29
Bosch Micromachined Sensorsystems in Series Production Robert Bosch Corporation Research and Technology Center 4009 Miranda Ave, CA94304 Email: [email protected]
| Date post: | 15-Mar-2018 |
| Category: |
Documents |
| Upload: | truongnguyet |
| View: | 224 times |
| Download: | 8 times |
Bosch Micromachined Sensorsystemsin Series Production
Robert Bosch CorporationResearch and Technology Center
4009 Miranda Ave, CA94304Email: [email protected]
Bosch Sensors for Automotive Applications
K8/STZ 80701 e
Md
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Drivetr
ain
Safety
Conve
nienc
e fea
tures
Radar
distan
ce se
nsor
(Hea
dlamp a
iming
syste
m)
(Veh
icle dy
namics
contr
ol)
(ACC, p
recras
h)Til
t sen
sor
Acceler
ation
sens
or (Airba
g)
Tilt s
enso
r (Veh
icle se
curity
sens
or)
Torqu
e sen
sor (P
ower
steeri
ng)
(Roll
over
sens
ing)
Angula
r rate
sens
or
Rotion
al sp
eed s
enso
r
Yaw ra
te se
nsor
Seat o
ccup
ancy
sens
or (Airb
ag)
Manifo
ld ab
solut
e pres
sure
sens
or
(Elec
tronic
diese
l contr
ol, motr
onic)
Angula
r rate
sens
or (N
aviga
tion)
Air qual
ity sen
sor (A
ir cond
itionin
g cont
rol)
Humidi
ty/ tempe
rature
sens
or
(H
eating
and a
ir con
dition
ing co
ntrol)
Pressu
re se
nsor
(C
entra
l locki
ng sy
stem)
Rain se
nsor
(W
ash/w
ipe co
ntrol)
Pressu
re se
nsor
(Electro
nic
tra
nsmiss
ion co
ntrol,
motron
ic)Mas
s air f
low se
nsor
(Motr
onic)
Kno
ck se
nsor
(Motr
onic)
Atmos
pheri
c pres
sure
sens
or
(M
otron
ic)
Oxyge
n sen
sor
Angula
r pos
ition s
enso
r
(M
otron
ic)
Tank p
ressu
re se
nsor
(O
n boa
rd dia
gnost
ics)
Rotatio
nal sp
eed s
enso
r (Elec
tronic
tra
nsmiss
ion co
ntrol,
motron
ic)
High pr
essu
re se
nsor
(Veh
icle dy
namics
contr
ol)
Steerin
g whee
l angle
senso
r
Accele
ration
sens
or
High pr
essu
re se
nsor
(Fu
el inje
ction s
ystem
, common
rail)
(Antil
ock b
raking
syste
m)
(Antil
ock b
raking
syste
m)
(Veh
icle dy
namics
contr
ol)
Ultraso
nic di
stanc
e sen
sor
(R
ear p
roxim
ity warn
ing sy
stem)
Pedal p
ositio
n sen
sor (E
lectro
nic
acc
elerat
or pe
dal, e
lectro
-hydra
ulic br
ake)
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K8/STZ DQ 80929 e
Silicon Sensors
Bosch Micromachined Sensorsystems
IntegratedPressure Sensor
Robert Bosch CorporationResearch and Technology Center
4009 Miranda Ave, CA94304Email: [email protected]
Micromechanical Pressure Sensor
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K8 /L MPK60913e
Metalhousing
Glass socket
Intake manifold pressure
Wire bonds
Reference vacuum
Sensor chip Membrane
Pressure Sensor in Bulk Micromachining
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
" K8/L MPK60914e
Bulk Micromachining
Wet chemical etching
Isotropic etching in an acid etching bath(imprecise shapes)
Etchingmask
Silicon
Silicon
Silicon wafer
Pyrex glass
Pyrex glass wafer
Anisotropic etching in an alkaline etching bath(precise shapes)
Anodic wafer bonding
Hot plate
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K8/L SE 81101e
Atmospheric Pressure Sensor SMD082
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K3 /L 826e
Sensor cell
Micromechanical Intake Manifold Pressure Sensor
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Bosch Micromachined Sensorsystems
Mass Air Flow Sensor
Robert Bosch CorporationResearch and Technology Center
4009 Miranda Ave, CA94304Email: [email protected]
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Mass Air Flow Sensors – Generations
K8/STZ DQ 80920 e
Hot wire1980
1991
1995
Thick film
on ceramics
Thin film
on silicon
5 mm
Measuring principle
Heater bandMembrane
Sensor element
T∆
T1
T2
T with air flowwithout air flow
0
Direction of air flow
HFM5 Micromechanical Mass Air Sensor
K3/L 825e
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K3/L 824e
HFM5 Micromechanical Mass Air Flow Meter
Sensor element
3 m
m
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Bosch Micromachined Sensorsystems
Surface MicromachinedAcceleration Sensors
Robert Bosch CorporationResearch and Technology Center
4009 Miranda Ave, CA94304Email: [email protected]
Si Micromachined Yaw Rate SensorDesign
folienSAE_980219 K8/STZ 01.98
Linear Accelerometer:
Surface micromachining
2µm gaps
12 µm thick Poly-Silicon
1pF working capacitance
folded springs
high sensitivity
internal stress
compensation
200 µm
Acceleration Sensor in Surface Micromachining
Scanning electron microscope imageof the comb structure
Sensor chipWire bonds
Suspension spring Fixed electrodes
Seismic mass with movable electrodes
K8 /L MPK60915e
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Evaluationcircuit
K8/L SE 70901e
Acceleration Sensors
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Bosch Micromachined Sensorsystems
Si-MicromachinedYaw Rate Sensor
Robert Bosch CorporationResearch and Technology Center
4009 Miranda Ave, CA94304Email: [email protected]
K8/STZ DQ 80924 e
Automotive Electronics – Electronic Stability Program (ESP)
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Micromachined Yaw Rate Sensor
Direction of sensitivity
Spring
Acceleration sensor
Direction of oscillationYaw rate
Oscillating mass
vΩ
K1/LE 61120 6534e
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
Si Micromachined Yaw Rate SensorDesign
folienSAE_980219 K8/STZ 01.98
Coriolis AccelerometerFolded Beam
Coupling Spring
Si Micromachined Yaw Rate SensorPackaging
folienSAE_980219 K8/STZ 01.98
Cross-section of the sensing element
Silicon Cap Wafer
Sensor Wafer
Silicon Base Wafer
Bond Pad
Oscillator
Accelerometer
Si Micromachined Yaw Rate SensorPackaging
folienSAE_980219 K8/STZ 01.98
Cross section of the module:
Metal Base
Magnet
HybridSensing Element
Metal Cover
Micromachined Angular Rate Sensor
K8/STZ DQ 80927 e
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
500 m50 m
100 m
© R
ober
t Bos
ch G
mbH
res
erve
s al
l rig
hts
incl
udin
g in
dust
rial p
rope
rty
right
s an
d al
l rig
hts
of d
ispo
sal s
uch
as c
opyi
ng a
nd p
assi
ng o
n to
third
par
ties.
K8/STZ DQ 80929 e
Silicon Sensors
