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AFSEM™AFM-SEM correlated microscopy
TEC
Did you know YOUR SEM could
do this?
2
Two microscopes are better than one!AFSEM™ is an Atomic Force Microscope (AFM) designed for integration into SEM or Dualbeam (SEM/FIB) microscopes. Its open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber.
Main features
• Direct 3D information (topography and phase)
• Correlated microscopy of the exact same sample position by SEM and AFM • Topography and Element analysis
• Nanometer scale analysis before SEM sample contamination
• Correlated microscopy without air exposure
• Easy to operate • No AFM laser alignment due to self-sensing cantilever
AFSEM™
The flexible AFSEM™ approach allows SEM integration of nanoindentors and AFM for in-situ experiments
Flexible microscope integration
Premounted microfabricated cantilevers
Specifications
Scan head type Tip scanner
Scan range (XYZ) 35 × 35 × 5 µm
Scanner resolution 24-bit
Closed loop scanning XY
Sample size 150 mm (SEM-dependent)
Motorized approach 25 mm (at tip position)
Positioning stage (XY) ±4 mm
Scan head weight 500 g
Scan head dimensions 44 × 110 × 77 mm
HV compatibility <1 × 10–6 mbar
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AFM modes supported by AFSEM™
• Static Force
• Dynamic Force
• Phase Contrast
• Conductive AFM
• Force spectroscopy
• Lithography
Some modes may require additional hardware and/or controller options
The complimentary capabilities of AFM and SEM allow for unique sample characterization possibilities. AFSEM™ lets you image your sample with high resolution, create true 3D topography representations and accurately measure heights, distances and even material properties, all while maintaining the large SEM field of view to position your AFSEM™ cantilever exactly where you want it.
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