B46.1-2002 Overview

B46.1 - 2002 Overview

Ted VorburgerMember, ASME Committee B46

ASME Spring Seminar 2004 - Surface MetrologySouthfield, MIApril 15, 2004

Contact: tvtv@nist.gov

B46.1-2002 Overview

ContentsWhats Old

Whats New

Whats Revised

Whats Anticipated

B46.1-2002 Overview

Collaborators

Editorial Working GroupTed Vorburger, Don Cohen, Brian Renegar

NanometerStylus SectionAl Hatheway

NanometerMicrosopy SectionDon Cohen

Fractal SectionChris Brown

Also: Mark Malburg, Alex Tabenkin

B46.1-2002 Overview

Whats Old (unchanged or slightly changed from 1995 revision)

Most of Terms Related to Surface Texture(Ex. Definition of Ra)

Classification of Instruments

Profiling, Contact, Skidless Instruments

Contact, Skidded Instruments

Techniques for Area Profiling

Techniques for Area Averaging

Precision Reference Specimens

Roughness Comparison Specimens

B46.1-2002 Overview

Whats Old (unchanged or slightly changed from 1995 revision)

Most of Terms Related to Surface Texture(Ex. Definition of Ra)

Classification of Instruments

Terminology and Measurement Procedures for Profiling, Contact, Skidless Instruments

Measurement Procedures for Contact, Skidded Instruments

But different procedures yield different results for Ra, Techniques for Area Profiling

Techniques for Area Averaging

Precision Reference Specimens

Roughness Comparison Specimens

B46.1-2002 Overview

B46.1-2002 Overview

Surface Parameters & Functions Defined in Section 1 on Terms and Definitions (changes)

Ra, Rq, Rz, Rt, Wt, Rsk, Rku, other height parameters

Amplitude Density, Bearing Length, Autocorrelation, Autocovariance, Power Spectral Density Functions

R q (R a)- root mean square (average absolute) slope

Area (S) parameters and functions

RSm - mean spacing of profile irregularities

B46.1-2002 Overview

Mean Spacing of Profile Irregularities

RSm = (1/n) SmiB46.1 allows height and spacing discrimination. Default height discrimination is 10% Rz. Default spacing discrimination is 1% of the sampling length

X

B46.1-2002 Overview

Contents

Whats OldWhats NewThree New Sections-Nanometer Surface Texture... Stylus Profiling-Nanometer Surface Roughness... Phase Measuring

Interferometric Microscopy-TerminologyFractal Geometry

Two New Appendices-Appendix - Reference Subroutines-Appendix- ASME and ISO Surface Texture ParametersWhats Revised

Whats Anticipated

B46.1-2002 Overview

New Section 7: Nanometer Surface Texture and Step Height Measurements by Stylus Profiling

Scope: The measurement ofnanometer-sized features on surfacesnear the performance limit of many metrology instruments

B46.1-2002 Overview

Nanometer Surface Texture and Step height Measurements by Stylus ProfilingIssuesAt least five data points per short-wavelength cutoffRecommendation for maximum stylus radius= 2 / (421/22Rq) Typo Error in Sec. 7.4.2.4Describes calibration specimens OR calibrated actuators for scale calibrationCites ultrasmooth surface artifacts for testing system noiseSpecifies reporting data

B46.1-2002 Overview

New Section 8: Nanometer Surface Roughness as Measured with Phase Measuring Interferometric Microscopy

Scope: Instruments for the measurement of surface roughness in the range 0.1 nm to 100 nm Rqusing phase measuring interferometeric microscopyalong a single profile

B46.1-2002 Overview

Nanometer Surface Roughness as Measured with Phase Measuring Interferometric Microscopy

B46.1-2002 Overview

Nanometer Surface Roughness as Measured with Phase Measuring Interferometric Microscopy

To enable the measurement of very smooth surfaces, where the instrument noise is about the same order of magnitude as the surface Rq,

This section cites:

Subtract Reference Method

Absolute Rq Method

B46.1-2002 Overview

Section 10: Terminology and Procedures for Evaluation of Surface Textures Using Fractal Geometry

Defines Fractal Dimension, D = (log N ) / [ log (1/r ) ]

B46.1-2002 Overview

Nonmandatory Appendix H: Reference Subroutines

Contains subroutines in C for calculation of the parameters:

Roughness Average - Ra

rms Roughness - Rq

Skewness - Rsk

Kurtosis - Rku

Average Maximum Height of the Profile - Rz

B46.1-2002 Overview

NonMandatory Appendix I: A Comparison of ASME and ISO Surface Texture Parameters (Excerpts of Table I1 shown here)

B46.1-2002 Overview

ContentsWhats Old

Whats New

Whats RevisedFiltering of Surface ProfilesWhats Anticipated

B46.1-2002 Overview

Filters help to specify the bandwidth limits of the surface texture measurement

B46.1-2002 Overview

The text describing the Gaussian bandwidth limits has been rewritten to improve clarity.

B46.1-2002 Overview

ContentsWhats Old

Whats New

Whats Revised

Whats Anticipated

B46.1-2002 Overview

Whats Anticipated: Possible Future Developments

ASME B46.2 on parameters for stratified surfaces: Rk et al.

Revision of Y14.36-1996

Revision of Classification of Instruments

B46.1-2002 Overview

From Y14.36-1996 Surface Texture Symbols

ISO 1302 has moved the specification of Ra and other surface texture parameters inside the basic symbol

B46.1-2002 Overview

Linear Profiling

Senses Z(X,Y)**

Optical Differential Profiling,Scanning Tunneling Microscopy,

Atomic Force Microscopy

Primarily Senses Z(X)*

Areal Topography

Total Integrated Scatter,Angle Resolved Scatter,

Parallel Plate Capacitance

Area-Averaging

*Accuracy of Z(Y) profiles often not determined

**Accuracy of Z(Y) profiles should be established

***Relies on circular scanning to produce a Z() profile

Contacting Stylus,Phase Shifting Interferometry,

Vertical Scanning (White Light) Interferometry,Focus Sensing Confocal Microscopy,

Chromatic Length Aberration Confocal Microscopy, Structured Light and Triangulation,

SEM Stereoscopy

Contacting Stylus,Phase Shifting Interferometry,

Circular Interferometric Profiling***,Optical Differential Profiling

Linear Profiling

Senses Z(X,Y)**

Optical Differential Profiling,Scanning Tunneling Microscopy,

Atomic Force Microscopy

Primarily Senses Z(X)*

Areal Topography

Total Integrated Scatter,Angle Resolved Scatter,

Parallel Plate Capacitance

Area-Averaging

*Accuracy of Z(Y) profiles often not determined

**Accuracy of Z(Y) profiles should be established

***Relies on circular scanning to produce a Z() profile

Contacting Stylus,Phase Shifting Interferometry,

Vertical Scanning (White Light) Interferometry,Focus Sensing Confocal Microscopy,

Chromatic Length Aberration Confocal Microscopy, Structured Light and Triangulation,

SEM Stereoscopy

Contacting Stylus,Phase Shifting Interferometry,

Circular Interferometric Profiling***,Optical Differential Profiling

Proposed Classification of Instruments drafted for new ArealSurface Texture ISO Standards

B46.1-2002 Overview

Summary:New ASME B46.1-2002 contains new sections onNanometer scale measurements with stylusNanometer scale measurements with phase measuring interferometryFractal parametersReference subroutinesTable comparing ASME and ISO parameters

More changes on the way, more harmony with comparable ISO standards