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B. MikulecB. Mikulec**M. Campbell, E. Heijne, X. Llopart, L. TlustosM. Campbell, E. Heijne, X. Llopart, L. Tlustos
CERN, Medipix CollaborationCERN, Medipix Collaboration* now with the University of Geneva, Switzerland* now with the University of Geneva, Switzerland
X-ray ImagingX-ray ImagingUsingUsing
Single Photon ProcessingSingle Photon Processingwithwith
Semiconductor Pixel DetectorsSemiconductor Pixel Detectors
Bettina Mikulec Vertex 2002, 8 Nov. 2002
The Origins...The Origins... High energy physics:
unambiguous reconstruction of particle patterns with micrometer precision
low input noise due to tiny pixel capacitance
WA 97, RD 19 (CERN):
208Pb ions on Pb target7 planes of silicon pixel ladders;1.1 M pixels
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Hybrid Pixel DetectorsHybrid Pixel DetectorsElectronics
CMOS technology advances steadily; Moore’s law
Sensors new materials to
increase stopping power and CCE; main problem: inhomogeneities!
1000
10000
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1000000
1988 1990 1992 1994 1996 1998 2000 2002
Year
Co
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on
ents
/mm
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OmegaD
Omega3/LHC1
Medipix2
Alice1/LHCb
area penalty forradiation tolerantdesign (x3)
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Single Photon ProcessingSingle Photon Processing
Quantum imaging
Example: photon counting
Q has to correspond to a single particle!
if Q > process signal
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Quantum Imaging - AdvantagesQuantum Imaging - Advantages Noise suppression
high signal-to-noise ratio; dose reduction low rate imaging applications
Linear and theoretically unlimited dynamic range
Potential for discrimination of strongly Compton scattered photons (for mono-energetic sources) or e.g. fluorescence X-rays
Energy weighting of photons with spectral sources possible
higher dose efficiency; dose reduction
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medical ImagingMedical Imaging
Detector requirements (sensor and electronics) depend on diagnostic X-ray imaging application.
Example: mammography spatial resolution 5-20 lp/mm high contrast resolution (<3%) uniform response patient dose <3 mGy imaging area: 18 x 24 (24 x 30) cm2 compact and easy to handle stable operation no cooling digital cheap
Moore and direct detection
quantum processing
sensors to be improved
high DQE (sensor + q.p.)
to be solved
???
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 / Medipix2Medipix1 / Medipix2Medipix1
square pixel size of 170 µm 64 x 64 pixels sensitive to positive input
charge
detector leakage current compensation columnwise
one discriminator
15-bit counter per pixel count rate: ~1 MHz/pixel
(35 MHz/mm2)
parallel I/O 1 m SACMOS technology
(1.6M transistors/chip)
Medipix2
square pixel size of 55 µm 256 x 256 pixels sensitive to positive or
negative input charge (free choice of different detector materials)
pixel-by-pixel detector leakage current compensation
window in energy discriminators designed to
be linear over a large range 13-bit counter per pixel count rate: ~1 MHz/pixel
(0.33 GHz/mm2) 3-side buttable serial or parallel I/O 0.25 m technology (33M
transistors/chip)
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 / Medipix2Medipix1 / Medipix2
IO
Logic
LVDS
Input
LVDS
Output32-bit CMOS Output
256-bit Fast Shift Register
3328
-bit
Pix
el C
olu
mn
-0
13 8-bit DACs
14111 m
3328
-bit
Pix
el C
olu
mn
-1
3328
-bit
Pix
el C
olu
mn
-1
1612
0
mIO
Logic
LVDS
Input
LVDS
Output32-bit CMOS Output
256-bit Fast Shift Register
3328
-bit
Pix
el C
olu
mn
-0
13 8-bit DACs
14111 m
3328
-bit
Pix
el C
olu
mn
-1
3328
-bit
Pix
el C
olu
mn
-1
1612
0
m
12249 m
1390
7 m
the prototype…
the new generation!
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 ApplicationsMedipix1 ApplicationsExamples: Dental radiography Mammography Angiography Dynamic autoradiography Tomosynthesis Synchrotron applications Electron-microscopy Gamma camera X-ray diffraction Neutron detection Dynamic defectoscopy
General research on photon counting!
Bettina Mikulec Vertex 2002, 8 Nov. 2002
ApplicationsApplicationsMammography(INFN Pisa, IFAE Barcelona):
Mo tube 30 kV; Medipix1;part of a mammographicaccreditation phantom
Dynamic Autoradiography:(INFN Napoli):
Medipix1; 14C L-Leucine uptake from the solution into Octopus vulgaris eggs(last slice in time: 80 min)
Bettina Mikulec Vertex 2002, 8 Nov. 2002
ApplicationsApplications
Sens-A-Raycommercial dental
CCD system(Regam Medical)
Medipix1
160 Gy 80 Gy 40 Gy
Dental Radiography(Univ. Glasgow, Univ. Freiburg,Mid-Sweden Univ.):
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 - SNRMedipix1 - SNRPixel-to-pixel non-uniformities:
optimum for counting systems: Poisson limit N
optimum SNR = N / N
determined SNR forMedipix1 taking flood fields(Mo tube) covering the entiredynamic range of the chip:
SNRuncorr(max.) ~30
using a flatfield correction
Medipix1 follows perfectly
the Poisson limit!
SNRuncorr
Red curve =Poisson limit
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 - SNRMedipix1 - SNR
First measurementpoint after settingthe detector bias!
First measurementpoint after settingthe detector bias!
SNRuncorr
flat field corrects mainlysensor non-uniformities!
8.5 keV 11.7 keV
12.4 keV
with adj. (35V det. bias)
29.8 18.8
without adj. (35V det. bias)
7
with adj. (17V det. bias)
19.2
with adj. (80V det. bias)
30.7
differences in the raw SNR, but with flat field correction the Poisson limit is ALWAYS reached BUT: flat field correction dependent on energy spectrum! working in over-depletion reduces charge sharing effects
SNRuncorr
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 Flat Field StudiesMedipix1 Flat Field Studies
raw image
flat field corrected
17 V detector bias(under-depleted)
35 V detector bias(fully depleted)‘waves’ due to
bulk dopingnon-uniformities
wrong flat field;inverse ‘waves’,BUT: single pixelinhomogeneities
smeared out
fixed pattern noise!
2 kinds of non-uniformities: ‘waves’ and fixed pattern noise
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Si Wave PatternsSi Wave Patterns
vary detector bias voltage from under- to over-depletion divide flat field map @Vbias with map @100 V
4 V 8 V12 V16 V24 V32 V48 V64 V80 V
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Si Wave PatternsSi Wave PatternsSection of the correction map for different detector bias:
‘waves’ move in under-depletion; stable in over-depletion
amplitude decreases with bias, but waves don’t disappear completely
Remark: images can be corrected for these non-uniformities
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Dose OptimizationDose Optimization Dose optimization for specific imaging
tasks:example: accumulation of single X-ray signals during X-ray of an anchovy
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Summary Medipix1Summary Medipix1 The Medipix1 prototype chip allows to study the
photon counting approach Comparison to charge integrating systems turned
out to be sometimes difficult due to the larger pixel size of Medipix1
Most of the problems encountered were due to sensor non-uniformities (e.g. locally varying leakage currents) and bump-bonding quality
Medipix1 turned out to be a tool to study the attached sensor; even silicon sensors show non-uniformities
The flat field correction was intensively studied and allows to minimize the pixel-to-pixel variations down to the Poisson limit over the full dynamic range of the chip. The energy dependence of the flat field correction has to be further investigated.
The experience with Medipix1 lead to many improvements implemented in the Medipix2 ASIC.
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix2 CharacterizationMedipix2 Characterization
all the reported measurements were done using the electronic calibration (injection capacitor + external voltage pulse).
The 8 fF injection capacitor nominal value has a tolerance of 10%.
The dedicated Muros2 readout system had been used
0
100
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5000 5500 6000 6500 7000 7500 8000 8500 9000 9500 10000
e-
Co
un
ts THL
Elec Noise L Elec Noise H
THH
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix2 CharacterizationMedipix2 Characterization
unadjusted thresholds ~500 e- rms
adjusted thresholds~110 e- rms
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix2 CharacterizationMedipix2 Characterization Threshold linearity in the low threshold range:
0
2000
4000
6000
8000
10000
12000
14000
0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 0.18
THL-FBK (V)
e-
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix2 CharacterizationMedipix2 Characterization
•threshold at 2 ke-
•injection of 1000 pulses of 3 ke-
•matrix unmasked
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Summary of the Electrical Summary of the Electrical MeasurementsMeasurements
Electron/Hole Collection
Gain ~12 mV/ke-
Non-linearity <3% to 80 ke-
Peaking time <200 ns
Return to baseline <1s for Qin <50 ke-
Electronic noise nTHL ~100 e- nTHH ~100 e-
Threshold dispersion THL ~500 e- THH ~500 e-
Adjusted threshold dispersion THL ~110 e- THH ~110 e-
Minimum threshold ~1000 e-
Analog power dissipation ~8 W/channel at 2.2 V supply
Bettina Mikulec Vertex 2002, 8 Nov. 2002
ConclusionsConclusions Miniaturization of CMOS technology allows for small pixel
sizes and increased functionality. A new single photon processing chip Medipix2 consisting
of a 256 x 256 matrix of 55 m square pixels has been produced and successfully characterized.
The potential of quantum imaging for various applications is still far from being fully explored.
Quantum imaging in the medical domain: rather complete systems are required to convince end users MTF and DQE curves as well as comparative phantom images
are necessary for approval (see e.g. FDA) A lot of progress has been made to achieve large areas;
as yet no satisfactory solution for most medical applications
There is a trend in some applications towards object characterization in addition to simple transmission images need energy information
colour X-ray imaging
Bettina Mikulec Vertex 2002, 8 Nov. 2002
‘‘Wishlist’Wishlist’sensors: high absorption efficiency and improved homogeneity
reliable ASIC-to-sensor connections
tiling: large areas without dead space
ASIC: small pixel size with charge sharing solutions (modern
CMOS technologies!) low-noise front-end with appropriate sensor leakage current
compensation; sensitive to electron and hole signals very fast front-end for time-resolved studies a precise threshold above noise a multi-bit ADC/pixel for energy information (optimum
weighting!) large dynamic range …???
cost!
Bettina Mikulec Vertex 2002, 8 Nov. 2002
Medipix1 Flat Field StudiesMedipix1 Flat Field Studies
vary detector bias voltage from under- to over-depletion calculate corresponding flat field from flood images (1st row) divide with correction map from 100 V detector bias data (2nd row)
a phantastic tool to study sensor inhomogeneities…