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Analysis of Microsystems Summer 2010 Dr. Oswald Prucker [email protected]
Transcript

Analysis of Microsystems Summer 2010

Dr. Oswald [email protected]

Part 1: Introduction & Motivation

Goal of this lecture

Goal of this lecture

Description of the most common surface analytical techniques

To help you later in your carrier to identify surface-related problems and to discuss with an expert about possible ways of characterization

AEAPS Auger Electron Appearance Potential Spectroscopy

AES Auger Electron Spectroscopy

AFM AtomicForce Microscopy

APECS Auger Photoelectron Coincidence Spectroscopy

APFIM Atom Probe Field Ion Microscopy

APS Appearance Potential Spectroscopy

ARPES Angle Resolved Photoelectron Spectroscopy

ARUPS Angle Resolved Ultraviolet Photoelectron Spectroscopy

ATR Attenuated Total Reflection

BEEM Ballistic Electron Emission Microscopy

BIS Bremsstrahlung Isochromat Spectroscopy

CFM Chemical Force Microscopy

CHA Concentric Hemispherical Analyser

CMA Cylindrical Mirror Analyser

CPD Contact Potential Difference

DAFS Diffraction Anomalous Fine Structure

DAPS Disappearance Potential Spectroscopy

DRIFT Diffuse Reflectance Infra-Red Fourier Transform

EAPFS Extended Appearance Potential Fine Structure

EDX Energy Dispersive X-ray Analysis

EELS Electron Energy Loss Spectroscopy

Ellipsometry, see RDS

EMS Electron Momentum Spectroscopy

EPMA Electron Probe Micro-Analysis

ESCA Electron Spectroscopy for Chemical Analysis

ESD Electron Stimulated Desorption

ESDIAD Electron Stimulated Desorption Ion Angle Distributions

EXAFS Extended X-ray Absorption Fine Structure

FEM Field Emission Microscopy

FIM Field Ion Microscopy

FTIR Fourier Transform Infra Red

FT RA-IR Fourier Transform Reflectance-Absorbtion Infra Red

HAS Helium Atom Scattering

HDA Hemispherica l Deflection Analyser

HEIS High Energy Ion Scattering

HREELS High Reso lu tion Electron Energy Loss Spectroscopy

IETS Ine lastic e lectron tunneling spectroscopy

KRIPES k-Reso lved Inverse Photoemission Spectroscopy

ILS Ion isation Loss Spectroscopy

INS Ion Neutra lisa tion Spectroscopy

IPES Inverse Photoemission Spectroscopy

IRAS In fra-Red Absorbtion Spectroscopy

ISS Ion Scattering Spectroscopy

LEED Low Energy Electron Diffraction

LEEM Low Energy Electron Microscopy

LEIS Low Energy Ion Scattering

LFM Latera l Force Microscopy

MBE Molecu lar Beam Epitaxy

MBS Molecu lar Beam Scattering

MCXD Magnetic Circu lar X-ray Dichro ism

MEIS Medium Energy Ion Scattering

MFM Magnetic Force Microscopy

MIES Metastab le Impact Electron Spectroscopy

MIR Multip le In terna l Reflection

MO CVD Meta l O rgan ic Chemica l Vapour Deposition

MO KE Magneto-O ptic Kerr Effect

NIXSW Normal Incidence X-ray Stand ing W ave

NEXAFS Near-Edge X -ray Absorption Fine Structure

NSO M Near Fie ld Scanning O ptica l Microscopy

PAES Positron ann ih ila tion Auger Electron Spectroscopy

PECVD Plasma Enhanced Chemica l Vapour Deposition

PEEM Photo Emission Electron Microscopy

Ph.D. Photoe lectron Diffraction

PIXE Proton Induced X-ray Emission

PSD Photon Stimula ted Desorption

TPRS Temperature Programmed Reaction Spectroscopy

TXRF Tota l Reflection X-ray Fluorescence

UHV Ultra High Vacuum

UPS Ultravio le t Photoemission Spectroscopy

XANES X-ray Absorption Near-Edge Structure

XPD X -ray Photoe lectron Diffraction

XPS X -ray Photoemission Spectroscopy

XRR X -ray Reflectometry

XSW X -ray Stand ing W ave

RAIRS Reflection Absorbtion In fra-Red Spectroscopy

RAS Reflectance Anisotropy Spectroscopy

RBS Rutherford Back Scattering

RDS Reflectance Diffe rence Spectroscopy

REFLEXAFS Reflection Extended X-ray Absorption Fine Structure

RFA Retard ing Fie ld Analyser

RHEED Reflection High Energy Electron Diffraction

RIfS Reflectometric In terference Spectroscopy

SAM Scanning Auger Microscopy

SEM Scanning Electron Microscopy

SEMPA Scanning Electron Microscopy with Po larisa tion Analysis

SERS Surface Enhanced Raman Scattering

SEXAFS Surface Extended X-ray Absorption Spectroscopy

SHG Second Harmonic G eneration

SH-MO KE Second Harmonic Magneto-O ptic Kerr Effect

SIMS Secondary Ion Mass Spectrometry

SKS Scanning Kinetic Spectroscopy

SMO KE Surface Magneto-O ptic Kerr Effect

SNMS Sputtered Neutra l Mass Spectrometry

SNO M Scanning Near Fie ld O ptica l Microscopy

SPIPES Spin Po larised Inverse Photoemission Spectroscopy

SPEELS Spin Po larised Electron Energy Loss Spectroscopy

SPLEED Spin Po larised Low Energy Electron Diffraction

SPM Scanning Probe Microscopy

SPR Surface Plasmon Resonance

SPUPS Spin Po larised Ultravio le t Photoe lectron Spectroscopy

SPXPS Spin Po larised X-ray Photoe lectron Spectroscopy

STM Scanning Tunnelling Microscopy

SXAPS Soft X-ray Appearance Potentia l Spectroscopy

SXRD Surface X-ray Diffraction

TDS Thermal Desorption Spectroscopy

TEAS Thermal Energy Atom Scattering

TIRF Tota l In terna l Reflectance Fluorescence

TPD Temperature Programmed Desorption

What do we really want to know about our surfaces ?

And how do we decide which technique to use ?

1. Chemical CompositionFT Infrared spectroscopy (GIR & ATR)XPS, SIMS

2. Thickness of a coatingEllipsometry, Surface Plasmon Spectroscopy, X-ray reflectometry

3. Surface Roughness / Homogeneity / TopologyAFM, X-ray reflectometry, microscopies

4. Wetting PropertiesContact angle measurements

5. Swelling of surfaces / coatingsEllipsometry, neutron reflectometry

6. Orientation of moleculesFTIR spectroscopy & others

Kanten 1 x 1 cm 5 x 5 nmVolumen 1 cm3 1 cm3

Oberfläche 0,0006 m2 2400 m2

Beispiel:Würfel

ultrathin layers can have physical properties different from the bulk :

- “wall“ effect- polymer conformation

layers of just a few Å can hide the underlying material („stealth effect“) and control adsorption/ad-hesion/wetting properties

polymer layer can carry functional groups („functional coating, molecular recognition”)�

"God created the bulk, the devil created the surface" (W. Pauli)�

Example 2: Surfaces & Biofouling

Protein adsorption / cell adhesion a function of contact angle?

Principles of Tissue Engineering, 2nd ed., R.P. Lanza, R. Langer, J. Vacanti, Academic Press 1997, page 225

Example 2: Surfaces & Biofouling

Protein adsorption / cell adhesion a function of contact angle?

Principles of Tissue Engineering, 2nd ed., R.P. Lanza, R. Langer, J. Vacanti, Academic Press 1997, page 225

NOT REALLY

Example 3: Learning from nature

What the stenocara beetle can teach us

Stenocara sp.

• tenebrionid beetle (avoids light)• habitat: Namib desert• uses fog for water supply (drop size1-40µm)

survival due to clever use of wetting properties

dry surface water starts to be collected

entire spot is wetted; contact line rests at “hydrophilic”/super-hydrophobic boundary.

more water is collected. meniscus remains pinned

on the downhill side, the advancing angle on the superhydro-phobic surface is reached

on the uphill side, the drop exhibits the receding angle on the “hydrophilic spot -drop rolls off

Part 2: Surface Forces

Surface phenomena are the result of forces between molecules or atoms

The origin of intermolecular forces

Forces between atoms are largely electrostatic and best described by quantummechanics >> Hellma-Feynman theorem

Schrödinger equation describes geometric dimensions of electrons

Exact solutions are rarebut classical electrostatics often sufficient

( ) ( ) ( )tx,ψtx,H=tx,ψt

i∂∂

Classification Ionic bonds Metallic bonds Van der Waals interactions Hydrophilicity / hydrophobicity Hydrogen bonding Solvation

Classification

Entirely electrostatic (Coulomb): Interactions between charged species, dipoles etc.

Polarization forces >> induced dipols

Quantum mechanics: covalent bonds steric interactions

Van der Waals forces

Hydrogen bonding

Hydrophobic /hydrophilic interactions

Covalent vs. metallic bonds

H H H2

H

HO H2O

• complex • Short ranged (0.1-0.2 nm),• Direction dependent, i.e.

characterized by valence structure

Moleucles: Neighboring atoms share electrons Binding energies:

100-300 kT (200-800 kJ/mol)

Metals: All atoms share electrons (electron gas)

Physical forces (vdW, electrostatic)

Non specific

Do not depend on stoichiometry

Not directed

Can be as strong as covalent bonds

But are long ranged

Coulombic forces

Forces between charges (same/opposite sign)

e = 1.602 x 10-19 C (uni charge)z = charge numberε = dielectric constant

Energie:r

ezzr

QQ)r(w

0

221

0

2144

==επεεπε

rezz

rQQ

dr)r(dw

F0

221

20

21

44==−=

επεεπε

Coulombic forces II

A worked example

12−( )( )

J.kT

J...

).()r(w

21

199

219

1014

1048102760108548.4

106021

−−

×=

×−=××

×−=

π

Sodium chloride ions in the gas phase

Na+ Cl-, r=0.276 nm; z1 = 1; z2 = -1

app. energy of covalent bond

w~kT only at r = 56 nmw(r) ≈ 200 KT

strongest physical force & long ranged

H2O

Interaction of polar molecules

H-Clpermanent distortion of the shape of the orbitals caused by strong differencies in electronegativity

polar molecules → electric dipoles

u ~ q l dipole moment of polar molecule

1 Debye = 1 D = 3.336 10-30 Cm

____________________________

alkanes 0CO2 0chloroform 1.06water 1.85ethanol 1.7acetone 2.9

____________________________

Strength of interaction

uθ Q

r

u2

charge - dipole

u1θ1

r

θ2

A worked example: Na+ (z=1, a=0.095 nm) near a water molecule (a=0.14 nm, u=1.85 D)

dipole - dipole

w (r, Θ=0) = 1.6 10-19 J

96 kJ/mol or 39 kT

relatively weak:

u ~ 1D, r = 0.35 nm, w ~ kT

Interaction via induced polarization

Induced dipoles are generated by electrical fields imposed by nearby permanent dipoles

All atoms and molecules can be polarized; polarizibility α is defined as the dipole moment Uind induced by a field of strength E

α describes how easily the electrons can be repositioned

Uind = α E e+ e-

e-e+

Electrical field

R

uind=0 uind=α0E=4πε0R3E~1D

Interaction ion vs. induced dipole

+

-q +q

Epolarizingfield

unpolarmolecule

Ion

ze

E field resulting from induced dipoleEr

( )( ) 4042

2 1~3422

1rkT

u+αrεπε

ze=αE=w(r)0

2

−−

Interaction between dipoles

-q +q

Epolarizing field

unpolar molecule

Permanent Dipole

field resulting from induced dipole

Er

u

( ) 62

21 1~

4 rkTrεπεαu=w(r)

60

Summary of interactions

Jacob IsraelachviliIntermolecular & Surface ForcesAcademic Press

What if two completely unpolar molecules interact? Can they?

Van der Waals dispersion forces

• active between any atom or molecule• quantum mechanic description needed :-(• intuitive explanation:

– electron densities in atoms (molecules) fluctuate

– only the time averaged dipol moment of an unpolar species is zero

– at a given time an instantaneous dipole might and will induce another dipole

( ) ( )electron theoffrequency orbiting theis

~1~42

36

1

262

0201

i

2

1

0

ν

kTfewarν+ν

νhνrπε

αα=w(r) −

Van der Waals dispersion forces

• VdW are always long ranged and are active at distances above 10 nm (wetting phenomena, disjoining pressures) but also down to 0.2 nm (interatomic distances)

• Usually attractive forces (repulsive at very short distancies)

• Weak orientational dependence

• Dispersion forces between two bodies are usually influenced by the presence of other species

Summary

interaction range dependence Typ. Energy (kJ/mol)

Ion-ion 1/r 250

Ion-dipole 1/r2 15

Dipole-dipole 1/r3 2

Dipole-induced dipole 1/r6 0.3

van der Waals (London dispersion)

1/r6 2

Wholistic view on intermolecular potentials

Lennard-Jones-Potential

612 rB

rA=w(r) −

4612 σσ

εrr

)r(w

=

repulsive attractive

ε = depth of minimum (water: 0.65 kJ/mol)

σ = molecular diameter (water: 0.32 nm)

vdW vs. Coulomb

• van der Waals:

interaction energy between neighboring atoms is 64 times higher than to next neighbor

• Coulomb:

but faster decrease in media of high dielectric constant (screening)

1/r 6

1/r

→ From molecules to ....

... macroscopic objects

From molecules to macroscopic surfaces

• same fundamental forces are involved: Coulomb, vdW

• pair potentials must be summed up (integration)

→ high energies even at large distances

→ very slow decay: > kT even at d > 100 nm !!

→ kinetic effects

Example 1: Molecule vs. Surface

The pair potential between two atoms or small molecules:

nrCrw −=)(

Additivity assumption: the net interaction energy of a molecule and the planar surface is the sum of ist interactions with all the molecules in the body.

For molecules in a circular ring of cross-sectional area dxdz and radius x, the ring volume is 2πxdxdz; the number of molecules in the ring is 2πρxdxdz.

The net interaction energy:

3,)3) (2(

2)2(

2)(

2)(

3

20 2/22

>−−

−=

=−

=+

−=

∞=

=

∞=

= ∫∫∫nf o r

DnnC

zd z

nC

xzx d xd zCDw

n

D n

x

x n

z

Dz

ρπ

ρπρπ

Which for n=6 (van der Waals forces):

The corresponding force:

36)(

DCDw ρπ

−=

42)(

DC

DDwF ρπ

−=∂

∂=

Example 2: Sphere vs. Surface

From the chord theorem:

The volume of a thin circular section of area and thickness dz:

The number of molecules contained within this section is

Since all these molecules are at a distance (D+z) from the planar surface, the net interaction energy is:

z)z(=x −2R2

πx 2

z)zdzπ(=dzπx2 −2R

z)zπρ( −2R

∫=

= −+−

−−−=

Rz

z nzDzzR

nnCDw

2

0 3

22

)()2(

)3) (2(2)( ρπ

For D<<R, only small values of z(z~D) contribute to the integral:

DRC

DnnnnRc

zDR z d z

nncDw

n

n

6)5) (4) (3) (2(4

)(2

)3) (2(2)(

22

5

22

0 3

22

ρπρπ

ρπ

−=−−−−

−=

=+−−

−=

−∫

Hamaker constant

The Hamaker constant A is defined as:

A=π2Cρ1ρ2

Typical values are of the order of 10-19 J ((0.4-4)10-19 J)

Medium C, 10-79 Jm6 ρ, 1028 m-3A, 10-19 J

Hydrocarbon 50 3.3 0.5

CCl4 1500 0.6 0.5

H2O 140 3.3 1.5

C is a combined constant from vdW equation and ρ are the number of atoms in a unit volume

Hamaker, 1937


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