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EE1411
MemorySTMicro/Intel/UCSD/THNU
Array Structured Memories
STMicro/Intel
UCSD CAD LAB
Weste Text
EE1412
MemorySTMicro/Intel/UCSD/THNU
Memory ArraysMemory ArraysMemory Arrays
Random Access Memory Serial Access Memory Content Addressable Memory(CAM)
Read/Write Memory(RAM)
(Volatile)
Read Only Memory(ROM)
(Nonvolatile)
Static RAM(SRAM)
Dynamic RAM(DRAM)
Shift Registers Queues
First InFirst Out(FIFO)
Last InFirst Out(LIFO)
Serial InParallel Out
(SIPO)
Parallel InSerial Out
(PISO)
Mask ROM ProgrammableROM
(PROM)
ErasableProgrammable
ROM(EPROM)
ElectricallyErasable
ProgrammableROM
(EEPROM)
Flash ROM
EE1413
MemorySTMicro/Intel/UCSD/THNU
Feature Comparison Between Feature Comparison Between Memory TypesMemory Types
EE1414
MemorySTMicro/Intel/UCSD/THNU
Array ArchitectureArray Architecture 2n words of 2m bits each If n >> m, fold by 2k into fewer rows of more columns
Good regularity – easy to design Very high density if good cells are used
row decoder
columndecoder
n
n-kk
2m bits
columncircuitry
bitline conditioning
memory cells:2n-k rows x2m+k columns
bitlines
wordlines
EE1415
MemorySTMicro/Intel/UCSD/THNU
Memory - Real OrganizationMemory - Real OrganizationS0
SR-1
RowDecoder
Log2RAddress
Lines
- - - - KxM bits - - - -
C of M bit words row 0
C of M bit words row 1
C of M bit words row 2
C of M bit words row N-2
C of M bit words row N-1
Array of N x K words------------- columns ------------ KxM
------------- rows R
------------
Log2CAddress
LinesColumn Select
M bit data word
EE1416
MemorySTMicro/Intel/UCSD/THNU
Hierarchical Memory ArchitectureHierarchical Memory Architecture
Global Data Bus
RowAddress
ColumnAddress
BlockAddress
Block Selector GlobalAmplifier/Driver
I/O
Control
Circuitry
Advantages:1. Shorter wires within blocks2. Block address activates only 1 block => power savings
EE1417
MemorySTMicro/Intel/UCSD/THNU
Array Organization Design IssuesArray Organization Design Issues aspect ratio should be relative square
Row / Column organisation (matrix) R = log2(N_rows); C = log2(N_columns) R + C = N (N_address_bits)
number of rows should be power of 2 number of bits in a row need not be…
sense amplifiers to speed voltage swing 1 -> 2R row decoder 1 -> 2C column decoder
M column decoders (M bits, one per bit)– M = output word width
EE1418
MemorySTMicro/Intel/UCSD/THNU
Simple 4x4 SRAM MemorySimple 4x4 SRAM Memory
A0
Row
Dec
oder
BLWL[0]
A1
A2
Column Decoder
sense amplifiers
write circuitry
!BL
WL[1]
WL[2]
WL[3]
bit line precharge
2 bit width: M=2R = 2 => N_rows = 2R = 4C = 1 N_columns = 2c x M = 4N = R + C = 3Array size = N_rows x N_columns = 16
clocking and control ->
enable
read precharge
A0!
WE! , OE!
EE1419
MemorySTMicro/Intel/UCSD/THNU
SRAM Read Timing (typical)SRAM Read Timing (typical) tAA (access time for address): time for stable
output after a change in address. tACS (access time for chip select): time for stable
output after CS is asserted. tOE (output enable time): time for low impedance
when OE and CS are both asserted. tOZ (output-disable time): time to high-impedance
state when OE or CS are negated. tOH (output-hold time): time data remains valid
after a change to the address inputs.
EE14110
MemorySTMicro/Intel/UCSD/THNU
SRAM Read Timing (typical)SRAM Read Timing (typical)stable stable stable
valid valid valid
tAA tOZ
tAA
tOE
tACS
tOZ tOE
Max(tAA, tACS)
tOH
ADDR
CS_L
OE_L
DOUT
WE_L = HIGH
EE14111
MemorySTMicro/Intel/UCSD/THNU
SRAM Architecture and Read SRAM Architecture and Read TimingsTimings
tAA
tACS
tOE
tOZ
tOH
EE14112
MemorySTMicro/Intel/UCSD/THNU
SRAM write cycle timing SRAM write cycle timing
~WE controlled
~CS controlled
EE14113
MemorySTMicro/Intel/UCSD/THNU
SRAM Architecture and Write SRAM Architecture and Write TimingsTimings
Write driver
tWP-tDW
Setup time = tDWtDH
EE14114
MemorySTMicro/Intel/UCSD/THNU
SRAM Cell DesignSRAM Cell Design
Memory arrays are large Need to optimize cell design for area and
performance Peripheral circuits can be complex
– 60-80% area in array, 20-40% in periphery
Classical Memory cell design 6T cell full CMOS 4T cell with high resistance poly load TFT load cell
EE14115
MemorySTMicro/Intel/UCSD/THNU
Anatomy of the SRAM CellAnatomy of the SRAM Cell
Write:•set bit lines to new data value
•b’ = ~b•raise word line to “high”
•sets cell to new state•Low impedance bit-lines
Read:•set bit lines high•set word line high•see which bit line goes low•High impedance bit lines
EE14116
MemorySTMicro/Intel/UCSD/THNU
SRAM Cell Operating PrincipleSRAM Cell Operating Principle
•Inverter Amplifies•Negative gain•Slope < –1 in middle•Saturates at ends
• Inverter Pair Amplifies•Positive gain•Slope > 1 in middle•Saturates at ends
EE14117
MemorySTMicro/Intel/UCSD/THNU
Bistable ElementBistable ElementStabilityRequire Vin = V2Stable at endpoints
recover from pertubationMetastable in middle
Fall out when perturbed
Ball on Ramp Analogy
EE14118
MemorySTMicro/Intel/UCSD/THNU
Cell Static Noise MarginCell Static Noise MarginCell state may be disturbed by•DC
•Layout pattern offset•Process mismatches
•non-uniformity of implantation•gate pattern size errors
•AC•Alpha particles•Crosstalk•Voltage supply ripple•Thermal noise
SNM (static noise margin) = Maximum Value of Vn
not flipping cell state
EE14119
MemorySTMicro/Intel/UCSD/THNU
SNM: Butterfly CurvesSNM: Butterfly Curves
1 12 2
2
2
1
1
SNM
SNM
EE14120
MemorySTMicro/Intel/UCSD/THNU
SNM for Poly Load CellSNM for Poly Load Cell
EE14121
MemorySTMicro/Intel/UCSD/THNU
12T SRAM Cell12T SRAM Cell Basic building block:
SRAM Cell 1-bit/cell (noise margin
again)
12-transistor (12T) SRAM cell Latch with TM-gate write Separately buffered read
bit
write
write_b
read
read_b
EE14122
MemorySTMicro/Intel/UCSD/THNU
6T SRAM Cell6T SRAM Cell Cell size accounts for most of array size
Reduce cell size at cost of complexity/margins 6T SRAM Cell Read:
Precharge bit, bit_b Raise wordline
Write: Drive data onto bit, bit_b Raise wordline
bit bit_b
word
EE14123
MemorySTMicro/Intel/UCSD/THNU
SRAM DesignSRAM Design
TI 65nm: 0.46x1.06um2
IBM 65nm: 0.41x1.25um2
Intel 65nm: 0.46x1.24um2
* Figures courtesy A. Chatterjee et al., P. Bai et al., and Z. Luo et al., Int. Electron Device Meeting Tech. Digest, 2004
EE14124
MemorySTMicro/Intel/UCSD/THNU
VDD
GND
SEL
B-
Q/
B+
Q
SEL MOSFET
PMOSPull Up
NMOSPull Down
SubstrateConnection
N WellConnection
Vertical 6T Cell LayoutVertical 6T Cell Layout
EE14125
MemorySTMicro/Intel/UCSD/THNU
SRAM Bitcell DesignSRAM Bitcell DesignWL
Schematic Layout Micrograph
Requirements of SRAM bitcell design Stable read operation: Do not disturb data when reading Stable write operation: Must write data within a specified time Stable data retention: Data should not be lost
Typical transistor sizing Cell ratio (= I(PD) / I(PG)) = 1.5 ~ 2.5 Pull-up ratio (= I(PU) / I(PG)) = 0.5
NL NL NR NRWLWL
VDD
VDDVSS
VSSBLB
BL
PG1
PU1
PD1
PG2
PU2
PD2
VDD
VSSBLB BL
NL NR
PG1
PG2
PD2
PD1
PU2
PU1PG1
PU1
PD1
PG2
PU2
PD2
EE14126
MemorySTMicro/Intel/UCSD/THNU
Detailed SRAM Bitcell LayoutDetailed SRAM Bitcell Layout
– Vertical: 2 poly pitch
– Horizontal: 5 contact pitch
– Poly-to-contact space > overlay + spacer + strain_layer + CD_control
(6.4nm*) ( 8nm**) (10nm**) ( 2.6nm*) = 27nm
– 1 poly pitch = 2 poly_to_contact + poly_width + contact_width 54 + 32 + 45** = 131 nm
A pitch is a multiple of a drawing grid for fine-grain pattern placement
Ex.: 5 grid per pitch drawing grid = (131/5) = 26 nm
Ex.: 6 grid per pitch drawing grid = (131/6) = 22 nmpoly
spacer
Strain layer
CNT* From ITRS 32nm tech.** From S. Verhaegen et al., SPIE Adv. Litho., 2008
EE14127
MemorySTMicro/Intel/UCSD/THNU
SRAM ReadSRAM Read
Precharge both bitlines high Then turn on wordline One of the two bitlines will
be pulled down by the cell Ex: A = 0, A_b = 1
bit discharges, bit_b stays high But A bumps up slightly
Read stability A must not flip N1 >> N2
bit bit_b
N1
N2P1
A
P2
N3
N4
A_b
word
0.0
0.5
1.0
1.5
0 100 200 300 400 500 600
time (ps)
word bit
A
A_b bit_b
EE14128
MemorySTMicro/Intel/UCSD/THNU
bit bit_b
N1
N2P1
A
P2
N3
N4
A_b
word
SRAM Read, 0 is stored in the cell
EE14129
MemorySTMicro/Intel/UCSD/THNU
SRAM WriteSRAM Write Drive one bitline high, other low Then turn on wordline Bitlines overpower cell Ex: A = 0, A_b = 1, bit = 1, bit_b = 0
Force A_b low, then A rises high Writability
Must overpower feedback P2 << N4 to force A_b low, N1 turns off, P1 turns on, raise A high as desired
time (ps)
word
A
A_b
bit_b
0.0
0.5
1.0
1.5
0 100 200 300 400 500 600 700
bit bit_b
N1
N2P1
A
P2
N3
N4
A_b
word
EE14130
MemorySTMicro/Intel/UCSD/THNU
SRAM SizingSRAM Sizing High bitlines must not overpower
inverters during reads But low bitlines must write new value
into cell bit bit_b
med
A
weak
strong
med
A_b
word
EE14131
MemorySTMicro/Intel/UCSD/THNU
SRAM Column ExampleSRAM Column Example
2
MoreCells
SRAM Cell
word_q1bit_v1f
bit_b_v1f
data_s1
write_q1
Bitline Conditioningread write
EE14132
MemorySTMicro/Intel/UCSD/THNU
DecodersDecoders n:2n decoder consists of 2n n-input AND gates
One needed for each row of memory Build AND from NAND or NOR gate
word0
word1
word2
word3
A0A1
A1
word
A0 1 1
1/2
2
4
8
16
word
A0
A1
1
1
11
4
8
word0
word1
word2
word3
A0A1
choose minimum size to reduce load on the address lines
staticPseudo-nMOS
EE14133
MemorySTMicro/Intel/UCSD/THNU
Single Pass-Gate MuxSingle Pass-Gate MuxA0A1
B0 B1 B2 B3
Y
bitlines propagate through 1 transistor
EE14134
MemorySTMicro/Intel/UCSD/THNU
Decoder LayoutDecoder Layout
Decoders must be pitch-matched to SRAM cell Requires very skinny gates
GND
VDD
word
buffer inverterNAND gate
A0A0A1A2A3 A2A3 A1
EE14135
MemorySTMicro/Intel/UCSD/THNU
Large DecodersLarge Decoders For n > 4, NAND gates become slow
Break large gates into multiple smaller gates
word0
word1
word2
word3
word15
A0A1A2A3
EE14136
MemorySTMicro/Intel/UCSD/THNU
PredecodingPredecoding Many of these gates are redundant
Factor out common
gates into predecoder Saves area Same path effort
A0
A1
A2
A3
word1
word2
word3
word15
word0
1 of 4 hotpredecoded lines
predecoders
EE14137
MemorySTMicro/Intel/UCSD/THNU
EE14138
MemorySTMicro/Intel/UCSD/THNU
Column CircuitryColumn Circuitry
Some circuitry is required for each column Bitline conditioning Sense amplifiers Column multiplexing
Each column must have write drivers and read sensing circuits
EE14139
MemorySTMicro/Intel/UCSD/THNU
Column MultiplexingColumn Multiplexing
Recall that array may be folded for good aspect ratio
Ex: 2k word x 16 folded into 256 rows x 128 columns Must select 16 output bits from the 128
columns Requires 16 8:1 column multiplexers
EE14140
MemorySTMicro/Intel/UCSD/THNU
Typical Column AccessTypical Column Access
EE14141
MemorySTMicro/Intel/UCSD/THNU
Pass Transistor Based Column Pass Transistor Based Column DecoderDecoder
BL3 BL2 BL1 BL0
Data
2 in
put
NO
R d
ecod
erA1
A0
S3
S2
S1
S0
Advantage: speed since there is only one extra transistor in the signal path
Disadvantage: large transistor count
!BL3 !BL2 !BL1 !BL0
!Data
EE14142
MemorySTMicro/Intel/UCSD/THNU
Tree Decoder MuxTree Decoder Mux Column MUX can use pass transistors
Use nMOS only, precharge outputs One design is to use k series transistors for 2k:1 mux
No external decoder logic needed
B0 B1 B2 B3 B4 B5 B6 B7 B0 B1 B2 B3 B4 B5 B6 B7A0
A0
A1
A1
A2
A2
Y Yto sense amps and write circuits
EE14143
MemorySTMicro/Intel/UCSD/THNU
Ex: 2-way Muxed SRAMEx: 2-way Muxed SRAM
MoreCells
word_q1
write0_q1
2
MoreCells
A0
A0
2
data_v1
write1_q1 two bits from two cells and selected by A0
2-to-1 mux
EE14144
MemorySTMicro/Intel/UCSD/THNU
Bitline ConditioningBitline Conditioning
Precharge bitlines high before reads
Equalize bitlines to minimize voltage difference when using sense amplifiers
bit bit_b
bit bit_b
EE14145
MemorySTMicro/Intel/UCSD/THNU
Sense Amplifier: Why?Sense Amplifier: Why? Bit line cap significant for large array
If each cell contributes 2fF,– for 256 cells, 512fF plus wire cap
Pull-down resistance is about 15K
RC = 7.5ns! (assuming V = Vdd)
Cannot easily change R, C, or Vdd, but can change V i.e. smallest sensed voltage Can reliably sense V as small as <50mV
ddV
VRC
Cell pull down
Xtor resistance
Cell current
EE14146
MemorySTMicro/Intel/UCSD/THNU
Sense AmplifiersSense Amplifiers
Bitlines have many cells attached Ex: 32-kbit SRAM has 256 rows x 128 cols 128 cells on each bitline
tpd (C/I) V Even with shared diffusion contacts, 64C of
diffusion capacitance (big C) Discharged slowly through small transistors (small
I) Sense amplifiers are triggered on small
voltage swing (reduce V)
EE14147
MemorySTMicro/Intel/UCSD/THNU
Differential Pair AmpDifferential Pair Amp
Differential pair requires no clock But always dissipates static power
bit bit_bsense_b sense
N1 N2
N3
P1 P2
EE14148
MemorySTMicro/Intel/UCSD/THNU
Clocked Sense AmpClocked Sense Amp Clocked sense amp saves power Requires sense_clk after enough bitline swing Isolation transistors cut off large bitline capacitance
bit_bbit
sense sense_b
sense_clk isolationtransistors
regenerativefeedback
EE14149
MemorySTMicro/Intel/UCSD/THNU
Sense Amp WaveformsSense Amp Waveforms
200mV
2.5V
1ns / div
bit
bit’
wordline
sense clk sense clk
BIT
BIT’
wordline
begin precharging bit lines
EE14150
MemorySTMicro/Intel/UCSD/THNU
Write Driver CircuitsWrite Driver Circuits
EE14151
MemorySTMicro/Intel/UCSD/THNU
Dual-Ported SRAMDual-Ported SRAM
Simple dual-ported SRAM Two independent single-ended reads Or one differential write
Do two reads and one write by time multiplexing Read during ph1, write during ph2
bit bit_b
wordBwordA
wordA reads bit_b (complementary)
wordB reads bit (true)
EE14152
MemorySTMicro/Intel/UCSD/THNU
Multiple PortsMultiple Ports
We have considered single-ported SRAM One read or one write on each cycle
Multiported SRAM are needed for register files Examples:
Multicycle MIPS must read two sources or write a result on some cycles
Pipelined MIPS must read two sources and write a third result each cycle
Superscalar MIPS must read and write many sources and results each cycle
EE14153
MemorySTMicro/Intel/UCSD/THNU
Multi-Ported SRAMMulti-Ported SRAM Adding more access transistors hurts read stability Multiported SRAM isolates reads from state node Single-ended design minimizes number of bitlines
bA
wordBwordA
wordDwordC
wordFwordE
wordG
bB bC
writecircuits
readcircuits
bD bE bF bG
EE14154
MemorySTMicro/Intel/UCSD/THNU
Logical effort of RAMsLogical effort of RAMs
EE14155
MemorySTMicro/Intel/UCSD/THNU
EE14156
MemorySTMicro/Intel/UCSD/THNU
Twisted BitlinesTwisted Bitlines
Sense amplifiers also amplify noise Coupling noise is severe in modern processes Try to couple equally onto bit and bit_b Done by twisting bitlines
b0 b0_b b1 b1_b b2 b2_b b3 b3_b
EE14157
MemorySTMicro/Intel/UCSD/THNU
Alternative SRAM CellsAlternative SRAM Cells
Low Voltage/High Leakage/Process Variations crowd the operating margins of conventional SRAM
Alternative Sense Amplifiers, column and row arrangements, adaptive timing, smaller hierarchy, redundant and spare rows/columns have all been addressed in the literature with some success.
Some problems come from the cell design itself– modifying the cell can break conflicting demands for optimization
EE14158
MemorySTMicro/Intel/UCSD/THNU
10T10T Features
BL Leakage reduction Approaches
Separated Read port Stacked effect by M10
Performance 400mV@475kHz, 3.28uW 320mV W/O Read error@27℃ 380mV W/O Write error@27℃ Vmin=300mV@1% bit errors 256 bits/BL
A 256-kb 65-nm Sub-threshold SRAM Design for Ultra-Low-Voltage Operation A 256-kb 65-nm Sub-threshold SRAM Design for Ultra-Low-Voltage Operation B. Calhoun & A. Chandrakasan, JSSC, 2007B. Calhoun & A. Chandrakasan, JSSC, 2007
EE14159
MemorySTMicro/Intel/UCSD/THNU
10T10T Features
BL leakage reduction of data Approaches
Virtual GND Replica Reverse Short Channel Effect BL Writeback
Performance 0.2V@100kHz, 2uW 1024 bits/BL 130nm process technology
A High-Density Subthreshold SRAM with Data-Independent Bitline Leakage andA High-Density Subthreshold SRAM with Data-Independent Bitline Leakage andVirtual Ground Replica SchemeVirtual Ground Replica Scheme
Chris Kim, ISSCC, 2007Chris Kim, ISSCC, 2007
EE14160
MemorySTMicro/Intel/UCSD/THNU
10T10T Features
ST cell array can work @160mV 2.1x larger than 6T cell
Approaches Schmitt Trigger based cell Good stability @ LowVDD Good scalability
Performance Read SNM↑1.56x @VDD=0.4V More power saving Leakage power↓18% Dynamic power↓50% Hold SNM @150mV is 2.3x of 6T 130nm process
A 160mV Robust Schmitt Trigger Based Subthreshold SRAMA 160mV Robust Schmitt Trigger Based Subthreshold SRAM
K. Roy, JSSC, 2007K. Roy, JSSC, 2007
EE14161
MemorySTMicro/Intel/UCSD/THNU
9T9T Features
Modifying from 10Tcell 17% more area than 6T cell 16.5% less area than 10T cell
Approaches More leakage saving than 8T cell Separated read port
Performance 128 bits/BL @350mV ,100MHz Hold SNM=117mV @300mV Stand-by power: 6uW 65nm process
A 100MHz to 1GHz, 0.35V to 1.5V Supply 256x64 SRAM Block using A 100MHz to 1GHz, 0.35V to 1.5V Supply 256x64 SRAM Block using Symmetrized 9T SRAM cell with controlled ReadSymmetrized 9T SRAM cell with controlled Read
S. A. Verkila,et al, Conference on VLSI Design, 2008S. A. Verkila,et al, Conference on VLSI Design, 2008
EE14162
MemorySTMicro/Intel/UCSD/THNU
9T9T Features
Read stability enhancement Leakage power reduction
Approaches Separated read port Min. sizing of N3, N4 and negative
Vg7, and larger Node3 during stand-by mode for leakage reduction
Performance 2x R-SNM cf. 6T 22.9% leakage power reduction 65 nm PTM
High Read Stability and Low Leakage Cache Memory CellHigh Read Stability and Low Leakage Cache Memory CellZ. Liu and V. KursunZ. Liu and V. Kursun, IEEE Conference, 2007, IEEE Conference, 2007
EE14163
MemorySTMicro/Intel/UCSD/THNU
8T8T Features
No read disturb About 30% area penalty
Approaches Separate Read & Write WL Separated read port
Performance Larger SNM than 6T Better scalability than 6T
Stable SRM Cell Design for the 32nm Node and BeyondStable SRM Cell Design for the 32nm Node and BeyondLeland Chang et. al, Leland Chang et. al, Symp. on VLSI,2005Symp. on VLSI,2005
EE14164
MemorySTMicro/Intel/UCSD/THNU
8T8T Features
No read disturb Low VDD(350mV) Low subthreshold(Sub. Vt) leakage
Approaches Separate Read &Write WL Separated read port Foot-drivers reduce the sub.Vt leakage
Performance 65nm process ,128 cells/row Operating @ 25KHz 2.2uW leakage power
A 256kb 65nm 8T Subhreshold SRAM Employing Sense-Amplifier RedundancyA 256kb 65nm 8T Subhreshold SRAM Employing Sense-Amplifier RedundancyN. Verma ,and A. P. Chandrakasan, JSSC,2008N. Verma ,and A. P. Chandrakasan, JSSC,2008
EE14165
MemorySTMicro/Intel/UCSD/THNU
7T7T Features
23% smaller than Conv. 6T bitcell Low VDD(440mV) Not suit for low speed demand
Approaches Separate Read &Write WL Seperate Read &Write BL Data protection nMOS:N5
Performance 20ns access [email protected] 90nm process
A Read-Static-Noise-Margin-Free SRAM Cell forLow-VDD andA Read-Static-Noise-Margin-Free SRAM Cell forLow-VDD andHigh-Speed Applications NEC, JSSC, 2006High-Speed Applications NEC, JSSC, 2006
EE14166
MemorySTMicro/Intel/UCSD/THNU
7T7T Features
90% power saving Approaches
BL swing: VDD/6 Performance
0.35um proces Leakage not
controlled well
90% Write Power-Saving SRAM Using Sense-Amplifying Memory Cell90% Write Power-Saving SRAM Using Sense-Amplifying Memory CellT. Sakurai et. al., JSSC, 2004T. Sakurai et. al., JSSC, 2004
EE14167
MemorySTMicro/Intel/UCSD/THNU
7T7T Features
Low write power SNM is effected by “Read pattern” (Read 0-N2,P2,N4 & Read 1-
N1,P1,N3,N5) 17.5% larger than 6T
Approaches Reducing write power by cut off the (feedback) connection to BL
Performance 0.18um proces 49% write power saving
Novel 7T SRAM Cell For Low Power Cache DesignNovel 7T SRAM Cell For Low Power Cache DesignR. Aly, M. Faisal and A. BayoumiR. Aly, M. Faisal and A. Bayoumi
IEEE SoC Conf., 2005IEEE SoC Conf., 2005
EE14168
MemorySTMicro/Intel/UCSD/THNU
6T6T• Features
– Single-ended– Low VDD
• Approaches– Adjustable header/footer (virVDD,
virGND)• Performance
– VDD range: 1.2V~193mV– Vmin=170mV with 2% redundancy
BL
WL
WL
A Sub-200mV 6T SRAM in 0.13μm CMOSA Sub-200mV 6T SRAM in 0.13μm CMOSISSCC, 2007ISSCC, 2007
EE14169
MemorySTMicro/Intel/UCSD/THNU
5T5T• Features
– Single-ended– Single BL, Single WL– Area 23% smaller than 6T
• Approaches– BL precharge to Vpc=600mV– Asymmetric cell sizing– Differential SA is used for Read
• Performance– 75% BL leakage reduction cf. 6T– SNM is 50% lower than the 6T’s– 0.18um process
A High Density, Low Leakage, 5T SRAM for Embeded CachesA High Density, Low Leakage, 5T SRAM for Embeded CachesI. Carlson et.al., ESSCIRC, 2004I. Carlson et.al., ESSCIRC, 2004
Low-skewedInverter
High-skewedInverter
EE14170
MemorySTMicro/Intel/UCSD/THNU
Example Electrical Design: UCSD Example Electrical Design: UCSD 32nm prototype32nm prototype
• Butterfly (read stability)• N-curves (read and write
stability)
• Iread (read stability and access time)
• VDDHOLD (data retention)
• Ileakage (power and data retention)
• SPICE Model: – 32nm HKMG (high-K/metal-
gate) from PTM• Reference Design
– Scaled bitcell from TSMC 90nm bitcell
TSMC 90nm 32nm scaled from
TSMC 90nm(REFERENCE)
32nm proposed(for 30x12, 25x12)
L (nm) W (nm) L (nm) W (nm) L (nm) W (nm)
Pull-up 100 100 32 32 32 44
Pull-down 100 175 32 56 32 88
Pass-Gate 115 120 37 38 32 44
EE14171
MemorySTMicro/Intel/UCSD/THNU
Butterfly and N-CurvesButterfly and N-Curves• Measure method
– Increase VR and measure VL– Increase VL and measure VR– Make voltage transfer curve in
VR and VL axes Butterfly
– Measure Iin N-curve
EE14172
MemorySTMicro/Intel/UCSD/THNU
IIreadread, I, Ileakageleakage and VDD and VDDHOLDHOLD
REFERENCE32nm proposed
(for 30x12 and 25x12)
Iread 41.2 uA 66.7 uA
Ileakage 85.4 nA 142.7 nA
VDDHOLD 110 mV 118 mV
Iread
Measure bitline current when WL switches to high
ILEAKAGE
Measure VDD (or VSS) current when WL=0
VDDHOLD
Decreasing VDD voltage, while WL=0 Measure minimum VDD voltage when
| V(nl) - V(nr) | = ‘sensing margin’
A1 A2
B1 B2
C1 C2 nl nr
VDD
WL
BLb BL
‘0’‘1’
‘1’ ‘1’
(100mV is assumed)
EE14173
MemorySTMicro/Intel/UCSD/THNU
Corner Simulation: Butterfly and N-Corner Simulation: Butterfly and N-CurveCurve
• Three candidate layouts across operating corners show little difference
(NN, 25degC, 1.0V)(SS, 125degC, 1.0V) (FF, -40degC, 1.0V)
0.00E+00
2.00E-01
4.00E-01
6.00E-01
8.00E-01
1.00E+00
1.20E+00
0 0.2 0.4 0.6 0.8 1 1.2
25x10, FF, -40degC25x12, FF, -40degC30x12, FF, -40degC
0.00E+00
2.00E-01
4.00E-01
6.00E-01
8.00E-01
1.00E+00
1.20E+00
0 0.2 0.4 0.6 0.8 1 1.2
25x10, NN, 25degC25x12, NN, 25degC30x12, NN, 25degC
0.00E+00
2.00E-01
4.00E-01
6.00E-01
8.00E-01
1.00E+00
1.20E+00
0 0.2 0.4 0.6 0.8 1 1.2
25x10, SS, 125degC25x12, SS, 125degC30x12, SS, 125degC
-1.5E-04
-1.0E-04
-5.0E-05
0.0E+00
5.0E-05
1.0E-04
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96 101
25x1025x1230x12
-1.5E-04
-1.0E-04
-5.0E-05
0.0E+00
5.0E-05
1.0E-041 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96 101
25x1025x1230x12
-1.0E-04
-5.0E-05
0.0E+00
5.0E-05
1.0E-04
1 6 11 16 21 26 31 36 41 46 51 56 61 66 71 76 81 86 91 96 101
25x1025x1230x12
EE14174
MemorySTMicro/Intel/UCSD/THNU
Corner Simulation: ICorner Simulation: Iread read ,, IIleakage leakage andand VDDVDDHOLD HOLD
VDDHOLD (V)
0.112
0.114
0.116
0.118
0.12
0.122
0.124
0.126
0.128
0.13
25x10 25x12 30x12 25x10 25x12 30x12 25x10 25x12 30x12
FF, -40 NN, 25 SS, 125
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
1.00E-04
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 1.5
FF, -40 25x10
FF, -40 25x12
FF, -40 30x12
NN, 25 25x10
NN, 25 25x12
NN, 25 30x12
SS, 125 25x10
SS, 125 25x12
SS, 125 30x120.00E+00
2.00E-05
4.00E-05
6.00E-05
8.00E-05
1.00E-04
1.20E-04
1.40E-04
1.60E-04
1.80E-04
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 1.5
FF, -40 25x10
FF, -40 25x12
FF, -40 30x12
NN, 25 25x10
NN, 25 25x12
NN, 25 30x12
SS, 125 25x10
SS, 125 25x12
SS, 125 30x12
Iread (A) Ileakage (A)
VDD (V)