An empirical pseudopotential approach to surface and line-edge roughness scatteringin nanostructures: Application to Si thin films and nanowires and to graphenenanoribbonsMassimo V. Fischetti and Sudarshan Narayanan
Citation: Journal of Applied Physics 110, 083713 (2011); doi: 10.1063/1.3650249 View online: http://dx.doi.org/10.1063/1.3650249 View Table of Contents: http://scitation.aip.org/content/aip/journal/jap/110/8?ver=pdfcov Published by the AIP Publishing Articles you may be interested in Physical insight into reduced surface roughness scattering in strained silicon inversion layers Appl. Phys. Lett. 101, 073504 (2012); 10.1063/1.4742772 Surface roughness scattering model for arbitrarily oriented silicon nanowires J. Appl. Phys. 110, 084514 (2011); 10.1063/1.3656026 Empirical pseudopotential calculations of the band structure and ballistic conductance of strained [001], [110],and [111] silicon nanowires J. Appl. Phys. 110, 033716 (2011); 10.1063/1.3615942 Monte Carlo study of surface roughness scattering in Si inversion layer with improved matrix element J. Appl. Phys. 100, 044513 (2006); 10.1063/1.2218029 Theoretical investigation of surface roughness scattering in silicon nanowire transistors Appl. Phys. Lett. 87, 043101 (2005); 10.1063/1.2001158
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An empirical pseudopotential approach to surface and line-edgeroughness scattering in nanostructures: Application to Si thinfilms and nanowires and to graphene nanoribbons
Massimo V. Fischettia) and Sudarshan NarayananDepartment of Materials Science and Engineering, University of Texas at Dallas,800 West Campbell Road RL 10, Richardson, Texas 75080, USA
(Received 4 May 2011; accepted 29 August 2011; published online 25 October 2011)
We present a method to treat scattering of electrons with atomic roughness at interfaces,
surfaces, and edges on nanometer-scale structures based on local empirical pseudopotentials.
This approach merges the computational advantages of macroscopic models based on the shift
of a phenomenological “barrier potential,” with the physical accuracy of models based on
modifications of the atomic configuration at the interface/surface/edge. We illustrate the
method by considering the dependence of the scattering matrix element on the confinement
(inversion) field in free-standing H-terminated Si inversion layers, on the thickness in similarly
H-terminated thin-Si bodies, on the diameter of free-standing [100] cylindrical Si nanowires, and on
the width of armchair-edge graphene nanoribbons. For these latter structures, we find extremely
large scattering rates, whose magnitude — ultimately due to the chirality dependence of the bandgap
— renders perturbation theory invalid and prevents us from drawing quantitative conclusions about
transport properties. Yet, they show clearly the dominant role played by line-edge roughness in
controlling electronic transport in these structures, in agreement with suggestions that transport in
narrow and rough ribbons does not occur via extended Bloch states. VC 2011 American Institute ofPhysics. [doi:10.1063/1.3650249]
I. INTRODUCTION
Scattering with roughness at the interfaces between two
semiconductors, a semiconductor and an insulator, or at the
free surface of a semiconductor has been treated at very dif-
ferent levels of approximations. Fully atomistic models
based on density functional theory (DFT) — describing
roughness as the presence of individual “protrusions” or
“vacancies” in the interfacial region — have been proposed1
and applied to the problem of the enhanced mobility in
tensely strained Si inversion layers,2 but these remain com-
putationally expensive methods, which have yet to find a
wider range of applications. Deferring to a later section the
discussion of line-edge roughness (LER or simply ER in the
following) in graphene nanoribbons (GNR), full-band
description of atomistically roughened interfaces and surfa-
ces (such as the tight-binding studies of Si nanowires
(NW)3–5) as well as phenomenological descriptions of the
roughness via “geometrically” roughened surfaces or interfa-
ces have been used to study the effect of roughness on elec-
tronic transport using three-dimensional (3D) classical6 or
quantum (based on the non-equilibrium Green’s function
(NEGF) approach) simulations of double-gate field-effect
transistors (DGFETs),7 NEGF simulations of Si NWs,3–5 or
two-dimensional (2D) Master-equation studies of DGFETs.8
These atomistic models or models which treat roughness
with geometrical modifications of the interfaces provide
some welcome kind of “ab initio” flavor. Unfortunately, this
gain must be weighed against the need to simulate ensembles
of many different geometrical configurations in order to
extract the desired transport properties of the “average” de-
vice. For this reason, more pervasive in the literature is the
use of the semi-phenomenological Ando’s model9 (see, for
example, recent work on thin bodies10–12), originally applied
to the case of Si inversion layers and recently extended by
Jin et al.13,14 to the case of thin bodies13 and circular cross-
section nanowires.14
With the exception of the DFT1,2 and tight-binding3–5
studies mentioned above, all of these approaches are based on
the effective-mass approximation and either assume as
“potential” the Hartree-like spatial variation of the conduction-
band minimum, including “barriers” due to band-edge discon-
tinuities, or introduce the concept of a “barrier potential”. For
interfaces between a semiconducting film of thickness ts and
oxide “barriers” located at z ¼ 0 and at z ¼ ts, the barrier-
potential Vb takes the form (see Eq. (9) of Ref. 13)
VbðzÞ ¼ Vox½hð�zÞ þ hðz� tsÞ�; (1)
where z is the coordinate along the direction perpendicular to
the interface, Vox is the barrier height, and h is the step func-
tion. The roughness is introduced by shifting rigidly along
the z-direction the Hartree-like or barrier potential by an
amount of �DR varying randomly over the plane of the inter-
faces. The power-spectrum hjDQj2i is usually taken to be ei-
ther a Gaussian real-space correlation function leading to9
hjDQj2i ¼ pD2K2e�Q2K2=4 (2)
or a correlation spectrum of the forma)Electronic mail: [email protected].
0021-8979/2011/110(8)/083713/20/$30.00 VC 2011 American Institute of Physics110, 083713-1
JOURNAL OF APPLIED PHYSICS 110, 083713 (2011)
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hjDQj2i ¼ pD2K2ð1þ Q2K2=2Þ�n�1; (3)
where D and K are the root-mean-square (rms) roughness
and correlation length, respectively. For n¼ 1/2, this corre-
sponds to the exponential correlation proposed by Goodnick
et al.,15 while alternative choices correspond to Bessel-type
real-space correlation, such as the case n¼ 2, which has
been proposed by Leadley and coworkers.16
Here, we abandon model-concepts, such as effective
mass and barrier potentials, and rely, instead, on atomic
potentials to describe the change of the interfacial/surface
potential caused by the atomic roughness. As an example,
we employ here empirical pseudopotentials calibrated to
experimentally known band structure and the workfunctions,
which are responsible for the confinement and the shape of
the interfacial potential. The use of alternative atomic poten-
tials, such as self-consistent pseudopotentials or tight-
binding approaches, are clearly possible, but will not be
discussed here. Clearly, the choice of local empirical pseudo-
potentials limits our approach, since we cannot treat realistic
oxides (although local empirical pseudopotentials for oxygen
and oxides have been used in the past17–19) so that insulating
barriers must consist of either vacuum — albeit with proper
H terminations of dangling bonds to avoid states in the gap
— or fictitious “barrier materials” of the type employed by
Williamson and Zunger as insulators for InAs quantum
dots.20 In addition, we are unable to account for atomic
relaxation, which occurs, for example, in small diameter Si
NWs21 and narrow armchair-edge GNRs.22 Yet, the simplic-
ity afforded by empirical pseudopotentials allows us to
investigate the ability of the method presented here to handle
a variety of realistic structures. Also, one should not underes-
timate the surprising “transferability” of the empirical pseu-
dopotentials available in the literature,23,24 which we employ
here,25 their ability to capture the essential physics and pro-
vide a sufficiently accurate band structure — compared with
self-consistent ab-initio methods — and the flexibility they
exhibit by definition in matching experimental information
when properly calibrated, in some cases exceeding (at the
expense of predictive power) the quality of ab-initio results.
The basic idea consists in following Ando’s or Jin’s
approaches, but rather than defining the roughness as a shift
z! zþ DR of the barrier potential given by Eq. (1) above,
we consider a similar shift of the atomic coordinates entering
the pseudopotentials or consider the deformation of the inter-
face caused by the addition or deletion of atomic lines. We
shall limit our study to the case of roughness caused by dis-
placed atoms, excluding the equally interesting case of chemi-
cal changes of the interface or surface (such as the oxygen
protrusions considered in Ref. 1, for example). Similarly, we
shall ignore the all-important Coulomb contributions to the
roughness-induced scattering rates, as they can be treated ei-
ther in the “conventional way” (such as in Refs. 9, 13, and
14), or by using approaches in which the self-consistent Har-
tree potential provides the shift of the electron charge and the
polarization dipoles caused by the deformation of the inter-
face. Also, we shall employ first-order perturbation theory
(more precisely, the first Born approximation, as discussed
below), having in mind diffusive transport. The case of ballis-
tic (coherent) transport requires the study of transmission
amplitudes, which are the subject of the quantum-transport
approaches mentioned above. Therefore, we shall focus here
on an attempt to deal with diffusive transport, employing a
pseudopotential-based atomistic model and doing so while
accounting for an ensemble-average of the interfacial or sur-
face roughness (SR) without the need to perform calculations
using a statistically significant number of different micro-
scopic configurations. The cases of free-standing H-termi-
nated Si inversion layers, thin bodies, cylindrical nanowires
(NWs), and armchair-edge graphene nanoribbons (AGNRs)
will illustrate the method and will provide interesting insight
on the dependence of the roughness-induced scattering on
confinement, thickness, diameter, and width, respectively. The
extremely large scattering rates found in AGNR will be the
main unanticipated result we will present.
We should stress that, ultimately, there is nothing
intrinsically new in using atomic potentials to deal with
roughness and its effect on ballistic (coherent) transport.
What we believe is different, and hopefully useful in the con-
text of electronic transport, is the use we make of these
atomic potentials, the explicit use of local pseudopotentials,
and the fact that we employ them within a perturbation-
theory framework amenable to transport studies in the diffu-
sive (scattering-dominated) regime. In this context, surprising,
but in hindsight expected, is the large role played by line-
edge roughness in AGNRs.
The paper is organized as follows: In Sec. II, we present
the method in the case of two-dimensional transport in inver-
sion layers and thin films and discuss three alternative for-
mulations for the roughness-induced scattering potential in
order to account for different degrees of correlation of the
roughness at different interfaces. We also discuss the validity
of perturbation theory. In Sec. III, we consider one-
dimensional (1D) transport in AGNRs and cylindrical Si
NWs (Secs. III A and III B, respectively), stressing the role
of the chirality dependence of the bandgap of AGNRs in
causing the very large scattering rates induced by line-edge
roughness. Conclusions are finally drawn in Sec. IV.
II. TWO-DIMENSIONAL TRANSPORT
In this section, we consider the case of two-dimensional
transport in inversion layers, quantum wells, and thin films.
This is the class of structures in which surface roughness-
induced scattering has been studied originally9 and provides
the ideal systems to check the validity of the method pre-
sented here.
Ideally, the geometry considered here consists of a thin
semiconductor film of thickness ts with barrier layers at both
surfaces, such as silicon-on-insulator (SOI) systems, SiO2-
Si-SiO2, or III-V heterostructures, such as AlInAs-InGaAs-
AlInAs.
To fix the ideas, we consider here a Si film with (100)
surfaces of thickness given by 9 cells with vacuum padding
of thickness equivalent to 2 Si cells and dangling bonds satu-
rated by H. Results obtained using slightly larger supercells
(11 Si cells separated by vacuum padding of thickness
083713-2 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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equivalent to 4 Si cells) will also be presented below and do
not yield significantly different results.
In order to account for the additional confining potential
of an inversion layer, a self-consistent solution of the associ-
ated Schrodinger/Poisson problem can be obtained (see, for
example, Ref. 25). For simplicity here, we mimic this effect
by adding a parabolic potential of the form
VðextÞðzÞ ¼ V0 1� 2z
Lcþ z2
L2c
� �; (4)
(where Lc is the extension of the supercell in the z direction,
Lc ¼ a0N, with N the total number of cells employed and a0
the Si lattice constant. Also, V0 ¼ FsLc=2 is the total voltage
drop in the cell expressed in terms of the surface field Fs).
This potential is added to the lattice pseudopotential when
expressed in terms of its Fourier components FsL=3 for
Gz ¼ 0 and
VðextÞGz¼ �Fs
2
2
LcG2z
� i
Gz
� �(5)
for Gz 6¼ 0.
Figure 1 shows the band structure of this film for a sur-
face field Fs ¼ 106 V/cm, obtained employing the local Si
and H empirical pseudopotentials proposed by Zhang, Yeh,
and Zunger23 and ignoring the spin-orbit interaction. Note
the “almost” doubly degenerate quantized bands at the zone-
center, corresponding to the “unprimed” subbands, the re-
moval of the double degeneracy (“valley splitting,”9 barely
visible in the figure) being caused by the breaking of the
inversion symmetry (“parity”) caused both by the external
confining field and by the finite extent of the film. Note also
the appearance of additional conduction bands at the �X point,
bands already obtained by Esseni and Palestri26 using a lin-
ear combination of bulk bands (LCBB) and denoted by them
as M3 and M4. Figure 2 shows the variation of the direct and
indirect bandgaps with film thickness. This smooth depend-
ence of the bandgaps with thickness will be in contrast with
a similar plot we shall show for AGNRs. This behavior has
strong consequences on the magnitude of the SR or LER
scattering rates.
We shall now consider three different approaches we
can use to describe atomic roughness: A uniform shift by an
amount D along the z direction of the entire structure (corre-
sponding to correlated roughness at both surfaces); an effec-
tive shift caused by the addition of an atomic line; or the
changes in thickness caused by the addition and removal of
atomic lines. The latter ones allow us to deal with anticorre-
lated or uncorrelated roughness at the interfaces.
A. Perturbation Hamiltonian and matrix element:Correlated roughness
We start, as usual, by assuming that the roughness is
described by a shift DR of the atomic coordinates along the zdirection and function of the coordinate R on the plane of
the interface or surface. The shift is defined in terms of Fou-
rier components DQ, so that
DR ¼X
Q
DQeiQ�R: (6)
(Here and in the following, upper-case bold symbols refer to
two-dimensional vectors on the plane of the surface or inter-
face, with the exception of the wavevectors of the reciprocal
lattice, G, for which we follow the conventional notation,
and we shall denote by Gk and Gz their in-plane and out-of-
plane components, respectively.) The rigid shift just defined
FIG. 1. Band structure of a (100) Si slab in vacuum terminated by H atoms.
The slab thickness is 9 Si cells, and a vacuum padding of thickness equiva-
lent to 2 Si cells separates the slabs. A parabolic potential with a surface
field of 106 V/cm has been employed to strengthen the confinement of the
conduction-band states. Note the quantized subbands in the conduction and
valence bands, the widening of the gap caused by the confinement, and,
barely visible, the lifting of the twofold degeneracy of the unprimed states
(“valley splitting”) caused by the symmetry breaking due to the external
potential. Note also, at the �X-point, the presence of two additional 2D
valleys.
FIG. 2. (Color online) Dependence on film thickness of the band-gap of a
free-standing, H-terminated (100) Si layer for the conduction-band minima
at the �C -point (associated with the “unprimed” ladder of subbands) and
along the �D symmetry line (“primed” ladder). The lines connecting the cal-
culated points are only a guide to the eye.
083713-3 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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describes correlated roughness at the two interfaces. Semi-
phenomenological approaches to extend the approach to
more general cases will be discussed below. As a conse-
quence of the atomic shift, the lattice (pseudo)potential will
be modified as follows:
VðlatÞðrÞ ¼X
a
VðaÞðr� saÞ
¼X
a
XG
VðaÞG eiG�ðr�saÞ
¼X
G
VðlatÞG eiG�r ! VðlatÞðr þ zDRÞ
¼X
G
eiGzDR VðlatÞG eiG�r �
XG
ð1þ iGzDRÞVðlatÞG eiG�r
¼X
G
VðlatÞG eiG�r þ i
XQG
DQVðlatÞG Gze
iðG�rþQ�RÞ (7)
to the first order in the atomic displacement. In this expres-
sion, VðlatÞðrÞ is the total lattice (pseudo)potential, VðaÞðrÞ is
the pseudopotential of atom of species a, VðlatÞG and V
ðaÞG are
their respective Fourier components, sa are the coordinates
of atom a in the supercell, and z is the unit vector along the zdirection.
From Eq. (7), we see that the perturbation Hamiltonian
caused by the roughness can be identified with the term
HðSRÞðrÞ ¼ iXQG
DQVðlatÞG Gze
iðG�rþQ�RÞ; (8)
which replaces the shift of the barrier potential employed in
models based on the effective-mass approximation. There-
fore, to the first order in DQ, the matrix element associated
with the process in which roughness causes a Bloch wave of
in-plane crystal momentum �hK in band n to scatter into a
Bloch wave of crystal momentum �hK0 in band n0 will take
the form
VðSRÞK0;K;n;n0
¼ iX
GkG0kG00kGz
DK�K0þGk�G0kþG
00kGzV
ðlatÞG00k ;Gz
�ð
dznðn0Þ�
G0k;K0 ðzÞeiGzznðnÞGk;K
ðzÞ; (9)
where we have introduced the functions
nðnÞGkKðzÞ ¼ 1
L1=2c
XGz
uðnÞG;KeiGzz; (10)
where the quantities uðnÞG;K are the Fourier coefficients of the
periodic component of the Bloch waves. Note that, at this
stage, the roughness fluctuations, DQ, are still “coupled” to
the in-plane variation of the wavefunctions (due to their Bloch
components eiGk�R), because of the presence of the vectors Gkand G
0
k. However, thanks to the fast-decaying fluctuations DQ
at large Q, this expression may be simplified, since the sum
over some of the Gk vectors is effectively truncated for a large
enough magnitude of K�K0 þGk �G0
k þG00
k (the sub-
scripts of D in the equation above). Physically, this means that
the roughness has negligible fluctuations at wavelengths short
enough to be felt by the in-plane Bloch functions. In order to
see this, it is convenient to rearrange the sums in a more con-
venient form. Defining g¼G0
k �Gk and, in turn, g0 ¼G0
k �gand renaming g0 !G
0
k and g!G00
k, this expression can be
rewritten as
VðSRÞK0;K;n0;n
¼ iX
GkG0kG00kGz
DK�K0þG0kGzV
ðlatÞG0kþ
00k ;Gz
ðdznðn
0Þ�kþG
00k ;K
0 ðzÞeiGzznðnÞGk;KðzÞ
¼ iX
GG00
G0k
DK�K0þG0kGzV
ðlatÞG u
ðn0Þ�GkþG
00k �G0k;GzþG00z ;K
0uðnÞG00;K
¼XG0k
DK�K0þG0kCðGPNÞ
K0;K;n0;n;G0k; (11)
where the last step defines the quantity CðGPNÞ, the
“generalized Prange-Nee” matrix element, which, as we
shall discuss below, plays the role of the matrix element
originally proposed by Prange and Nee27 in the effective-
mass, barrier potential approximation. In this equation, we
have also given an alternative form of the matrix element
expressed in terms of the “bulk” Bloch components uðnÞG;K.
This form may be more suitable for numerical evaluation,
especially in the case of small supercells, when the number
of G-vectors is relatively small, while in large cells, the real-
space integration can be more efficient. However, this k-
space form hides somewhat the physical picture, which is
more intuitively emphasized when employing the wavefunc-
tions nðnÞGk;KðzÞ or the wavefunctions fðnÞK ðzÞ introduced below.
Since the power spectrum of the roughness, hjDQj2idecays very quickly with increasing magnitude of the in-
plane transfer wavevector Q, we can retain only the term
G0
k ¼ 0 in the equation above or the term corresponding to
the minimum G0
k required to map the momentum transfer
K�K0 into the first two-dimensional Brillouin zone (2D
BZ). When only the term G0
k ¼ 0 is retained, this approxima-
tion amounts to considering only normal (N), ignoring
Umklapp processes. Swapping now G00
k with Gk and renam-
ing G00
k ! G0
k, we have
VðSRÞK0;K;n0;n
� iDK�K0X
G
GzVðlatÞG
XG0k
ðdznðn
0Þ�G0kþGk;K
0 ðzÞeiGzznðnÞG0k;KðzÞ
¼ iDK�K0XGG0
GzVðlatÞG u
ðn0Þ�GþG0;K0
uðnÞG0;K
¼DK�K0CðGPNÞK0;K;n0;n;0
:
(12)
A further simplification may be obtained by ignoring the
Bloch-function overlap effects by using the envelope
wavefunctions
fðnÞK ðzÞ ¼1
L1=2c
XGz
uðnÞGk¼0;Gz;K
eiGzz; (13)
which constitute the average of the wavefunctions nðnÞGk;KðzÞ
over the area of the cell on the plane of the interface/surface.
We have referred to these functions as “envelopes,” since
083713-4 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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they represent the envelope approximation on the plane of
the interface, varying only over length scales larger than the
size of the in-plane unit cell. This approximation is justified
as long as the power spectrum hjDQj2i is negligible for Q of
the order of 1=a, where a is the lattice constant in the ðx; yÞplane. This means that there will be negligible roughness at
wavelengths of the order of the in-plane lattice constant,
assumption of which will not result in any significant loss of
information about the nature of the roughness, the only
“loss” being the mistreatment of the Bloch overlap effects.
Thus we can replace both the lattice potential VG as well as
the full wavefunctions nðnÞGk;Kwith their cell-averaged func-
tions, VGk¼0;Gzand fðnÞK , respectively. In so doing, we obtain
the following expression, which can be evaluated numeri-
cally in a relatively efficient way:
VðSRÞK0;K;n0;n
� iDK�K0XGz
GzVðlatÞ0;Gz
ðdzfðn
0Þ�K0ðzÞeiGzzfðnÞK ðzÞ
¼ iDK�K0XGz
GzVðlatÞ0;Gz
~Ið2DÞK;K0;n;n0 ðGzÞ; (14)
where the overlap factor ~Ið2DÞK;K0;n;n0 ðqzÞ is also employed in the
context of electron-phonon scattering.
B. Physical interpretation
The expressions we have just derived for the matrix ele-
ment VðSRÞK0;K;n0;n
are suitable to numerical evaluation, but hide
the physical meaning of the process. Therefore, it is worth
retracing, in part, our steps, rewriting the matrix element in
its “N-process form,” Eq. (12), as
VðSRÞK0;K;n0;n
¼ DK�K0XGkG
0k
ðdznðn
0Þ�G0kþGk;K
0 ðzÞd ~VðlatÞGkðzÞ
dznðnÞ
G0k;KðzÞ
� DK�K0
ðdzfðn
0Þ�K0ðzÞ
d ~VðlatÞGk¼0ðzÞdz
fðnÞK ðzÞ
¼ DK�K0
ðdzfðn
0Þ�K0ðzÞ dhV
ðlatÞðzÞidz
fðnÞK ðzÞ; (15)
where we have introduced the 2D Fourier transform of the
lattice pseudopotential
~VðlatÞGkðzÞ ¼
XGz
VðlatÞG eiGzz (16)
and have considered only the cell-averaged lattice potential
hVðlatÞðzÞi ¼P
GzV0;Gz
eiGzz when replacing the functions
nðnÞGk;Kwith their corresponding cell-average fðnÞK , since the
latter functions are insensitive to the position R within a cell.
Note that the equation above resembles very closely the
model given by Eq. (7) of Ref. 10, the main — and very sig-
nificant — difference being the presence of the atomic (pseu-
do)potential instead of the Hartree-like potential in Eq. (15).
More important is the fact that Eq. (15) has a very clear
physical interpretation: The matrix element for scattering
with roughness is mostly controlled by the location at which
the atomic (pseudo)potential exhibits the largest change as a
function of z. This occurs at the interfaces where
dhVðlatÞðzÞi=dz is largest, since it is related to the change of
workfunction as we move from one material (Si or InGaAs
in the examples above) to another (SiO2 or AlInAs, respec-
tively). Thus a large matrix element will be obtained when-
ever there will be a large workfunction variation (that is, at
interfaces with large band discontinuities) and whenever the
wavefunctions peak in proximity of these interfaces (such as
in the case of a large interfacial field or strong geometric
confinement in thin films). Note also that, for n0 ¼ n and
K ¼ K0, the integral in Eq. (15) represents the first-order
shift, DEnðKÞ, of the dispersion of band n under a change
�D of the layer thickness. This is equivalent to the “usual”
assumption CðGPNÞK;K;n;n;0 � �DEnðKÞ=D � �dEnðKÞ=dts (see
Eq. (39) of Ref. 13, model first proposed in Ref. 28), relating
surface-roughness scattering to the fluctuations of the energy
of quantum-confined states in a quantum well. Finally note
that our approach accounts for the “smearing” of the interfa-
cial ionic potential barrier (over the interfacial region in
which dhVðlatÞðzÞi=dz is significantly different from zero)
and for whatever penetration of the wavefunction across the
interface happens to occur.
Figure 3(a) helps to visualize the situation. The figure
refers to the H-terminated 9-cell-thin (100) Si layer described
FIG. 3. (Color online) (a) Derivative of the cell-averaged lattice potential,
dhVðlatÞðzÞi=dz, as a function of position for a (100) H-terminated free-stand-
ing Si film, with thickness given by 9 Si cells and vacuum padding with thick-
ness equivalent to 11 Si cells. (b) Perturbation potentials due to the deletion
(positive potentials, dashed line, black online) or insertion (negative poten-
tials, solid lines, red online) of a single Si atom from each interface. Also
shown are the real parts of the two ground-state quasi-doubly-degenerate
wavefunctions at flat-band conditions (thin lines, blue online). Note that, while
they both exhibit the same sine-like envelopes, their real parts show different
parity, as required by orthogonality.
083713-5 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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above. The thick line in (a) shows the derivative of the cell-
averaged lattice potential, dhVðlatÞðzÞi=dz, as a function of
position in the supercell. The variation of the confining poten-
tial at the Si/vacuum interface is clearly seen as the positive
(negative) peak at the bottom (top) interface. For wavefunc-
tions affected by an electric field which confines them at the
top (z¼ 0) interface, it is clear that the matrix element, con-
trolled by the overlap between the wavefunctions and the de-
rivative of the pseudopotential, will increase with increasing
confinement. This is illustrated by the black dots (labeled
“uniform shift”) in Fig. 4. This figure shows the squared ma-
trix element jVðSRÞK;K;n;n0=Drmsj2 (that is, normalized to the rms
average of the atomic displacement, Drms ¼ hjD0j2i1=2) for
intra- and inter-subband transitions at the �C-point, involving
the two-fold almost-degenerate ground state (n ¼ 16) calcu-
lated from Eq. (15). The labels “þ” and “–” identify the high-
energy and the low-energy state of each quasi-degenerate pair.
This lack of perfect degeneracy — known as “valley
splitting,” as mentioned previously — is due to the presence
of the confining potential and to the finite thickness of the
layer, effects of which both break inversion symmetry. Note
that one state of each pair is associated to a symmetric (even)
wavefunction, the other state to an odd wavefunction,
although the envelopes of their squared amplitudes are both
even and of almost identical form, and they both resemble the
envelope of the ground-state sine-like wavefunction obtained
using the effective-mass approximation (see Fig. 3(b)). In
order to follow the “conventional” effective-mass nomencla-
ture, which ignores valley splitting, we refer to the ðn�; nþÞtransitions as “intra-subband,” although we have the rather un-
usual feature of dealing with even-odd intra-subband proc-
esses. Similarly, we lump into the same subband n the pair of
quasi-two-fold degenerate states nþ and n� and average the
four squared matrix elements ðn6; n6Þ. Also note that we
plot inter-subband matrix elements at the �C symmetry point,
as they give additional information about the physical picture,
even though energy conservation obviously forbids many of
these transitions. Also shown is the field-dependence of the
Prange-Nee matrix element calculated according to the varia-
tional wavefunction approximation.9 For intrasubband transi-
tions within the ground state in the electric quantum limit, this
matrix element — known to be quantitatively incorrect when
employed using Eq. (17), but still providing the correct de-
pendence of Fs — yields
VðSRÞK;K;n;n0
Drms� �h2
2mL
dfð0Þðz ¼ 0Þdz
����������2
� �h2b3
2mL� 33
32
e2
�sns ¼
33
32eFs;
(17)
where b3 ¼ 12mLe2½nd þ ð11=32Þns�=ð�s�h2Þ, e is the magni-
tude of the electron charge, mL is the longitudinal electron
effective mass, nd and ns are the depletion and electron den-
sities, respectively, and �s is the static Si dielectric constant.
In Eq. (17), we have neglected the depletion density nd com-
pared to the electron density ns at these large surface fields
and we have used the fact that Fs ¼ ens=�s.
C. Correlated, anticorrelated, and uncorrelatedroughness
As we have already mentioned, in the case of thin films,
the approach we have just described amounts to assuming
correlated roughness at both interfaces, since Eq. (7) repre-
sents a rigid shift on the z direction of the entire structure,
albeit of magnitude randomly varying on the plane of the
interface. Indeed, for perfectly z-symmetric structures, the
integral in Eq. (15) vanishes in the case of odd-to-odd, even-
to-even transitions and, of course, of intraband processes as
well, since, in this case, the energy shift of the dispersion
vanishes, dEnðKÞ=dts ¼ 0. Obviously, in addition to the case
of correlated roughness in a thin-body structure, the matrix
elements above can be employed to treat surface-roughness
scattering in thick films or, in thin films, at confining fields
large enough to localize the wavefunctions at one of the two
interfaces (the “top” interface, to fix the ideas) and so render-
ing the roughness of the bottom interface ineffective, since
the factor nðn0Þ�
Gk;K0 ðzÞnðnÞGk;K
ðzÞ is negligible around z � ts.
In order to deal with more general situations, we must
resort to a quasi-atomistic framework. The reason why the
model described above can handle only correlated roughness
stems from the fact that we have initially assumed a homoge-
neous shift of the entire structure. On the contrary, account-
ing for the effect of different degrees of correlation between
the two interfaces requires decoupled (uncorrelated rough-
ness) or opposite (anticorrelated roughness) shifts of the
atoms at the interfaces. To accomplish this, let us consider
the effect of removing a single atom at one interface only,
the “top” one to fix the ideas. Accounting also for the fact
FIG. 4. (Color online) Comparison of the (1,1) squared generalized Prange-
Nee matrix elements obtained using the uniform atomic shift, as in Eq. (15)
(labeled “uniform shift”), the displaced average interface potential obtained
by removing one atomic layer, as in Eq. (22) (labeled “average interfacial
potential”), and the interface potentials associated to the insertion or deletion
of one atomic layer, as in Eq. (25) (labeled “interfacial potentials”). Note that
the results differ only by 65%, despite the vastly different assumptions. The
dotted (blue online) line represents the value of the squared matrix element
obtained employing the variational wavefunction multiplied by a factor of 4.5
to align it with the pseudopotential results. While the variational wavefunction
used with Eq. (17) is known to yield inaccurate results, it still provides the
correct dependence of the squared matrix element on the surface field Fs. The
lines connecting the calculated points are only a guide to the eye.
083713-6 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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that, in H-terminated surfaces, this requires shifting two H
atoms to new positions, this will cause a change of the
lattice-averaged potential given by
hDVðtÞðzÞi ¼XGz
eiGzzX
a
e�iGzsaz VðaÞ0Gz�Xa0
e�iGzsa0z Vða0Þ0Gz
" #:
(18)
More generally, we can view this as the lattice average of
the perturbation Hamiltonian caused by this change of the
lattice potential, the Hamiltonian which takes the form
HðSRÞðrÞ ¼XGQ
eiðG�rþQ�RÞ
�X
a
e�iG�saVðaÞG �
Xa0
e�iG�s0aVG
ða0Þ" #
: (19)
In these equations, the index a runs over the atoms added
(that is, the two H atoms in the new positions) and the index
a0 runs over the atoms deleted from the structure (i.e., the Si
atom removed together with the two H atoms saturating its
dangling bonds). The change of the lattice potential
expressed by Eq. (18) can be viewed as caused by a down-
ward shift D ¼ a0=4 of the top interface. Of course, the pres-
ence of random roughness implies, in general, the interface
may shift “downwards,” as we have just assumed, or
“upwards” (which is equivalent to the addition on an atomic
layer). This general case can be handled in two different
ways, which, however, will yield very similar end results, as
we shall see shortly.
Following a first approach, we can simply shift the func-
tion hDVðtÞðzÞi by an amount �a0=8 (that is, upward) to repre-
sent a shift of rms amplitude < jD00j2 >¼ a0=4 of the top
interface. Proceeding similarly for the bottom interface, defin-
ing a function hDVðbÞðzÞi by removing a single Si atom from
the bottom interface (and re-arranging two H atoms as well),
we can define a matrix element, which accounts for the
roughness-induced potential at the two interfaces separately as
follows:
VðSRÞðacÞK0;K;n0;n
� DK�K0
ðdzfðn
0Þ�K0ðzÞ dhV
ðtÞðzÞidz
fðnÞK ðzÞ�
þð
dzfðn0Þ�
K0ðzÞ dhV
ðbÞðzÞidz
fðnÞK ðzÞ�
¼ DK�K0 IðSR;topÞK0;K;n0;n
þ IðSR;bottomÞK0;K;n0;n
h i; (20)
where dhVðtÞðzÞi=dz¼ð4=a0ÞDVðtÞðzþ a0=8Þ and dhVðbÞðzÞi=dz ¼ ð4=a0ÞDVðbÞðz� a0=8Þ are the “top” and “bottom” inter-
facial roughness potentials normalized to the displacement
amplitude a0=4, from which have been calculated and shifted
by amounts 6a0=8 to represent vanishing rms shifts at either
interface. These potentials are shown by the dashed lines,
black online (labeled “removal”) in Fig. 3(b). We see the
similarity with the derivative of the lattice potential shown in
frame (a) of that figure, but now the “peaks” at the two interfa-
ces are fully decoupled. Of course, Eq. (20) represents the
effect of anti-correlated roughness at the two interfaces, since
the interfacial potentials have been obtained by removing one
atom at each interface, so effectively shifting the two interfaces
by equal and opposite amounts. The effect of correlated or
uncorrelated roughness can be obtained defining the matrix
elements
VðSRÞðcÞK0;K;n0;n
¼ DK�K0 IðSR;topÞK0;K;n0;n
� IðSR;bottomÞK0;K;n0;n
h i; (21)
VðSRÞðucÞK0;K;n0;n
��� ���2� hjDðtopÞ
K�K0j2ijI ðSR;topÞ
K0;K;n0;nj2 þ hjDðtopÞ
K�K0j2ijIðSR;bottomÞ
K0;K;n0;nj2; (22)
respectively. In the last expression, DðtopÞ (DðbottomÞ) are the
random atomic shifts for the top (bottom) interface. This
expression can be regarded as describing uncorrelated shifts
of spatially averaged amounts hDðtopÞ0 irms and hDðbottomÞ
0 irms at
the two interfaces.
In a second approach, we consider now both the deletion
of an atomic layer, as we have just discussed, as well as the
addition of a new atomic layer. Thus, the perturbation poten-
tial resulting from correlated, anticorrelated, and uncorre-
lated roughness at both interfaces can be expressed as
VðSRÞðcÞK0;K;n0;n
��� ���2 ¼ 1
4hjDK�K0 j2i I
ðSR;top;þÞK0;K;n0;n
þ IðSR;bottom;�ÞK0;K;n0;n
��� ���2�þ IðSR;top;�Þ
K0;K;n0;nþ IðSR;bottom;þÞ
K0;K;n0;n
��� ���2� (23)
for correlated roughness, as
VðSRÞðacÞK0;K;n0;n
��� ���2 ¼ 1
4hjDK�K0 j2i I
ðSR;top;þÞK0;K;n0;n
þ IðSR;bottom;þÞK0;K;n0;n
��� ���2�þ IðSR;top;�Þ
K0;K;n0;nþ IðSR;bottom;�Þ
K0;K;n0;n
��� ���2� (24)
for anticorrelated roughness, and as
VðSRÞðacÞK0;K;n0;n
��� ���2¼ 1
4hjDðtopÞ
K�K0j2i IðSR;top;þÞ
K0;K;n0;n
��� ���2þ IðSR;top;�ÞK0;K;n0;n
��� ���2� ��þhjDðbottomÞ
K�K0j2i IðSR;bottom;þÞ
K0;K;n0;n
��� ���2�þ IðSR;bottom;�Þ
K0;K;n0;n
��� ���2�� (25)
for uncorrelated roughness. In these expressions, the multipli-
cative factor of 1=4 is due to the fact that each matrix element
must be normalized by twice the displacement of the atomic
lines at a single interface, and the form factors IðSR;top;6ÞK0;K;n0;n
and
IðSR;bottom;6ÞK0;K;n0;n
represent integrals of the form of Eq. (20) where
the perturbation potential is given by the difference pseudopo-
tential obtained by inserting (þ) or deleting (�) an atomic
layer at the top or bottom interface, respectively. Note that the
potential resulting from the insertion of an atomic layer is real
and negative, while that resulting from the deletion of an
atomic layer is real and positive. Thus, anti-correlated rough-
ness, for example, is expected to result in the largest matrix
element. The scattering (pseudo)potentials correspond to the
083713-7 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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dashed lines, black online (“removal”) and solid lines, red
online (“addition”) shown in Fig. 3(b).
One major concern arises when abandoning the
perturbation-potential described by the “shifted” scattering
potential, Eq. (8), moving to the atomistic approach, which
employs the scattering potential due to the removal or addi-
tion of atomic line, Eq. (18): The former potential is “weak”
in the perturbation parameter DR, so that perturbation theory
applies for small shifts DR. On the contrary, the difference-
potential given by Eq. (18) is of the same magnitude as the
unperturbed ionic (pseudo)potential. Therefore, the use of
perturbation theory seems to be highly questionable. How-
ever, one should look at the problem with a perspective simi-
larly embraced when using the (first) Born approximation in
dealing with Coulomb scattering with ionized impurities or
fixed charges.
Two criteria must be considered: The strength of the scat-
tering potential and the average density of the scatterers.
Regarding the first criterion, we are at the very edge of the
range of validity of the Born approximation. Assuming the
potential to be localized within a scale-length a � hjD0j2i1=2
comparable to an inter-ionic separation, for low-energy
electrons, ka < 1, we must have jHðSRÞj ¼ jhjD0j2i1=2
ðdhVðlatÞi=dzÞj << Ea, where Ea is the energy of an electron
confined within the length-scale a. Assuming that is due to a
square-well potential, Ea � p2�h2=ð2ma2Þ, which is of the
order of one-to-a-few Rydbergs, depending on the exact shape
of the scattering potential. For high-energy electrons,
ka >> 1, we must have, instead, the jHðSRÞj << �hk=ðmaÞcondition met at sufficiently large energies. So, limiting our-
selves to the more worrisome low-energy range, from Fig. 3,
we see that we are within the range of validity, but not too
comfortably so, depending on the shape of the scattering
potential. While this may indeed worry us, we should note
that we satisfy the conditions of validity of the Born approxi-
mation much more comfortably than when dealing with scat-
tering with the Yukawa-type dielectrically screened Coulomb
potential of an ionized-impurity, VðimpÞ. Indeed, in this case,
a � 1=b, (where b is the Debye-Huckel or Thomas-Fermi
screening wavevector) the static dielectric screening length,
which is usually much larger than hjD0j2i1=2, so that Ea is cor-
respondingly smaller and the condition jVðimpÞj << Ea is met
with even less certainty. Note, finally, that, in principle, we
could bypass these limitations and go beyond the perturbative
approach by considering the full wavefunctions of the per-
turbed system — i.e., with atomic lines added or deleted —
when calculating the scattering matrix elements. However,
this would require a significant computational overhead, since
we should have to compute the full band structure of at least 2
additional systems, a tough computational proposition.
Regarding the density of the scatterers, additional prob-
lems arise at densities large enough to cause concerns about
multiple-centers scattering and interference between succes-
sive collisions. Drawing once more on the analogy with Cou-
lomb scattering with ionized impurities of electron-electron
single-particle collisions, we can consider the Born approxi-
mation valid as long as the interfacial steps are separated by
an average distance (the “correlation length” K) larger than
the electron wavelength or mean-free-path due to additional
collisions, so the coherence over successive SR scattering
events is excluded. Note also that, for large K, the quantity
hjDQj2i1=2becomes smaller, thus relaxing also the conditions
considered in the previous paragraph. However, for very
short correlation lengths, one should employ approaches
which account for the coherence of the electronic wavefunc-
tions over many steps, such as the approaches of Refs. 4 and
5 or Refs. 29–38, which give a full quantum treatment of the
transmission probability across surface or edge steps in the
case of nanowires or graphene nanoribbons, respectively.
The necessity of using these approaches will become even
more evident below, when we will find that the ER-induced
mean-free-path in narrow AGRNs predicted by perturbation
theory may even be much smaller than any reasonable value
of K itself, a clearly inconsistent result.
Finally, concerns may arise also regarding the issue of
unitariety: Considering a perturbation caused by a shift of
the interface resulting in widening the layer by an atomic
layer, we should have
jhfðwide;n0ÞK0
jHðSR;þÞjfðnarrow;nÞK ij ¼ jhfðnarrow;nÞ
K jHðSR;�Þjfðwide;n0ÞK0
ij;(26)
where fðnarrow=wide;nÞK are the wavefunctions (at the same
energy, although here we shall assume that they do not
depend on energy here for discussion’s sake) of the wide or
narrow layer and HðSR6Þ is the perturbation Hamiltonian due
to a step resulting in the widening (þÞ or narrowing (�) of
the layer. The formulation presented here (and its variant dis-
cussed below for nanowires and graphene nanoribbons) sat-
isfies this requirement — which amounts to unitariety —
only in the limit in which the perturbation to the
wavefunctions,
DfðnÞK ¼ fðwide;nÞK � fðnarrow;nÞ
K ; (27)
can be ignored, as it constitutes a second-order contribution
to the matrix element above, Eq. (26). Once more, we should
consider Df negligible for “dilute” roughness-steps after a
suitable spatial average over the interface, so that
hDfðnÞK i � hjDRj2i1=2. Therefore, the treatment followed here
will be valid as long as the correlation length K of the inter-
face or edge roughness is larger than the electronic wave-
length, while it will fail at small K (and, perhaps, at small
carrier energies).
Figure 4 shows that treating correlated roughness via
Eqs. (15), (21), or (23) yields essentially the same result, as
the matrix elements for intra-subband transition (1,1) com-
puted using these different models differ by no more than
65%. Of course, in this case, we do not expect the degree of
correlation at the interfaces to affect the result because of the
strong confinement at the top surface. This effect will be
most evident in thinner films and under flat-band conditions.
Before discussing this case as well as the thickness de-
pendence of the SR matrix elements, we should make two
observations, which we will emphasize again in the follow-
ing: First, even considering a fully “symmetric” quantum
083713-8 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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well, at the atomistic level, no full inversion symmetry can
be obtained; regardless of how the two interfaces are termi-
nated, no symmetry under inversion around the axis of the
well can be obtained. As a consequence, the wavefunctions
— as well as the perturbing potentials — will not yield the
selection rules, which one would naıvely expect in an
effective-mass context. This is of course related to the
valley-splitting mentioned above. Second, as we analyze the
thickness dependence by varying the number of atomic
planes, we should expect some “noise” arising from the ab-
rupt variation of the atomic (pseudo)potential. In Si, the issue
is further complicated by the alternating symmetry exhibited
by the quasi-twofold degenerate subbands. Similarly, the
thickness ts of the film cannot be defined rigorously (this will
be an ever bigger issue when attempting to define the radius
of a cylindrical nanowire). Here, we have taken it as the
number of cells times the cell thickness, Nca0, but we should
keep in mind the presence of H atoms and of an “interfacial”
region, over which the atomic potential varies significantly.
In Fig. 5, we show the squared matrix element — calcu-
lated using Eqs. (23), (24), and (25) for the various corre-
lated, anticorrelated, and uncorrelated cases, respectively —
for SR-induced processes as a function of the thickness of an
H-terminated free-standing Si layer at flat-band conditions.
Only the four lowest-energy subbands at the �C-point are con-
sidered. The top (a), middle (b), and bottom (c) frames of
Fig. 5 are relative to the case of correlated, uncorrelated, and
anti-correlated roughness at the two interfaces. The top
frame shows that the ð1; 2Þ inter-subband transition yields a
non-negligible matrix element, as expected, since uncorre-
lated or anticorrelated roughness is required to trigger intra-
subband even-even or odd-odd processes. The surprising
presence of significant ð1; 1Þ and ð2; 2Þ matrix elements is
indeed exclusively due to ð1þ; 1�Þ and ð2þ; 2�Þ even-odd
processes, while the even-even and odd-odd ðn�; n�Þ and
ðnþ; nþÞ processes exhibit a vanishing matrix element. The
completely opposite situation is seen in the bottom frame:
Anticorrelated roughness allows only even-even and odd-
odd intra- and inter-subband processes, even-odd mode-
mixing (i.e., inter-subband transitions involving states of
opposite symmetry) being forbidden. Thus, the presence of
the ð1; 1Þ and ð2; 2Þ processes is due exclusively to
ð1�; 1�Þ, ð1þ; 1þÞ, ð2�; 2�Þ, and ð2þ; 2þÞ processes,
while the ð1�; 1þÞ and ð2�; 2þÞ transitions are forbidden.
Similarly, ð2; 1Þ processes arise exclusively from the even-
even or odd-odd ð2þ; 1þÞ and ð2�; 1�Þ transitions, since
the even-odd ð1þ; 2�Þ and ð1�; 2þÞ transitions are forbid-
den, in complete contrast to the case of correlated roughness.
In all frames, note how the well-known t�6s dependence
of the process is approximately reproduced, as expected also
from the expression28
VðSRÞK;K;n;n
Drms� dEn
dts� � �h2p2
mLt3s
; (28)
which is shown in Fig. 5 as dashed lines (obtained using
mL ¼ 0:91m) for the ð1; 1Þ and ð2; 2Þ intrasubband processes.
A dependence on layer-thickness slightly slower than t�6s is
actually to be expected from the strong nonparabolic effects
arising at high energies (so, especially in thinner films) and
from the fact that, at lower ts, the energy of the eigenstate
grows substantially, thus causing an increased spreading of
wavefunctions inside the vacuum padding region and, thus, a
reduced quantum confinement.
D. Numerical evaluation
The numerical evaluation of the surface-roughness scat-
tering rate can be performed in the standard way: The
Golden-Rule (or, better, Born-approximation) expression for
the scattering rate will be
1
sðSRÞn ðKÞ
¼ 2p�h
XK0n0
VðSRÞK0;K;n0;n
��� ���2d EnðKÞ � En0 ðK0Þ½ �: (29)
FIG. 5. (Color online) Squared generalized Prange-Nee matrix element —
normalized to the rms atomic displacement — as a function of layer-
thickness, ts, calculated from Eqs. (23), (24), and (25) for correlated (a),
uncorrelated (b), and anti-correlated (c) roughness at the two interfaces of an
H-terminated, free-standing Si layer at flat-band conditions. A large number
of cells (20 total) have been employed for all values of the Si thickness ts. The
lines connecting symbols are only a guide to the eye, while the dashed (purple
online) lines correspond to the analytical results obtained using Eq. (28) for
the ð1; 1Þ and ð2; 2Þ intrasubband transitions, as indicated in the top frame.
083713-9 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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In order to perform the integration over the constant-energy
surface, we can follow the algorithm proposed by Gilat and
Raubenheimer39 adapted to a two-dimensional integration.
Thus, we first discretize the 2D BZ into squares of sides DKcentered at points Kj. We then calculate the energy Ejn and
the gradient r2DEjn at the center of the square for each band
n. Then, the density of states at energy E for band n in the jthsquare can be expressed as ½1=ð2pÞ2�LðwjnÞ=r2DEjn. Here,
w ¼ ðE� EjnÞ=jr2DEjnj is the distance in k-space between
the center of the square and the equienergy surface at energy
E along the direction of r2DEjn and LðwÞ is the length of the
segment perpendicular to r2DEjn intersecting the square at a
distance w away from the center. Only squares spanning the
required energy E (that is, �w1 w < w1 with terms defined
below) will contribute to the sum, and, for these squares, the
length LðwÞ is given by (assuming without loss of generality
axes rotation such that cos a> sin a)
LðwÞ ¼
DK
cos aðw w0Þ
w1 � w
cos a sin aðw0 w w1Þ
8>><>>: ; (30)
where w0¼ðDK=2Þðcosa�sinaÞ, w1¼ðDK=2ÞðcosaþsinaÞ,a is the angle between the Ky-axis and r2DEjn. Employing
this algorithm, Eq. (29) can be evaluated numerically as
1
sðSRÞn ðKÞ
¼ 2p�h
Xjn0
0VðSRÞKj;K;n0;n
��� ���2 1
ð2pÞ2Lðwjn0 Þjr2DEjn0 j
; (31)
the “primed sum” indicates that only “energy-conserving”
squares contribute. The evaluation of matrix element VðSRÞK0;K;n0;n
presents only limited difficulties: The generalized Prange-Nee
term in the form given by Eq. (15), for example, involves only
the numerical evaluation of a one-dimensional overlap inte-
gral for each pair (K;K0).Ignoring Coulomb-related terms, Fig. 6 shows the gener-
alized Prange-Nee component of the SR scattering rate in an
11-cell-thick Si layer with the additional confinement of a par-
abolic potential: At small electron kinetic energies, the con-
finement effect of the field is significant, since the scattering
rates in the first subband increases significantly when the sur-
face field increases from 106 to 2:5� 106 V/cm. At larger
energies, the larger density of states at lower fields and geo-
metric confinement (since the wavefunctions “extend” more
and more toward the bottom interface as their energy
increases) dominate and the rate becomes weakly dependent
on the field.
Note that, here and in the following, we shall not discuss
the low-field carrier mobility, since this requires the calcula-
tion of the relaxation rates due to additional processes, such
as scattering with phonons (possibly confined), the effort of
which goes beyond the scope of the present work.
III. ONE-DIMENSIONAL TRANSPORT
In this section, we discuss scattering caused by rough-
ness at the free surfaces of nanowires or at the edges of gra-
phene nanoribbons, which can be treated following an
approach similar to what we have discussed in Sec. II.
AGNRs are of interest because of their potential technologi-
cal applications enabled by the chirality dependence of the
gap40 and also because they illustrate the outcome of the
method presented here in case in which roughness-induced
scattering takes is of a unique flavor. Si NWs, of course, are
of interest because gate-all-around Si NW field-effect tran-
sistors (FETs) provide excellent electrostatic control at the
10-nm gate length41 and roughness can present a significant
challenge if we want to maximize their performance.
A. Armchair-edge graphene nanoribbons
Let us consider first the case of armchair-edge graphene
nanoribbons with axis along the z direction, cross section on
the ðx; yÞ plane, and width W along the y axis fixed by the
number Na of atomic lines.
In Fig. 7, we show the band structure of a 9-AGNR
(Na ¼ 3p, where p is an integer), a 10-AGNR (Na ¼ 3pþ 1),
and an 11-AGNR (Na ¼ 3pþ 2) obtained using the C and H
local empirical pseudopotentials proposed by Kurokawa etal.42 This figure shows directly the energy gap for the three
chiral “ladders” considered in Fig. 8. These results are in
good quantitative agreement with DFT results, which ignore
many-body corrections,22 while GW corrections predict the
same qualitative trends, but yield even larger values for the
energy gap.43 Note that nearest-neighbor empirical tight-
binding models based on a single pz orbital predict qualita-
tively incorrect gaps and an incorrect ordering of the three
ladders.22 It should be remarked that experiments44 have not
FIG. 6. (Color online) Surface-roughness scattering rates (Prange-Nee com-
ponent only) for electron in the inversion layer of an 11-cell thick Si layer
with a 4-cell thick vacuum “insulator” and an external parabolic potential
with a surface field of 106 (dashed line, blue online) and 2:5� 106 V/cm
(solid line, black online). Energies are measured from the bottom of the
ground state subband, and 8 subbands have been considered. Note that, at
the low carrier energies which determine the low-field carrier mobility, the
scattering rates take values in the range of 1013/s, as expected. Note also the
effect of the field at low energy — a higher surface field inducing a larger
rate — and the major effect of the density of states and of the geometric
confinement at larger energies yielding a very high rate — casting doubts on
the validity of perturbation theory — which becomes almost independent of
the confining potential. Uncorrelated roughness at both interfaces has been
considered together with a quasi-exponential correlation spectrum of the
form given in Eq. (3) with n¼ 2, as suggested in Ref. 16.
083713-10 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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confirmed this chirality dependence of the bandgap. Querlioz
and co-workers have attributed this to disorder or, equiva-
lently, to line-edge roughness and disorder of the chirality.45
Tseng et al.29 have similarly argued that the clustering of the
gap around values corresponding to the largest 3pþ 1 gap is
the result of line edge roughness, which allows electron
transmission only at the largest “local” gap.
In complete analogy to Sec. II, we now describe the
roughness by a shift of the atoms along the y direction by an
amount �Dz varying along the length of the ribbon,
described by its Fourier decomposition,
Dz ¼X
q
Dqeiqz: (32)
We shall assume for its power spectrum hjDqj2i a Gaussian
or exponential form similar to Eqs. (2) or (3), respectively,
accounting, however, for the lower dimensionality. Thus, for
the exponential case, we have
hjDzj2i ¼ D2e�jzj=ðffiffi2p
KÞ ! hjDqj2i¼
ffiffiffi2p
D2Kð1þ q2K2=2Þ�1: (33)
The displacement of the atoms modifies the potential as
follows:
VðlatÞðrÞ ¼X
a
VðaÞðr� saÞ
¼X
a
XG
VðaÞG eiG�ðr�saÞ
¼X
G
VðlatÞG eiG�r ! VðlatÞðr þ yDzÞ
¼X
G
eiGyDz VðlatÞG eiG�r �
XG
ð1þ iGyDzÞVðlatÞG eiG�r
¼X
G
VðlatÞG eiG�r þ i
XqG
DqVðlatÞG GyeiðG�rþqzÞ (34)
to the first order in the atomic displacement, so that the per-
turbation Hamiltonian caused by the edge roughness can be
expressed as
HðERÞðrÞ ¼ iXqG
DqVðlatÞG GyeiðG�rþqzÞ: (35)
Defining the following wavefunctions analogous to Eq. (10),
nð2DÞðnÞGz;kz
ðRÞ ¼ 1
A1=2c
XGk
uðnÞG;kz
eiGk�R (36)
(where Ac is the area of the supercell on the cross-sectional
plane), the matrix element associated with a transition from
a state in band n and wavenumber kz to a state in band n0 and
wavenumber k0z can be written as
VðERÞkz;k0z;n;n
0 ¼ iX
GzG0zG00z
XGk
GyDkz�k0zþGz�G0zþG00Z
VðlatÞGk;G
00z
�ð
dR nð2DÞðn0Þ�G0z;k
0zðRÞ eiGk�R nð2DÞðnÞ
Gz;kzðRÞ: (37)
With the usual reshuffling of the dummy summation wave-
vectors, we can rewrite this expression in the more conven-
ient form
FIG. 7. Band structure of (a) an Na¼ 9, (b)
an Na ¼ 1 (b), and (c) an Na ¼ 11 graphene
nanoribbon with armchair edges with H ter-
mination of the edge C atoms. The exten-
sion of the supercell along the axial zdirection is az ¼ 3aC, where aC is the C–C
bond length � 0.142 nm. The variation of
the energy gap for the various cases
Na ¼ 3pþ 1 and Na ¼ 3pþ 2 compared to
the Na ¼ 3p can be easily seen.
FIG. 8. (Color online) Dependence of the bandgap of AGNRs on ribbon-
width. The lines connecting the calculated points are only a guide to the eye.
083713-11 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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VðERÞkz;k0z;n;n
0 ¼ iX
GzG0zG00z
XGk
Gy Dkz�k0zþG0z VðlatÞGk;G
00z
ðdRnð2DÞðn0Þ�
Gz�G0zþG00z ;k0z
�ðRÞeiGk�R nð2DÞðnÞGz;kz
ðRÞ
¼ iX
GzG0zG00z
XGkG
00k
GyDkz�k0zþG0z VðlatÞG u
ðn0Þ�GkþG
00k ;Gz�G0zþG00z ;k
0z
uðnÞG;kz
¼XG0z
Dkz�k0zþG0zCð2DÞðGPNÞkz;k0z;n;n
0;G0z: (38)
Recognizing the fast decay of Dq with increasing q, we can
ignore Umklapp terms with G0z 6¼ 0, so that the matrix ele-
ment simplifies to (renaming G00 ! G0)
VðERÞkz;k
0z ;n;n
0 � iDKz�k0z
XGzG
0z
XGk
GyVðlatÞGk;G
0z
�ð
dRnð2DÞðn0Þ�GzþG0z;k
0z
ðRÞeiGk�rnð2DÞðnÞGz;kz
ðRÞ
¼ iDKz�k0z
XGG0
GyVðlatÞG u
ðn0Þ�GþG0;k0z
uðnÞG0;kz
¼ DKz�k0zCð2DÞðGPNÞ
kz;k0z ;n;n
0;0: (39)
Defining wavefunctions fð2DðnÞkz
in analogy to Eq. (13) as
fð2DÞðnÞkz
ðRÞ ¼ 1
A1=2c
XGk
uðnÞGk;Gz¼0;kz
eiGk�r; (40)
we reach an approximated form convenient for numerical
evaluation,46
VðERÞkz;k
0z ;n;n
0 � iDKz�k0z
XGk
GyVðlatÞGk;Gz¼0
�ð
dRfð2DÞðn0Þ�k0z
ðRÞeiGk�rfð2DÞðnÞkz
ðRÞ
¼ iDkz�k0z
XGk
GyVðlatÞG
~Ið1DÞkz;k0z;n;n
0 ðGkÞ; (41)
having used in the last step the expression for the overlap
factor
~Ið1DÞkz;k0z;n;n
0 ðQÞ ¼ð
dRfð2DÞðn0Þ�k0z
ðRÞeiQ�rfð2DÞðnÞkz
ðRÞ: (42)
Note that, in simpler models which ignore Bloch-functions
effects,47,48 the reciprocal-lattice vectors disappear and the
scattering rate for edge-roughness-induced processes van-
ishes for inter-subband transitions, since, whenever only one
final state k0z ¼ �kz is assumed to exist, ~Ið1DÞkz;�kz;n;n0
ð0Þ ¼ dn;n0 .
The expression above, Eq. (41), represents the case of
roughness correlated at both edges. As we have noticed above
discussing the case of thin films, such a correlated roughness
(representing a “snaking” ribbon with constant width), can
induce only a moderate mode-mixing, but no intra-subband
transitions. Therefore, we should consider the more interesting
case of anti-correlated and uncorrelated edge roughness.
These cases can be treated in a way similar to the approach,
which had led us to Eqs. (23)–(25), as demanded by the fact
that the addition or the deletion of an atomic line in an AGNR
can have a dramatically different effect in view of the
chirality-dependence of the AGNR band-gap (see Fig. 8).
This chirality dependence also makes us expect a “noisy”
width dependence, since, for each different ribbon, a change
of width will cause a dramatically different change of the sub-
band energy. More importantly, questions should be raised
about the validity of the perturbation theory (the Born and
independent-collisions approximation) we are employing,
since large matrix elements will imply scattering lengths
shorter than the electronic wavelength, even in the presence of
“dilute” roughness. As we shall see from the large magnitude
of the matrix elements, a correct approach — already men-
tioned above — would have to rely on the calculation of the
transmission probability across a ribbon of varying width, as
done by Tseng et al.,29 by Betti and co-workers,30 and
others,31–35,37,38 and even in the context of GNR-based FETs
by Luisier and Klimeck.36 Therefore, our results should be
interpreted as providing a qualitative trend and clearly indicat-
ing most definitely that LER scattering plays a huge role in
controlling electronic transport in AGNRs, but their quantita-
tive correctness — and especially their applicability to trans-
port calculations — should be questioned.
Here, we consider the change of the lattice (pseudo)po-
tential caused by removing (�) or adding (þ) only a single
line of C atom (and terminating H atoms) from the left and
right edges, obtaining scattering potentials hDðleft;6ÞðRÞi and
hDðright;6ÞðRÞi given by expressions similar to Eq. (18). We
ignore the case of abrupt variations of the AGNR-width by
more than a single atomic line at each edge, since these
would correspond to (hopefully) unrealistically large values
of hjDq¼0j2i1=2. Thus, the matrix element associated to the
roughness at the two edges can be written as
VðERÞðcÞk0z;kz;n0;n
��� ���2¼ 1
4hjDKz�k0z j
2i IðER;left;þÞk0z;kz;n0;n
þ IðER;right;�Þk0z;kz;n0;n
��� ���2�þ IðER;left;�Þ
k0z;kz;n0;nþ IðER;right;þÞ
kz;kz;n0;n
��� ���2� (43)
for correlated roughness, by
VðERÞðacÞk0z;kz;n0;n
��� ���2¼ 1
4hjDKz�k0z j
2i IðER;left;þÞk0z;kz;n0;n
þ IðER;right;þÞk0z;kz;n0;n
��� ���2�þ IðER;left;�Þ
k0z;kz;n0;nþ IðER;right;�Þ
k0z;kz;n0;n
��� ���2� (44)
for anti-correlated roughness, and by
VðERÞðacÞk0z;kz;n0;n
��� ���2¼ 1
4hjDðleftÞ
Kz�k0zj2i IðER;left;þÞ
k0z;kz;n0;n
��� ���2þ IðER;left;�Þk0z;kz;n0;n
��� ���2� ��þhjDðrightÞ
Kz�k0zj2i IðER;right;þÞ
k0z;kz;n0;n
��� ���2þ IðER;right;�Þk0z;kz;n0;n
��� ���2� ��(45)
for uncorrelated roughness. In these expressions, the form fac-
tors IðER;left;6Þk0z;kz;n0;n
and IðER;right;6Þk0z;kz;n0;n
represent integrals of the form
083713-12 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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IðER;lr;6Þk0z;kz;n0;n
¼ð
dRfð2DÞðn0Þ�k0z
ðRÞ dhVðlr;6ÞðRÞi
dxfð2DÞðnÞ
kzðRÞ; (46)
where the perturbation potentials dhVðlr;6ÞðRÞi=dx are given
by the difference pseudopotentials obtained by inserting (þ)
or deleting (�) an atomic layer at the left (l) or right (r) edge,
respectively, where, exactly as discussed after Eq. (18),
dhVðleftÞðRÞi=dx¼ ½2=ffiffiffi3p
aCÞ�DVðleftÞðzÞ and dhVðrightÞðRÞi=dx¼ ½2=
ffiffiffi3p
aCÞ�DVðleftÞðzÞ are the “left” and “right” edge rough-
ness potentials normalized to the displacement amplitudeffiffiffi3p
aC=2 from which have been calculated. Here, aC is the
C–C bond length, � 0.142 nm. These potentials are shown in
Fig. 9. The contour plots of the ground-states conduction-band
wavefunctions are shown in the top (a) and third frames (c) to-
gether with the contour plots of the scattering potentials (only
the potential due to the deletion of an atomic line is shown for
clarity) for a 7-AGNR and an 11-AGNR, respectively. They
can be viewed as 2D “cross-sections” of the nanoribbons. The
second frame from the top (b) and the bottom frame (d) show
the same quantities, but averaged over the thickness of the rib-
bon. Both potentials (resulting from the insertion or deletion
of atomic line) are shown in this case. Comparing these
frames — in which the “thickness-averaged” wavefunctions
are plotted, retaining the relative normalization ratio — we
can see how the overlap between the ER-induced scattering
potential and the wavefunctions is reduced as the width of the
ribbon increases. Note also — comparing the 2D and the 1D
views of the ER potential and wavefunction — that two-
dimensional effects are quite significant.
Figure 10 shows the squared matrix element as a func-
tion of the width of the nanoribbon for armchair-edge rib-
bons for the case of uncorrelated roughness. For wide
AGNRs, we expect a W�4 dependence, weaker than the t�6s
dependence observed in thin films. This dependence is
expected from the fact that, in a simple analytical approxi-
mation, the dispersion of the ribbons can be expressed as
EnðkzÞ � �htF
ffiffiffiffiffiffiffiffiffiffiffiffiffiffiffik2
n þ k2z
q; (47)
where tF is the Fermi velocity in graphene and kn is the
quantized wavenumber along the width of the ribbon for
band n given by gnp=W, where g is a number of the order of
unity, which varies depending on the model chosen.37,47–49
If additional effects (to be discussed momentarily) are
ignored, in analogy with Sasaki’s expression, we expect for
the matrix element due to line-edge roughness
VðERÞðucÞ0;0 � dEnðkz ¼ 0Þ
dW� � g�htFpn
W2; (48)
hence the W�4 dependence for the squared matrix element.
This is indeed observed for the (2,2) transitions (Fig. 10(b))
for 3p-wide AGNRs at the largest W we have considered,
but it does not appear to be a general feature as a result of
the chirality-dependence of the AGNR bandgap not captured
by the simple model, Eq. (47).
Indeed, two features stand out in Fig. 10: First, the
“noise” observed, especially at small W, and, second, the
magnitude of the squared matrix element, some two orders
of magnitude larger than the magnitude (of the order of
1 eV/nm for W¼ 1 nm) expected from Eq. (48). Both fea-
tures can be understood, looking back at Fig. 8. Since, at
the atomic level, the edge roughness stems from a fluctuat-
ing edge affected by the removal or addition of an atomic
line, the gap, and so the energy of each kz state is not cor-
rectly described by Eq. (47), but “jumps” quite suddenly as
the number of atomic lines along the width of the ribbons
FIG. 9. (Color online) (a) Contour plot of the cell-averaged squared ground-
state conduction-band wavefunction (thin lines, black online) and LER scat-
tering potentials due to the insertion of an atomic line at the left (thick blue
lines) and right (thick contour lines, black online) edges for a 7-AGNR.
Open circles underneath the contour lines represent C atoms, solid circles
(partially hidden by the contours of the ER potential) H atoms. (b) The same
quantities plotted in the top frame, but now averaged over the thickness of
the ribbon. In this case, both scattering potentials due to the insertion (solid
lines) or deletion (dashed lines) of an atomic line have been plotted. (c), (d)
As in the top two frames, but for an 11-AGNR.
083713-13 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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jumps among 3p, 3pþ 1, or 3pþ 2 (although this effect may
be masked by disorder45), hence the large fluctuations —
actually, the chirality dependence — and the large magnitude
seen in Fig. 10. This effect has not been considered in
previous mobility studies based on a “smooth” analytic band-
structure and associated roughness models,47,48 but is obvi-
ously implicitly present in atomistic approaches,30,36,37,50–52
and it may explain the low electron mobility seen experimen-
tally in narrow ribbons,54,55 much lower than in large gra-
phene sheets.56 Thus, perfect control of the nanoribbon width
— with whatever process one may envision, such as bottom-
up synthesis57 or chemically “unzipping” carbon nanotubes
(CNTs)58,59 — may be necessary in order to obtain AGNRs
with good transport properties, at least in the diffusive (long
GNRs) regime. How crucial our observations really are in
practice is still hard to assess. Indeed, we should add a brief
“disclaimer” stressing once more the (perhaps) obvious fact
that our discussion is valid in the diffusive regime. On the
contrary, in the quasi-ballistic regime, the quantum-
transmission approaches of Refs. 29–35, 37, and 38 are to be
preferred also, because, as mentioned above, electronic trans-
port in rough (or disordered) GNRs may be affected by vari-
ous confinement effects, depending on the electron coherence
length,56 by Anderson localization,33,35 as discussed in the
review article by Cresti et al.,60 or by transport among quan-
tum dots formed by lithographically induced ER61 or induced
by nearby charged impurities.62,63 Finally, while we have con-
sidered free-standing ribbons, we should keep in mind possi-
ble interactions with the substrate, which may give rise to
strong effects related to remote coupling with polar substrate
phonons.64,65
Curiously, relatively smaller matrix elements are
observed for AGNRs of width given by a small odd integer
of the form 3pþ 1. This is definitely against the expectations
we could draw from Ref. 29. There, it is shown that, in
AGNRs of varying width, good transmission occurs only for
states at energy corresponding to the ground-state energy of
the nearest sector with 3pþ 1 width (which exhibits the larg-
est gap). Thus, we should expect ð3pþ 1Þ AGNRs to exhibit
the smallest matrix elements. On the contrary, we find that
the two narrowest odd-ð3pþ 2Þ AGNRs we have considered
(Na¼ 5 and 11) exhibit the smallest overlap between the per-
turbing potential and the electron wavefunction. These rib-
bons are characterized by the smallest gap, like all ð3pþ 2ÞAGNRs, and also by their full inversion symmetry at the
atomic level:60 AGNRs of even width do not exhibit inver-
sion symmetry about their axial direction and only odd-
ð3pþ 2Þ AGNRs exhibit this symmetry fully (at the A and Bsublattice level). For example, the edge C atoms and the cen-
ter C atom along a cross-section of the ribbon belong to the
same sublattice in this case. This allows the wavefunctions
of states in the first conduction band to be fully symmetric
with small amplitude at the edges, as in the naıve effective-
mass sine-like approximation. This is seen in Fig. 9(d). This
minimizes the overlap integral with the roughness-induced
difference-potential, leading to a small matrix element. We
are unable to provide any deeper physical explanation for
this surprising observation.
Finally, the ER scattering rate can be evaluated using a
1D discretization analogous to the 2D expression of Eq. (31),
1
sðERÞn ðkzÞ
¼ 2p�h
Xjn0
0 1
2pdEn0j
dkz
���� �����1
VðERÞkzj;kz;n0;n
��� ���2; (49)
and similarly for the velocity relaxation rate,
1
sðERÞnt ðkzÞ
¼ 2p�h
Xjn
0
12p
dEn0j
dkz
���� �����1
VðERÞkzj;kz;n0;n
��� ���2 1� tn0j
tnðkzÞ
� �: (50)
This requires a discretization of the 1D BZ into segments of
length Dkz labeled by an integer j centered around the wavenum-
ber kzj, with central energy Enj given by the dispersion EnðkzjÞin band n. We denote the central derivative dEnðkzjÞ=dkzj
by dEnj=dkz and group velocity by tnj ¼ dEn0j=dkz=�h.
The “primed” sum means that only energy-conserving
segments (i.e., such that En0j � ðdEn0j=dkzÞDkz=2 EnðkzÞ< En0j þ ðdEn0j=dkzÞDkz=2) should be considered. Note that, in
FIG. 10. (Color online) Squared magnitude of the generalized Prange-Nee
edge-roughness matrix element at the zone-center in the case of uncorrelated
toughness for the (1,1) (top frame) and (2,2) (bottom frame) matrix ele-
ments, emphasizing the chirality dependence. For the (1,1) matrix element, a
much different power-law dependence is observed for each different chiral-
ity of the ribbons. The two narrowest odd-(3pþ 2)-AGNRs exhibit the
smallest matrix element. For the (2,2) matrix element, roughly the same
power-law is observed. These differences can be attributed to the chirality
dependence of the band-gap of AGNRs. Indeed, in the bottom frame, one
can clearly see the quasi-periodic oscillation of the matrix element as we
cycle through 3p-, (3pþ 1)-, and (3pþ 2)-wide AGNRs.
083713-14 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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the sum appearing in Eq. (49), the initial state itself must be
excluded, since this process amounts to a first-order self-energy
renormalization of the electron dispersion. (The fact that this ob-
servation matters is specific to 1D transport, since 3D or 2D scat-
tering to the initial state itself constitutes a zero-measure volume
of k-space and gives no contribution to the total rate.) Also, the
“microscopic” velocity relaxation rate defined by Eq. (50) —
different from the relaxation rate used when performing mobility
calculations — may take negative values in the presence of
strong forward inter-subband scattering to states with larger
group velocity. This is a frequent occurrence for 1D processes
with the matrix element decreasing with increasing wavenumber
transfer, which is the case here because of the dependence of
hjDqj2i on q. While not shown explicitly below, this indeed hap-
pens in AGNRs at large energies and in Si NWs even at small
energies.
Figure 11 shows the uncomfortably large magnitude of
the generalized Prange-Nee component of the LER scatter-
ing rates (top) or velocity relaxation rates (bottom) in 7-, 13-,
and 19-AGNRs, the effect already discussed above. Since a
quantitative estimate of the scattering rates is now available,
we can rephrase the discussion — and present our concerns
— in more precise terms: From Fig. 2 (or even Fig. 14, to be
discussed below), we see that a change D � 0.1 nm of the
thickness (or diameter) of Si layers (or NWs) causes a
change of the bottom of the conduction band DEc � 0.1 eV.
On the contrary, for AGNRs, the chirality dependence of
their energy gap implies that a change of width of a similar
D due to the addition or deletion of a single atomic line
causes a change DEc one order of magnitude larger, hence in
turn, ER matrix elements and scattering rates two orders of
magnitude larger, as indeed shown in Fig. 11. From this per-
spective, zigzag-edge ribbons are not expected to suffer so
severely, as indeed found by Cresti and Roche.38 As already
mentioned, the large magnitude of these scattering rates
clearly presents difficulties in translating these results into
measurable properties of electron transport: Even assuming
the very high Fermi velocity tF � 108 cm/s of carriers near
the graphene Dirac point, electrons would not survive farther
than � 0.l nm for sðERÞ � 10�16 s, a distance even shorter
than any reasonable ER correlation-length K. While one may
improve the confidence in these perturbation theory results
by going beyond the first Born approximation (for example,
by employing as final “scattered” wavefunctions those calcu-
lated by considering ribbons of width different from those
used to compute the initial “incident” waves), the matrix ele-
ments are likely to remain extremely large. This is a clear
symptom of the fact that the extended Bloch waves of the
homogeneous system cannot be employed reliably to deal
with electronic transport in narrow and rough AGNRs — as
implied by the ridiculously short lifetimes shown in Fig. 11
— and quantum-transport simulations of the full inhomoge-
neous system become a necessity. Nevertheless, if we were
willing to take these quantitative results seriously, from the
magnitude of the rates shown in this figure, we could crudely
estimate an ER-limited electron mobility lERÞ in narrow
AGNRs of the order of 1 cm2/V s or even less, assuming
naıvely lðERÞ � esðERÞt =m�, (m� � 0:1m being the effective
mass in the lowest-energy band of AGNRs with width in the
range of 2 to 3 nm53), in rough qualitative (and probably ac-
cidental) agreement with recent experimental observations.54
So, while clearly the numerical values shown in Fig. 11 can-
not be taken seriously, nevertheless, they tell us a strong
message which confirms, from our different perturbative per-
spective, the dramatic importance of edge disorder in
AGNRs,37,61–63 with the likely implication that transport in
narrow and rough AGNRs does not occur via extended
states. Therefore, it appears that the optimistic statements
made in Ref. 47 regarding the “robustness” of GNRs with
respect to ER scattering — based on Eq. (47) and the ques-
tionable assumption that only intra-subband transitions are
allowed — are not supported by our approach, at least in the
FIG. 11. (Color online) (a) Line-edge-roughness scattering rate (Prange-Nee component only) as a function of electron energy (measured from the bottom of
the conduction band) in three H-terminated armchair-edge GNRs with width given by Na ¼ 3pþ 1 atomic lines (Na ¼ 7, 13, and 19). A total number of 6 sub-
bands have been employed together with an exponential autocorrelation. Note the very large scattering rates originating from the chirality-dependence of the
gap shown in Fig. 8. (b): As in the top frame, but showing the velocity relaxation time. Note that, for the 7-AGNR at large energies, the relaxation rate
increases as a result of inter-subband scattering to the lower-velocity, higher density-of-states second subband. Scattering and relaxation rates so large obvi-
ously bear implications on the electron mobility of narrow AGNRs, but their magnitude casts doubts on the suitability of perturbation theory (Born approxima-
tion) and, more appropriately, of employing Bloch states to deal with this issue.
083713-15 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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diffusive regime. On the contrary, what is most worrisome is
the fact that the “slower” width dependence shown in Fig. 10
for any chirality, if maintained at widths larger than what we
can handle here, implies that ER-scattering may remain very
strong — stronger than in NWs or thin films of similar dimen-
sions and roughness — also in wider ribbons.
B. Circular cross-section nanowires
Considering now cylindrical Si nanowires, Fig. 12
shows the band structure and density of states of an
H-terminated [100] Si NW with diameter D of 2 nm. The
same local empirical pseudopotentials from Ref. 23 have
been employed, and spin-orbit interaction has been
neglected. The squared amplitudes of the wavefunctions
of the lowest-energy conduction-band states for the 2-nm-
diameter NW are illustrated in Fig. 13. Note that, in these
small wires, the ground state wavefunctions have polar
symmetry (being characterized by an angular momentum
quantum number l ¼ 0), but the first excited state has quad-
rupole symmetry (l ¼ 2). This is due to the fact that the
states at C originate from a superposition of states in the 4
bulk ellipsoidal equienergy surfaces with transverse and
longitudinal masses along the principal x and y directions.
The smaller energy thus corresponds to those states whose
“lobes” probe the larger longitudinal mass by extending
along the positive and negative x and y directions, resulting
in the fourfold symmetry of the lattice and so in s-wave
envelopes. On the contrary, the dipole-like (l ¼ 1) states
result from states whose lobes probe the smaller transverse
mass, thus yielding a larger kinetic energy. Finally, the de-
pendence of the bandgap as a function of nanowire diame-
ter is shown in Fig. 14. The expected D�2-dependence is
seen, deviations at the smallest diameters being caused by
the finite confinement potential.
In order to account for roughness at the surface of the
wire, we consider an atomic shift along the radial directionbR by an amount �D/;z function of the position on the surface
of the wire characterized by the axial and angular coordi-
nates z and /, respectively, employing cylindrical coordi-
nates. We can decompose the displacement D/;z into its
Fourier components,
D/;z ¼Xl;q
Dl;qeiðl/þqzÞ; (51)
and assume an exponential power spectrum of the form14,66
hjDl;qj2i ¼D2K2
2Rs1þ K2
2
l2
r2s
þ q2
� �� ��3=2
; (52)
where Rs is the radius of the nanowire and D and K are, as
usual, the roughness rms amplitude and correlation length.
Note that, while this expression is valid only for 2pRs >> K,
in the following, we shall use it indiscriminately in all situa-
tions, since our interest here is not so much on the micro-
scopic nature of the roughness itself, but on the effect of the
roughness on electronic transport. Then, under such a shift,
the change of the lattice potential — and so the perturbation
Hamiltonian — will be
FIG. 12. Band structure of a [100] cylindrical H-terminated Si nanowire
with diameter of 2 nm. The extension of the supercell along the axial z direc-
tion is az ¼ a0, where a0 is the bulk Si lattice constant.
FIG. 13. Contours of the square amplitude of the wavefunctions of the 6
lowest-energy conduction-band states for the 2-nm-diameter, H-terminated
[100] Si NWs of the previous figures. The angular momentum quantum
number l indicates the most significant lowest-l component of each
wavefunction.
083713-16 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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HðSRÞðRÞ ¼ dVðlatÞðRÞ � iX
G
Xl;q
G � bRDl;qeiðl/þqzÞeiG�r;
(53)
where bR ¼ R=R is the unit vector along the radial direction.
Employing the wavefunctions nð2DÞðnÞGz;kz
ðR;/Þ (expressed in
polar coordinates), the scattering matrix element can be writ-
ten as follows:
VðSRÞk0z;kz;n0;n
¼ iX
l
XGz;G0z;G
00Dl;kz�k0zþG0z V
ðlatÞG00 G00k
ð2p
0
d/cosð/� hG00 Þeil/
�ð
dRRnð2DÞðn0Þ�Gz�G0zþG00z ;k
0zðR;/ÞeiG00kRcosð/�hG00 Þnð2DÞðnÞ
Gz;kzðR;/Þ
¼X
l
XG0z
Dl;kz�k0zþG0zCðGPNÞðlÞk0z;kz;n0;n;G0z
;
(54)
where we have expressed Gk � bR as Gk cosð/� hGÞ and hG
is the polar angle of Gk, hG ¼ acosðGx=GkÞ. Considering, as
usual, only N processes (i.e., retaining only the term G0z ¼ 0
in the sum above),
VðSRÞk0z;kz;n0;n
� iX
l
Dl;kz�k0z
XGz;G0
VðlatÞG0 G0k
ð2p
0
d/ cosð/� hG0 Þeil/
�ð
dR Rnð2DÞðn0Þ�GzþG0z;k
0zðR;/ÞeiG0kR cosð/�hG0 Þnð2DÞðnÞ
Gz;kzðR;/Þ
¼X
l
Dl;kz�k0zCðGPNÞðlÞk0z;kz;n0;n;0: (55)
Our final “usual” approximation consists of ignoring the
Bloch oscillations within the wavefunctions nð2DÞðnÞGz;kz
, replac-
ing them with the envelopes fð2DÞðnÞkz
, while simultaneously
considering the lattice potential averaged over the unit cell
in the axial direction. Thus, the matrix element takes the sim-
pler form
VðSRÞk0z;kz;n0;n
� iX
l
Dl;kz�k0z
XGk
VðlatÞGk;Gz¼0Gk
�ð2p
0
d/ cosð/� hGÞeil/
�ð
dRRfð2DÞðn0Þ�k0z
ðR;/ÞeiGkR cosð/�hGÞfð2DÞðnÞkz
ðR;/Þ:
(56)
This expression is still too complicated for numerical evalua-
tion: In order to calculate the scattering rate, for each pair
ðkz; k0zÞ, we would have to compute a two-dimensional integral
for several values of angular momentum l and for several val-
ues of Gk. Therefore, we shall seek an alternative formulation,
while retaining unaltered the major physical properties of the
process. In order to do this, let us rewrite Eq. (56) as
VðSRÞk0z;kz;n;n0
�X
l
Dl;kz�k0z
ð2p
0
d/
�ð
dRRfð2DÞðn0Þ�k0z
ðR;/Þ @hVðlatÞðR;/Þi@R
eil/fð2DÞðnÞkz
ðR;/Þ;
(57)
where
hVðlatÞðR;/Þi ¼XGk
VðlatÞGk;Gz¼0eiGk�r (58)
is the lattice potential averaged over a unit cell in the z direc-
tion. This form of the matrix elements emphasizes two major
aspects of the problem. First, it illustrates the physical mean-
ing of the integration: The dominant contribution to the inte-
gral above will arise from the interfacial/surface region,
where the confining supercell pseudopotential changes
abruptly. Indeed, as we had noticed in the case of thin layers,
for l ¼ 0, kz ¼ k0z, and n ¼ n0, Eq. (57) expresses the change
of the energy of the state kz; n under a change �D of the NW
diameter. Therefore, we recover the customary physical
interpretation of the process, which applies to models
employing “barrier potentials,” having, however, replaced
such potentials with the atomic pseudopotential of the super-
cell. The terms with l 6¼ 0, instead, express the energy
change due to angular variations of the wire boundaries. Due
to the “faceting” necessarily resulting from the quasi-circular
nature of the cross section, these effects are quite important,
especially in small-diameter wires.
The second virtue of Eq. (57) stems from the following
observation: In circular NWs, the potential which confines
the wavefunctions within the wire exhibits “approximately”
cylindrical symmetry, deviations from this symmetry being
due to the individual ionic potentials at the ion locations.
Therefore, we can make use of this “quasi-circular” geome-
try by considering the angular Fourier components of the
wavefunctions and of the lattice potential defining
qðnÞkz;lðRÞ ¼ 1
ð2pÞ1=2
ðd/e�il/fð2DÞðnÞ
kzðR;/Þ (59)
FIG. 14. (Color online) Diameter-dependence of the band-gap of
H-terminated, circular, cross-section Si nanowires. The expected depend-
ence on inverse of the square of the diameter is shown by the dashed line
(blue online). Deviations at the smallest values of the diameter are due to the
finite height of the Si-vacuum confining potential barrier. The lines connect-
ing the calculated points are only a guide to the eye.
083713-17 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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so that
fð2DÞðnÞkz
ðR;/Þ ¼ 1
ð2pÞ1=2
Xl
qðnÞkz;lðRÞeil/: (60)
Similarly, we can define the angular Fourier components of
the lattice potential averaged over a unit cell along the axial
direction, hVðlatÞðR;/Þi,
tðlatÞl ðRÞ ¼ 1
ð2pÞ1=2
XGk
VðlatÞGk;Gz¼0
ð2p
0
d/eiGkR cosð/�hGÞe�il/
¼ 1
ð2pÞ1=2
ð2p
0
d/hVðlatÞðR;/Þie�il/: (61)
Thus,
hVðlatÞðR;/Þi ¼ 1
ð2pÞ1=2
Xl
tðlatÞl ðRÞeil/: (62)
A similar Fourier decomposition can be obtained for
dhVðlatÞðR;/Þi=dR. So, inserting these expansions into Eq.
(57), the matrix element takes the form
VðSRÞk0z;kz;n;n0
� 1
ð2pÞ1=2
Xll0l00
Dl�l0þl00;kz�k0z
�ð
dR Rqðn0Þ�
k0z;l0 ðRÞ
dtðlatÞl00 ðRÞdR
qðnÞkz;lðRÞ: (63)
The squared matrix element must be obtained by adding
“incoherently” the various q and l contributions of the SR
spectrum, consistently with Eq. (52),
jVðSRÞk0z;kz;n;n0
j2 ¼ hjVðSRÞk0z;kz;n;n0
j2i
� 1
2p
Xll0l00hjDl�l0þl00;kz�k0z j
2ij
�ð
dR Rqðn0Þ�
k0z;l0 ðRÞ
dtðlatÞl00 ðRÞdR
qðnÞkz;lðRÞ
����������2
: (64)
In order to illustrate the behavior of the matrix elements in
wires of different diameters independent of the particular
form chosen for the power spectrum D/;z, let us consider the
case of circularly symmetric change of the wire diameter and
consider the matrix element
VðSRÞkz;kz;n;n0
� 1
ð2pÞ1=2D0;0
Xll0
ðdR Rqðn
0Þ�k0z;l0 ðRÞ
dtðlatÞl�l0 ðRÞdR
qðnÞkz;lðRÞ;
(65)
(i.e., the circular-symmetric term of Eq. (63) for kz ¼ k0z).The square of this matrix element, normalized to the squared
rms displacement D2rms ¼ hjD0;0j2i, is plotted in Fig. 15. This
figure shows the dependence of the SR matrix element on
the radius Rs of circular cross-section (100) Si NWs at flat
bands. As done previously in the case of thin Si films, quasi-
twofold degenerate pairs are observed, the degeneracy being
lifted by the presence of different facets at the wire boundary
(effects equivalent to the valley splitting seen in thin films).
As we have already remarked in the case of thin Si films, rec-
ognizing how each element of the pair evolves as the diameter
of the wire is changed is a hard task which can be avoided by
lumping together the pair of quasi-degenerate states and aver-
aging the squared matrix element over the transitions among
“equivalent” states. Note that the R�6s dependence expected
for the generalized Prange-Nee term is seen at large values of
the radius and for low-energy states, but as the radius
decreases and/or the energy of the states increases, “leakage”
into the vacuum reduces the strength of the confinement and
so of the matrix elements. Only transitions of significant am-
plitude are shown, processes like (2,1) or (3,2) transitions
being forbidden (so, no mixing of these modes) for the partic-
ular circular-symmetric atomic shift considered in the figure
via Eq. (65), especially at the low energies at which quantum
confinement induces strong angular-momentum selection
rules. Note that the expected R�6s -dependence is observed in
larger wires, while nonparabolic and “leakage into vacuum”
effects take over in smaller-diameter wires.
Finally, the scattering rate caused by interfacial roughness
can be calculated from Eq. (49) just replacing VðERÞkzj;kz;n0;n
with
VðSRÞkzj;kz;n0;n
. Figure 16 shows the generalized Prange-Nee com-
ponent of the SR scattering rates as a function of electron
energy (measured from the bottom of the ground-state sub-
band) in [100] Si NWs with a diameter of 1, 2, and 3 nm.
Note, at low energy, the much lower scattering rates within
the ground-state subband for the larger wires. At higher ener-
gies, instead, the larger DOS in the 2- and 3-nm-diameter
wires dominates.
FIG. 15. (Color online) Squared generalized Prange-Nee matrix element for
the ðn; n0Þ transitions as a function of the radius of circular, cross-section
(100) Si NWs under flat-band conditions. The matrix element has been cal-
culated for the kz ¼ k0z, l¼ l0 transitions and have been consequently normal-
ized to the rms atomic displacement hD0;0i. Because of the quasi-two-fold
degeneracy of the states and the fact that the ordering of same-symmetry
states changes with varying NW diameter, the states have been lumped into
doublets and the label ðn; n0Þ in the figure indicates the average of the
squared matrix elements for the transitions ðn�; n�Þ, ðn�; nþÞ, and
ðnþ; nþÞ, where n6 denotes the low/high energy member of the pair. The
dotted line shows the “usual” R�6s dependence expected for the generalized
Prange-Nee term (Ref. 14). The lines connecting the calculated points are
only a guide to the eye.
083713-18 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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IV. CONCLUSIONS
We have presented a method to study scattering with
surface/interface and line-edge roughness in nanometer-scale
structures based on atomic potentials, considering explicitly
the case of local empirical pseudopotentials. The method
bridges the gap between, on the one hand, physically accu-
rate atomistic and geometric approaches, which require com-
putationally expensive ensemble averages to extract the
behavior of the “average” device, and on the other hand,
numerically efficient macroscopic models, which lack the ac-
curacy of atomistic models. We have considered thin Si films
and cylindrical nanowires as well as armchair-edge graphene
nanoribbons and shown that the method provides the
“expected” confinement and width dependence in known
cases, but provides extremely large scattering rates in the
case of AGNRs as a result of the chirality dependence of
their band-gap. While these scattering rates are too large to
be employed correctly in transport simulations, they show
clearly the dominant role LER plays in controlling electronic
transport in AGNRs and confirms that transport in narrow
and rough AGNRs may not occur via extended Bloch states.
ACKNOWLEDGMENTS
We gratefully acknowledge the support provided by the
Semiconductor Research Corporation (SRC), by the Micro-
electronics Advanced Research Corporation (MARCO)
Focus Center Research Project (FCRP) for Materials, Struc-
tures and Devices (MSD), and by Samsung Electronics Ltd.
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FIG. 16. (Color online) (a) Generalized Prange-Nee component of the surface-roughness scattering rate as a function of electron energy in [100] circular
cross-section Si nanowires with diameter of 1, 2, and 3 nm. The energy is measured from the bottom of the ground-state subband; a roughness correlation spec-
trum of the form given by Eq. (52) has been used. The lowest-energy 16 conduction (sub)bands have been considered and have been decomposed into 32 angu-
lar momentum components. At the lowest energy of importance for mobility calculations, the intrasubband scattering rate within the ground-state subband is
reduced significantly as the diameter increases. On the contrary, at larger energies, the largest density of final states in the larger wires controls the scattering
rate. (b) As in (a), but showing the velocity relaxation rate. The “noise” is due to forward inter-subband transitions to states with higher group velocity, giving
negative contribution to the total relaxation rate.
083713-19 M. V. Fischetti and S. Narayanan J. Appl. Phys. 110, 083713 (2011)
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