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Affordable Terahertz Components using 3D Printing Amanpreet Kaur, Joshua C. Myers, Mohd Ifwat Mohd Ghazali, Jennifer Byford, and Premjeet Chahal Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI- 48824, USA [email protected] Abstract This paper presents the design and characterization of 3D printed photonic crystal filter (quasi optic component) and dielectric ridge waveguide (integrated component). Commercially available 3D printer was used to print polymer based components. Design and characterization of these devices is carried out over a frequency range of 0.15 - 0.5 THz. The photonic crystal filter shows a stop band from 0.25 - 0.35 THz. Also a very narrow defect mode (notch filter) was introduced by altering the structure of photonic crystal. The dielectric ridge waveguide shows broadband THz propagation characteristics. The transmission loss was determined to be largely dominated by the loss characteristics of the polymer material used. Introduction Over the last two decades, terahertz (THz) technologies have attracted increased attention and interest due to its wide range of applications such as spectroscopy, sensing, material characterization, medical imaging, security, and communication systems [1-3]. One of the major road blocks to the adoption of THz technologies for consumer applications is the cost of the system. Some of the key components such as filters, waveguides, modulators, etc. that are readily available in the RF and optical spectral region are missing from the THz portfolio. THz components require further advancement with respect to materials, fabrication and integration. For its practical implementation, approaches to fabricate complex 3D structures at low cost are necessary. Micromachining techniques have been adapted to fabricate THz components. However, micromachining techniques are expensive and limited to fabrication on planar substrates. Thus, a simple fabrication method is desirable that is low-cost and allows fabrication of complex 3D structures. Recent developments in rapid prototyping technologies may provide a path to meet this challenge. Rapid prototyping technologies such as stereo lithography, fused deposition modeling, selective laser sintering, polymer- jetting have been explored for fabricating microwave circuits [4, 5]. Among these, polymer stereolithography and polymer- jetting are fast, and additive printing (3D printing) processes capable of building high aspect-ratio micro structures with high resolution. The 3-D parts are made by curing liquid polymer using a laser beam in a layer by layer process. Through layering of fine structures and by using temporary support structures complex 3D parts can readily be made. Advantages of 3D printing include design flexibility, short cycle time, good reproducibility, vast choice of materials and overall low cost. Passive THz components such as filters, waveguides, antennas and couplers are the building blocks of a THz system and hence fabrication of these using 3D printing is of great interest. While 3D printing has been used extensively to print large objects, the use of 3D printing for THz devices has not been well studied, although a few examples have been demonstrated recently[6-8]. One of the key components required for THz circuits are tunable/ reconfigurable quasi-optical THz devices that can control the spatial transmission of THz signal. Also, the ability to manipulate the THz signal using structures like photonic crystals (PC) is of great interest for application in communication and sensing. The PC with distorted periodicity are also of significant interest due to their highly localized defect mode. This property can be used for design of filter with very narrow transmission band (notch filter), resonant cavities, and waveguides [9]. Along with quasi-optical THz system components, wafer level integration is desirable to further reduce the cost of THz systems. There are several challenges to realizing THz integrated circuits such as design, microfabrication, and lack of compatible materials. THz waveguide is one of the important components needed to achieve integrated circuits. Various types of THz waveguides such as metallic waveguide, Plasmonic waveguide, hollow-core photonic crystal fibers, and dielectric waveguides etc. have been studied in past [10, 11]. However, these structures are difficult to fabricate at the wafer level due complexity of the manufacturing process. Planar dielectric waveguides such as ribbon waveguides and Dielectric Ridge waveguide (DRW) can be used for the realization of a low cost THz waveguide with component integration. Recently, Pandey et. al. showed the use of 3D printing for fabrication of spoof plasmonic waveguide where the structure is first printed with polymer resin and then blanket coated with metal film [7]. In these waveguides the wave propagates on the surface, i.e. at the metal-air interface. These waveguides are narrowband and thus limited in application. Dielectric waveguides such as ribbon waveguide carries THz signal efficiently as the signal travels at the air dielectric interface and have wide band operation [12]. However, they require thin films of high dielectric constant material. Ridge waveguide is another good candidate as a low-loss THz waveguide, whereas here the signal travels in the bulk of the dielectric material and can be designed using low dielectric constant materials. Similar to the ribbon waveguide, it does not require sub-wavelength size dimensions. So, it is possible to realize such a structure using 3D printing. This paper demonstrates the use of conventional 3D printing to fabricate two types of circuits: quasioptical and integrated. A photonic crystal based quasioptical filter, and an integrated DRW and power splitter are demonstrated. Such functional THz devices are needed in THz sensing, imaging and communications. These structures require feature sizes on the scale of the wavelength or below. For our frequency range 978-1-4799-8609-5/15/$31.00 ©2015 IEEE 2071 2015 Electronic Components & Technology Conference
Transcript

Affordable Terahertz Components using 3D Printing

Amanpreet Kaur, Joshua C. Myers, Mohd Ifwat Mohd Ghazali, Jennifer Byford, and Premjeet Chahal

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI- 48824, USA

[email protected]

Abstract

This paper presents the design and characterization of 3D

printed photonic crystal filter (quasi optic component) and

dielectric ridge waveguide (integrated component).

Commercially available 3D printer was used to print polymer

based components. Design and characterization of these

devices is carried out over a frequency range of 0.15 - 0.5

THz. The photonic crystal filter shows a stop band from 0.25 -

0.35 THz. Also a very narrow defect mode (notch filter) was

introduced by altering the structure of photonic crystal. The

dielectric ridge waveguide shows broadband THz propagation

characteristics. The transmission loss was determined to be

largely dominated by the loss characteristics of the polymer

material used.

Introduction

Over the last two decades, terahertz (THz) technologies have

attracted increased attention and interest due to its wide range

of applications such as spectroscopy, sensing, material

characterization, medical imaging, security, and

communication systems [1-3]. One of the major road blocks to

the adoption of THz technologies for consumer applications is

the cost of the system. Some of the key components such as

filters, waveguides, modulators, etc. that are readily available

in the RF and optical spectral region are missing from the THz

portfolio. THz components require further advancement with

respect to materials, fabrication and integration. For its

practical implementation, approaches to fabricate complex 3D

structures at low cost are necessary. Micromachining

techniques have been adapted to fabricate THz components.

However, micromachining techniques are expensive and

limited to fabrication on planar substrates. Thus, a simple

fabrication method is desirable that is low-cost and allows

fabrication of complex 3D structures. Recent developments in

rapid prototyping technologies may provide a path to meet this

challenge.

Rapid prototyping technologies such as stereo lithography,

fused deposition modeling, selective laser sintering, polymer-

jetting have been explored for fabricating microwave circuits

[4, 5]. Among these, polymer stereolithography and polymer-

jetting are fast, and additive printing (3D printing) processes

capable of building high aspect-ratio micro structures with

high resolution. The 3-D parts are made by curing liquid

polymer using a laser beam in a layer by layer process.

Through layering of fine structures and by using temporary

support structures complex 3D parts can readily be made.

Advantages of 3D printing include design flexibility, short

cycle time, good reproducibility, vast choice of materials and

overall low cost. Passive THz components such as filters,

waveguides, antennas and couplers are the building blocks of

a THz system and hence fabrication of these using 3D printing

is of great interest. While 3D printing has been used

extensively to print large objects, the use of 3D printing for

THz devices has not been well studied, although a few

examples have been demonstrated recently[6-8].

One of the key components required for THz circuits are

tunable/ reconfigurable quasi-optical THz devices that can

control the spatial transmission of THz signal. Also, the ability

to manipulate the THz signal using structures like photonic

crystals (PC) is of great interest for application in

communication and sensing. The PC with distorted periodicity

are also of significant interest due to their highly localized

defect mode. This property can be used for design of filter

with very narrow transmission band (notch filter), resonant

cavities, and waveguides [9].

Along with quasi-optical THz system components, wafer

level integration is desirable to further reduce the cost of THz

systems. There are several challenges to realizing THz

integrated circuits such as design, microfabrication, and lack

of compatible materials. THz waveguide is one of the

important components needed to achieve integrated circuits.

Various types of THz waveguides such as metallic waveguide,

Plasmonic waveguide, hollow-core photonic crystal fibers,

and dielectric waveguides etc. have been studied in past [10,

11]. However, these structures are difficult to fabricate at the

wafer level due complexity of the manufacturing process.

Planar dielectric waveguides such as ribbon waveguides and

Dielectric Ridge waveguide (DRW) can be used for the

realization of a low cost THz waveguide with component

integration.

Recently, Pandey et. al. showed the use of 3D printing for

fabrication of spoof plasmonic waveguide where the structure

is first printed with polymer resin and then blanket coated with

metal film [7]. In these waveguides the wave propagates on

the surface, i.e. at the metal-air interface. These waveguides

are narrowband and thus limited in application. Dielectric

waveguides such as ribbon waveguide carries THz signal

efficiently as the signal travels at the air dielectric interface

and have wide band operation [12]. However, they require

thin films of high dielectric constant material. Ridge

waveguide is another good candidate as a low-loss THz

waveguide, whereas here the signal travels in the bulk of the

dielectric material and can be designed using low dielectric

constant materials. Similar to the ribbon waveguide, it does

not require sub-wavelength size dimensions. So, it is possible

to realize such a structure using 3D printing.

This paper demonstrates the use of conventional 3D

printing to fabricate two types of circuits: quasioptical and

integrated. A photonic crystal based quasioptical filter, and an

integrated DRW and power splitter are demonstrated. Such

functional THz devices are needed in THz sensing, imaging

and communications. These structures require feature sizes on

the scale of the wavelength or below. For our frequency range

978-1-4799-8609-5/15/$31.00 ©2015 IEEE 2071 2015 Electronic Components & Technology Conference

of interest (0.1 – 1 THz), the corresponding wavelength range

is 3 – 0.3 mm in free space. Thus, the printing resolution of

existing 3D printed system is well suited for fabrication of

components for the terahertz range.

These components are printed using a professional-grade

commercially available 3D printer (Objet Connex350) using a

photo-polymer resin. All the THz components measured here

are fabricated using 3D printed material called “verowhite”

which has a dielectric constant εr ~ 2.8 at the frequency of

interest and a loss tangent, tanδ, of ~0.04. The simulation and

experimental results for 3D printed structures are presented in

the next section. THz frequency domain spectroscopy (THz-

FDS) is used here to characterize the transmission properties

of the components.

Quasi-Optic components: Filters

This paper demonstrates THz band stop filter based on 1-

D photonic crystal (PC) design. The PC’s are artificially

periodic structures composed of two or more mediums with

different permittivity. In 1D PCs, the periodic change of the

permittivity occurs only in one direction. They have the

advantage of simple structure and thus can be easily

fabricated. The parameters that play an important role in

achieving good performance are the thickness of each of the

dielectric layers and the total number of layers. In order to

work as a THz filter the PC structure should be composed of

stack of quarter wavelength thick high and low permittivity

material layers.

PC’s with defect in its lattice is also of great interest for

many applications such as sensing, wave guiding, notch filter.

A defect can be created in a 1D PCs, by using one of the

layers to have a slightly different dielectric constant or

thickness than the other layers. A defect was created here by

replacing the center high permittivity dielectric layer with air.

The Photonic crystal filter is modeled here using a commercial

finite element EM solver, HFSS. The filter was designed to

operate in the lower THz range (~ 0.3 THz). The PCF is

composed of 10 layers of 0.150 mm thick 3D printed material

(εr = 2.8 at 0.3 THz) separated from each other by air gap of

0.25 mm thickness. Figure 1 shows the simulated transmitted

signal (S21) of the filter over a frequency range of 0.3 - 0.5

THz.

The filter has a stop band over a frequency range of 0.25 -

0.35 THz. For the filter with a defect layer, the stop band is

comparatively narrow and slightly shifted towards higher

frequency. It also shows a single defect mode near 0.27 THz,

within the stop band region which is centered at 0.3 THz.

These highly localized modes are useful for applications such

as sensing, narrow band pass filters, antenna designs, noise

suppression, etc. The filter was modeled for two different

values of dielectric loss tangent (tan δ) of 0.01 and 0.05. As

expected, the transmitted signal for filter designed with lower

loss dielectric is higher. Thus, dielectric materials with lower

loss are desired for low transmission losses. The individual

layers of the periodic structure were fabricated using a 3D

printer. These structures were stacked together to form a 1D

PC as shown in Figure 2. The 3D material acts as a high

dielectric layer and the spacer at the edges of the dielectric

slab creates air gap between subsequent slabs (Figure 2(a)).

The thickness of air-spacer is 0.25 mm while the dielectric

layer is 0.15 mm thick. The stack consists of total of 10 layers.

Figure 2(b) shows the schematic and optical micrograph of PC

stack.

Figure 1: Simulated S21 of 1D photonic crystal filter with and

without a defect layer with different dielectric loss tangent (tan

δ=0.01, and 0.05).

Figure 2: Photonic crystal based filter (a) Schematic of single

layer and the stack (b) Optical picture of 3D printed layer and

stack.

To introduce a defect, a window was opened in the lattice

by removing one dielectric layer and replaced with air

dielectric. The transmission spectra of 3D printed filters were

measured using a frequency-domain THz measurement setup,

Emcore PB-7200. In this system, the THz signal is generated

by mixing narrow band wavelengths from two different lasers

using a low-temperature GaAs film coupled to an antenna.

The signal is detected using a laser based heterodyne mixer.

The collimated THz beam from the transmitter (Tx)

propagates through air and is detected on the other end using a

heterodyne mixer. The samples are placed in between the

transmitter and the receiver (Rx) heads for transmission

measurements. The filters measured in here were directly

placed in the THz beam path and the amplitude of the

transmitted signal was measured.

For the measurement of the filters, first a background

signal was measured by removing the sample from the THz

beam path. This signal was used as the reference. The

measured transmitted signal through the filter with and

without defect is shown in Figure 3. The measured result

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matches closely with simulation results with similar stop band

and defect mode. These results show that 3D printing can be

easily used for making good quality THz filter. The filters can

be further improved by using polymer materials with lower

dielectric losses as opposed to “Verowhite” material used

here.

Figure 3: Experimental results for Photonic crystal based

filter with and without defect.

Integrated Circuits Components:

Ridge Waveguides (RWG)

There is growing interest in THz integrated circuits to

realize similar circuits as monolithic microwave integrated

circuits (MMICs). Some of the challenges to achieving THz

integrated circuits are design and microfabrication

complexities, and lack of availability of low loss materials.

THz waveguides is one of the important components that form

a basic building block for integrated circuits. Conventional

metal based transmission lines like microstrips have high

losses. Dielectric based waveguides are attractive as they

provide low loss propagation of THz signals. There is need of

simple prototyping process like 3D printing for realization of

dielectric waveguides and associated components. In this

paper, the proposed ridge waveguide were fabricated using a

simple and low cost 3D printed technology. Also, the

applicability of these waveguides in a power splitter is

demonstrated.

Figure 4: (a) Schematic of ridge waveguide, W is width of

ridge, h2 is the height of ridge (b) Side view of the 3D printed

ridge waveguide. (c) Optical image of 3D printed power

splitter and waveguides.

The critical parameters for DRW are the ridge height (h1)

and width (w), and the substrate thickness (h2). Figures 4(a),

4(b) and 4(c) show the schematic and optical image of 3D

printed waveguides and a power splitter. The cross section of

a fabricated waveguide (w = 0.5mm) is shown in Figure 4(b)

and the edges looks very clean. Waveguides were simulated

using HFSS using the same material properties as the filter

design. Simulations for ridge waveguide with different ridge

height (0.2mm and 0.4 mm) and widths (0.25mm, 0.5mm and

0.75mm) were carried out. Figure 5 shows the electric field

intensity inside the waveguide across the cross section with

different waveguide widths at fixed frequencies of 0.3 and 0.4

THz. It can be observed that the propagating fields

concentrate right beneath the ridge. The fields for the same

geometrical parameters are better concentrated at higher

frequency (0.4 THz) than at lower frequency (0.3 THz). There

is an optimal ridge height and width that allows optimum

concentration of propagating wave. When the ridge is much

smaller than a wavelength, propagation of multiple modes is

observed.

Figure 5: E-field pattern in DRW on the vertical plane for

ridge height of 0.4 mm and different ridge widths (0.25 mm,

0.50 mm, 0.75 mm) at a) 0.4 THz and (b) 0.3 THz.

Figures 6(a) and 6(b) shows the E-field intensity for ridge

height of 0.2mm at fixed frequencies of 0.4 and 0.3 THz,

respectively. Again, three ridge waveguide widths were

simulated. For a lower ridge height, the wave begins to also

propagate at the air-dielectric interface. Thus it can be

concluded that the ridge height is as critical as the width.

Figure 6: E-field pattern in DRW on the vertical plane for

ridge height of 0.2 mm and different ridge widths (0.25 mm,

0.50 mm, 0.75 mm) at a) 0.4 THz and b) 0.3 THz.

The transmission through waveguide was also simulated

over a frequency range of 0.25- 0.5 THz for fixed ridge height

of 0.4 mm and varying widths as shown in Figure 7. From the

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simulation results of ridge waveguide it can be concluded that,

overall the ridge waveguide is lossy which was expected due

to the higher loss tangent of the 3D printed material. However,

the narrower ridge waveguides provide higher transmission.

Here, most likely, only a single mode is excited and whereas

in the wider ridge propagation may be spread over multiple

modes. There is a clear interference pattern that can be seen in

S21 of the waveguides with wider ridge. Further design studies

needs to be carried out on the design of ridge waveguides with

different geometries.

Figure 7: Simulated S-parameters for ridge waveguide with

ridge height h1=0.4 mm and ridge with of 0.25mm, 0.5mm and

0.75 mm.

In order to study the effect of dielectric losses on the

transmission of 3D printed waveguides, the simulation was

carried out using different values of tanδ. The S21 andS11 for

ridge waveguide (w = 0.5 mm and h1 = 0.4 mm) with different

tanδ is shown in Figure 8.

Figure 8: Simulated S-Parameters for ridge waveguide of

h=0.4 mm and w=0.5 mm for different values of loss tangent.

This result shows that there is a huge drop in the transmission

signal as the dielectric loss increases. For practical

applications, low loss materials needs to be developed that can

be 3D printed.

To calculate the propagation losses for DRW, two different

lengths (3 and 6 mm) of waveguide were simulated. Figure 9

shows the calculated loss per unit length for waveguide

designed with different loss tangent. The difference between

the transmitted signal ΔS21= S21(short)- S21(long) subtracts

possible coupling losses. Thus the ΔS21/length (dB/mm)

shown in Figure 9 represents the loss factor of the waveguide.

As expected, the simulated results show that the DRW with

higher loss tangent have higher loss. The inset of Figure 9

shows the loss factor determined from simulations at a fixed

frequency of 0.3 THz for waveguides designed with different

dielectric losses.

Figure 9: Loss factor (dB/mm) of ridge waveguide

(w=0.4mm, h1=0.5 mm for two different value of tanδ (0.03

and 0.05). Inset (loss factor vs tanδ at 0.3 THz).

Waveguides with ridge height h1=400 and different width

(0.25mm, 0.50 mm, and 0.75mm) were 3D printed. Also two

different lengths (20mm and 30 mm) for waveguide were

fabricated (Figure 4). For the measurement of thin ridge

waveguides, two dielectric probes were used to probe the

samples as shown in Figure 10, see ref. [12] for details of

probe design. These probes focus the collimated beam from

the source to the tip of the probe which directly contacts the

sample. Similarly, another probe is used at the exit end to

couple the transmitted signal to the receiver. A metal skirt is

placed on one of the probes to minimize direct coupling of

THz signal between the probes. Two waveguides with lengths

of 20 and 30 mm and having identical cross section were

placed in the beam path sequentially, and their transmitted

waveforms were measured. The two probes were also

positioned away without a waveguide in between to obtain a

reference scan. For the measurement of the reference signal

for the waveguides, both the probes were moved slightly away

the sample and this transmitted signal was used as the

reference. This signal is largely due to the leakage between the

probes around the waveguide. The probes directly make a

contact to the sample to measured transmitted signal through

the waveguide. Straight waveguide with two different lengths

are measured to acquire the characteristics of signal

transmission and the results are shown in Figure 11. The

differences in the transmitted signal between two lengths

2074

indicate the effective transmission loss associated with the

difference in the waveguide lengths.

Figure 10: THz measurement set-up for measuring ridge

waveguide.

This loss is largely due to the high loss of the dielectric

material used here. The transmitted signals decay at higher

frequencies which can be contributed to loss occurring due to

dielectric probes which are not optimized for wide frequency

bandwidth operation. Also, the signal from the THz source

decreases with increase in frequency. At higher frequencies (>

0.35 THz) the difference in transmitted signal decreases. This

is an artifact from the poor signal to noise ratio achieved at

low transmitted signals.

Figure 11: Measured Transmission signal intensity of DRW

with two different lengths, short (20 mm) and long (30 mm)

with fixed width and height of 0.25mm and 0.4 mm,

respectively.

Waveguides with fixed height of 0.4 mm and length of

20mm, and different ridge widths (0.25 mm, 0.50 mm, 0.75

mm) were also measured and the results are shown in Figure

12. All of the waveguides having different widths show good

transmission properties and their transmission characteristics

looks similar. Overall, these results indicated that 3D printing

can be used to print THz waveguides. Loss can be decreased

with further improvement in material properties and reduced

surface roughness.

Figure 12: Measured Transmission Intensity for waveguides

with different ridge width (0.25mm, 0.5 mm, 0.75 mm).

Power Splitter

To demonstrate a functional THz circuit, a 1:2 RWG based

power splitter was designed and 3D printed as shown in

Figure 4. The splitter consists of 15 mm input arm and two 15

mm output arms, with ridge height of 04 mm and ridge width

of 0.5 mm. The measured transmission signal intensity was

measured for both arms over a frequency range of 0.15 THz to

0.5 THz. The measured result for power splitter is shown in

Figure 13. The transmitted signal from both arms is

approximately equal as expected from a 1:2 power splitter.

Figure 13. Measured transmitted signal intensity for RWG

based power splitter.

These results indicate that 3-D printed waveguide can

serve as a critical building block for THz integrated circuits.

This process is wafer level compatible and can be carried out

at room temperature. Thus, it is compatible with a host of low

cost large area substrates. 3D printing can be adopted for post

2075

processing of passive structures on semiconductor wafers.

Also, with further development, passive elements that require

combination of metal and dielectric layers can be directly

printed at the wafer level.

Conclusion

This paper experimentally demonstrated that conventional 3D

printing is well suited for fabrication of THz passive

components such as straight ridge waveguides, splitters and

filters. Quasi-optical PC based THz filters were fabricated by

polymer jetting UV resin. Results of the transmission loss

showed good agreement with simulations. Wide band dielctric

ridge waveguides were also designed and 3D printed. A 1:2

power splitter wide band frequency operation was also

demonstrated using this technique having. The higher loss in

the transmitted signal in the 3D printed structures can be

attributed to surface roughness (~10 m) that results from the

printing process and the high loss of the dielectric material.

With further improvements in printing resolution and low loss

materials, this technique will be useful in printing of THz

large area low cost passive components. Also, it can be

adopted to directly print passive components on a

semiconductor wafer for the manufacture of THz integrated

circuits.

Acknowledgments

The authors would like to thank the members of Terahertz

Systems Lab (TeSLa) and Brian Wright for their help.

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