

NDrives with integrated encodermultipliers and I/O connections

Plug-and-play FireWire® cable

Significant Integration and Support Savings

- 38% less wiring

- 65% fewer components

- Plug-and-play drive interface cabling (FireWire®)

- Simplified troubleshooting

- Increased design flexibility

BENEFITS

Motors

SIMPLIFIED INTEGRATION...REDUCED COST

NSERVO FOR RETROFIT APPLICATIONSNServo is a FireWire® based four-axis interface module with digital rateand position loops that provides three-phase output (+/-10 volt) forcommutated motors and accepts resolver, encoder, or tachometer feed-back for loop closure. With NServo, the Automation 3200 system caninterface with drives and motors that do not support FireWire®, such asspindle drives, induction motors, and other specialized motors.

NSTEP FOR STEPPER MOTOR APPLICATIONSWith NStep, the Automation 3200 system can interface to steppermotors and galvanometers not supported by FireWire® for open-loopcontrol. This provides a simple and inexpensive mechanism to controlsynchronized motion with servo and stepper motors from a singlecontroller. NStep provides two axes of control with two clock anddirection outputs per axis.



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The Automation 32 and associated hardware N rive , NServo, and NStep are ideal for retrofitting existing machines.xisting motors and/or drives can be used with our digital automation platform to improve production rates, shorten setup,

and decrease lifecycle cost. This low cost, low-risk life extension improves performance and extends capital equipment life.

Existing motors are retainedsaving the cost of new motorswhile improving performance

Up to 32 axes of control

NDrivesAerotechMotorsNDrives

Existingservomotors

and/orsteppermotorsExisting amplifiers and motors

ServoDrives

Servomotors

StepperDrives

StepperMotors

Complete Aerotech solution formaximum performance increase

Existing motors and amplifiersare retained saving maximum

cost while still improvingperformance

Up to 32 axes of controlUp to 32 axes of control

Automation 3200Control

NServoand/or

NStep



HIGH PERFORMANCE, COST-EFFECTIVE MACHINE RETROFITS


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Low costsolution

(NCDrive)

Base unit

(NDrive®)

Expanded I/O capability

(NDrive®)

Linear amplifiers forlow-noise applications

(NLDrive)

High power (NDrive®)

I N T E L L I G E N T , N E T W O R K E D D R I V E S

10 - 30 amps 10 - 30 amps 10 - 30 amps 10 - 20 amps50 - 100 amps

Wide output power range from 10 A peak to 100 A peak at 320 VDC

No transformer required; direct connection to AC line

PWM and linear power stages available

Digital current, velocity, and position loops for improved motion stability

Optional integrated encoder multiplier for higher throughput and reduced wiring

Flexible design provides ability to drive brushless and DC brush-type servomotorsas well as stepping motors

Compatible with all linear androtary feedback devices:resolver, encoder (incremental,absolute), inductosyn, laserinterferometer

20 kHz sample rate for currentloop and 8 kHz for servo loops

High bandwidth server tominimize position and rate errors

UL, CE, and CSA approved

6 axes of amplifiers

Frameless rotary motors

ive frame sizes

rameless design for easy integration into O machines

Slotless stator and high-pole-count rotor provide zero cogging forexceptional velocity and position control

Up to 46 Nm of peak torque and 36.5 Nm continuous torque



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C O M P O N E N T S O L U T I O N S f o r

H I G H E R T H R O U G H P U T

Linear motors

Advanced design yields 4 greater continuous output force than competitive models

Zero-cogging design allows super-smooth velocity and position control

Special magnet options available for increased force output

Utilizing a symmetrical mounting pattern, the modular tracks mount end-to-end forunlimited travel

Optional cooling for higher rms force

Up to 474 N of peak force and 2 N of continuous force

Slotless, brushless motors

Standard N A sizes for easy integration and retrofitting

Advanced slotless design yields superior velocity and position control

rushless technology provides maintenance-free use and delivers higheracceleration than brush counterparts

Brushless motors

Standard sizes N A for easy integration and retrofitting

Wide range of torques cover most applications .5 - 75 Nm

Advanced -pole design matched with skewed stator minimizes torque ripple andcogging for smoother velocity control

ugged construction ideal for 24/7 production applications

Optional I 65 through I 67 construction allows use in harsh environments

HIGH PERFORMANCE

Aerotech s A rotary air-bearing stage providessuperior angular positioning, velocity stability, highstiffness, and superior error-motion performance in acompact package. It is designed to meet the exactingrequirements of wafer inspection, V mastering, disk-drive test and servo writing, optical inspection andfabrication, and S/nanotechnology devicefabrication.

LOW PROFILE

In order to combat stack-up related errors, Aerotechdesigned the A S series direct-drive rotary stages. Theselow-profile stages reduce the working height of yoursystem while still providing superior velocity stability andhigh accuracy. lear apertures also help to reduce systemheight by allowing product feed-through or laser beamdelivery and avoiding additional tooling.


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A WIDE SELECTION of

S U P E R I O R R O T A R Y M E C H A N I C S

FLEXIBILITY

A T series tables are our most flexible, highperformance rotary positioners. eatures include large-diameter clear apertures, integral brakes, rotary unions,integral slip rings and collets. owered by a high-torque-output, cog-free, direct-drive brushless motor, A Tsprovide outstanding velocity stability, wobble, and runout.

HIGH OFF-AXIS PAYLOAD

mploying precision worm gears, Aerotech s A T Seriesstages provide outstanding accuracy and repeatability.These tables are also capable of high speeds and high loadcapacities due to a wide array of brushless motor options. In addition, a range of gearing options allow the customerto optimize their table for speed or resolution.



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A WIDE SELECTION of

S U P E R I O R L I N E A R M E C H A N I C S

HIGH THROUGHPUT

irect-drive linear motors provide the highest accelerationand velocity with the lowest maintenance and total cost-of-ownership of any competing drive technology.Aerotech offers the widest range of direct-drive linearpositioners on the market, including the extremely popularAGS series high-throughput gantry systems.

INTELLIGENT DESIGNS

TeflonT impregnated hard covers provide protection fromsparking and other debris introduced in the machiningprocess. Side seals keep dirt and particulates out of thestage, protecting bearing surfaces and linear encoders fromcontamination and reducing maintenance costs. Integratedcabling enhances both the reliability and appearance ofyour machine. These are just some of the ways ourmechanics contribute to making your system world-class.

PRECISE POSITIONING AND CONTROL

esigned with fully-preloaded air bearings, the Aseries stages represent state-of-the-art precisionpositioning and control. apable of picometer resolution,the A s offer outstanding velocity stability and ultra-smooth motion in a low profile, noncontacting design.

CUSTOM DESIGNS

on t see exactly what you need Aerotech has over 3years experience in designing successful custom electro-mechanical systems. rom nanopositioning systems for thedisk-drive industry to large air-bearing systems withcustom control algorithms for flat-panel inspection, wehave the precision motion experience to provide theoptimum solution for your application.


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F U L L Y I N T E G R A T E D A U T O M A T I O N S O L U T I O N S

or over 3 years, Aerotech has been building fully-integrated automation platforms for our customers. ysupplying machine structures and interfacing elements withour motion control systems, we have been able to partnerwith our customers to create high-performance machines.These machines have given our customers a competitive

advantage by improving their throughput and improving partquality. all us today to hear how we can increase yourmanufacturing output.

Aerotech automation solutions exceed your expectations within budget and on time.

VISION SYSTEMSCognex, Matrox,integrated withprocess

I/Odiscrete, networked, PLCs,integrated with controls

MOTION SYSTEMSXYZθR, goniometers,direct-drive linear &rotary positioners,steppers, airbearings, piezos

ISOLATION SYSTEMSpassive, damped, or active vibrationisolation

INTEGRATEDELECTRONICSautomation servers,computers, drives,power meters, lasercontrollers

MACHINE BASEsteel weldment, aluminum, stainless,composite, granite, anti-static

HMIcustom software, integrated 3rd party modules,touch screens, 3rd party panels, remote server

SAFETY ENCLOSURESinterlocked, light curtains

MOUNTING AND TOOLING PLATESgranite, aluminum, steel, custom holepatterns, custom finishes

Structure

Interface Motion andControl



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APPLICATION SUPPORT AND DEVELOPMENTAerotech engineers and manufactures specialty high-performance subsystems that meet customer needs for variousapplications. Our highly-trained staff of experienced software and hardware engineers enables our customers to get toproduction readiness faster. Aerotech provides real-time collaborative support either on site at your facility, on siteat our facility, or through the web.

E N G I N E E R E D S Y S T E M S

Ion Beam Profiling in Vacuum

Advanced Laser Machining Discrete Part Milling Machine

Liquid-Cooled, Vacuum-PreppedSystem

Precision Optical Production High-Precision Air Bearings

Rapid Prototyping Advanced Pick-Place-Inspect Station

Patterned Media Inspection

High Volume Production InspectionStation

4-Axis Coordinate MeasuringMachine

Optical Lens FabricatingPrinthead Inspection Station High-Accuracy Laser Machining

Electronic Inspection High-Speed Optical Indexer


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A E R O T E C H O N L I N E

Product Navigation

Current Product and Company NewsWorldwide Sales Office Locator

Customer Service

Aerotech s website at www.aerotech.com is your comprehensive resource for all Aerotech information worldwide. Ourproduct information is very thorough and better than having a catalog ach product section comes with all theinformation available in print and includes downloadable 2 and 3 models. egister for our e-newsletter toreceive bi-monthly news on all of the current activities at Aerotech.

Select your Market



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A W A R D - W I N N I N G A E R O T E C HAerotech’s strong commitment to research and development has resulted in many patents and a number of awards for ourinnovative products. We look forward to the future and our part in advancing the capabilities of our customers for manyyears to come.

Machine DesignSlides/Ways

Lightwave OFC 2001Attendees’ Choice AwardFiberAlign® 130

PD & D Top 50Product 2002Automation 3200

Aandrijftechniek 2002“Most Innovative Product”FiberMax®

Lightwave NFOEC2002 Attendees’Choice AwardFiberMax®

Design News 2002Best Product of theYear finalistAutomation 3200

A E R O T E C H : A N I S O 9 0 0 1 R E G I S T E R E D C O M P A N Y

Since 1995, Aerotech’s quality system has been certified tothe ISO 9001 standard. The ISO 9001 standard encompassesthe Aerotech organization through manufacturing.

As part of our commitment to the ISO standard, weformally survey our customers on a monthly basis whichprovides valuable feedback as to how to continuallyimprove our products and processes.



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Aerotech offers comprehensive worldwide training and customer service eitherat customer facilities or at one of our Aerotech training centers.

Our Training Program Features:

Standard and customized courses

Hands-on training with Aerotech positioning systems

Interactive training with experienced instructors

Comfortable, spacious facilities

W O R L D W I D E T R A I N I N G A N D S U P P O R T

Aerotech North America Aerotech GmbH

Aerotech Ltd

INSTALLATION AND START UP (COMMISSIONING)Aerotech offers startup and commissioning services to minimize startup times, reduce cost and accelerate time-to-pro-duction. By combining our product knowledge with your process and application expertise, new systems and applica-tions can be completed faster at a reduced overall cost.

ENGINEERING SUPPORTAerotech provides complete engineering support for our products, including onsite support and maintenance, andremote support via phone, fax, website, and/or WebEx® software. As a manufacturer staffed by engineers, we under-stand the unacceptability of downtime.

TRAININGAerotech training classes are designed to help our customers realize the full potential of our products. By demonstratingall of a product's features and how to use them, customers have been able to reduce startup time and quickly optimizetheir applications. Aerotech’s classes have been developed, and continually upgraded, using feedback from ourcustomers.

Aerotech has over 30 years of expertise in designing motion control and positioning systems and components with anunsurpassed track record of reliability. When you make the choice to purchase from Aerotech, we urge you to learn howto get the most from your new Aerotech products. Aerotech provides both onsite (your facility) and/or in-house (ourfacility) training for our customers’ convenience.

1970s: Introduced first ball-screw-based positioning systemswith advanced linear servo drives. This represented a revolu-tionary advancement in system throughput - five times betterthan lead screw and stepper motor technology. Adapted andwidely deployed by IBM, DuPont, and Westinghouse. Patenton coarse and fine adjustment positioning mechanism (U.S.Patent #3,727,471). Established subsidiary in Germany.

1980s: Introduced UNIDEX® series microprocessor-basedmotion controllers. Developed brushless amplifier and rotarymotors which increased throughput, reliability, anddecreased maintenance. Patents on a switching amplifierwith MOSFET driver circuit (U.S. Patent #4,554,512), amilling machine tool changer (U.S. Patent #4,426,763), amicrostepping translator controller (U.S. Patent #4,652,806),and for closed-loop torque angle control of a synchronousmotor (U.S. Patent #4,884,016). Established subsidiary inthe United Kingdom.

1970 1980 1990 1991 1992 1993 1994 1995 19

1990: Introduced the U500 ISA PC-bus-based motion con-troller and the UNIDEX® 511 stand-alone, multi-axis motioncontroller.

1991: Patent on successive fringe detection position interfer-ometry (U.S. Patent #5,018,862). Introduced AOM seriesAZ/EL optical mounts.

1992: Patent on quadrature error correction (U.S. Patent#5,134,404). Introduced the BLM series linear brushlessmotors.

1993: Introduced the BM series brushless rotary motors.

1994: Introduced the ABL8000 air-bearing stage and BASeries amplifiers.

1995: Introduced the ALS2000 linear motor stages series.Developed the ABL9000 H-bridge air-bearing stage.

Aerotech: A History Dedicated to the Science of MotionAerotech innovation means:

• Highest Throughput

• Best Accuracy

• Lowest Cost of Ownership

• Best Return on Investment

2002: FiberMax® wins NFOEC 2002 Attendees’ ChoiceAward. Automation 3200 named Design News 2002 BestProduct of the Year finalist and PD & D EngineeringAwards 2002 Top 50 Product. Patents on a calibratedencoder multiplier (U.S. Patent #6,356,219), on a direct-drive tilt and goniometer stage (U.S. Patent #6,442,851), ona small footprint vertical lift and rotation stage (U.S. Patent#6,486,574), and on a calibrated encoder multiplier (U.S.Patent #6,501,403).

2003: Aerotech developments include the ADRT, ADR160,and AVL 113/125 Series Rotary Stages; the ASR2000 High-Speed Spindle; the ATS1000, ATS1100-H, and ALS SeriesLinear Stages; the ABL1000 Air-Bearing Stage; the BLLinear Amplifier; and continuous improvements to theA3200 32-Axis Motion, Vision and I/O System. Aerotechexpands headquarters. Patent on printed circuit linear motor(U.S. Patent #6,664,664).

1996: Introduced the AGS10000 linear-motor-driven gantry.

1997: Introduced the BA Intellidrive.

1998: Patent on linear motor driven vertical lift stage (U.S.Patent #5,731,641). Won the Machine Design AchievementAward for slides and ways. Introduced the BLMF series flatlinear motors and BAL linear amplifier.

1999: Introduced the ABL2000 linear air-bearing stage andthe U500PCI PC-bus-based motion controller.

2000: Won the Machine Design Achievement Award forslides and ways.

2001: Aerotech develops the first software-based, 32 axismotion, vision and I/O controller — the Automation 3200.The Automation 3200 is voted one of the year’s 50 mostinnovative products by the readers of Design News.FiberAlign® 130 wins OFC 2001 Attendees’ Choice Award.

996 1997 1998 1999 2000 2001 2002 2003 2004

- Aerotech Headquarters - Direct Field Sales Office - Aerotech Subsidiary - Representative

Aerotech’s Worldwide Sales and Service Locations

CA0304A

Dedicated to the Science of Motion

WORLD HEADQUARTERS, Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238 • 412-963-7470 • Fax: 412-963-7459 Aerotech, Ltd., Jupiter House, Calleva Park, Aldermaston, Berkshire RG7 8NN, UK • +44-118-9409400 • Fax: +44-118-9409401 Aerotech GmbH, Süd-West-Park 90, D-90449 Nürnberg, Germany • +49-911-9679370 • Fax: +49-911-96793720

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