C08: Effect of on-chip magnetic shielding for TES microcalorimeters

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Cross Section. Au Abs. a. b. Ti / Au. Nb. SiO 2 membrane. Al. SiNx membrane. Si. C08: Effect of on-chip magnetic shielding for TES microcalorimeters. SII-182. a. TES calorimeter needs a magnetic shield to work stably. 350 µm. b. - PowerPoint PPT Presentation

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C08: Effect of on-chip magnetic shieldi C08: Effect of on-chip magnetic shieldi ng for ng for TES microcalorimeters TES microcalorimeters Y. Ishisaki, H. Kurabayashi, A. Hoshin o, T. Ohashi, T. Yoshino 2) , T. Hagihara 2) , K. Mitsu da 2) , , K. Tanaka 3) Department of Physics, Tokyo Metropolitan Univ. 2) ISAS/JAXA, 3) SII Nano-Technology 350 µm SII-182 a b SiNx membrane Al Nb Ti/Au Au Abs. b a ross Section Si SiO 2 membrane On-chip Mag shield Current TES calorimeter TES calorimeter needs a magnetic needs a magnetic shield shield to work stably. to work stably.

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Page 1: C08: Effect of on-chip magnetic shielding for TES microcalorimeters

C08: Effect of on-chip magnetic shielding for C08: Effect of on-chip magnetic shielding for TES microcalorimetersTES microcalorimeters

Y. Ishisaki, H. Kurabayashi, A. Hoshino, T. Ohashi,

T. Yoshino 2), T. Hagihara 2), K. Mitsuda 2),,

K. Tanaka 3)

Department of Physics, Tokyo Metropolitan Univ.

2) ISAS/JAXA, 3) SII Nano-Technology

350 µm

SII-182

SiNx membraneAl

Nb Ti/Au

Au Abs.ba

Cross Section

SiO2 membrane

On-chip Mag shieldCurrent

TES calorimeter needs TES calorimeter needs a magnetic shielda magnetic shieldto work stably.to work stably.

Page 2: C08: Effect of on-chip magnetic shielding for TES microcalorimeters

300T

6T0T

26T

300T

100T

SII-14b

SII-182

SII-14b(no shield)

SII-182On-chip shield

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C08: Effect of on-chip magnetic shielding for TES microcalorimeters

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