Calibration and Measurement of Micro Liquid Flow

Dr. Chun-Min SUCMS / ITRI

Calibration and Measurementof Micro Liquid Flow

APMP2011 / TCFF Workshop on Liquid Flow Calibration Facilities

77 3 Dec. 2011, Kobe, Japan

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Calibration and Measurement of Micro Liquid Flow

Chun-Min Su, Ph.D. CMS/ITRIDec. 03, 2011 @ Kobe, Japan

APMP 2011 TCFF Workshop

Copyright 2009 ITRI

Content

IntroductionMicro Flow Measurements Micro Liquid Flow Calibration

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nl/min l/min ml/min

Bio-Chip SystemsMicroarraysLab-on-a-ChipNano-Jet Tech

ChemistryMicro ReactorsSynthesis

Chip FabsEvaporatorsCoating Systems

Industrial Process TechnologyMixture ProcessesCooling SystemsGluing& Sealing Automation

Analytical Instruments (Bio/Med Tech)Pipetting / DispensingLiquid Chromatography & Mass Spectrometry

MedicalDrug Dosing (Disposable & Non-Disposable)Medical Compliance MonitoringDialysisAnesthesia

nl/min l/min ml/minnl/min l/min ml/min













Ranges of flow required for various areas and their applications Micro Liquid Flows

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Micronozzle (Aerospace)

Inkjet printers (Computer)Micro-pump (MEMS)

Lab-on-chip (Bio) Micro-array bio-chip (Bio) Portable Insulin Injector (Medical)

Microfluidics Applications



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The science and engineering of systems in which fluid behavior differs from conventional flow theory primarily due to the small length scale of the system. A collective noun, that is defined as the control and movement of microscopic quantities of fluids.

Quantity ~ nL - pL

Characteristic length ~ several μm

Low Re laminar/creeping flows C.-M. Ho, 2001

Microfluidics

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Length Scales and Applications of Microfluidics

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Length Scale--Most physical quantities are scaled differently with dimension L

Surface Tension L (F=L )Skin Friction Force L2

Volume L3

Mass L3

Length L Area L2

Heat Transfer L2

Bone Strength L2

Basic Others

Example: Weight Lifting (The pressure on muscle is the same for different body size)

Darm Lbody (Arm size is proportional to individual body size)

(Contact Area)

(Cross-section)

(Heat Flux)

Size Effect

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Surface tension force (Line force) is dominate in nano scale and important in micro scale!!

Scaling Law



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Dimensionless Parameters

Knudsen number (Kn)

Reynolds number (Re)

Turbulence

1200 ~ 1600

Laminar

Transition

2100

Convention

(Zeighami et al., 2000)

L

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Slip or Non-Slip?

Hydrophilic

Hydrophobic

Non-slip

slip

Kn

Kn

(Meinhart et al., 2001)

Boundary Conditions



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Content

Introduction Micro Flow Measurements Micro Liquid Flow Calibration

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Micro Flow Measurements Microflow sensors

MEMS technology driven Low energy consumption Capable of measuring ultra-low flowrates

L/min nL/min Two major types

ThermalConverts flow energy into electrical signals through heat transfer Majority: thermoresistive

Non-thermalTransforms mechanical variables into electrical signals Majority: differential pressure

Oosterbroek et al., 1999

Wu et al., 2000




Hot-film Flow Sensors

Tai, Y.C. et al., Caltech, USA, 2000

-T0)R(T)R(T0) 0

20x2 m


Hot-Wire Flow Sensors

Jiang, F. et al., Caltech, USA, 1998.

Const. Temp. mode P=V2/RConst Current mode P=IV

P=(T-T0)(A+B 1/3)U =U00.108Re-0.089

Convention

Novelty




Thermal Dilution Flow Sensors

Similar to Supersonic Anememotry 1 heater + 2 thermal sensor Measurement principle:

Heater H and thermal detector T2: t2=Xm/(c+V)Heater H and thermal detector T1: t1=Xm/(c-V)

V=(L/t1-L/t2)/2; c=(L/t1+L/t2)/2


Time-of-Flight Flow Sensors

Time

(a)

H+

H+ H+

H+ H+ H+

Flow

Ion generator pH sensor

Channel

t

Gen

erat

or s

igna

l

(b)

Time

(a)

H+

H+ H+

H+ H+ H+

Flow


H+

H+ H+

H+ H+ H+

Flow


Channel

t

Gen

erat

or s

igna

l

(b)

Transit-time method: V=L/ theat generator + thermal sensor ion generator + ion detector 1 or 2 sensor/detector




Oosterbroek et al., 1999

Capacitance

Piezoelectric/Piezoresistive

FrontBack

C = Q / (Ed)

Differential Pressure Flow Sensors

Copyright 2009 ITRI 18Tai and Ho et al., 1995

089.0Re1079.0uu2uw

Shear Stress (Drag Force) Flow Sensors




Enoksson, P. et al., Royal Institute of Technology, Sweden, 1996.

Coriolis-Principle F = Mt

2

maximum flow of 2.3 ml/min.

Resonant (Coriolis Force) Flow Sensors


The dimension of the flow sensor is 9 mm x 9 mm x 1 mm

Yoon, H.J., et al., Ajou Univ., Korea, 2002.

Advantages: a simple structure, no heat generation, a rapid response and no pressure loss

Based on Faradays law

Micro Electromagnetic Flow Sensors




(MEMS) Ultrasonic Flow Sensors

Jagannathan H. et al. 2001, IEEE Symp. Ultrasonics Takamoto M. et al. 2001, Flow Meas. and Inst.


Phonon quasi-momentum Momentum transfer

crystal vibration phonon transfer potential difference

Acoustic phonon in nanotube

Liquid moleculesJ

Acoustic phonon in nanotube

Liquid moleculesJ

Carbon Nanotube Flow Sensors

6 order of magnitude metering range!




Non-Invasive Micro Flow Measurements

Micro Laser Doppler Velocimetry ( LDV)

Micro Particle Image Velocimetry ( PIV)

Holographic Micro Particle Image Velocimetry

Optical Doppler Tomography (ODT)

Scalar Image Velocimetry (SIV)

Molecular Tagging Velocimetry (MTV)

3D Micro-Particle Tracking Velocimetry

Stereoscopic Micro Particle Image Velocimetry

1D

2D

3D

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Content

Introduction Micro Flow Measurements Micro Liquid Flow Calibration

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Gravimetric/Weighing method Volumetric method

Time-of-flightVelocity*cross-section

Comparison method Precision fluid delivery pump Reference standard flowmeter

Calibration Methods

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Marinozzi et al., 2005 Pan et al., 2004

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

-1.00 -0.50 0.00 0.50 1.00r/R

U/U

c

P1P2P3CFD_P1CFD_P2CFD_P3

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Micro Flow Calibration System in Taiwan (CMS/ITRI)

Capability 0.1 L/min to 10 mL/min U95 = 0.5 % to 3.0 %

Fluid: water Flow generation

pressurized tank (with automatic pressure controller)metering pump (e.g. syringe pump)

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System schematic Twin-beaker covered

with low volatility oil

Twin balance design

Gravimetric calibration Method: flying-start-and-finish with dynamic weighing

Micro Flow Calibration System in Taiwan (CMS/ITRI)

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Novel Water Flow Facility in France (LNE)

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Range extension to low flow rates (10 L/h down to 1 mL/h)

Overview1 Water production, 2 Supervision and flow generation, 3 Measuring instruments

Line 1 : 1 ml·h-1 to 10 ml·h-1

Line 2 : 10 ml·h-1 to 100 ml·h-1

Line 3 : 100 ml·h-1 to 1 000 ml·h-1

Line 4 : 1 000 ml·h-1 to 10 000 ml·h-1

Flow is generated using a pressurized tank (0.1 to10 bar) and is controlled tightly by a constant upstream pressure and the selection of a well designed capillary

A clean room with controlled ambient conditions T = 20 C +/- 2 C, RH = 55 % +/- 5 %, P = Patm + 20 Pa

The temperature around the weighting cell better than 0,3 C during 30 minutes




Water preparation equipment1 Nitrogen bubbling tank, 2 Heating and degassing tank,3 Stock tank

Particles filteredAvoid formation of bubbles by degassing Temperature of the fluid regulated

Flow generationwater flow controlled by two devices

10 liter tank (with compressed N2)Pressure stability better than 0,05% Situated in a thermostatic chamber

10 capillaries located after the flowmeter Inner diameter: 100 m to 325 Length: 1 m to 4 m immerged in a thermostatic bath



Flow measurement The equipment is separated in four individual lines

1 Heat exchangers 2 Capillaries in a thermostatic bath and associated valves 3 Mass measurement: line n 2 (10 mL·h-1 to 100 mL·h-1)




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Flow range (goal) 0.1 m3/h to 0.00005 m3/h (1.67 L/min to 0.83 mL/min)

Fluid (goal) Light oil, kerosene

Examples of needs Fuel blender Centralized fuel supply system Evaluation of fuel efficiency

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New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST)

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New Calibration Facility for Small Flow of Hydrocarbon Liquid in Japan (NMIJ/AIST)

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T P

T P

T P

T P

Flow generation section Test section

DUT Checkstandard

Weighing section

Storage tank

Pump

Heatexchanger

Header

Flowcontrolvalve

Bypass to storage tank

Gravimetric calibration Method: standing-start-and-finish with static weighing



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Volumetric method (1) Time-of-flight (Caltec.)

Visual detection; 50 nL/min to 1500 nL/min

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Wu et al., MEMS flow sensors for nano-fluidic applications, Sensors and Actuators A: Physical, Vol. 89(1-2), 2001

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Volumetric method (2)

Time-of-flight (Applied Biosystems) Optical detection (refractive index); 1 nL/min to 1000 nL/min

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Volumetric method (3) Air-piston calibrator of CMS/ITRI

gas-liquid interface detection 10 nL/min to 1 mL/mintime-of-flight

0

2

4

6

8

10

0 5 10 15 20 25 30 35 40

time (sec)

Vol

tage

(V

)

Node 1 Node 2

tt

tVQ

FlowOutlet

Imped./Volt.Converter

Multiplexer

Out 2 Out 1

FlowInlet

AC

+

-

Vout

R1Rx

R2

Cx

Equivalent circuit




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Calibration and Measurement of Micro Liquid Flow

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