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BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer...

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External Use BUILDING MOMENTUM Dr. Randhir Thakur EXECUTIVE VICE PRESIDENT, GENERAL MANAGER IN SILICON SYSTEMS GROUP
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Page 1: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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BUILDING MOMENTUM Dr. Randhir Thakur EXECUTIVE VICE PRESIDENT, GENERAL MANAGER

IN SILICON SYSTEMS GROUP

Page 2: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Safe Harbor and Other Information These presentations contain forward-looking statements, including those regarding our industry and business outlooks, growth opportunities, strategies, market positions, profitability and 2016 financial model. These statements are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied in our current views, including: uncertain global economic and industry conditions; demand for mobility products; customers’ new technology and capacity requirements; the concentrated nature of our customer base; Applied’s ability to (i) develop, deliver and support a broad range of products and expand its markets, (ii) achieve the objectives of operational initiatives, (iii) plan and manage resources and production capability, (iv) obtain and protect IP, (v) attract, motivate and retain key employees, and (vi) accurately forecast future operating and financial results, which depends on multiple assumptions; and other risks described in our most recent Form 10-Q. All forward-looking statements are based on management’s estimates, projections and assumptions as of July 8, 2013, and Applied undertakes no obligation to update any forward-looking statements.

The presentations also include non-GAAP adjusted financial measures. Reconciliations to GAAP measures are included in the slides, a copy of which is available on Applied’s Investor page at www.appliedmaterials.com.

Applied Materials, the Applied Materials logo, and other trademarks so designated as product names or services are trademarks of Applied Materials, Inc. Other names and brands are the property of third parties.

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Page 3: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Lead in TRANSISTOR inflections

Extend leadership in INTERCONNECT

Change the rules in PATTERNING and INSPECTION

Earlier and deeper customer collaboration enabled by

Precision Materials Engineering (PME) leadership

SSG STRATEGY

Page 4: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Mobility’s Implications for Semiconductor Equipment

4

THEN NOW

Litho-enabled 2D transistor Materials-enabled 3D transistor

Litho-enabled 2D NAND Materials-enabled 3D NAND

Conventional processes Selective material processes

Bulk dominates Interface engineering increasingly critical

Standalone tool Integrated processes on same tool

Materials

Materials

material

Interface engineering

Integrated

Page 5: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Transistors

Interconnect

3D NAND

Patterning

Mobility Inflections enabled by Applied’s “PME Solutions”

Functions and features

Battery life

Interface experience

Form factor

… at the right cost

3D, low-voltage, low leakage, new materials, atomic control of material interfaces

Resistance, capacitance, reliability

3D, precision dielectrics, conformal materials, high aspect ratio processes

Brightfield inspection, advanced materials

5

END USER BENEFIT

CUSTOMER CHALLENGES

OUR PME SOLUTIONS

Page 6: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Era of Precision Materials Engineering

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45nm 32nm 22nm 16nm 10nm

NEW MATERIALS will be the driver of technology migrations in advanced nodes

2X INCREASE IN NEW MATERIALS

Page 7: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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28 / 32 HKMG 16 / 14 FinFET Planar 2D 3D NAND

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Major inflections grow our opportunity 64-pairs

32-pairs

APPLIED’S SERVED MARKET

per 100K WSPM

+25 to 35% 3D NAND

+25 to 35% FOUNDRY

Page 8: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Leading in TRANSISTOR Inflections

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Epi Implant Thermal CVD PVD CMP

► Selective Epi films deliver speed

► Integrated PVD Metal Gate lowers power consumption

► Implant and Annealing products improve drive current

► Transistor complexity favors our sweet spot of material innovation

~$800M Incremental Revenue in 2016 vs. 2012 (assumes 2016 WFE of $37B)

#1 in All Market Segments*

*Source: Gartner

Mobility Longer Battery Life is Enabled by Our Products

Page 9: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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0

2

4

6

8

45nm 32/28nm 22/20nm 16/14nm 10nm

EPI S

TEPS

Epi Delivers Transistor Speed With Low Leakage

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Epi

Oxynitride High-k Metal Gate FinFET Selective Epi

4X INCREASE IN STEPS

► New Epi materials will be key driver for transistor speed beyond 20nm

► Revenue doubled in last 5 years with >80% share*

► >500 systems shipped and counting

► $250M incremental revenue in 2016

*Source: Gartner; Assumes 2016 WFE of $37B

Page 10: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Metal Gate Drives Low Leakage Transistors

0

2

4

6

8

10

32/28nm 22/20nm 16/14nm 10nm

MET

AL G

ATE

STEP

S

Planar Metal Gate

FinFET Metal Gate

► Industry’s only integrated PVD/ALD solution

► #1 in PVD with >75% share*

► >$600M cumulative revenue over next 3 years

Integrated process without air break improves performance

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8X INCREASE IN STEPS

*Source: Gartner; Assumes 2016 WFE of $37B

Page 11: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Selective Epi High-k

Metal Gate FinFET New Channel

Materials

Enabling the Transistor Roadmap

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2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018

Epi

Implant

Metal Gate

Transistor CMP >70%

WHERE APPLIED HAS

MARKET SHARE*

*Source: Gartner, Applied Materials

Page 12: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Extending Leadership in INTERCONNECT

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CVD Barrier & Low-k Etch PVD Copper Metal ALD Barrier Metal CVD Liner & Cap Copper Plating CMP

Mobility Low Resistance and Reliable Interconnect

► Integrated PVD/CVD/ALD processes lower wiring resistance and improve reliability

► Low-k dielectrics reduce power consumption and increase device speed

#1 in CVD, PVD, CMP* New wins in ETCH

*Source: Gartner

~$400M Incremental Revenue in 2016 vs. 2012 (assumes 2016 WFE of $37B)

Page 13: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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GROWTH IN WIRING LEVELS

NEW PROCESS STEPS

INTEGRATED BARRIER/SEED COMPLEXITY

Interconnect Growth Drivers

Selective Metal Cap Hardmask

Barrier-Seed

Local interconnect Intermediate Semi-Global

Global

Barrier-Seed

Intermediate Semi-Global

Global

Reflow Metal CVD Liner

ALD Barrier Advanced PVD PVD

TRANSISTOR DENSITY

RELIABILITY & PATTERNING

FILL & RELIABILITY

Page 14: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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+5 New Metal Deposition Steps in Production in 2014

► Industry’s first selective metal on integrated PVD/ALD/CVD system

► >5,000 Endura® systems

0

10

20

30

32/28nm 22/20nm 16/14nm 10nm

MET

AL D

EPO

SITI

ON

STE

PS

2X INCREASE IN STEPS

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Interconnect: Selective Metal Deposition

Page 15: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Strategy to Grow in Patterning and Inspection

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Defend core positions Defect review | High Aspect Ratio Etch | Patterning films

Win head-to-head battles Growing Foundry Etch and Inspection applications

Change the rules & win disruptive inflections 3D NAND | Selective Material Removal

R&D and

Talent

Increasing investments in

Page 16: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Changing the Rules in PATTERNING & INSPECTION

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Mobility More Functionality; Faster Time to Market

► Differentiated inspection tools accelerate yield ramp at advanced nodes

► CVD and Etch integrated processing enables patterning of dense structures

► Selective materials removal is a disruptive innovation

*Source: Gartner

~$400M Incremental Revenue in 2016 vs. 2012 (assumes 2016 WFE of $37B)

CVD PVD Etch Metrology Inspection Selective removal

#1 in Defect Review*

Gaining Brightfield share Winning most 3D NAND CVD and Etch DTOR

Page 17: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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New SEMVision® G6 system filters out nuisance defects to find the few that matter most to Device Performance and Yield

Extending Defect Review Leadership

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Sub-20nm nodes require new approaches to detect killer defects

Industry Benchmark Tool of Record at all leading edge customers

#1 in $250M market*

*Source: Gartner

Page 18: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Building Momentum in Brightfield Inspection

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30% Increase in Qualified Layers at Leading Customers

► Earning customer trust and expanding 20nm applications

► Gaining share in $1.5B market* - the largest inspection segment

► Record orders in Q2’13

*Source: Gartner forecast (Optical Patterned Wafer Inspection market size)

Page 19: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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PATTERNING ► New Etch and Hardmask steps

CVD STAIRCASE DEPOSITION ► New and slow multi-layer deposition

SACVD and HDPCVD ► New greenfield opportunity in leadership areas

3D NAND CVD and Etch Growth Opportunities

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SACVD, HDPCVD

CVD STAIRCASE DEPOSITION

PATTERNING ETCH

ALD, CVD, PATTERNING FILMS

Planar NAND

3D NAND

50% TAM INCREASE IN ETCH & CVD Shift from

Lithography to Deposition and Etch

>$500M Opportunity

per 100k wspm

Page 20: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Winning Staircase Patterning Etch

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► Differentiated pulsed plasma etching

► Precise step width control with in-situ measurement

► ~$150M growth opportunity per 100k wspm

Precise Step-Width Control with High Productivity

High Productivity Centris™ Mesa™ HIGH VALUE PROBLEMS

UNEVEN STEPS

OUR ETCH SOLUTIONS

STRAIGHT PROFILE EQUAL STEPS

UNLANDED CONTACTS

LANDED CONTACTS

TAPERED PROFILE

Page 21: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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3D NAND Etch and CVD Momentum

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CUSTOMER

A CUSTOMER

B CUSTOMER

C CUSTOMER

D

High Aspect Ratio Etch

Staircase Etch

Hardmask Deposition

Staircase Deposition

Development Tool of Record

Demo Engagement On-going

1st Gen 32 Pairs

>$500M New Market Opportunity

per 100k wspm

2nd Gen 64 Pairs

>$800M New Market Opportunity

per 100k wspm

Page 22: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Aspect Ratio 6:1 Post Etch: No issue After Wet Clean

► At small line width, wet clean causes pattern collapse and line bending

► Selective material removal displaces wet clean and enables patterning inflection

► Proven technologies to address up to $1B market in 2016

Won Majority of Selections

PATTERNING CHALLENGE Line bending and pattern collapse

WET CLEAN

OUR SOLUTION

Selective Material Removal is a Disruptive Innovation

Page 23: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Key Wins Ramping in Production Next Year

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TRANSISTOR

INTERCONNECT

PATTERNING & INSPECTION

► NMOS Epi ► Metal Gate PVD ► Flowable CVD

► Co-Implant Steps ► Metal Gate CMP

► Metal CVD ► Low-k CVD

► Brightfield Inspection

► Selective Material Removal

► 3D NAND Patterning Etch

► CVD Multi-layer Stack ► CVD Hardmask

Revenue Growth

20nm Foundry & 3D NAND

Epi & PVD Growth

Inspection & Etch Momentum

► Selective Treatment ► Foundry Etch

Page 24: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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TRANSISTOR

#1 in Epi #1 in Implant

#1 in RTP #1 in PVD #1 in CMP

~$800M

INTERCONNECT

#1 in PVD #1 in CVD #1 in CMP

New Metal CVD Steps New Dielectric Steps

~$400M

PATTERNING & INSPECTION

#1 in Defect Review Gaining Inspection Share

3D NAND Etch DTOR 3D NAND CVD DTOR

New Selective Removal

~$400M

Winning with Precision Materials Engineering Innovation

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+2 to 4pts WFE Share Gain

by 2016

2016 INCREMENTAL REVENUE FROM 2012 BASELINE*

*Assumes 2016 WFE of $37B

Page 25: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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Silicon Business is Transforming for Mobility War

We are the clear leader in Precision Materials Engineering with tremendous opportunity for growth

We are excited and more confident than ever to grow 2 to 4 points of WFE share

We are increasing investments in SSG, Products, Technology, and Customers

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Page 26: BUILDING MOMENTUM - Applied Materials€¦ · Steps in Production in 2014 ... to detect killer defects Industry Benchmark Tool of Record at all leading edge customers #1. in. $250M.

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