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1
Data Sheet
BrooksFlow Controllers
Variable Area
DescriptionDescriptionDescriptionDescriptionDescription
PrPrPrPrProduct Featuroduct Featuroduct Featuroduct Featuroduct Featureseseseses
Flow Controllers for Gas & Liquid ServiceModel FC 8744, Series FC 8800 & FC 8900
Model 1350G with FC 8800
DS-VA-FC-engOctober, 2015
Brooks® flow controllers are designed to maintain a constant differential pressure acrossan integral manual flow regulating valve. The incoming fluid pressure on one side ofthe diaphragm, and outlet pressure plus spring action on the other side, position anintegral diaphragm-actuated control valve. Variations in the supply or dischargepressure disturb the balance of forces on the diaphragm, causing the internal controlvalve to open or close, thus maintaining a fixed differential pressure across the integral,manual flow regulating valve resulting in constant flow. (Refer to Figure 1)
Model FC 8744Model FC 8744Model FC 8744Model FC 8744Model FC 8744 controllers are used for accurately adjusting and maintaining small gasand liquid flows with variable downstream pressures.
Series FC 8800Series FC 8800Series FC 8800Series FC 8800Series FC 8800 controllers are used for accurately adjusting and maintaining liquid andgas flows with variable upstream pressures.
Series FC 8900Series FC 8900Series FC 8900Series FC 8900Series FC 8900 controllers are used for accurately adjusting and maintaining liquid andgas flows with variable downstream pressures.
• Flow controllers for high pressure or low flow rates to handle demanding applications• Integral mounting to flowmeter to save space and improve installation• High-resolution valves provide precise flow control for many applications• Many different materials of construction that provides process immunity and flexibility
FC 8800/ FC 8900 FC 8744
PrPrPrPrProduct Specificationsoduct Specificationsoduct Specificationsoduct Specificationsoduct Specifications
SpecificationsSpecificationsSpecificationsSpecificationsSpecifications FC Series Flow ControllersFC Series Flow ControllersFC Series Flow ControllersFC Series Flow ControllersFC Series Flow Controllers
Flow Ranges (Refer to Table 1)Flow Ranges (Refer to Table 1)Flow Ranges (Refer to Table 1)Flow Ranges (Refer to Table 1)Flow Ranges (Refer to Table 1) Water - up to 480 GPH / 1820 l/hAir - up to 2130 SCFH / 56000 l
n/h
Pressure and Temperature RatingsPressure and Temperature RatingsPressure and Temperature RatingsPressure and Temperature RatingsPressure and Temperature Ratings Up to 1000 psig / 69 Bar. Refer to Table 2a or 2bMinimum Operating Temperature: -40°F/C
Maximum Operating Temprature: Refer to Tables 2a or 2b.
Pressure DropPressure DropPressure DropPressure DropPressure Drop Refer to Table 2a.
Pressure Equipment DirectivePressure Equipment DirectivePressure Equipment DirectivePressure Equipment DirectivePressure Equipment Directive (97/23/EC) (97/23/EC) (97/23/EC) (97/23/EC) (97/23/EC) Equipment falls under Sound Engineering Practice (SEP) according to the directive.
(Specifications continued on next page)
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PrPrPrPrProduct Specifications (conoduct Specifications (conoduct Specifications (conoduct Specifications (conoduct Specifications (continued)tinued)tinued)tinued)tinued)
SpecificationsSpecificationsSpecificationsSpecificationsSpecifications FC Series Flow ControllersFC Series Flow ControllersFC Series Flow ControllersFC Series Flow ControllersFC Series Flow Controllers
Materials of ConstructionMaterials of ConstructionMaterials of ConstructionMaterials of ConstructionMaterials of Construction
Controller BodyController BodyController BodyController BodyController Body 316 Stainless Steel, Brass or Aluminum (FC 8744 only). Refer to Table 3
Controller DiaphragmController DiaphragmController DiaphragmController DiaphragmController Diaphragm Buna-N, Teflon® or Viton® fluoroelastomers. Refer to Table 3.
Needle ValveNeedle ValveNeedle ValveNeedle ValveNeedle Valve 316 Stainless Steel Cartridge Valve. Refer to Figure 3. Refer to data sheet DS-VA-CART-eng.316 Stainless Steel NRSTM Valve. Refer to Figure 2. Refer to data sheet DS-VA-8503-eng.
316 Stainless Steel high flow needle valve type. Refer to Table 3.
O-ringsO-ringsO-ringsO-ringsO-rings Viton® fluoroelastomers, Buna-N, Kalrez® (SS body only), EPR (SS body only),Kalrez/Teflon (SS body only). Refer to Table 3.
DimensionsDimensionsDimensionsDimensionsDimensions Refer to Figure 4
SizingSizingSizingSizingSizing Refer to Table 4.
Material CertificationMaterial CertificationMaterial CertificationMaterial CertificationMaterial Certification Certification to NACE MR-01-75;(Stainless Steel body only)(Stainless Steel body only)(Stainless Steel body only)(Stainless Steel body only)(Stainless Steel body only) Certification to EN 10204-2.2; Certification to EN 10204-3.1
Ordering Information / Model CodesOrdering Information / Model CodesOrdering Information / Model CodesOrdering Information / Model CodesOrdering Information / Model Codes Refer to Model Code
Figure 3 Cutaway View, Cartridge Valve
Figure 1 Cutaway View, Principle of Operation
Figure 2 Cutaway View, NRS Valve
3
PrPrPrPrProduct Specifications - Flow Ranges, Product Specifications - Flow Ranges, Product Specifications - Flow Ranges, Product Specifications - Flow Ranges, Product Specifications - Flow Ranges, Pressuressuressuressuressure / e / e / e / e / TTTTTemperemperemperemperemperaturaturaturaturature Ratings & Pre Ratings & Pre Ratings & Pre Ratings & Pre Ratings & Pressuressuressuressuressure Dre Dre Dre Dre Dropopopopop
Table 1 FC Series Flow Ranges
Table 2a FC Series Pressure / Temperature Ratings and Pressure Drop
Table 2b FC Series Pressure / Temperature Ratings CRN
4
PrPrPrPrProduct Specifications (conoduct Specifications (conoduct Specifications (conoduct Specifications (conoduct Specifications (continued)tinued)tinued)tinued)tinued)
Table 3 FC Series Materials of Construction / Connection / Valve Option
Table 4 Sizing Chart
5
PrPrPrPrProduct Dimensionsoduct Dimensionsoduct Dimensionsoduct Dimensionsoduct Dimensions
Figure 4 Flow Controller Dimensional Drawings
Model FC 8744
Model FC 8830
Series FC 8800/8900
6
Model CodeModel CodeModel CodeModel CodeModel Code
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption Description
I.I.I.I.I. Base Model Number FCA87FCA87FCA87FCA87FCA87 Low flow gases and liquids with variable downstream pressureFCA88FCA88FCA88FCA88FCA88 Gases and liquids with variable upstream pressureFCA89FCA89FCA89FCA89FCA89 Gases and liquids with variable downstream pressure
II.II.II.II.II. Type of Use 0000000000 General use, standard operating pressure, integral connection to Models 1350 & 13550202020202 General use, standard operating pressure, integral NPT connections0505050505 General use, high operating pressure, integral NPT connections1212121212 High flow rates, standard operating pressure, integral NPT connections1515151515 High flow rates, high operating pressure, integral NPT connections30*30*30*30*30* Very high flow rates, standard operating pressure, integral NPT connections4040404040 Precise control, standard operating pressure, integral connection to Models 1350 & 13554242424242 Precise control, standard operating pressure, integral NPT connections4545454545 Precise control, high operating pressure, integral NPT connections44*44*44*44*44* Very precise control, low operating pressure, adapters required
III.III.III.III.III. Body Material A*A*A*A*A* BrassBBBBB 316 Stainless SteelC*C*C*C*C* Aluminum - FC 8744 onlyDDDDD 316 Stainless Steel - CRN
IV.IV.IV.IV.IV. Diaphragm Material 11111 Viton22222 Teflon3*3*3*3*3* Buna
V.V.V.V.V. O-ring Material AAAAA VitonBBBBB BunaCCCCC Kalrez - Stainless Steel body onlyDDDDD Kalrez/Teflon - Stainless Steel body onlyEEEEE EPR - Stainless Steel body onlyYYYYY Not applicable
VI.VI.VI.VI.VI. Process Connection Size & Type 11111 1/4” FNPT22222 1/8 FNPT33333 1/8” Tube Compression44444 1/4” Tube Compression5*5*5*5*5* 1/4” I. D. Hose6*6*6*6*6* 3/4” FNPT77777 Integral 5/16-24 UNF Thd
VII.VII.VII.VII.VII. Valve Configuration AAAAA Cartridge Valve, Low FlowBBBBB Cartridge Valve, Medium FlowCCCCC Cartridge Valve, High FlowDDDDD NRS Needle Valve, Size #1 (316 SS only)EEEEE NRS Needle Valve, Size #2 (316 SS only)FFFFF NRS Needle Valve, Size #3 (316 SS only)GGGGG NRS Needle Valve, Size #4 (316 SS only)HHHHH NRS Needle Valve, Size #5 (316 SS only)JJJJJ NRS Needle Valve, Size #6 (316 SS only)LLLLL High Flow Needle ValveYYYYY No Valve
VIII.VIII.VIII.VIII.VIII. Valve Option 00000 Knob only
IX.IX.IX.IX.IX. Filter AAAAA NoneBBBBB Filter on InletCCCCC Filters on Inlet & Outlet
X.X.X.X.X. Mounting Configuration 00000 None11111 Mounting Bracket, Plated Steel (standard) Note: N/A FC 874422222 Mounting Bracket, Stainless Steel Note: N/A FC 8744
* CRN NOT AVAILABLE
Sample Standard Model Code (Fields incomplete )Sample Standard Model Code (Fields incomplete )Sample Standard Model Code (Fields incomplete )Sample Standard Model Code (Fields incomplete )Sample Standard Model Code (Fields incomplete )
IIIII IIIIIIIIII IIIIIIIIIIIIIII IVIVIVIVIV VVVVV VIVIVIVIVI VIIVIIVIIVIIVII VIIIVIIIVIIIVIIIVIII IXIXIXIXIX XXXXX XIXIXIXIXI XIIXIIXIIXIIXIIFCA88FCA88FCA88FCA88FCA88 0000000000 BBBBB 11111 AAAAA 11111 DDDDD 00000 AAAAA 00000
(Model Code continued on next page)
7
Model Code (ConModel Code (ConModel Code (ConModel Code (ConModel Code (Continued)tinued)tinued)tinued)tinued)
Sample Standard Model Code (Fields complete)Sample Standard Model Code (Fields complete)Sample Standard Model Code (Fields complete)Sample Standard Model Code (Fields complete)Sample Standard Model Code (Fields complete)
IIIII IIIIIIIIII IIIIIIIIIIIIIII IVIVIVIVIV VVVVV VIVIVIVIVI VIIVIIVIIVIIVII VIIIVIIIVIIIVIIIVIII IXIXIXIXIX XXXXX XIXIXIXIXI XIIXIIXIIXIIXIIFCA88FCA88FCA88FCA88FCA88 0000000000 BBBBB 11111 AAAAA 11111 DDDDD 00000 AAAAA 00000 AAAAA 11111
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption Description
XI.XI.XI.XI.XI. Material Certifications AAAAA NoneBBBBB Certification to NACE MR-010-75CCCCC Material Certification EN 10204-2.2DDDDD Material Certification EN 10204-3.1EEEEE Certification to NACE & Material Certification EN 10204-2.2FFFFF Certification to NACE & Material Certification EN 10204-3.1
XII.XII.XII.XII.XII. Additional Cleaning 11111 Standard Cleaning Process22222 Degrease and Clean for Oxygen Service
* CRN NOT AVAILABLE
8
BrBrBrBrBrooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Support
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service andsupport to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location
utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our localWeights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
STSTSTSTSTARARARARARTTTTT-UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE AND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRATIONTIONTIONTIONTION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality
Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under
in-situ conditions, and the results will be traceable to the relevant international quality standards.
CUSTCUSTCUSTCUSTCUSTOMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS AND AND AND AND AND TRAININGTRAININGTRAININGTRAININGTRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESKHELP DESKHELP DESKHELP DESKHELP DESK
In case you need technical assistance:
Americas 1 888 554 FLOW
Europe +31 (0) 318 549 290
Asia +81 3 (0) 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
TRADEMARKSBrooks ............................................................. Brooks Instrument, LLCAll other trademarks are the property of their respective owners.
1
The Brooks® SolidSense II® Pressure Transducers are designed for stable, accurate, andreliable pressure monitoring in high purity and ultra-high purity (UHP) applications. Acombination of optimum design and materials improves both signal stability andreliability in numerous pressure measurement applications.
Pressure transducers are widely used in high purity and ultra-high purity fluid storageand delivery systems in many industries. Unfortunately, a number of current transducersrely on technologies that have problems with zero and span drift, thermal shift, and casestress. Adjusting the transducer to rectify errors requires ongoing maintenance thatincreases downtime and cost of ownership.
The third generation SolidSense II pressure transducers by Brooks Instrument utilizeglass-fused strain gauge technology enabling a new level of performance for microelectronics and industrial applications.
SolidSense II pressure transducers employ ultra stable, micro machined silicon straingauges that are matched and fused to the metal diaphragm at high temperature torelieve manufacturing induced stress. The process reduces drift or lack of zero stabilitycommonly associated with competitive products. Consequently, down time for zeroadjustment to compensate for drift is significantly reduced. In addition, the uniquemechanical design eliminates torque effects during installation.
SolidSense II digital architecture enables automated software driven calibration and awide range of thermal compensation routines, unlike the passive compensation used incompetitive devices. This enhances measurement repeatability regardless of changes tothe operational environment.
SolidSense II devices feature 316L stainless steel wetted surfaces electropolished to5- and 10-micro in. (5- and 10-Ra) to maintain the purity of the measured fluid.
Data Sheet
Pressure Transducers
OverviewOverviewOverviewOverviewOverview
Superior stability and reliabilityfor demanding pressure
measurement applications
SolidSense II®
Pressure Transducers
SolidSense II® PressureTransducers
DS-PR-SolidSenseII-PT-engApril, 2016
2
PrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct Description
Industry StandarIndustry StandarIndustry StandarIndustry StandarIndustry Standard Ind Ind Ind Ind InterfaceterfaceterfaceterfaceterfaceOptions and outputs
Digital Digital Digital Digital Digital ThermalThermalThermalThermalThermalCompensationCompensationCompensationCompensationCompensationMulti-point temperaturecompensation
Digital LinearizationDigital LinearizationDigital LinearizationDigital LinearizationDigital LinearizationConsistency of performance
StrStrStrStrStress Isolation Stageess Isolation Stageess Isolation Stageess Isolation Stageess Isolation StageTo reduce stress introducedduring mounting
Sensor Sensor Sensor Sensor Sensor AAAAAttacttacttacttacttachmenhmenhmenhmenhmentttttGlass fusion bondingto relieve stress
Sensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionPaired strain gauges to reducestress induced drift
WWWWWetted Materialsetted Materialsetted Materialsetted Materialsetted Materials316L meets SEMI F20Fully Swept FlowpathFully Swept FlowpathFully Swept FlowpathFully Swept FlowpathFully Swept Flowpath
Complete removal ofresidual gas
FeaturFeaturFeaturFeaturFeatureseseseses BenefitsBenefitsBenefitsBenefitsBenefits
Two pairs of strain gauge sensors Precision matched sensors for improved performance
Glass fusion process to High temperature glass bonding drives off any mechanically induced build up of stressbond strain gauge from sensor manufacturing process
Stress isolation stage Minimizes stress introduced during installation of the transducer
Digital temperature compensation Improved thermal stability over entire range of temperature
Digital linearization and calibration Consistency of performance, improved reproducibility
Fully swept flowpath Ensures contamination-free pressure measurement
Integrated fully rotatable display option Local indication of process pressure for safe system maintenanceCompact with no special wiring for easy system integration/installation
3
Sensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionSensor ConstructionSolidSense II utilizes proprietary micro machined silicon straingauges that are ultra stable and suitable for high purity andultra-high purity requirements.
A design feature for controlling stress is the use of dual pairedgauges. By using two paired gauges in Wheatstone bridgecircuitry, pressure signal is maximized enhancing stability.
Sensor AttachmentSensor AttachmentSensor AttachmentSensor AttachmentSensor Attachment
A key step for eliminating machining stress in the diaphragm isthe glass fusion process used to bond the strain gauges to thesensor diaphragm. This process occurs at 600OC and drives offany mechanically induced build up of stress resulting in ahighly stable and accurate sensor.By using silicon strain gauge technology and the glass fusionbonding method for SolidSense II, there is no stress inducedfrom thermal gradients between structural materials. In somecompetitive designs, different thermal expansion coefficientsbetween the metal casing and ceramic electrode (upon whichthe sensor is mounted) allow for flexing of the sensor which isinterpreted as a false pressure change.
Stress Isolation StageStress Isolation StageStress Isolation StageStress Isolation StageStress Isolation StageSolidSense II incorporates an isolation stage shown at right thatminimizes stress from: (1) thermal heating during any adjacentwelding and (2) torque during installation in gas panels, gasinterface boxes, valve manifold boxes, etc. By preventing stressduring these two scenarios, creep (drift) is eliminated duringsubsequent usage.
Wetted MaterialsWetted MaterialsWetted MaterialsWetted MaterialsWetted MaterialsMade from 316L that meets SEMI F20. Surface finish complieswith SEMI F19. Product is assembled in clean environmentcompliant with ASTM F1374-92 - meets requirement for ultra-high purity application.
PrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct Description
Ground
VIn
5VR1, Tension R2, Comp.
R3, Comp. R4, Tension
Pressure
Tension CompressionCompression
StressIsolationGroove
Diaphragm
Strain Gauges(bonded ondiaphragm)
ReferenceVolume
Fully rotatable displayFully rotatable displayFully rotatable displayFully rotatable displayFully rotatable displayThis integrated display option reduces gas panel overall sizeconstraints by eliminating the requirement for a standalonepressure gauge and reduces height by 2-6 inches. The display isfully rotatable - covering 4 quadrants - and no tools are requiredto set/secure the position. A bright LED display ensures readabilityin typical compact installation conditions. It provides exact visualfeedback and verification of line pressure and an over pressureindication (roughly at 110% FS). The fully integrated displaycombined with the SSII high performance provides exact pressuremeasurement choice for field upgrades and new gas processingsystem designs.
4
Digital Linearization and CalibrationDigital Linearization and CalibrationDigital Linearization and CalibrationDigital Linearization and CalibrationDigital Linearization and CalibrationSolidSense II is calibrated with automated software which usesabout 200 linearization points compared with 2 for somecompeting units. This results in consistency of performancefrom one transducer to the next (reproducibility). Due toautomation, operator induced differences are eliminated.
Digital Thermal CompensationDigital Thermal CompensationDigital Thermal CompensationDigital Thermal CompensationDigital Thermal CompensationSolidSense II uses multi-point digital temperature compensation. Some competitive devices rely on single or two pointcompensation to optimize device performance over the operating temperature range. For example, device performance might bechecked at -10oC and 60oC to determine the dZ/dT and dS/dT (rate of zero/span change per temperature change) with thetemperature compensation interpolated for other values. SolidSense II can incorporate five separate data points, which are typicallytaken at -10oC, -5oC, 20oC, 40oC and 60oC, giving the temperature compensation algorithm far better resolution.
Fully swept flowpathFully swept flowpathFully swept flowpathFully swept flowpathFully swept flowpathThe SolidSense II incorporates an all-swept flowpath and very small internal volume allowing complete removal of residual fluidduring the purge cycle. As a result inert, dry and clean surfaces are available at the end of the purge cycle.
ASTM F1397 establishes a dry-down requirement to 20 ppbv H20 within 30 minutes. As accompanying data shows, the dead endconfiguration of the SolidSense II recovered to desired level within 11.5 minutes and the flow thru configuration recovered in 9.5minutes, both well below the requirement indicated in standard.
PrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct Description
Pulse Test Dry Down SolidSense-II TransducerGFD01A3DCS Model
-50
0
50
100
150
200
250
300
350
400
450
0 5 10 15 20 25
Time (min)
Wate
r (p
pb
)
Water Contribution Surface Mount Spool Piece
Water Contribution Surface Mount Transducer
Subtracted
Pulse Test Dry Down SolidSense-II Transducer
GFF01A30FS Model
-100
-50
0
50
100
150
200
250
300
350
400
0 5 10 15 20 25
Time (min)
Wa
ter
(pp
b)
Water Contribution VCR Spool Piece
Water Contribution VCR Mount Transducer
Subtracted
Thermal Zero
0.07
(0.23)(0.22)
(0.04)(0.18)
(0.45)
(1.00)
2.68
2.86
0.57
0.52
(1.00)
(0.50)
‐
0.50
1.00
1.50
2.00
2.50
3.00
‐30 ‐20 ‐10 0 10 20 30 40 50 60 70
Temperature (deg C)
Zero
Dev
iati
on
(%
FS
/100 d
eg
F)
Brooks 1
Brooks 2
Comp A 1
Comp A 2
Comp B 1
Comp B 2
Thermal Span
(0.14)0.020.100.29
(0.66)
(0.44)
1.83
(2.07)
1.43
0.760.91
(2.01)
(2.50)
(2.00)
(1.50)
(1.00)
(0.50)
‐
0.50
1.00
1.50
2.00
‐25 ‐5 15 35 55 75
Temperature (deg C)
Zero
Devia
tio
n (
% F
S/1
00 d
eg
F)
Brooks 1
Brooks 2
Comp A1
Comp A2
Comp B1
Comp B2
5
RobustnessRobustnessRobustnessRobustnessRobustnessThe SolidSense II design incorporates a stress isolation stage. This prevents stresses built up during installation of transducers frombeing transmitted to diaphragm. As a result, SolidSense II will not require frequent resetting of zero after installation and inoperation.
A number of applications involve subjecting the pressure transducer to rapid pressure cycling in a purge cycle. As shown in testresults, SolidSense II will not temporarily indicate inaccurate pressure readings due to the Joule-Thompson effect. In somecompetitive devices this may cause false alarms and shut down the gas distribution system.
PrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct Description
Zero StabilityZero StabilityZero StabilityZero StabilityZero StabilityMinimal drift, creep and shifts during installation and service life.
Stabilty - 2,000,000 pressure cycles without failure
MetrologyMetrologyMetrologyMetrologyMetrologyCalibration system that is traceable to international primary standards with minimal uncertainty - precise dependable pressuremeasurements.
Accurate pressure readings during purge cycle
Solid Sense II Pressure Cycle (0 psig - 2000 psig)3000 psig device (0-5Vdc output)
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
52:39 53:46 54:59 56:12 57:25 58:38 59:51
Time (minutes)
Tran
sduc
er O
utpu
t (VD
C)
6
PrPrPrPrProduct oduct oduct oduct oduct ApplicationsApplicationsApplicationsApplicationsApplications
Semiconductor ManufacturingSemiconductor ManufacturingSemiconductor ManufacturingSemiconductor ManufacturingSemiconductor ManufacturingUltra-high purity gases and liquids are at the heart ofsemiconductor manufacturing operations. Their safe storageand distribution is vital to uninterrupted production. Gascabinets, gas panels, valve manifold boxes and distributionvalve boxes all require reliable pressure measurement of thesefluids.
Several design features and manufacturing processes describedin more detail elsewhere in this data sheet enable superioraccuracy and long-term stability. Two are emphasized here:The sensor isolation stage minimizes stress coupled fromadjacent welding operations and torque from installation. Byisolating stress during these two scenarios, stress-related creepor drift is eliminated.
All gas cabinets are designed to handle purge cycles tofacilitate safe changeover of cylinders. Whether these areautomatic or manual, it is common to introduce a big surge inpressure followed by vacuum over very short period of time.Test results show that SolidSense II will not temporarily indicateinaccurate readings during purge cycles due to Joule-Thompsoneffect.
7
PrPrPrPrProduct oduct oduct oduct oduct ApplicationsApplicationsApplicationsApplicationsApplications
Measure build-up across filtersMeasure build-up across filtersMeasure build-up across filtersMeasure build-up across filtersMeasure build-up across filtersMany sanitary processes use filters to ensure product quality. Asthe load on the filter increases, a pressure differential betweenthe inlet and outlet sides of the filter can be measured usingSolidSense II. Once an established differential limit is reached,the filter can be preventively replaced before throughput goesdown.
8
PrPrPrPrProduct Specificationsoduct Specificationsoduct Specificationsoduct Specificationsoduct Specifications
PerformancePerformancePerformancePerformancePerformance Non-Display VersionNon-Display VersionNon-Display VersionNon-Display VersionNon-Display Version Display VersionDisplay VersionDisplay VersionDisplay VersionDisplay Version
Temperature:
Operating: -20OF to 180OF (-29OC to 82OC) -20°F to 140°F (-29°C to 60°C)Storage: -40OF to 180OF (-40OC to 82OC) -40°F to 167°F (-40°C to 75°C)
Compensated: -4OF to 140OF (-20OC to 60OC) / 68OF to 140OF (20OC to 60OC) 0-10 Vdc version
Burst Pressure: 400% full scaleProof Pressure: 200% full scale up to 2,000 psi, 150% full scale for higher ranges
Accuracy: 0.25% full scale (BFSL)
Response Time: < 5 msec
Zero and Span Temperature
Coefficient (each):
>100 PSI Ranges Full Scale: +0.02% full scale/OF (-4OF to 140OF, -20OC to 60OC)+0.50% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version
<100 PSI Ranges Full Scale: +0.04% full scale/OF (-4OF to 140OF, -20OC to 60OC)+1.00% full scale (68OF to 140OF, 20OC to 60OC) 0 to 10 Vdc version
MechanicalMechanicalMechanicalMechanicalMechanicalHousing: Stainless steel, polymer plastics
Wetted Parts: VIM-VAR 316L stainless steel, SEMI F20
Surface Finish: Compliant with SEMI F19
Cleanliness: Compliant to ASTM F1374-92 (2005)
Internal Volume: 1.79cc
Process Connections: (See Product Configurations for available options)
Approximate Shipping Weight: 0.70 lb. (0.32 kg)
ElectricalElectricalElectricalElectricalElectrical Non-Display VersionNon-Display VersionNon-Display VersionNon-Display VersionNon-Display Version Display VersionDisplay VersionDisplay VersionDisplay VersionDisplay Version
Supply Current: Max. 10 mA Max. 30 mA
Power Requirements: 10 to 30 Vdc for 4 to 20 mA output 15 to 30 Vdc for 4 to 20 mA output and no signal output
11 to 30 Vdc for 0 to 5 Vdc output 11 to 30 Vdc for 0 to 5 Vdc output
13 to 32 Vdc for 0 to 10 Vdc output 13 to 30 Vdc for 0 to 10 Vdc output
Electrical Connections: Code B Bendix® connector
(See page 11 for Code P Pigtail 6 ft long
full list) Code D 15-pin HD D-sub connector
Code K 9-pin D-sub
Code A 4 ft pigtail with AMP® connector (3 pin)
Code G 4 ft pigtail with AMP® connector (4 pin)
Code H 6 inch pigtail with Molex® connector
Electrical Protection: Reverse polarity for power connections
Optional DisplayOptional DisplayOptional DisplayOptional DisplayOptional DisplayDigits: N/A -xxx to 1xxx
Type: N/A 7 Segment Red LED
Polarity: N/A Automatic (-) Display
Over Pressure Reading Trigger: N/A 110% full scale ± 5% full scale (Display reading: 1---)
Display Accuracy: N/A ±-0.25% of Rdg ± 1 Count for psi
(excluding transducer output) N/A ± - 0.25% of Rdg ± 5 Count for kPa
Character Size: N/A 0.30” height
kPa/psi Switch: N/A Yes
Rotatable: N/A Continuous rotation covering 4 quadrants
Zero Pot: N/A Yes
Zero Pot Adj. Screwdriver: N/A 1-1.2 mm flat type
Approvals and ComplianceApprovals and ComplianceApprovals and ComplianceApprovals and ComplianceApprovals and ComplianceFM Approval: Non-Incendive for use in Class I, Div II Groups A, B, C and D Hazardous Applications Excludes 0 to 10 Vdc and 15-pin HD D-Sub connector configurations, GI/integrated display pending
EMC: Compliant to EU Directive 2004/108/EC
RoHS: Compliant to EU Directive 2002/95/EC
9
PrPrPrPrProduct Dimensions (Standaroduct Dimensions (Standaroduct Dimensions (Standaroduct Dimensions (Standaroduct Dimensions (Standard Cond Cond Cond Cond Configurfigurfigurfigurfigurations)ations)ations)ations)ations)
Shown are just a few of the most common configurations of the SolidSense II® pressure transducers.The SolidSense II pressure transducers are available in over 40 configurations.For more information and a complete selection of configurations available see the Brooks Instrument Installation and Operation Manual“XXXXX-PR-PR-PR-PR-PR-SolidSense II-PT-SolidSense II-PT-SolidSense II-PT-SolidSense II-PT-SolidSense II-PT-eng-eng-eng-eng-eng” by visiting our website at www.BrooksInstrument.com or contact your nearest Brooks customer servicerepresentative for assistance.
NO. 4
VCR SWIVEL FEMALE PIGTAILGFDXXXXPSFFITTING A333124002
CABLE ME0521302-001
PIGTAIL
.84 [21.33]
3.40 [86.36]
PIGTAIL
NO. 4
VCR SWIVEL MALE PIGTAILGFDXXXXPSMFITTING A333124001
CABLE ME0521302-001
.84 [21.33]
4.00 [101.6]
W-SEAL PigtailGFDXXXXP5WFITTING A333366001
1.53 [38.97]
3.88 [98.55]
.84 [21.33]
CABLE ME0521302-001
PIGTAIL.84 [21.33]
VCR FIXED MALETHRUTUBE PIGTAILGFFXXXXPVMFITTING A333125004
2.24 [56.90]
3.36 [85.40]
CABLE ME0521302-001
BENDIX
TUBE STUB/TUBE STUBTHRUTUBE BENDIXGFFXXXXB4TFITTING A333125001
.84 [21.33]
1.85 [46.98]
3.23 [82.04]
.31 [7.92]
2X .42 [10.79]
2X .25 [6.35]
TUBE STUB/TUBE STUBTHRUTUBE PIGTAILGFFXXXXP4TFITTING A333125001
PIGTAIL
1.85 [46.98]
.84 [21.33]
3.36 [85.40]
.31 [7.92]
2X .42 [10.79]
2X .25 [6.35]
CABLE ME0521302-001
VCR SWIVEL FEMALE BENDIXGFDXXXXBSFFITTING A333124002
NO. 4
BENDIX
.84 [21.33]
3.30 [83.86]
1 1/8" C-SEAL W/AMP ON PIGTAILGFDXXXXMCS
FITTING A333127001
CABLE ME0521302-001
.84 [21.33]
1.12 [28.57]
3.51 [89.15]
PIGTAIL
VCR SWIVEL MALE BENDIXGFDXXXXBSMFITTING A333124001
BENDIX
NO. 4
.84 [21.33]
3.89 [98.84]
10
Optional Cables Optional Cables Optional Cables Optional Cables Optional Cables AAAAAvailable for the SolidSense II Prvailable for the SolidSense II Prvailable for the SolidSense II Prvailable for the SolidSense II Prvailable for the SolidSense II Pressuressuressuressuressure e e e e TTTTTrrrrransducersansducersansducersansducersansducersCableCableCableCableCable CableCableCableCableCable Transducer ElectricalTransducer ElectricalTransducer ElectricalTransducer ElectricalTransducer Electrical TransducerTransducerTransducerTransducerTransducerPart NumberPart NumberPart NumberPart NumberPart Number DescriptionDescriptionDescriptionDescriptionDescription Cable lengthCable lengthCable lengthCable lengthCable length Connector RequiredConnector RequiredConnector RequiredConnector RequiredConnector Required OutputOutputOutputOutputOutput
EL0001965104 Cable w/ four pin female Bendix connector to connect to transducer;flying leads on opposite end for power connection 10ft. 4 pin male Bendix 4-20 mA
EL0001965105 Cable w/ four pin female Bendix connector to connect to transducer;flying leads on opposite end for power connection 25ft. 4 pin male Bendix 4-20 mA
PrPrPrPrProduct Dimensions (Optional Display LR056)oduct Dimensions (Optional Display LR056)oduct Dimensions (Optional Display LR056)oduct Dimensions (Optional Display LR056)oduct Dimensions (Optional Display LR056)
The SolidSense II pressure transducer is available with an optional display: Model LR056, for details on this displaysee DS-PR-LR056-eng
Visit the Brooks Instrument website for product documentation at: www.BrooksInstrument.com/Manuals.
LR056Pressure
TransducerDisplay
Dimensions
Local display option for SolidSense II with Bendix connector and 4-20 mA output
9999
PrPrPrPrProduct Dimensions (GID/GIF Options)oduct Dimensions (GID/GIF Options)oduct Dimensions (GID/GIF Options)oduct Dimensions (GID/GIF Options)oduct Dimensions (GID/GIF Options)
11
Model CodeModel CodeModel CodeModel CodeModel Code
SampleSampleSampleSampleSampleModel CodeModel CodeModel CodeModel CodeModel Code
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption DescriptionI.I.I.I.I. Base Model Code GFGFGFGFGF Pressure Transducer
GIGIGIGIGI Pressure Transducer with integrated display
II.II.II.II.II. Body Type DDDDD Dead EndFFFFF Flow Through
III.III.III.III.III. PSI 0000000000 300101010101 1000202020202 250X2X2X2X2X2 2350505050505 5001010101010 10002525252525 25003030303030 30004545454545 456060606060 601515151515 1500 Torr
IV.IV.IV.IV.IV. Pressure Reference AAAAA Absolute, psiCCCCC Compound, psiGGGGG Gauge, psiEEEEE Absolute, mPa/kPaRRRRR Compound, mPa/kPaDDDDD Gauge, mPa/kPaBBBBB Absolute, BarPPPPP Compound, BarSSSSS Gauge, BarTTTTT Absolute Torr
V.V.V.V.V. Output 33333 0.00 to 10.00 Vdc44444 4 to 20 mA55555 0.05 to 5.05 Vdc66666 0.2 to 5.2 Vdc77777 2 to 10 Vdc88888 No signal output (GI model with display only)
VI.VI.VI.VI.VI. Electrical Connection BBBBB Bendix® ConnectorPPPPP 6 ft (2m) PigtailDDDDD 15 Pin HD D-Sub ConnectorEEEEE 9 inch Pigtail with 15 Pin (Standard) D-Sub Connector
M+M+M+M+M+ 5 inch (0.127m) Pigtail with AMP® Connector (4-pin)JJJJJ Bendix® with Jumper B-D (Offered with 4-20 mA only)LLLLL 10 ft (3m) PigtailRRRRR 8 inch Pigtail with AMP® Connector (4-pin)NNNNN 16.5 ft cable with Bendix® Type (Bayonet)V+V+V+V+V+ 18 inch Pigtail with 6-pin Molex® ConnectorCCCCC 6 ft (2m) Pigtail with 9-pin D Connector
G+G+G+G+G+ 4 ft Pigtail with AMP® Connector (4-pin)H+H+H+H+H+ 6 inch Pigtail with Molex® ConnectorKKKKK 9-pin D-Sub
A+A+A+A+A+ 4 ft Pigtail with AMP® Connector (3-pin)F+F+F+F+F+ 8 inch Pigtail with AMP® Connector (3-pin)Q+Q+Q+Q+Q+ M12 4-pin Male ConnectorSSSSS 2m (79”) Pigtail with 9-Pin D Connector
Z+Z+Z+Z+Z+ 36 inch Pigtail ith Bendix® Connector (Bayonet)
VII.VII.VII.VII.VII. Fittings 4S4S4S4S4S Tube Weld Stub 1/4” O.D. (GFD Only)*CS+CS+CS+CS+CS+ Surface Mount, 1.125” C-Seal, Standard (GFD & GID Only)CHCHCHCHCH Surface Mount, 1.5” C-Seal, High Flow K1H (GFD Only)SCSCSCSCSC Surface Mount, 1.5” C-Seal (GFD Only)5W5W5W5W5W Surface Mount, 1.5” W-Seal (GFD Only)4W4W4W4W4W Surface Mount, 1.125” W-Seal (GFD Only)CD+CD+CD+CD+CD+ Surface Mount, 1.125” C-Seal, 0.5” longer gland (GFD & GID Only)NTNTNTNTNT 1/4” NPT (GFD only)
VM+VM+VM+VM+VM+ Face Seal, fixed male (x2 on Duncan T for GFF) (GFF & GIF Only)VSVSVSVSVS Face Seal, fixed male/swivel female on Duncan T (GFF Only)
SM+SM+SM+SM+SM+ Face Seal, swivel male (x2 on Duncan T for GFF)SFSFSFSFSF Face Seal, swivel female (x2 on Duncan T for GFF)4T4T4T4T4T Duncan T, 1/4” Tube Weld Stub (GFF Only)*3T3T3T3T3T Duncan T, 3/8” Tube Weld Stub (GFF Only)*3M3M3M3M3M Duncan T, 3/8” with Face Seal, swivel male (GFF Only)2T2T2T2T2T Duncan T, 1/2” Tube Weld Stub (GFF Only)*CTCTCTCTCT Tube Stub, 3/8” OD (Suitable for compression joint) (x2 on Union T for GFF)(GFD & GFF)
VIII.VIII.VIII.VIII.VIII. Special Option RRRRR Integrated Display Removed (For base model GI only)
* Tube stubs (4S, 4T, 3T and 2T) are not suitable for compression joint. Use CT for compression joint.GID/GIF Integrated Display options are only available with the fittings and connectors noted with “+”.
IIIII IIIIIIIIII IIIIIIIIIIIIIII IVIVIVIVIV VVVVV VIVIVIVIVI VIIVIIVIIVIIVII VIIIVIIIVIIIVIIIVIII
GFGFGFGFGF FFFFF 0202020202 CCCCC 44444 PPPPP SFSFSFSFSF
12
BrBrBrBrBrooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Support
TRADEMARKSAMP ......................................................................................... Tyco ElectronicsBendix ..................................................................................... Amphenol Corp.Brooks ........................................................................... Brooks Instrument, LLCMolex ............................................................................................... Molex Inc.SolidSense II .................................................................. Brooks Instrument, LLC
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstandingservice and support to back it up. We operate first class repair facilities located around the world to provide rapid response andsupport. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs andrecalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
STSTSTSTSTARARARARARTTTTT-UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE AND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRATIONTIONTIONTIONTION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this servicecan be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.
CUSTCUSTCUSTCUSTCUSTOMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS AND AND AND AND AND TRAININGTRAININGTRAININGTRAININGTRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESKHELP DESKHELP DESKHELP DESKHELP DESK
In case you need technical assistance:Americas 1 888 554 FLOWEurope +31 (0) 318 549 290Asia +81 (0) 3 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
1
The Brooks® Sho-RateTM Series glass tube variable area flow meter has been the industrystandard glass tube variable area meter for decades. This glass tube meter is ideal for avariety of gas and liquid applications. These meters are particularly suited for purgeapplications. The base configuration uses a borosilicate glass tube installed in analuminum frame with 316SS end blocks, adaptors, and valve. Additional materialoptions, valve options, and flow controllers are available to provide the appropriateconfiguration for a wide variety of applications.
• Standard direct read scales on tube for all fluids and fluid conditions (user selected)• Standard millimeter scales with flow curves for all fluids and fluid conditions (user
selected)• Scale length (approximate) 65mm, 150mm• Magnifier built into front shield• Flowmeter options:
Multiple fitting adapters for all world areasNo valve, cartridge valve and precision control valveInlet & outlet valvesIntegral flow controller, upstream & downstreamMultiple connection fittings to fit all applicationsMultiple approval certifications for world wide usage
Data Sheet
Sho-RateTM
Models 1350G & 1355GVariable Area
OverviewOverviewOverviewOverviewOverview
PrPrPrPrProduct Featuroduct Featuroduct Featuroduct Featuroduct Featureseseseses
DS-VA-1350G-engApril, 2016
Sho-RateTM 1350G & 1355G Series
Low Flow Glass TubeFlowmeters
2
FeaturFeaturFeaturFeaturFeatures and Benefitses and Benefitses and Benefitses and Benefitses and Benefits
Optional Optional Optional Optional Optional VVVVValves for Inlet or Outletalves for Inlet or Outletalves for Inlet or Outletalves for Inlet or Outletalves for Inlet or Outlet• Cartridge III Valves• NRSTM (Non-Rising Stem)• Integral Flow Controllers
ThrThrThrThrThreaded eaded eaded eaded eaded JacJacJacJacJack Scrk Scrk Scrk Scrk Screwewewewew• Tubes sealed on compression gasket
Metering Metering Metering Metering Metering TTTTTubesubesubesubesubes• Heavy-wall, precision bore• Borosilicate glass• Removeable without
disconnnecting instrument
InInInInInterterterterterccccchangeable hangeable hangeable hangeable hangeable TTTTTubes and Floatsubes and Floatsubes and Floatsubes and Floatsubes and Floatswith Dirwith Dirwith Dirwith Dirwith Direct Reading (DR) Scales onect Reading (DR) Scales onect Reading (DR) Scales onect Reading (DR) Scales onect Reading (DR) Scales onthe the the the the TTTTTubeubeubeubeube• Allows users to change ranges as
the application dictates• DR Scale on Tube is determined
by the user; based on specificapplication needs
• Eliminates reading errorsintroduced by detached scales;resulting in a more accurateindication of flow
Rugged, Single Piece FrRugged, Single Piece FrRugged, Single Piece FrRugged, Single Piece FrRugged, Single Piece Frame Constructioname Constructioname Constructioname Constructioname Construction
InInInInIntegrtegrtegrtegrtegral Float Stopsal Float Stopsal Float Stopsal Float Stopsal Float Stops• Prevent loss of float during tube
removal
Clear PClear PClear PClear PClear PolycarbonateolycarbonateolycarbonateolycarbonateolycarbonateFFFFFaceshieldaceshieldaceshieldaceshieldaceshield
• Built-in magnifier for easierfloat and scale reading
Self Self Self Self Self Aligning BlocAligning BlocAligning BlocAligning BlocAligning Blocksksksksks• Allows for easier tube alignment and
replacement
3
1350G1350G1350G1350G1350G 1355G1355G1355G1355G1355G
PrPrPrPrProduct Specificationsoduct Specificationsoduct Specificationsoduct Specificationsoduct Specifications
PerformancePerformancePerformancePerformancePerformanceAccuracyAccuracyAccuracyAccuracyAccuracy ±5% at reference conditions ± 3% at reference conditions
RepeatabilityRepeatabilityRepeatabilityRepeatabilityRepeatability 0.25% F.S.
Pressure/TemperaturePressure/TemperaturePressure/TemperaturePressure/TemperaturePressure/Temperature 200 psig (33°F - 250°F) / 13.8 bar (1°C-121°C)
Materials of ConstructionMaterials of ConstructionMaterials of ConstructionMaterials of ConstructionMaterials of Construction Borosilicate glass, Brass, Aluminum, 316 Stainless Steel, Clear Polycarbonate,Milk White Polycarbonate, Teflon®
End Block OptionsEnd Block OptionsEnd Block OptionsEnd Block OptionsEnd Block Options Stainless Steel and Brass
Elastomer SealsElastomer SealsElastomer SealsElastomer SealsElastomer Seals Viton® fluoroelastomers, Teflon®, Buna, Kalrez® perfluoroelastomers
Float MaterialsFloat MaterialsFloat MaterialsFloat MaterialsFloat Materials Glass, Sapphire, Stainless Steel, Carboloy®, Tantalum
Connection MaterialsConnection MaterialsConnection MaterialsConnection MaterialsConnection Materials Stainless Steel
Connection OptionsConnection OptionsConnection OptionsConnection OptionsConnection Options 1/8” NPT (w/wo locknuts)1/4” NPT (w/wo locknuts)
1/8” Compression (w/wo locknuts)1/4” Compression (w/wo locknuts)
6 mm Compression (w/wo locknuts)1/4” RC (w/wo locknuts)3/8” RC (w/wo locknuts)
1/4” VCR®
1/4” ID HoseSwagelok® Converters
DimensionsDimensionsDimensionsDimensionsDimensions See Dimension Drawings
Alarm AvailabilityAlarm AvailabilityAlarm AvailabilityAlarm AvailabilityAlarm Availability (coming soon)
Valve OptionsValve OptionsValve OptionsValve OptionsValve Options Cartridge III Valve and NRSTM
Valve MaterialsValve MaterialsValve MaterialsValve MaterialsValve Materials Stainless Steel
Flow ControllerFlow ControllerFlow ControllerFlow ControllerFlow Controller Yes
CertificationsCertificationsCertificationsCertificationsCertifications International Calibration Certificate (ICC)CRN
Pressure Equipment Directive (97/23/EC)RoHS (II)
REACH (coming soon)Materials (2.2)
4
PrPrPrPrProduct Specifications - Capacities; 1350G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1350G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1350G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1350G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1350G, Rib Guided, Spherical Floats
Models 1350G/1355G Models 1350G/1355G Models 1350G/1355G Models 1350G/1355G Models 1350G/1355G TTTTTube and Float Code; Decaled Scale Option, 7th, 8th & 9th Digitsube and Float Code; Decaled Scale Option, 7th, 8th & 9th Digitsube and Float Code; Decaled Scale Option, 7th, 8th & 9th Digitsube and Float Code; Decaled Scale Option, 7th, 8th & 9th Digitsube and Float Code; Decaled Scale Option, 7th, 8th & 9th Digits
SevenSevenSevenSevenSeventh Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Configurfigurfigurfigurfigurationationationationation
CodeCodeCodeCodeCode Model 1350 Model 1350 Model 1350 Model 1350 Model 1350 TTTTTubeubeubeubeube Model 1355 Model 1355 Model 1355 Model 1355 Model 1355 TTTTTubeubeubeubeube
A R-2-15-A GB R-2-15-B GC R-2-15-C GD R-2-15-D GF R-6-15-B GG R-2-65-A G R-2-15-AAAA GH R-2-65-B GJ R-2-65-C GK R-2-65-D GL R-6-65-A GM R-6-65-B GN No Tube No Tube
Eighth and NinEighth and NinEighth and NinEighth and NinEighth and Ninth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Conth Digit in Model Code, for Scale Configurfigurfigurfigurfigurationationationationation
Decal Scale InscriptionDecal Scale InscriptionDecal Scale InscriptionDecal Scale InscriptionDecal Scale Inscription
MeterMeterMeterMeterMeter FloatFloatFloatFloatFloat MMMMMMMMMM LinearLinearLinearLinearLinear CustomCustomCustomCustomCustom PPPPPererererercencencencencentttttAccurAccurAccurAccurAccuracyacyacyacyacy MaterialMaterialMaterialMaterialMaterial ScaleScaleScaleScaleScale ScaleScaleScaleScaleScale DecalDecalDecalDecalDecal ScaleScaleScaleScaleScale
StandarStandarStandarStandarStandarddddd Glass 1A 2A 3A 4A(1350-10%) Stainless Steel 1B 2B 3B 4B(1355-5%) Sapphire 1C 2C 3C 4C
Carboloy 1D 2D 3D 4DTantalum 1E 2E 3E 4E
CalibrCalibrCalibrCalibrCalibratedatedatedatedated Glass 1G 2G 3G 4G(1350-5%) Stainless Steel 1H 2H 3H 4H(1355-2% Sapphire 1J 2J 3J 4J
Carboloy 1K 2K 3K 4KTantalum 1L 2L 3L 4L
*Note: Code for No Float/No Scale = “ZZ”
Capacities - Rib Guide Capacities - Rib Guide Capacities - Rib Guide Capacities - Rib Guide Capacities - Rib Guide TTTTTubes, Spherical Floats for use with 1350G Series Onlyubes, Spherical Floats for use with 1350G Series Onlyubes, Spherical Floats for use with 1350G Series Onlyubes, Spherical Floats for use with 1350G Series Onlyubes, Spherical Floats for use with 1350G Series OnlyMeterMeterMeterMeterMeter TTTTTubeubeubeubeube FloatFloatFloatFloatFloat WWWWWateraterateraterater AirAirAirAirAirSizeSizeSizeSizeSize No.No.No.No.No. MaterialMaterialMaterialMaterialMaterial GPHGPHGPHGPHGPH LPHLPHLPHLPHLPH SCFHSCFHSCFHSCFHSCFH NLPHNLPHNLPHNLPHNLPH
Glass 0.010 0.041 0.12 3.2Sapphire 0.021 0.079 0.19 5.0
R-2-65-A G Stainless Steel 0.049 0.18 0.37 9.8Carboloy 0.10 0.36 0.65 17Tantalum 0.10 0.40 0.71 18
Glass 0.014 0.06 0.16 4.4Sapphire 0.028 0.10 0.25 6.7
R-2-65-B G Stainless Steel 0.07 0.25 0.48 12Carboloy 0.12 0.48 0.80 21
2 Tantalum 0.14 0.53 0.87 22
Glass 0.12 0.47 0.99 26Sapphire 0.22 0.83 1.3 35
R-2-65-C G Stainless Steel 0.41 1.5 2.1 55Carboloy 0.65 2.4 3.1 81Tantalum 0.70 2.6 3.3 87
Glass 0.68 2.5 3.9 100Sapphire 0.99 3.7 5.1 130
R-2-65-D G Stainless Steel 1.6 6.3 7.9 200Carboloy 2.5 9.5 11 290Tantalum 2.7 10.0 12 310
Glass 2.4 9.2 14 370Sapphire 3.6 13 18 480
R-6-65-A G Stainless Steel 6.0 22 27 710Carboloy 8.9 33 38 1000Tantalum 9.5 36 41 1000
6 Glass 9.9 37 52 1300Sapphire 14.0 53 67 1700
R-6-65-B G Stainless Steel 22.0 85 97 2500Carboloy 32.0 120 130 3500Tantalum 34.0 130 140 3700
Air flows are at 14.7 psia and 70 Degrees F/1.01 Bar and 21.1 Degrees C
5
PrPrPrPrProduct Specifications - Capacities; 1355G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1355G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1355G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1355G, Rib Guided, Spherical Floatsoduct Specifications - Capacities; 1355G, Rib Guided, Spherical Floats
Capacities - Rib Guide Tubes, Spherical Floats for use with 1355G Series OnlyMeter Tube Float Maximum Flow Rate*Size No. Material Water (CC/Min) Air
Glass 0.59 50 SCC/MSapphire 1.1 79 SCC/M
R-2-15-AAAA Stainless Steel 2.6 150 SCC/MCarboloy 5.2 280 SCC/MTantalum 5.8 310 SCC/M
Glass 5.5 370 SCC/MSapphire 10 520 SCC/M
R-2-15-D Stainless Steel 20 830 SCC/MCarboloy 34 1200 SCC/MTantalum 36 1300 SCC/M
Glass 17 0.82 SLPMSapphire 26 1.0 SLPM
2 R-2-15-A Stainless Steel 46 1.6 SLPMCarboloy 70 2.4 SLPMTantalum 75 2.5 SLPM
Glass 53 2.3 SLPMSapphire 80 3.0 SLPM
R-2-15-B Stainless Steel 130 4.6 SLPMCarboloy 200 6.7 SLPMTantalum 210 7.1 SLPM
Glass 90 4.0 SLPMSapphire 130 5.2 SLPM
R-2-15-C Stainless Steel 220 7.9 SLPMCarboloy 340 11 SLPMTantalum 360 11 SLPM
Glass 210 9.5 SLPMSapphire 320 12 SLPM
R-6-15-A Stainless Steel 540 18 SLPMCarboloy 790 25 SLPMTantalum 840 26 SLPM
6 Glass 560 23 SLPMSapphire 820 29 SLPM
R-6-15-B Stainless Steel 1300 43 SLPMCarboloy 1900 60 SLPMTantalum 2000 63 SLPM
Air flows are at 14.7 psia and 70 Degrees F/1.01 Bar and 21.1 Degrees C
6
PrPrPrPrProduct Dimensions - Model 1350G and 1355Goduct Dimensions - Model 1350G and 1355Goduct Dimensions - Model 1350G and 1355Goduct Dimensions - Model 1350G and 1355Goduct Dimensions - Model 1350G and 1355G
Model 1350G
Model 1355G
7
PrPrPrPrProduct Dimensions - Model 1350G/1355G with Flow Conoduct Dimensions - Model 1350G/1355G with Flow Conoduct Dimensions - Model 1350G/1355G with Flow Conoduct Dimensions - Model 1350G/1355G with Flow Conoduct Dimensions - Model 1350G/1355G with Flow Contrtrtrtrtrollerollerollerolleroller
Model 1350G/1355G withModel 8800 Flow Controller on Inlet
Model 1350G/1355G withModel 8900 Flow Controller on Outlet
8
1. Model2. Size, connections, type3. Quantity required4. Fluid5. Minimum, normal and maximum operating temperature6. Minimum, normal and maximum operating pressure (inlet and outlet)7. Minimum, normal and maximum flow rate8. Materials of construction
a. End fittingsb. Side platesc. Bezeld. Elastomers
9. Fluid10. Fluid specific gravity11. Fluid viscosity12. Unusual system conditions (For ranges and pressure drops other than those listed, consult factory).13. Optional equipment
a. Valve type and locationb. Flow controller and type
OrOrOrOrOrdering Indering Indering Indering Indering Information - Referformation - Referformation - Referformation - Referformation - Reference Model Code ence Model Code ence Model Code ence Model Code ence Model Code TTTTTablesablesablesablesables
9
Model CodeModel CodeModel CodeModel CodeModel Code
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption DescriptionI.I.I.I.I. Basic Model Number 13501350135013501350 65mm Sho-Rate Size 1-6 Flow Indicator
13551355135513551355 150mm Sho-Rate Size 1-6 Flow Indicator
II.II.II.II.II. Model Revision Level GGGGG Revision G
III.III.III.III.III. End Block Material AAAAA 316 stainless steelBBBBB Brass
IV.IV.IV.IV.IV. Tube 1350 1355AAAAA - R-2-15-A GBBBBB - R-2-15-B GCCCCC - R-2-15-C GDDDDD - R-2-15-D GEEEEE - R-6-15-A GFFFFF - R-6-15-B GGGGGG R-2-65-A G R-2-15-AAAA GHHHHH R-2-65-B GJJJJJ R-2-65-C GKKKKK R-2-65-D GLLLLL R-6-65-A GMMMMM R-6-65-B GN*N*N*N*N* No Tube
*Notes: The options indicated are not available with a CRN certification.
V.V.V.V.V. Float & Direct Read Scale Float Accuracy Scale InscriptionSelection ZZ**ZZ**ZZ**ZZ**ZZ** None N/A N/A
1A1A1A1A1A *GLASS STD-50(10%), 55(5%) MM1B1B1B1B1B *ST.STL STD-50(10%), 55(5%) MM1C1C1C1C1C *SAPPHIRE STD-50(10%), 55(5%) MM1D1D1D1D1D *CARBOLOY STD-50(10%), 55(5%) MM1E1E1E1E1E *TANTALUM STD-50(10%), 55(5%) MM1G1G1G1G1G GLASS CALIB-50(5%), 55(3%) MM1H1H1H1H1H ST.STL CALIB-50(5%), 55(3%) MM1J1J1J1J1J SAPPHIRE CALIB-50(5%), 55(3%) MM1K1K1K1K1K CARBOLOY CALIB-50(5%), 55(3%) MM1L1L1L1L1L TANTALUM CALIB-50(5%), 55(3%) MM2A2A2A2A2A *GLASS STD-50(10%), 55(5%) LINEAR2B2B2B2B2B *ST.STL STD-50(10%), 55(5%) LINEAR2C2C2C2C2C *SAPPHIRE STD-50(10%), 55(5%) LINEAR2D2D2D2D2D *CARBOLOY STD-50(10%), 55(5%) LINEAR2E2E2E2E2E *TANTALUM STD-50(10%), 55(5%) LINEAR2G2G2G2G2G GLASS CALIB-50(5%), 55(3%) LINEAR2H2H2H2H2H ST.STL CALIB-50(5%), 55(3%) LINEAR2J2J2J2J2J SAPPHIRE CALIB-50(5%), 55(3%) LINEAR2K2K2K2K2K CARBOLOY CALIB-50(5%), 55(3%) LINEAR2L2L2L2L2L TANTALUM CALIB-50(5%), 55(3%) LINEAR3A3A3A3A3A *GLASS STD-50(10%), 55(5%) CUSTOM DECAL3B3B3B3B3B *ST.STL STD-50(10%), 55(5%) CUSTOM DECAL3C3C3C3C3C *SAPPHIRE STD-50(10%), 55(5%) CUSTOM DECAL3D3D3D3D3D *CARBOLOY STD-50(10%), 55(5%) CUSTOM DECAL3E3E3E3E3E *TANTALUM STD-50(10%), 55(5%) CUSTOM DECAL3G3G3G3G3G GLASS CALIB-50(5%), 55(3%) CUSTOM DECAL3H3H3H3H3H ST.STL CALIB-50(5%), 55(3%) CUSTOM DECAL3J3J3J3J3J SAPPHIRE CALIB-50(5%), 55(3%) CUSTOM DECAL3K3K3K3K3K CARBOLOY CALIB-50(5%), 55(3%) CUSTOM DECAL3L3L3L3L3L TANTALUM CALIB-50(5%), 55(3%) CUSTOM DECAL4A4A4A4A4A *GLASS STD-50(10%), 55(5%) PERCENT SCALE4B4B4B4B4B *ST.STL STD-50(10%), 55(5%) PERCENT SCALE4C4C4C4C4C *SAPPHIRE STD-50(10%), 55(5%) PERCENT SCALE4D4D4D4D4D *CARBOLOY STD-50(10%), 55(5%) PERCENT SCALE4E4E4E4E4E *TANTALUM STD-50(10%), 55(5%) PERCENT SCALE4G4G4G4G4G GLASS CALIB-50(5%), 55(3%) PERCENT SCALE4H4H4H4H4H ST.STL CALIB-50(5%), 55(3%) PERCENT SCALE4J4J4J4J4J SAPPHIRE CALIB-50(5%), 55(3%) PERCENT SCALE4K4K4K4K4K CARBOLOY CALIB-50(5%), 55(3%) PERCENT SCALE4L4L4L4L4L TANTALUM CALIB-50(5%), 55(3%) PERCENT SCALE
*Accuracy for air and water in the preceding capacity tables will be STD-50(5%), 55(3%).** Use this code (ZZ) only when Tube Code above is “N”
10
Model Code (ConModel Code (ConModel Code (ConModel Code (ConModel Code (Continued)tinued)tinued)tinued)tinued)
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption DescriptionVI.VI.VI.VI.VI. Tube Packing and Tube Packing O-ring Meter/Valve
O-ring Materials AAAAA Buna BunaBBBBB Viton VitonDDDDD Viton EPREEEEE Viton KalrezFFFFF Teflon BunaGGGGG Teflon VitonJJJJJ Teflon EPRKKKKK Teflon KalrezLLLLL EPR EPRMMMMM Butyl ButylNNNNN No Packing BunaPPPPP No Packing VitonRRRRR No Packing EPRSSSSS No Packing KalrezTTTTT No Packing Butyl
Note: If valve assy is not required for a specific model number, select the proper code for the O-ring material of the Sho-Rate.
VII.VII.VII.VII.VII. End Fitting Composition Fitting Material Connection Size and TypeCCCCC 316SS 1/8" NPT*F*F*F*F*F 316SS 1/8" Thd.W/LocknutJJJJJ 316SS 1/4" NPT
* / ***K* / ***K* / ***K* / ***K* / ***K KYNAR 1/4" NPT*N*N*N*N*N 316SS 1/4" Thd.W/LocknutRRRRR 316SS 1/8" Compression*U*U*U*U*U 316SS 1/8" Compression w/locknut (2 pc design)WWWWW 316SS 1/4" F-Rc Thd w/LocknutXXXXX 316SS 1/4" Compression*1*1*1*1*1 316SS 1/4" Compression w/locknut (2 pc design)33333 316SS 3/8" F-Rc Thd w/Locknut
***4***4***4***4***4 316SS 1/4" I.D.Hose*6*6*6*6*6 316SS Integral 5/16-24 thd.*7*7*7*7*7 316SS 1/4" VCR
***8***8***8***8***8 316SS 6mm thd*Not valid for controllers***The options indicated are not available with a CRN certification.
VIII.VIII.VIII.VIII.VIII. Valve Type AAAAA Valve PlugBBBBB NRS-316SS #1CCCCC NRS-316SS #2DDDDD NRS-316SS #3EEEEE NRS-316SS #4FFFFF NRS-316SS #5GGGGG NRS-316SS #6HHHHH NRS-316SS #7JJJJJ To Integrally Mounted 88/8900 316SS Flow Controller - Cartridge II/III Valve - Viton DiaphragmKKKKK To Integrally Mounted 88/8940 316SS Flow Controller - Cartridge II/III Valve - Viton DiaphragmLLLLL To Integrally Mounted 88/8900 Brass Flow Controller - Cartridge II/III Valve - Viton DiaphragmMMMMM To Integrally Mounted 88/8940 Brass Flow Controller - Cartridge II/III Valve - Viton DiaphragmNNNNN To Integrally Mounted 88/8900 316SS Flow Controller - Cartridge II/III Valve - Teflon DiaphragmPPPPP To Integrally Mounted 88/8940 316SS Flow Controller - Cartridge II/III Valve - Teflon DiaphragmQQQQQ To Integrally Mounted 88/8900 Brass Flow Controller - Cartridge II/III Valve - Buna DiaphragmRRRRR To Integrally Mounted 88/8940 Brass Flow Controller - Cartridge II/III Valve - Buna Diaphragm11111 To Integrally Mounted 88/8900 316SS Flow Controller - NRS - Viton Diaphragm22222 To Integrally Mounted 88/8940 316SS Flow Controller - NRS - Viton Diaphragm33333 To Integrally Mounted 88/8900 Brass Flow Controller - NRS - Viton Diaphragm44444 To Integrally Mounted 88/8940 Brass Flow Controller - NRS - Viton Diaphragm55555 To Integrally Mounted 88/8900 316SS Flow Controller - NRS - Teflon Diaphragm66666 To Integrally Mounted 88/8940 316SS Flow Controller - NRS - Teflon Diaphragm77777 To Integrally Mounted 88/8900 Brass Flow Controller - NRS - Buna Diaphragm88888 To Integrally Mounted 88/8940 Brass Flow Controller - NRS - Buna DiaphragmSSSSS Std. Valve Cavity - no valve assy or plugTTTTT Cartridge II/III Valve - Low Flow - 316SSUUUUU Cartridge II/III Valve - Med Flow - 316SSVVVVV Cartridge II/III Valve - HighFlow - 316SS
11
Model Code (ConModel Code (ConModel Code (ConModel Code (ConModel Code (Continued)tinued)tinued)tinued)tinued)
Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption DescriptionIX.IX.IX.IX.IX. Valve Cavity/Controller Location Valve/Controller Connection Orientation
& Connection Orientation Location Inlet Outlet11111 Inlet Back Back55555 Outlet Back Back99999 n/a Back Back
X.X.X.X.X. Accessories AAAAA NoneB*B*B*B*B* Bistable Alarm 1 InitiatorC*C*C*C*C* Bistable Alarm 2 InitiatorsD*D*D*D*D* Bistable Alarm 1 Initiator with I.S. Relays 240VE*E*E*E*E* Bistable Alarm 2 Initiators with I.S. Double Relays 240VF*F*F*F*F* Bistable Alarm 1 Initiator with I.S. Relay 120VG*G*G*G*G* Bistable Alarm 2 Initiators with I.S. Double Relays 120VHHHHH Aluminum Flush Bezel for Stainless MetersKKKKK Panel Mount Screws
*Notes: Not yet available. Release TBD
XI.XI.XI.XI.XI. Options AAAAA NoneBBBBB 316 Stainless Steel FrameCCCCC Baseplate (Aluminum)DDDDD No Brooks IdentificationEEEEE 316SS Frame & No Brooks IDFFFFF Baseplate & No Brooks IDGGGGG 316SS Frame & BaseplateHHHHH 316SS Frame & Baseplate & No Brooks IDJJJJJ Stainless Steel Tag & 316SS FrameKKKKK Stainless Steel Tag & Baseplate (Aluminum)LLLLL Stainless Steel Tag & no Brooks IDMMMMM Stainless Steel Tag & 316SS Frame & No Brooks IDNNNNN Stainless Steel Tag & Baseplate & No Brooks IDPPPPP Stainless Steel Tag & 316SS Frame & BaseplateQQQQQ Stainless Steel Tag & 316SS Frame & Baseplate & No Brooks IDRRRRR Stainless Steel TagS*S*S*S*S* Stainless Steel Float StopsT*T*T*T*T* 316SS Frame & Stainless Steel Float StopsU*U*U*U*U* 316SS Frame & Stainless Steel Float Stops & Stainless Steel Tag
*Notes: Not yet available. Release TBD
XII.XII.XII.XII.XII. Certifications AAAAA NoneBBBBB CRN CertificationCCCCC International Calibration Certification (10%-1350, 5%-1355)DDDDD Degrease for Oxygen Service (not MIL Spec)EEEEE CRN Cert & ICCFFFFF CRN Cert & Degrease for O2GGGGG Degrease for O2 & ICC
Sample Standard Model CodeSample Standard Model CodeSample Standard Model CodeSample Standard Model CodeSample Standard Model Code
IIIII IIIIIIIIII IIIIIIIIIIIIIII IVIVIVIVIV VVVVV VIVIVIVIVI VIIVIIVIIVIIVII VIIIVIIIVIIIVIIIVIII IXIXIXIXIX XXXXX XIXIXIXIXI XIIXIIXIIXIIXII
13501350135013501350 GGGGG GGGGG 1B1B1B1B1B FFFFF AAAAA CCCCC 22222 11111 AAAAA AAAAA AAAAA
12
BrBrBrBrBrooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Supportooks Service and Support
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service andsupport to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each locationutilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local
Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
STSTSTSTSTARARARARARTTTTT-UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE -UP SERVICE AND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRAAND IN-SITU CALIBRATIONTIONTIONTIONTION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality
Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under
in-situ conditions, and the results will be traceable to the relevant international quality standards.
CUSTCUSTCUSTCUSTCUSTOMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS OMER SEMINARS AND AND AND AND AND TRAININGTRAININGTRAININGTRAININGTRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESKHELP DESKHELP DESKHELP DESKHELP DESK
In case you need technical assistance:
Americas 1 888 554 FLOW
Europe +31 (0) 318 549 290
Asia +81 3 (0) 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
TRADEMARKSBrooks, NRS, Sho-Rate ..................................... Brooks Instrument, LLCAll other trademarks are the property of their respective owners.