Jetzendorfer Str. 6 D-85238 Petershausen Germany Tel +49-8137-935-0 Fax +49-8137-935-235
www.camline.com
LineWorksproducts
The information contained in thisdocument is subject to change without
notice. camLine GmbH assumes noresponsibility for any errors which mayappear in this document. All companynames and product names are trade-
marks or registered trademarks oftheir respective holders. The followingare trademarks of camLine Datensys-
teme für die Mikroelektronik GmbH:
• camLine• CAPS• LineWorks• LineWorks ECoFrame• LineWorks ETM• LineWorks PR• LineWorks RM• LineWorks SPACE• LineWorks WIP• LineWorks UA
LineWorks PULSEEquipment Efficiency Monitoring and Optimization
LineWorks RMRecipe Management
LineWorks WIPWork in Process Tracking
LineWorks ECoFrameEquipment Connection Framework
LineWorks iGateInformation Gateway
LineWorks UAUser Administration
LineWorks SPACEStatistical Process Analysis and Control Environment
Company Profile and Fact Sheet
CAPScamLine Application Server
PAAPart Average Analysis
7. September 2006 Company Profile and Fact Sheet 1
Company Profile and Fact Sheet
Company Name camLine GmbH, a company of the camLine Holding AG
Founded August 1989
camLine is profitable since 1993.
The company has about 46 employees.
Headquarter Jetzendorfer Str. 685238 Petershausen, GermanyPhone: +49-8137-935-0Fax: +49-8137-935-235Email: [email protected]
Mission camLine GmbH distributes effective IT solutions for production automation,
process data management and process data analysis worldwide. The manu-
facturing execution systems (MES) of camLine are designed for extreme re-
liability and massive data throughput to meet the requirements of a 24/7
production.
camLine’s IT solutions are installed in various business sectors such as micro-
electronics, solar cell production, semiconductor production, or the automo-
tive industry. Customers include Audi, Bosch, Continental TEMIC, Fujitsu,
IBM, Infineon, OSRAM, and SolarWorld, to name but a few. The company
provides worldwide support through local distribution partners in the U.S.,
Taiwan, Japan, and Singapore.
Business Units Customer Specific IT Projects
Software Product Development
Consulting
Product Integration and Tool Connection
7. September 2006 Company Profile and Fact Sheet 2
Company Profile and Fact Sheet
ProductOverview
LineWorksTM Product Family
The LineWorksTM product family provides software modules for a fabwide
production automation solution. Each LineWorks module can be employed
separately in production. The combined usage makes up a comprehensive
CIM solution (Computer Intergrated Manufacturing) meeting the IT require-
ments between the planning systems (e.g. SAP/R3) and production tools.
LineWorks SPACE (Statistical Process Analysis and Control Environment)
Online process and product data management and analysis,
online SPC, offline SPC, SPC reporting
LineWorks SQM (Supplier Quality Management)
Generic quality portal for suppliers: quality checks and reporting of incom-
ing materials before shipment
LineWorks STARGATE (SPC Quality Reporting)
Overview of the performance indexes for production processes to assess
the quality of SPC activities
LineWorks PULSE (Equipment Efficiency Monitoring and Optimization)
Recording of any equipment data
Fabwide OEE analysis (Overall Equipment Efficiency)
LineWorks RM (Recipe Management)
Central administration of process recipes and control parameters for all pro-
duction tools
7. September 2006 Company Profile and Fact Sheet 3
Company Profile and Fact Sheet
LineWorks WIP (Work in Process Tracking)
Process security and transparency through tracing and verification of proc-
ess steps (sequence) including order, lot, serial number and used material
tracking
LineWorks ECoFrame (Equipment Connection Framework)
Generic tool connection
LineWorks iGate (Information Gateway)
Visualization framework for Web based reporting
LineWorks UA (User Administration)
Common user access control for all LineWorks products
camLine Application Server CAPSTM
All LineWorks products are based on the CAPS libraries guaranteeing the
performance and stability required in 24/7 environments.
Contacts outsideGermany and
DistributionPartners
David Hsu, Taiwan – email: [email protected]
Aneric Enterprises, Singapore
Brooks Automation Inc., USA, worldwide distribution of LineWorks SPACE
Yamatake Industrial Systems Co. Ltd., Japan
Customers AMS OSRAM Opto Semiconductors
Atmel Panasonic
Audi AG Pari
Chartered Semiconductors ProMOS
Continental TEMIC Qimonda
Deutsche Cell GmbH Robert Bosch GmbH
Dialog Semiconductor GmbH Samsung
EPCOS AG Sandia
Fujitsu Silterra
Honeywell Sonion
IBM ST Microelectronics
Infineon Technologies AG Sumco
Innolux Sunpower
International Rectifier SVA NEC
LSI Logic Corporation Toppan
Microchip Trecenti Technologies Inc.
NEC TSMC
Nokia Mobile Phones Winbond
Olympus ZMD Zentrum Mikroelektronik
25. August 2006 LineWorks SPACE 5.1 1
LineWorks SPACE TM
Statistical Process Analysis and Control Environment
LineWorks SPACE provides enterprise-wide SPC including online analysis of
measurement and process data. SPACE stores all collected data in one cen-
tral database for traceability according to ISO 9000 standards. Operators
and engineers are instantly informed about SPC violations.
SPACE Monitor for Online SPC
SPACE Navigator for Offline SPC
SPACE Reporting
for Reports
25. August 2006 LineWorks SPACE 5.1 2
Online SPC with SPACE Monitor
The online component SPACE Monitor can be interactively integrated into
the production process. Samples sent to SPACE are evaluated according to
definable rules within a fraction of a second. The result is immediately
available to the operator or to the equipment. SPACE extends classic SPC by
providing Corrective Actions and Trouble Shooting Guides.
After a violation has occurred in produc-
tion operators or engineers are informed
by immediately receiving a chart. The
chart will be automatically displayed by
SPACE Monitor with the doubtful sam-
ple highlighted.
The operator is offered a list of typical ac-
tions to correct the problem. If unsure
which corrective action (CA) to take
they can inform themselves in a trouble
shooting guide (TSG). At last the opera-
tor is requested to comment their action.
A CA can have some attributes which
control further actions. You can auto-
matically flag samples as invalid to pre-
vent it from being included in further cal-
culations, e.g. in case of wrong measure-
ments.
Or you might want to build a direct con-
nection to the production equipment
(through SPACE Listener). SPACE Moni-
tor offers the following features:
Flexible SPC Administration
SPC administrator can configure under
which conditions which work stations
will receive a chart to be displayed.
SPC administrator can define the data
and attributes to be displayed for the
selected sample.
Raw value chart and attributes on raw
value level
Flexible Display
Users can reset the date for moving
charts
Users may choose CAs, TSGs, or com-
ments for each sample.
Click on a sample to view corrective
action or comment input
View pre-process data in sample histo-
ry for selected sample
Launch external program, e.g. wafer-
map viewer
Show or Hidehistograms
grid
calendar axis
markers for violations, com-
ments, missing comments, etc.
flagged samples
specifications
configurable axis labels
linear / logarithmic,
automatic / manual scaling
25. August 2006 LineWorks SPACE 5.1 3
Offline SPC with SPACE Navigator
The process engineer is offered a powerful tool to analyse and administer
process data. You can view the data in offline charts as soon as they have
been collected by LineWorks SPACE.
Offline SPC with SPACE Navigator offers
the following features:
Calculation Control
Calculate control limits
Calculate process indexes
Flexible Display
Define the data and attributes to be
displayed for the selected sample.
Click on a sample to view corrective
action or comments
View pre-process data in sample histo-
ry for selected sample
Raw value chart and attributes on raw
value level
Sample Processing
Assign corrective action
Add comment to any sample
Flag samples and exclude them from
calculations
Launch external programs,
e.g. wafermap viewer
Export data to external tools like
qs-STAT, Microsoft EXCEL etc.
Show or Hidehistograms
grid
calendar axis
markers for violations,
available comments, miss-
ing comments, etc.
specifications
configurable x-tick labels
linear / logarithmic, auto-
matic / manual scaling
25. August 2006 LineWorks SPACE 5.1 4
Reports with SPACE Reporting
The generation of regular reports makes sure that the management will al-
ways get an up-to-date overview. Reports are generated periodically – such
as daily, weekly, monthly, or quarterly. Standard reports are provided, Cpk
and other process index values can be automatically scheduled and calcu-
lated.
SPACE Reporting is integrated into
SPACE Navigator and offers the follow-
ing features:
Calculations performed at an absolute
date or at periodical time intervals
User-definable report cycles
(e.g. bi-weekly)
Calculation of thousands of process
capability coefficients in overnight
batch processes
Cpk calculation from non-normal
data for supported distribution mod-
els (requires qs-STAT)
Customer calculations by integrating
customer-specific formulas
Export report results – calculation re-
sults can be visualized and exported in
various formats such as PDF (Adobe
Acrobat), HTML (Web browsers) or
CSV (MS Excel)
Use Web Reporting to view already
calculated reports in the Intranet in
PDF format.
Searches that search for specific re-
port results (like »bad performing
charts«)
25. August 2006 LineWorks SPACE 5.1 5
SPC Administration with SPACE Navigator
SPACE Navigator presents the SPACE system as a tree hierarchy. You are en-
abled to arrange even thousands of control charts in a clear and easy-to-use
structure.
Easy Navigation
Easy navigation like in Windows Ex-
plorer
All key structures, control charts and
reports are arranged under the »Data
Sources« node.
Corrective actions, trouble shooting
guides and alarms can be found under
the »Events« node.
Bookmarks for a fast view of objects
or charts of interest
Fast Control ChartAdministration
Existing control charts can be used as
templates.
Properties can be inherited through
SPACE Navigator object hierarchy.
Pasting attributes to copy settings
from one chart to multiple other charts
Powerful Search
Quick changes by powerful »Search«
or »Search and Replace« features
Multi-Language Support
SPACE Navigator, as well as SPACE Mon-
itor can be used with the following GUI
languages:
English
German
Japanese
Chinese
Asian Character Support
SPACE fully supports the usage of texts
with Multibyte characters, e.g. to enter
comments in Chinese language.
25. August 2006 LineWorks SPACE 5.1 6
IntegratedSPC Violation HandlingThe online-violation handling together
with the chart display allows immediate
reactions in the production line.
Operators or engineers are informed
about violations by charts sent to their
SPACE Monitor or via Email.
The integration of customer business
rules is provided through an open event-
broadcasting interface.
Appropriate Reactions
The operator can perform various ac-
tions when a sample has violated a spe-
cific SPC rule:
Enter an online comment when the
chart is displayed.
Assign the appropriate corrective
actions to the sample.
Use your existing instructions as
SPACE trouble shooting guides by
simply defining the visualization pro-
gram and the document path.
Track Corrective Actions
Sequential assignment of different
corrective actions to the same rule vio-
lation of a sample will automatically
create an audit trail.
Append comments to a sample:
– Choose comments from predefined
list
– Enter free comments
– Pre-defined lists can be linked to
specific rule violations in specifc
charts
– Corrective action attributes track
current state (immediate, in-
progress, resolved)
25. August 2006 LineWorks SPACE 5.1 7
Configurable SPC Violation Types
Violation of specification limits with
one- or two-sided limits
Violations of control limits , S, R,
one- or two-sided limits for each sta-
tistical value
Moving average of mean values,
standard deviation, or range (identical-
ly or exponentially weighted)
Run above/below center line
Linear trend up and trend down esti-
mation of mean values
N of M in zone A or B
N of M in zone A or beyond
N in zone C
N rising or falling in a row
N[%] raw values above/below specifi-
cation limit
N[%] raw values above/below control
limit
Mean value above/below specification
limit
N , S, R alternating up and down
N violations of specific types within the
last M samples (4 configurable repeat
rules)
Specification AdministrationSpecification limits are delivered by the
input process together with the sample
data or they are administered within
SPACE Navigator.
Special cases can be handled individu-
ally.
A Learning Mode is provided to cause
specification changes sent together
with the sample automatically change
the specification limits administered by
LineWorks SPACE.
x
x
25. August 2006 LineWorks SPACE 5.1 8
Control Limit CalculationSPACE allows to automatically calculate
control limits. Calculated limits are dis-
played together with the existing limits
to accept or reject them.
Automatic control limit checks can be set
up, e.g. limits within spec, not wider
than previous limits, no violations, etc.
A control limit wizard allows to calculate,
accept or reject new limits for a larger set
of charts.
Benefits
Extended limits for process models
with considerable sample-to-sample
spread (e.g. for batched processing)
Calculation with customer specific for-
mulas through an open interface (see
»Integration Kit« below)
Wizard to quickly review or recalculate
control limits for a numerous charts
Limits can be marked as fixed to pre-
vent them from being overwritten by
subsequent calculations.
Statistical Designs
Calculation options are administered as
statistical designs. A statistical design is
provided as a standard (e.g. »6-sigma«)
by the inheritance mechanism of SPACE.
If parameters need special treatment
they can override the standard.
Once a chart is assigned to a statistical
design, control limits can be calculated
with a one button-click.
Advanced calculation options can be
used, such as distribution models, sever-
al choices for location and spread esti-
mators, acceptance limits, etc.
25. August 2006 LineWorks SPACE 5.1 9
Non-Normal Distributed Data
Calculation of process indexes and con-
trol limits for non-normal distributed
data is supported by the following distri-
bution models (qs-STAT is required):
log-normal distribution
root transformed normal distribution
folded and extended normal distr.
Rayleigh distribution
Weibull distribution
Johnson transformation
Mixed distribution
Box-Cox transformations
Pearson distribution system
Automated PrerunWith the »Automated Prerun Support«
feature the SPC administrator's work will
be made easier. After a predefinable
number of samples have been collected,
the calculation of control limits is auto-
matically triggered without any human
intervention.
After prerun completion the control lim-
its are automatically checked against a
choice of rules. An email address can be
provided to automatically send a notifi-
cation. A prerun can be started at any
time.
Variable Sample SizesThe »Variable Sample Sizes« feature al-
lows dynamic adjustment of control lim-
its in the case of missing data or extend-
ed sample sizes due to dynamic sampling
strategies.
For each possible sample size, control
limits are calculated in advance and
stored in a look-up table.
This enables the fast adjustment of con-
trol limits to the actual sample size with-
out any recalculation needed:
Handling of situations where the sam-
ple size cannot be fixed, for example
100% sampling with varying lot sizes
Zero-effort implementation of adap-
tive sampling techniques
25. August 2006 LineWorks SPACE 5.1 10
NotificationNotifications allow the automatic gener-
ation of emails to inform all responsible
persons about particular incidents, e.g.
an SPC rule violation. By simply clicking
on the link the receiver can display the
SPACE chart.
The mail contains all important data
about the incident and the violating
sample. The mail contents are configura-
ble via mail templates.
LineWorks NotificationManagerLineWorks Notification Manager (NFM)
is an extension of LineWorks SPACE.
It offers an elegant way to manage mail
templates, mail addresses and mailing
lists.
25. August 2006 LineWorks SPACE 5.1 11
Sample HistoryThe sample history function provides
support for:
Checking for problems in upstream
process steps for a given lot or wafer
Displaying data for all lots from a given
wafer manufacturer within the last
week
Jumping to the chart of a pre-process
Launching external program, e.g. for
the wafermap of a pre-process
Simply click a button in the chart to dis-
play all samples collected for a given key
such as lot, tool and/or vendor.
The sample list shows keys, collection
date and sample value. Mean, Minimum
and Maximum values are displayed as
dot and whiskers, and the values are
normalized to upper (= 1.0) and lower
(= -1.0) specification limits.
By filtering and sorting the sample list
can be narrowed down.
25. August 2006 LineWorks SPACE 5.1 12
SearchesBased on freely defined conditions you
can search for various objects or individ-
ual samples. Searches are stored in the
SPACE Navigator tree for repeated exe-
cution. You can work with the results as
if with objects, all actions are supported,
such as:
Search for uncommented SPC viola-
tions and add a comment
Search for unwanted sample data be-
longing to a specific lot and flag them
Search for charts with limits being too
old or wide and change the control
limits
Search for charts with specific settings
Search for charts with low Cpk or high
violation percentage
Search for charts for specific products,
tools or processes
Search for charts with no data collect-
ed since a certain time period and set
them to »Archived«
Specific report results (like »bad per-
forming charts«)
Over 25 different conditions can be com-
bined to define the search criteria.
25. August 2006 LineWorks SPACE 5.1 13
RevisioningChanges of logical data sources and sub-ordinated objects and even of samples are automatically determined. They cause to generate revisions of these ob-jects resulting in an audit trail by whom, when and why an object was changed.
An additional revision tab allows to re-view the old revisions in detail, perform comparisons and to revert to a previous object revision.
Export InterfacesThe »Export Interfaces« feature allows
the export of sample data from control
charts, queries or query groups to vari-
ous file formats. The export can be auto-
mated, e.g. to provide external systems
with measurement data from SPACE.
There are export interfaces available for:
qs-STAT
Microsoft Excel (.csv)
ASCII files (.txt)
Further formats are supported on
demand.
25. August 2006 LineWorks SPACE 5.1 14
User PermissionsThe »User Permissions« feature is used
to administer users, user groups, respon-
sibility domains and security levels in
LineWorks SPACE.
Objects are assigned to an owner and a
responsibility domain, e.g. »furnace
cell«, »lithography« etc.
Only users who are either owner of the
object, or have appropriate rights in the
objects responsibility domain, can per-
form an administrative function. With-
out read permission, the corresponding
objects is invisible.
Permission Objects
Data Sources
Logical Data Sources
SPC Channels
Specification Channels
Folders
Alarms
Corrective Actions
Trouble Shooting Guides etc.
Permissions per Object
Read
Write
Delete
Delete cascading
Create subordinated objects etc.
25. August 2006 LineWorks SPACE 5.1 15
Calculated CharacteristicsThe »Calculated Characteristics« feature
offers the ability to define characteristics
which are determined from other (not-
calculated) characteristics using standard
or custom formulas.
It allows the calculation from two subse-
quent measurements with the result
stored as new calculated sample.
You may want to measure the film thick-
ness of the oxygen layer before and after
etching. The calculated characteristic
may be the etch removal, i.e. the differ-
ence of the film thickness before and af-
ter the etching.
Advanced CalculationOption (ACO)In addition to the standard formulas pro-
vided by SPACE, you can add your own
formulas by supplying a compiled Java
class. The class calculates the new pa-
rameter at runtime.
Furthermore, runtime parameters can be
supplied in a formula text area that con-
trol the calculation, such as the parame-
ters a,b,c in »c log( a x + b)«.
Specification limits for calculated param-
eters are provided by the SPACE specifi-
cation administration or by the formula
itself.
For more information, see the separate
LineWorks SPACE ACO specification
sheet.
25. August 2006 LineWorks SPACE 5.1 16
Moving ChartsThe »Moving Charts« feature offers the
following possibilites:
EWMA of , R, S
Overlay display of EWMA and
Shewhart chart
Moving average (MA) or Moving Me-
dian (MM)
Moving standard deviation
The moving value computations start
anew after process target shifts, after a
reset of the calculation start or after con-
trol limit violations in the x-bar chart.
x
25. August 2006 LineWorks SPACE 5.1 17
Normalized ChartsBy displaying normalized values you can
combine charts with different specifica-
tions. For example, you might want to
see different products in a single chart to
detect equipment trends earlier.
Normalized charts offer the following
features:
Normalize to target
Normalize to specification
Normalize to control limits
Normalized and real-value scale
Cpk value calculation across different
specs
Attributes ChartsThe »Attributes Charts« feature offers
the possibility to display the defects in a
unit without representing any numerical
values of the measurement parameter.
Each unit inspected is usually classified as
either »conforming« (nondefective) or
»nonconforming« (defective) to the
specifications. The attributes charts of-
fered by SPACE are:
p chart for fraction nonconforming
np chart for number nonconforming
c chart for nonconformities
u chart for average number of non-
conformities per unit
25. August 2006 LineWorks SPACE 5.1 18
Matching ChartsTo facilitate commonality analysis, you
can configure the chart to connect sam-
ples with common attributes using color-
ed lines, e.g. one line per tool/chamber
combination.
You show or hide each line by a simple
mouse-click.
25. August 2006 LineWorks SPACE 5.1 19
Multi-Parameter ChartsMulti-parameter charts (MPC) are built
to align samples of related parameters
together into one window. Multi-param-
eter charts can be used online in SPACE
Monitor for displaying simultaneously
transmitted parameters. In SPACE Navi-
gator, you can show arbitrary parameter
combinations in MPCs offline.
25. August 2006 LineWorks SPACE 5.1 20
QueriesUsing the »Queries« offline SPC feature,
you can easily create free queries against
the LineWorks SPACE database using a
GUI instead of SQL.
Queries can be defined independently
from the control charts, or can be aliased
to an existing control chart.
Queries can ask for raw values or com-
pressed data only
Once a query is defined, it will be saved
in the database and can be re-
executed with one button click.
Query results are represented in offline
charts and can be used to export data
Simple query building...... with the aid of query templates.
Displaying the offline chart
for a query
25. August 2006 LineWorks SPACE 5.1 21
Web Data Collectionwith SPISESPISE (LineWorks SPACE Input Server) is a
Web server that provides an HTML gen-
erator for manual data input forms.
It validates the entered data and delivers
it to the LineWorks SPACE online server,
providing feedback on violations to the
operator. SPISE offers features such as:
Include mechanism for form generator
property files and overwriting proper-
ties in the URL reduces effort for crea-
tion of similar forms
Automatic generation of input fields
on raw value level
Input of raw values or statistical values
Validation of input against limits, data
formats and missing values
Support of attributes chart data collec-
tion: p, np, u, or c data can be collect-
ed for various defect classes
Optional user login protection using
the LineWorks SPACE »User Permis-
sions« feature and the cookie mecha-
nism
Supply of......logical context keys with:
fixed values from URL or generator property file
choice lists
input fields from URL or generator property file
Seamless embedding......of input forms in an
existing Intranet struc-
ture using URL refer-
encing of input forms
and follow-up URLs
after data collection
25. August 2006 LineWorks SPACE 5.1 22
Customer Specific Calculation ServerCustomer specific calculation strategies
for control limits and process indexes can
be realized by the use of an extra server
that is integrated into LineWorks SPACE
via the »Integration Kit«. The open inter-
face supports calculations from individu-
als or compressed statistical data.
Integration KitThe »Integration Kit« forms the basis for
customer input processes, event sub-
scribers and hook functions.
It comes with support and example pro-
grams for several middleware, program-
ming languages and platforms. The fol-
lowing connections are supplied:
Data upload from MS-Excel compati-
ble CSV (comma separated value) files
IDL files for any CORBA IIOP clients
OLE Automation proxy related to the
camline Application Server (CAPS) or
CORBA middleware including a type li-
brary to integrate arbitrary OLE auto-
mation capable clients such as Delphi,
Visual Basic, Java and C++
Java sample input API as jar library
C-DLLs with generated C style stub
functions via the camline Application
Server (CAPS) middleware and CORBA
for Windows clients (further clients on
demand)
Java Administration API to manage
various SPACE objects such as
– SPC channels
– Folders
– Bookmarks
– Multi-parameter charts
– CAs, TSGs, Alarms
25. August 2006 LineWorks SPACE 5.1 23
GlossaryAdvanced Calculation Option (ACO)
Support for customer-specific formulas
for calculated characteristics.
Calculated Characteristics
Definition and usage of parameters that
are calculated from other parameters.
Control Limit Calculation
Automatic calculation of control limits
from control charts and automatic im-
port of the calculated control limits with
or without manual interaction (prerun).
Email and LineWorks NFM(Notification Manager)
Automatic generation of emails when an
SPC violation is detected or after auto-
mated preruns. NFM is used to manage
email addresses, mailing lists, and mail
content templates.
Export Interfaces
Export of sample data from control
charts or queries to various file formats.
Integration Kit
Implementation of your own customer
input processes, event subscribers, hook
functions, or calculation strategies for
SPC indices and control limits.
Matching Charts
To faciliate commonality analysis the user
can configure the chart to color by com-
mon attributes, e.g. one line per tool/
chamber combination.
Moving Statistics
Moving charts are based on statistics
that are calculated from more than the
current sample. SPACE supports EWMA
( ), EWMA (S), EWMA (R), Moving Av-
erage (x), Moving Median (x), Moving
Stdev ( ).
Multi-Parameter Charts
Alignment of samples of related param-
eters in one window.
Normalized Charts
Normalized charts plot values relative to
their specification or control limits, al-
lowing to compare data with different
specs in a common chart.
Attributes Charts
SPACE offers p, np, c, or u charts for at-
tribute characteristics.
Queries
Point and click definition and storage of
free queries against the SPACE database
using a GUI instead of SQL.
Reporting
Automatic scheduling and generation of
Cpk and other process index values for a
group of queries; visualization in reports
and export in various formats like PDF,
HTML or CSV.
Specification Administration
Maintenance of specification limits pro-
vided by fab data sources or manual in-
put.
Trouble Shooting Guides
Assignment of documents like flow-
charts or intranet web pages to an SPC
violation to assist the operator or engi-
neer in handling SPC violations.
User Permissions
Administration of users, groups, respon-
sibility domains and security levels.
Variable Sample Sizes
Dynamical adjustment of control limits in
the case of missing readings or extended
sample sizes due to dynamic sampling
strategies.
Web Data Collection (SPISE)
HTML form generator for manual data
input forms.
Web Reporting
Browser access to reports and automatic
generation of PDFs from report results.
x
x
25. August 2006 LineWorks SPACE 5.1 24
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks SPACE is based on
the camLine Application Server (CAPS).
All interfacing technologies supported
by CAPS (CDLB, CORBA, COM, TIB/Ren-
dezvous) are also available to LineWorks
SPACE.
LineWorks SPACE Server Operating SystemsHP-UX 11.i
Sun Solaris 5.8 and 5.9
SuSE Enterprise Server 8 and 9
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE Client Operating SystemsMS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP (Load Balancing for UNIX server operating systems)
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks SPACE RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
2-May-2006 LineWorks SQM 3.0 1
LineWorks SQMSupplier Quality Management
LineWorks SQM is an additional LineWorks SPACE module to manage qual-
ity checks and reporting of incoming materials. SQM provides an electronic
Certificate of Analysis (eCOA) for the goods receipt.
LineWorks SQM provides a generic qual-
ity portal for suppliers, state of the art
data tracking with SPC, scheduled quali-
ty reports and automated feedback
based on the latest specifications for
each material. With this B2B extension of
LineWorks SPACE the quality of incom-
ing material can be automatically
checked and the supplier notified before
the physical shipment happens.
Value AddedSave cost and time by checking quality
of incoming material before shipment
Eliminate human errors for data entry
and spec checking
Collect all data to do analysis – corre-
late supplier quality data to IQC meas-
urements or Final Yield
Easily share data throughout the fab
Utilize the SQM Web Portal for data
upload and notification
Suppliers can avoid costly rejects – no
need to ship material until it has been
checked and released
Take advantage of powerful Line-
Works SPACE reporting capabilities;
every night, all important quality in-
dexes can be calculated automatically
Benefit from Web reports based on
iGate to show trends of delivered qual-
ity or compare similar materials deliv-
ered by different vendors
2-May-2006 LineWorks SQM 3.0 2
System OverviewFor each of your vendors, you define a
Quality Schema describing the parame-
ters and measurement values the vendor
has to supply for each material.
In compliance with that Quality Schema,
vendors collect their quality data and up-
load it over the SQM Web Portal.
On your Web server, the vendors' data is
validated against your requirements im-
plemented in the Quality Schema. Based
on the validation results, the materials
will be released for shipment or the re-
lease will be denied.
The release decision will automatically be
distributed by email to the supplier and
the input quality department. Vendors
can retrieve the validation results regard-
ing their materials in the Web portal as
well.
With LineWorks SQM, you can perform
quality checks of nearly all types of ma-
terials, such as Wafer, Pellicle, Gas,
Chemical, Quartz, Target, or Photo
Chemical etc.
SQM Web PortalThe SQM Web Portal offers:
Upload of quality data contained in
XML files structured according to a
given schema description; further-
more, upload by manual input, or op-
tionally using CSV files
Traceability of history
Notification to supplier if format is
wrong or data is missing
AnalysisSQM offers the following Analysis fea-
tures:
Automated verification of file formats
Easy to use SQM viewer
– View the contents by lot – out of spec items highlighted
– Manual acceptance or rejectionallowed
Automated spec checking
Full featured SPC with LineWorks
SPACE
Quality reports
– Cp/Cpk by material, supplier, location, etc.
– Trend quality over time (weeks, months, quarters)
– Scheduled report runs, no additional engineering effort
– SPACE chart display in the Web browser
2-May-2006 LineWorks SQM 3.0 3
SQM AdminstrationThe SQM Administration enables you to
define all the details regarding your
measurement parameters.
Materials with their measurement pa-
rameters and related context keys are
defined.
For each of the parameters, specification
limits and the type of samples like raw
values or condensed values, is specified.
For each vendor, a Quality Schema is cre-
ated describing which materials and
measurement values they have to pro-
vide.
Specification ManagementSQM offers a complete Specification
Management system.
Definition of materials supplied
Administration of measurable parame-
ters
Supplier specific alias names for pa-
rameters
Storage of specs for materials and sup-
pliers
Audit trail for spec changes
Definition of measurement data for
each supplier and material
Supplier specific XML schemas to be
used for data validation
2-May-2006 LineWorks SQM 3.0 4
ReportingWith LineWorks SPACE, reports can be
calculated on SQM quality data over-
night. They are provided as Web reports
based on LineWorks iGate.
Engineering Reports
Engineering Reports show the quality
trend (Cpk and OOC) of all materials
with a drill-down to part names. Further-
more, a comparison of material groups
as well as a comparison of suppliers is
available.
Management Reports
Management Reports show the maturity
trend (combination of Cpk and OOC) of
all materials with a drill-down to part
names.
Comparison of material groups as well
as a comparison of suppliers is provided.
The supplier comparison enables you to
clearly see the differences between ven-
dors.
2-May-2006 LineWorks SQM 3.0 5
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides an automation solution with or without MES system.
The LineWorks product family includes:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency Monitoring and Optimization
RM – Recipe Management
WIP – Work in Process Tracking
iGate – Information Gateway
ECoFrame – Equipment Connection Framework
UA – User Administration
LineWorks SQM Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows 2000, XP
Further systems or versions on demand
LineWorks SQM Client Operating SystemsMS Windows 2000, XP
Further systems or versions on demand
LineWorks SQM MiddlewareCORBA/IIOP
RMI (Java Remote Method Invocation)
LineWorks SQM RDBMS SupportOracle 9i
Further database systems on demand
1. August 2006 LineWorks SPACE ACO 1
LineWorks SPACE ACOAdvanced Calculation Option
LineWorks SPACE Advanced Calculation Option (ACO) adds support for
customer-definable calculations to the Calculated Parameter feature of
SPACE. Arbitrary Java code can be provided through a plugin architecture,
for applications from outlier removal and data normalization up to
Advanced Process Control (APC).
Easy deployment by auto-detection of new customer calculation formulas through plugin manager
Supports an arbitrary number of refer-ence parameters
Supports passing additional calcula-tion constants through the formula text GUI field
Centralized management of all formu-las and constants
Support to compute specification limit intervals for calculated parameters from original specifications
Build-in functions: Plus, minus, times, divide, log, clip
API Javadoc and example source
Value Added
Derive relevant parameters like etch rates from combined measurements
Reduce control chart numbers and administration by normalizing data first
Implement your own outlier removal strategies and reduce false alarms
Split data into subsets and control zones on a wafer in separate charts
Plug-in your favourite math tool
Derive new recipe parameters based on the measured values (APC)
Features
Extend the list of available formulas in the Calculated Parameter Editor
1. August 2006 LineWorks SPACE ACO 2
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks SPACE ACO is based
on the camLine Application Server
(CAPS). All interfacing technologies sup-
ported by CAPS (CDLB, CORBA, COM,
TIB/Rendezvous) are also available to
LineWorks SPACE ACO.
LineWorks SPACE ACO Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE ACO Client Operating SystemsMS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE ACO MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks SPACE ACO RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
5. September 2006 LineWorks STARGATE 2.0 1
LineWorks STARGATE TM
SPC Quality Reporting
To guarantee serious SPC, statistics should be examined on a regular basis.
LineWorks STARGATE provides an overview of performance indexes for
production processes to assess the quality of SPC activities.
In LineWorks SPACE, thousands of SPC
charts are running to control various
process parameters during production
online.
With a growing variety of products,
managers and process engineers need to
keep a clear overview of the production
quality.
How good is the quality within the area
of responsibility? Which process areas or
individual processes don’t reach the
quality requirements? Which charts are
not maintained properly?
To get a fast summary of quality being
processed LineWorks STARGATE pro-
vides important analysis reports.
SPC ManagementProcess capability (Cpk) and process sta-
bility (%OOC)
SPC Engineering
Frequency of WE rule violations
Proper ChartsHave the control limits been set »reason-
ably« or »inadequately«?
SPC MaturityAre charts maintained well?
Matching ChartsIs the process close enough to the target
value?
Limit Changes
How often have the limits been
changed?
5. September 2006 LineWorks STARGATE 2.0 2
Drill-Down
It is very likely that you have to deal with
thousands of control charts. Which of
them have a Cpk < 1..33? With a simple
mouse click you navigate from the com-
pany-wide summary down to the indi-
vidual SPACE chart.
User Permissions
Depending on the permissions granted
during login, users might be allowed to
view only results belonging to specific
lots from particular customers.
STARGATE Summary Views
The summary views show statistics over
SPC charts, e.g. in one technology are
10000 control charts with 500 having a
Cpk < 1.33. You will find the 5% marked
red. In general, there are three summary
views available:
Summary over time, e.g. days, weeks,
or months
Summary over levels, e.g. site, tech-
nology, or recipe
Pareto analysis, e.g. find the most fre-
quent process step within 500 control
charts with Cpk < 1.33.
There are numerous other filter methods
available, e.g. »only critial processes«.
In configurable trees you create appro-
priate groupings of your data, e.g. by
Site, Technology, Product, and Process
Step.
Drill-down from the overviewto the individual SPACE chart
Click in summary report to see the details table. Click in
details table to open individual control chart in SPACE
5. September 2006 LineWorks STARGATE 2.0 3
SPC Management
The »SPC Management« report shows
summaries about process capability and
process stability. You can see immediate-
ly if your process behaviour is excellent
(green color) or the process behaviour is
not satisfying (yellow to red).
Quality managers can decide at first
glance whether everything is okay, proc-
esses have to be improved, or the SPC
system has to be adjusted by modifiying
specification or control limits.
Proper Charts
The »Proper Charts« report compares
the control limits configured in the charts
with the control limits resulting from the
actual process values.
If the configured limits are too wide
process instabilities will not be detected
and parts will not be processed with op-
timum quality.
If the configured limits are too tight the
manufacturing process will be inferred
too often resulting in reduced through-
put and less acceptance of SPC.
Even if it seems to be an unsoluble task
with thousands of charts to look for bad-
ly configured control limits you can do it
in this report with one mouse-click.
5. September 2006 LineWorks STARGATE 2.0 4
SPC Maturity
The »SPC Maturity« report shows how
well your charts are maintained. First, the
charts are checked against several mini-
mum standards, e.g. if control limits exist
and corresponding rules are enabled.
To reach the highest maturity level, com-
pany-wide objectives regarding process
capability (Cpk) and stability (%OOC)
must be fulfilled and the control limits
must be state-of-the-art.
Charts which utilize SPC evaluations in-
tensely and define limits reasonably are
rated excellent (green). Charts with im-
proper or insufficient valuations are rat-
ed bad (red).
SPC Engineering
The »SPC engineering« report is mainly
designed for process engineers to get an
overview over all technical processes for
a certain time period.
From this report you can see how often
the various violation types have been oc-
curred in your production and the ac-
tions performed by the operators.
You can individually sort by all available
violation types, e.g. trends in the Sigma
chart.
5. September 2006 LineWorks STARGATE 2.0 5
Matching Charts
The »Matching Charts« report shows if
the process average is close enough to
the target values. Usually, the control li-
mit center is compared with the target
value. Alternatively, the comparison can
be done with the values of a master
chart. This might be useful with a pro-
cess running on several tools.
Limit Changes
The »Limit Changes« report shows how
often the SPC system is adjusted to the
process behaviour. Excellent processes
usually do not need much adjustments.
SPC managers get a quick overview of
charts with frequent limit changes to de-
cide if processes are really controlled.
5. September 2006 LineWorks STARGATE 2.0 6
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
LineWorks Product FamilyThe LineWorks product family provides an automation solution with or without MES system.
The LineWorks product family includes:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
RM – Recipe Management
WIP – Work in Process Tracking
iGate – Information Gateway
ECoFrame – Equipment Connection Framework
UA – User Administration
LineWorks STARGATE Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows 2000, XP
For all operating systems Java Development Kit 1.4 is required.
LineWorks STARGATE Client Operating SystemsMS Windows 2000, XP
For all operating systems, Internet Explorer 6 or higher is required.
LineWorks STARGATE RDBMS SupportOracle 9.2 Enterprise Edition
Further database systems on demand.
17. Juli 2006 LineWorks PULSE 1.1 1
LineWorks PULSE
Using LineWorks PULSE managers and engineers get the ideal tool to
improve the efficiency of manufacturing equipment. With LineWorks PULSE
as a fabwide standard tool you achieve complete production traceability.
LineWorks PULSE is the key tool to ana-
lyse downtime problem areas, to achieve
higher equipment uptime, to enhance
the throughput and to increase your re-
turn on invest (ROI). Overall Equipment
Efficiency (OEE) as well as RAM metrics
are calculated according to SEMI-E10
and SEMI-E79 in real-time.
AdvantagesReal-time processing of online equip-
ment messages
Centralized storage in standard data-
bases (Oracle, etc.)
Powerful Monitoring & Reporting
based on modern Web technology
Comfortable analysis and drilldown
features
Overall Equipment Efficiency (OEE)
analysis
Automatic determination of the
required time
RAM measurement
Recipe time analysis and material
tracking
Flexible equipment modelling
Support of cluster tools
High Reliability = 24 hours per day / 7
days a week
17. Juli 2006 LineWorks PULSE 1.1 2
LineWorks PULSE Features
Real Time State Processing
Real time interpretation of equipment
messages according to your freely de-
finable equipment models
Configurable recipe tracking and ma-
terial tracking
Processing of individual production
keys
Online alarming based on configura-
ble alarm conditions for real time state
monitoring
CentralizedAdministration Tool
Comfortable administration and or-
ganization of state models, state inter-
pretation, watchdog settings etc.
Advanced modelling of cluster tools
Modern Java GUI
Hardware independent
User authentification for functions, di-
alogs and administration data
Equipment Online Connection
Connect your equipment to LineWorks
PULSE and see the real life of your ma-
chines. There is a broad range of possibil-
ities to connect your equipment to the
PULSE software online.
Send your equiment states using the
PULSE Online Input Interface via:
– CORBA /IIOP– COM– CAPS/DLB– TIB/Rendezvous
Connect SECS equipment using
LineWorks ECoFrame
Implement the LineWorks PULSE input
client in your existing equipment con-
troller or in your MES system. The
PULSE client function is avaliable in
– C, C++– Java– Turbo Pascal– Visual Basic– Further languages on demand.
17. Juli 2006 LineWorks PULSE 1.1 3
Web Based Monitoringand Reporting
PULSE Web Server allows any web
browser to become an efficient moni-
toring tool to show real time equip-
ment efficiency summaries, states and
the situation of your production.
Fab wide real time data access
Advanced drill down features help to
find improvements
Individual analysis hierarchies
Using trace functions you will have a
powerful search engine.
Equipment Log Book
Visualization of equipment state histo-
ry, material flows, recipe loading, used
equipment programs, etc.
Comparison of tools or modules
Comfortable zoom functions to visual-
ize detailed time slices
Equipment State Monitor
Real time visualization of current tool
states, material and recipe informa-
tion, process variables etc.
Select your tool group, using the
hierarchy tree
See lot names, operation numbers,
material identifications, etc.
17. Juli 2006 LineWorks PULSE 1.1 4
Comfortable Time Analysis
Get more information about
time states of your process cycles
Detect trends of tools and tool groups
Compare divisions, tools and modules
Target group oriented detail levels:
– main states (time model) for management
– sub and detail states (original tool states) for engineering
Drill Down Features
Drill down to learn from detailed
equipment states and events
Interactive charts offer a simple way
to drill down from trend views to com-
pare views and detail reports
drill down ...
17. Juli 2006 LineWorks PULSE 1.1 5
Overall EquipmentEfficiency Analysis
Overall Equipment Efficiency (OEE) is an
important metrics, that will help manag-
ers benchmark the efficiency of their
production. While the expenses for lead-
ing edge equipment are increasing, the
technological lifespan is decreasing.
Equipment productivity is a highly con-
trollable factor which influences the
overall return on investment (ROI) signif-
icantly.
LineWorks PULSE is designed to support
managers in decision-making:
OEE review or drill down for detailed
equipment analysis
See trend reports, comparison reports
and OEE detail reports for tools, mod-
ules, tool groups – using your own
analysis hierarchies
Analyse the OEE figures
– OEE, speed loss, quality loss– OEE efficiency factors – productive losses– OEE and SEMI E10 time analysis
Find the most important losses in the
OEE loss pareto view
Using the SOT method, LineWorks
PULSE can automatically retrive theo-
retical production times.
17. Juli 2006 LineWorks PULSE 1.1 6
RAM Measurement
Take an overview of equipment utiliza-
tion, reliability, availability and maintain-
ability.
See trends, tool-compare and detail re-
ports with one mouse-click.
Tracing Features
Powerful search engine, to find states,
material, comments, failures, alarms,
etc. – using flexible filter conditions.
17. Juli 2006 LineWorks PULSE 1.1 7
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility forany errors which may appear in this document. All company names and product names are trademarks or registered trademarksof their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks PULSE is based on
the camLine Application Server (CAPS).
All interfacing technologies supported
by CAPS (CDLB, CORBA, COM, TIB/Ren-
dezvous) are also available to LineWorks
PULSE.
LineWorks PULSE Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks PULSE Client Operating SystemsMS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks PULSE MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks PULSE RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
17. July 2006 LineWorks RM 3.2 1
LineWorks RMTM
Recipe Management
LineWorks RM offers enterprise wide process security. It ensures that a
product is processed by a piece of equipment correctly. As a full-featured
Recipe Management System (RMS), LineWorks RM assures that all required
data for processing is ready on the equipment.
All process recipes and control parame-
ters are centrally stored in a database.
Each modification is recorded. The ap-
proval and release of recipes makes sure
that a recipe is only used after having
been confirmed by certain persons.
FeaturesManagement of all recipes in a central
database
Cluster Tool Support: Management of
sequence and module recipes
APC support via SEMI E42 compliant
APS (Adjustable Parameter Sets)
Recipe filters for context /process spe-
cific recipe and parameter utilization
Support of recipe upload and down-
load
Version control
Approval for recipe releases
Audit trail
Administration of documents related
to equipment, recipe, or recipe filter
Basic reticle management
Web Reports showing recipe history
17. July 2006 LineWorks RM 3.2 2
Value AddedLineWorks RM can save companies sev-
eral million dollars in material and re-
work by helping reduce the scrap gener-
ated due to wrong recipes and recipe pa-
rameter values to almost ZERO and
guarantee on-time delivery to custom-
ers.
LineWorks RM provides access to recipes
anywhere in the corporate intranet, al-
lowing process engineers to access them
from their offices.
Recipe approval processes avoid the
use of any recipe that may have potential
to scrap the material or cause an acci-
dent.
Recipe management history can play a
vital role and give a new dimension in
yield analysis.
LineWorks RM asCentral Storage ...To improve throughput time and yield
the production line should avoid han-
dling errors and mis-processing due to
incorrect settings.
... of Recipes,With a centralized recipe management
solution corrections and modifications
of the recipes don’t need to be done at
the individual tool.
Using LineWorks RM as an enterprise
wide tool, from one central office the
recipes of all equipments can be admin-
istered and distributed to all production
lines as and when required.
...and APS (Adjustable Parameter Sets)
Adjustable Parameter Sets (APS) offer
variable parameters which are provided
to the equipment in addition to the reci-
pe, but can be adjusted to individual pro-
duction conditions.
17. July 2006 LineWorks RM 3.2 3
APS for Processesand EquipmentLineWorks RM handles generic recipe
bodies and APS. The adjustable parame-
ter sets might either depend on the proc-
ess (recipe filters) the recipe is associated
with or on the equipment that executes
the recipe.
While running a specific manufacturing
process the original recipe may be tem-
porarily modified by process-specific
parameters at the tool. Individual tool
adjustments may be necessary to make
equipment interchangeable and to track
and follow-up the adjustment of wear
and tear.
SearchesSearches can be used to find recipe filters
with certain process-specific information
or parameters. The retrieved parameters
might be updated then simultaneously.
Recipe FiltersRecipe filters provide context-sensitive
access to recipes and their adjustable pa-
rameters. A recipe filter determines the
process-specific context for which the
recipe is chosen, together with appropri-
ate process-specific parameters. Needed
documents and additional customer
data are provided as well.
The filter enriches the recipe by user-de-
finable keys and parameters for process-
specific adjustments.
By assigning various filters, a physical
recipe stored in the LineWorks RM recipe
pool can be utilized very effectively.
17. July 2006 LineWorks RM 3.2 4
Cluster Tool SupportLineWorks RM provides the possibility to
link one recipe to other recipes. This
might be useful for a multi-chamber tool
where each main recipe controls a se-
quence of module recipes. Each of the
module recipes controls one individual
process and can be a sequence recipe it-
self. For each recipe, the recipe structure
stored in the database defines its mod-
ule recipes.
Recipe Download ...At the tool, configuration settings and
individual adjustments are necessary to
run a required manufacturing process.
LineWorks RM always provides the pro-
duction with the matching recipe version
and the current adjusted parameters.
... and UploadThe efficient usage of the central recipe
storage relies on how fast the storage
may be supplied with the up-to-date rec-
ipes.
The recipe upload facility enables the
rapid transfer of productve recipes to the
central recipe storage.
LineWorks RM Opens theWay for APCThe usage of LineWorks RM support the
realization of automated control loops of
Advanced Process Control (APC). In Line-
Works RM, all parameters needed for
APC can be defined.
17. July 2006 LineWorks RM 3.2 5
Automated RecipeApprovalLineWorks RM offers an recipe approval
process. Using Approval Manager, vari-
ous approval boards can be configured
containing certain persons.
In LineWorks RM you define, if a recipe
has to be approved by certain boards or
persons, or if they will simply be notified
via e-mail of the changes made in a reci-
pe.
Reticle ManagementThe Reticle Management allows to store
all needed reticles in the central reticle
pool. From that pool, recipes can be as-
signed the reticles needed with certain
parameters for particular process steps
from.
Traceability throughVersioningLearning from experience is only reliable
if all changes of recipes are recorded
correctly. LineWorks RM gives full admin-
istrative control to all modifications to
guarantee full traceability.
LineWorks RM maintains the history of
various activities. It has a record of the
user activities as well as a history related
to a given recipe and its versions.
SecurityLineWorks RM can be employed with an
extensive security management sys-
tem. After users has logged in using
their individual passwords, LineWorks
RM provides them with their particular
security settings and permissions.
Permissions apply to the authorized reci-
pe import or export, the recipe locking
while it is being edited by another user,
and the recipe approval for production
release.
17. July 2006 LineWorks RM 3.2 6
Web ReportingLineWorks RM generates reports to be
viewed in the Web browser. The Web re-
ports provide easy and fast access to all
information relevant in recipe manage-
ment. They are based on the Web repor-
ting tool LineWorks iGate.
LineWorks RM offers reports about reci-
pes, their history and usage. They allow
easy navigation between different
views on your production by just click-
ing on the information of interest.
InterfacesLineWorks RM communicates with the
manufacturing tool using a station con-
troller, e.g. LineWorks ECoFrame, via a
common SECS/GEM interface.
17. July 2006 LineWorks RM 3.2 7
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP, and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks RM is based on the
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM/DCOM, TIB/
Rendezvous) are also available to Line-
Works RM.
LineWorks RM Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Client Operating SystemsMS Windows 2000, XP
Further systems or versions on demand
LineWorks RM MiddlewareCORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks RM RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
17. July 2006 LineWorks RM 4.1 1/6
LineWorks RMTM
Recipe Management 4.1
Optimized equipment efficiency, traceability and process security are essential requests
asking for a comprehensive control of all factors influencing a manufacturing process.
Without the right recipe at the right place and all additional information needed for the
process to run properly, the fab looses efficiency due to lost time, rework, or scrapped
product. As a full-featured Recipe Management System (RMS), LineWorks RM assures
that all required data for processing is ready on the equipment.
FeaturesManagement of recipes in a central database
Cluster tool support: management of se-
quence and module recipes and their relation-
ship
Recipe objects representing recipe bodies, pa-
rameters, equipment constants, FDC strategies
(Fault Detection and Classification), process-
specific documents, etc.
Registration of recipe objects for context/proc-
ess specific recipe and parameter utilization
Support of recipe object upload and download
Advanced version control and audit trail
Configurable approval and release procedures
Notification management
17. July 2006 LineWorks RM 4.1 2/6
Fulfill the Paradigm ChangeAs a modern RMS, LineWorks RM 4.1 represents
more than pure recipe and parameter administra-
tion. It offers the management of all controllable
components, so-called Recipe Objects. Recipe
Objects cover all pieces of information needed to
define the process target.
Each equipment type is described by means of a
Recipe Object. A recipe object contains a distinct
collection of Data Items. Which data items are al-
lowed or required is determined by the structure
definition. Among others, data items can be:
Recipe body, module and sequence recipe,
binary or formatted
Internal recipe structure
Recipe parameters
Equipment constants
Rules and control limits for parameters, e.g. for
supporting Advanced Process Control (APC)
Additional process relevant documents, e.g.
FDC strategies (Fault Detection Control)
Attributes used by the equipment automation
Once defined for the equipment type, a Recipe
Object can be used for all corresponding pieces
of equipment.
To meet all requirements made on a modern
RMS, LineWorks RM offers:
Management of automatich notifications, e.g.
via email
Approval of recipes
Versioning of recipes
User authorization and permissions
Paradigm Shift
From Recipes to Recipe Objects
Recipe Objects
Sequence Recipe, Module Recipe, Parameter,
Equipment Constant, Reticle, etc.
Registrations
An easy but powerful access to the recipe
objects
Variants
Prepare specialized variants of your recipe
objects
Version Branching
Develop several versions of your recipe object
in parallel
Notification
Be informed about the changes of your recipe
objects
Approval
Approve a recipe before releasing it to produc-
tion
Recipe Object Compare
Binary, masked and range compare
Integration
XML based API via TIB/Rendezvous and CORBA
17. July 2006 LineWorks RM 4.1 3/6
Release Your Recipe ObjectsTo avoid misprocessing due to wrong or invalid
recipe objects, they need to be explicitly released
by particular authorities. LineWorks RM supports
all phases of the release procedure.
Validation
It is checked if the source data recipe object is
syntactically correct, if all required data items are
specified and if the values are in the range given
by the control information.
Approval
Make sure that the control information of the
recipe object (parameter limits) meet the process
target. Rules enable the concept of »minor and
major changes«. All changes which violate a rule
are »major« which means that an approval has to
be performed.
Rules can contain minimum or maximum limits, a
distinct set of values, or free definable expres-
sions which are based on JavaScript, for example.
Qualification
The recipe object is tested on each process equip-
ment to ensure the process capability of the rec-
ipe object.
Release
A recipe object has to be approved before it can
be released for production.
Access Recipe Objects byCluster Tool SupportLineWorks RM provides the possibility to link one
recipe to other recipes, e.g. for a multi-chamber
tool with a main (sequence) recipe controlling a
sequence of module recipes for individual proc-
esses. Module recipes can be sequence recipes as
well. The structure of a recipe stored in the data-
base defines the linked optional or mandatory
module recipes.
RegistrationsWhat really determines the recipe object is a set
of attributes describing how and when it is to be
used, e. g. process step, tool id, product, etc.
LineWorks RM registers a recipe object with a set
of context keys which can be used to retrieve it
later.
Using different context information, users can
register one recipe object for various purposes
more than once.
17. July 2006 LineWorks RM 4.1 4/6
Keep Your Recipe ObjectsUp to DateLineWorks RM supports advanced event-driven
synchronization by a Notification Service. Every
recipe object modification is broadcasted to all
users and third-party systems such as MES (Man-
ufacturing Execution System), document man-
agement system, or external approval system,
that have been registered to be informed about
modifications.
Receivers, rules and contents of a notification can
be administered in LineWorks Notification Man-
ager. The effective use of the notification service
enables process engineers to be always up-to-
date regarding the latest recipe object changes.
Full Version ControlLineWorks RM provides a Version Control System
similar to the Concurrent Version System (CVS).
Track Your Recipe ObjectsLineWorks RM records all changes of a recipe ob-
ject as they happen to guarantee full traceability.
New recipe object versions are created based on
incrementing minor or major version numbers.
Rework, Design and ExperimentsEngineers can prepare special recipes for distinct
lots, products, experiments or tools. New recipe
object versions as well as rework or emergency
recipes can be created within dedicated develop-
ment branches. Via a priority matrix, branches
can be provided with priorities.
Furthermore, variants can be used to implement
special APS configurations for a recipe object, for
example.
17. July 2006 LineWorks RM 4.1 5/6
Open ArchitectureThe advanced level of automation of modern fac-
tories makes high demands on the data ex-
change between the involved systems such as
MES, RMS, APC, or equipment automation.
Lineworks RM supports the upload and downlo-
ag of recipe objects from and to the equipment
automation. In addition, it provides information
about the state and the availability of certain rec-
ipe objects which can be used to plan further
processing.
LineWorks RM publishes all its system interfaces
so that you can extend each of the LineWorks RM
user interface by own functions or replace it com-
pletely with your own client program.
Information is exchanged with XML-based mes-
sages over the middleware CORBA/IIOP or TIB/
Rendezvous. All server components of LineWorks
RM are implemented in pure Java and are there-
fore available on all server systems supporting a
Java Runtime Environment (JRE).
LineWorks RM Opensthe Way for APCThe usage of LineWorks RM support the realiza-
tion of automated control loops of Advanced
Process Control (APC). In LineWorks RM, all pa-
rameters needed for APC can be defined.
SecurityThe security system of LineWorks RM is based on
user authorization and permission management.
With a single login and password, LineWorks RM
provides finely graded security and access rights.
This includes authorized recipe import/export,
recipe locking while it is being edited by another
user, and built-in recipe approval for production
release.
17. July 2006 LineWorks RM 4.1 6/6
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility forany errors which may appear in this document. All company names and product names are trademarks or registered trademarksof their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks RM is based on the
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM/DCOM, TIB/
Rendezvous) are also available to Line-
Works RM.
LineWorks RM Server Operating SystemsHP-UX
IBM AIX
Sun Solaris
SuSE Enterprise Server
SuSE Linux
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Client Operating SystemsMS Windows 2000, XP
Further systems or versions on demand
LineWorks RM MiddlewareCORBA/IIOP
TIB/Rendezvous TIBCO Load Balancing
LineWorks RM RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
3-Oct-2005 LineWorks WIP 4.2 1
LineWorks WIPTM
Work in Process Tracking
LineWorks WIP is the tool for tracking and monitoring jobs and material
throughout the enterprise manufacturing process, offering views from the
bird's-eye view right down to the individual process steps of each job.
LineWorks WIP can be used indepen-
dently or integrated with existing Pro-
duction Planning (PPS) or Enterprise Re-
source Planning (ERP) Systems.
LineWorks WIP supports production con-
trol and the monitoring of material flow,
and is the key element in a reliable pro-
duction environment.
LineWorks WIP allows managers or engi-
neers to track jobs within shopfloor pro-
duction areas in various industries.
"Work In Process Tracking" means mon-
itoring the previous, current and future
process steps, with regard to the num-
bers of good, failed and scrapped parts
resulting from each individual process
step.
LineWorks WIP can simultaneously mon-
itor various types of material flows which
can be orders, charges, lots or serial
numbers – LineWorks WIP summarises
them all as jobs.
3-Oct-2005 LineWorks WIP 4.2 2
LineWorks WIP FeaturesLineWorks WIP offers the following
features:
Tracking production unitsduring manufacturing
Interactive dispatch lists
Job split and merge
Carrier management, e.g. SMIF pod
Identifiable and non-identifiable
subsets
Standard jobs or development jobs for
new products
Locking the parts on each level (job,
process step, subset)
Verifying process stepsand used materials
Full traceability
Optional process steps
Rework with flexible capabilites for
repair and re-process
Alternative process step sequences
Check if equipment is released for pro-
cessing
Provides data for verification of mate-
rials to be used
Documented manufacturing
Guaranteed backtracing for related
production data
Displaying and recording the current
production status of each job
Detailed messages (check-in, process
start, process end, check-out) or
progress messages
Calculation of various indexes: yield,
cycle time, throughput, rework
Documentation of losses and related
reasons
Loss and loss rate statistics
Fast database access by separating
current from historic data
Attachments
3-Oct-2005 LineWorks WIP 4.2 3
LineWorks WIP Modules
WIP Core
Overview of the current state of production
WIP Core makes sure that a product is manufactured according to the pro-cess plan. It documents the individual process steps and the used material and provides an overview of the cur-rent state of your production.
WIP PMDA
Administration of product definitions and parts lists
LineWorks PMDA (Product Main Data Adminsitration) is used to define the main data for a product. This data is the basis for the jobs in WIP.
A process plan and a parts list describe how to produce the product. The parts in the parts list can be linked to process steps or directly to the job. Multiple structuring levels can be arranged to build a process plan.
WIP CarMa
Administration of production units
WIP Carrier Management allows the flexible administration of carriers (FOUP, SMIF pods, cassettes, boxes) and the contained material. Production units can be arranged in groups on var-ious hierarchy levels, e.g. serial num-bers on carriers in boxes on palettes.
LineWorks UA
User administration
LineWorks User Administration man-ages users, user groups, divisions and object permissions.
WIP ERP Interface
Information exchange with sys-tems like SAP, Workstream, Promis
LineWorks WIP can be provided with data from an Enterprise Resource Plan-ning System (ERP) through the CAPS client interface, e.g. Job (lot Id, charge Id, work order), Product Id, Process Plan, Feedback Indicator, or Parts List as well as various other parameters to synchronize the ERP information with the LineWorks WIP module.
A public interface is provided to sup-port the integration of WIP with the ERP to share the required data. In many systems the WIP interface can be di-rectly embedded into the ERP environ-ment.
Besides the »create job« feature the LineWorks WIP ERP interface offers a flexible feedback to the superordinate production planning system.
WIP MaMa
Tracking and monitoring of materials
WIP Material Management provides the tracking and monitoring of materi-als based on the defined stock.
3-Oct-2005 LineWorks WIP 4.2 4
Detailed Control of ProcessSequences and RoutesLineWorks WIP allows detailed control of
process sequences and routes.
The production units are either identi-
fied, e.g. via a production key, a number,
a name or a barcode, or exist as non-
identified subsets.
Using LineWorks WIP you will get an
overview of the current state of your pro-
duction which can be used for feedback
to the production planning system or op-
timized capacity planning and utilization.
LineWorks WIP makes sure that the indi-
vidual process steps are performed in the
correct order. In addition, it documents
all used materials so that you can check
if your products are manufactured exact-
ly according to the appropriate process
plan and parts list.
Loss or failure reasons can be recorded
during the production process and anal-
ysed via statistics.
The data gathered and managed in Line-
Works WIP contains basic information
for the other LineWorks modules such as
PULSE, SPACE, ECoFrame, or Recipe
Management.
Therefore, the features offered by Line-
Works WIP are of essential significance
for the area of production data acquisi-
tion.
3-Oct-2005 LineWorks WIP 4.2 5
Alternate Process StepsLineWorks WIP supports alternate pro-
cess steps or routes, any number of
which are defined in the Process Plan.
The Process Plan is defined in the WIP
PMDA module or an external ERP system
and sent to Lineworks WIP at run-time.
LineWorks WIP offers the possibility to
define alternative process steps or routes
and select them for execution. Line-
Works WIP tracks which one of the alter-
nate process steps is used and verifies
the correct sequence of steps.
Split & Merge JobLineWorks WIP internally supports Split
& Merge of jobs. Using WIP you specify
how many pieces from the master job
should be sent to the Split job, for exam-
ple. A Split job carries a new job id, a
new process plan and a new parts list.
Via the LineWorks WIP API you can de-
scribe the details for each split, e.g. the
number, quantity, process plan and parts
list.
The Merge function does exactly the
same as the Split function in reverse,
moving pieces back to a defined process
step in the master job.
3-Oct-2005 LineWorks WIP 4.2 6
ReworkIn LineWorks WIP it is possible to define
two different rework scenarios: sched-
uled and non-scheduled rework.
Non-Scheduled Rework
Non-scheduled rework is called for if an
unexpected event occurs, for example, a
process step may fail due to equipment
malfunction.
To repair the failure a Repair Job can be
generated with an individual process
plan and parts list and delivered to WIP.
The Repair Job works similar to the Split
& Merge procedure. However, all pieces
are moved to the repair job.
After completion they are moved back
into the defined process step to progress
the original job.
Scheduled Rework
Scheduled rework usually depends on
measurements taken during the produc-
tion process. If the result of the measure-
ment is outside of the required limits a
rework route will be used for reworking
the failed piece.
After rework, the piece could be routed
back to the measurement process step,
or routed to a different process step as
required.
When failed units are detected regularly,
a scheduled rework route will be speci-
fied in the process plan for failed pieces
and will be defined in the Product Main
Data Administration (PMDA) or in the ex-
ternal Enterprise Resource Planning (ERP)
system.
3-Oct-2005 LineWorks WIP 4.2 7
WIP Online ReportsWIP Online offers Web reports which can
be viewed in the Web browser. WIP On-
line reports offer:
Current list of all jobs that are not
started, started, in progress or finished
Dispatch list with jobs related to pro-
cess steps
Overall set, subset, failure per job and
process step
Jobs and split jobs per process step
Production time per job, process step,
subset or individual part, respectively
Various yield calculations
Numerous other reports regarding
jobs, process steps, stations and pro-
duction time
»Diary« of individual subsets (serial
numbers)
WIP APIUsing the LineWorks WIP API (Applica-
tion Programming Interface) you can in-
tegrate numerous WIP functions into the
program environment of your produc-
tion equipment.
WIP Online AcquisitionWIP integration can be facilitated by de-
ploying the camLine product LineWorks
ECoFrame providing powerful client
functions to accomplish equipment au-
tomation.
Using LineWorks ECoFrame, WIP can be
employed for online data acquisition
and monitoring.
3-Oct-2005 LineWorks WIP 4.2 8
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility forany errors which may appear in this document. All company names and product names are trademarks or registered trademarksof their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks WIP is based on the
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM, TIB/Rendez-
vous) are also available to LineWorks
WIP.
LineWorks WIP Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8 and 9
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks WIP Client Operating SystemsMS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks WIP Supported Web BrowsersMicrosoft Internet Explorer 5.5 or higher
LineWorks WIP MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks WIP RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
RM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection Framework
iGate – Information Gateway
UA – User Administration
7. August 2006 LineWorks ECoFrame 1.8 1
LineWorks ECoFrameTM
Equipment Connection Framework
LineWorks ECoFrame offers an efficient way to automate equipment includ-
ing equipment data collection, data routing and remote equipment control.
Data is automatically retrieved from the equipment guaranteeing highest
data quality as well as most detailed information.
Using LineWorks ECoFrame, equipment
automation can be realized with little ef-
fort. By simple configuration, alarms,
events, or process data are routed to
other LineWorks modules. Data routing
to third party solutions can be integrated
as well.
FeaturesBroad range of equipment connec-
tions via SECS, HSMS, OPC, Profibus
OPC, CORBA, Digital I/O
Combining and selecting relevant
equipment parameters
Enabling facility alarms, event reports,
or process data logging
Configurable data routing of alarms,
events or process data to other Line-
Works modules or third party solutions
Recipe download, upload or select
Optional equipment control
SEC (Statistical Equipment Control) in
combination with LineWorks SPACE
Monitoring equipment via LineWorks
PULSE
7. August 2006 LineWorks ECoFrame 1.8 2
Equipment Data Alarms, Events, Variables
All equipment data provided by the man-
ufacturer can be used for processing.
The user chooses the relevant data and
defines how to use them further. For ex-
ample:
A variable to be monitored via SPC will
be collected during processing and sent
to LineWorks SPACE.
The process start and process end events
are sent to LineWorks PULSE to record
the productive time as well as the idle
time of the equipment.
With the aid of the administration fea-
tures of LineWorks ECoFrame the data
collection for a complete facility logging
file can be specified in LineWorks PULSE.
By that a lot track, recipe track, info
track, alarm track and/or time track can
be written.
Data Routing
In the ECoFrame Administration, it can
be defined for all equipment data where
the data is to be further processed.
For further processing the LineWorks
modules SPACE, PULSE, PDC and/or oth-
er existing applications can be specified.
Contextual Information
In the ECoFrame Administration, individ-
ual contextual data and constants such
as operation or lot number can be de-
fined.
The contextual information can be com-
bined with the equipment data and sent
to other applications.
7. August 2006 LineWorks ECoFrame 1.8 3
ComprehensiveCIM Automation
Facility Specific Dispatch
The interface to Lineworks WIP offers the
possibility to link contextual information
with the equipment data. This interface
can be extended to existing MES sys-
tems, e.g. SAP/R3, Workstream, or
Promis.
User Administration
Extension of LineWorks ECoFrame for
the administration of users, divisions and
security levels.
ECoFrame MultiplatformClientThe ECoFrame Multiplatform Client of-
fers the same features as the ECoFrame
Standard Client 1.8. It supports equip-
ment connection via SECS, OPC, Profi-
bus OPC, CORBA, and Digital I/O.
Recipe Management
LineWorks RM provides central manage-
ment of programs and recipe files. Using
keys from the facility dispatch the correct
recipe is automatically provided for the
lot to be processed.
7. August 2006 LineWorks ECoFrame 1.8 4
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks ECoFrame is based
on the camLine Application Server
(CAPS). All interfacing technologies sup-
ported by CAPS (CDLB, CORBA, COM,
TIB/Rendezvous) are also available to
LineWorks ECoFrame.
LineWorks ECoFrame Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks ECoFrame Client Operating SystemsMS Windows NT, 2000, XP / Further systems or versions on demand
LineWorks ECoFrame MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks ECoFrame Communication ProtocolscamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP, COM (via CAPS OLE Gateway), TIB/Rendezvous TIBCO Load Balancing
SECS I, HSMS-SS, Digital I/O, OPC, Profibus-OPC
LineWorks ECoFrame RDBMS SupportOracle 9i
LineWorks products include:
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
8. August 2006 LineWorks iGate 2.3 1
LineWorks iGateTM
Information Gateway
LineWorks iGate is a component-oriented visualization framework for
Web-based reporting. It is developed to provide easy and fast access to all
information available in various databases. It is a powerful reporting tool
to meet the requirements typical in production. The so-called 80%
solution can be achieved very quickly on the basis of re-usable components.
LineWorks iGate FeaturesDashboard functionality: define a col-
lection of reports you are interested in
Publishing by configuration
– easy and fast creation of reports
– configuration using XML files
– Uniform configuration with style
sheets stored centrally on a server
Best support for drill down approaches
Easy linking of reports over different
databases
Servlet library with common report
layout components which is regularly
extended by camLine
Online modification of reports without
restarting
Authentication and access control,
Hierarchical menus
e.g. with LineWorks User Administra-
tion (UA)
Plugin support for
– user-defined modifications of charts
and data sources
– the import of arbitrary data like csv
files, text files etc.
Blob support. Storage of any files such
as MS-Excel, images, zip-files etc.
WIP RM Third Party
Local DBs
OtherData Sources
LineWorks iGateWeb
Browser
XML Configuration
Files
Integration of data from
LineWorks products
such as WIP or RM
Third party products
Local customer database
All accessible data sources
8. August 2006 LineWorks iGate 2.3 2
Common Web Page Layout
High SecurityLogin required
Different users have
different permissions
Central permission and
password administration
Users can view a piece of
information only if they have
the corresponding
permissions
Main menus and sub menus
Navigation trees
Results area
Main and Sub MenusMain menu used to separate by prod-
ucts, user groups, etc.
Sub menu depends on the main
menu selection, displays detailed
views or adds constraints
Period under observation can be
specified
Each menu item can be provided with
user access control, e.g. by Line-
Works User Administration (UA)
8. August 2006 LineWorks iGate 2.3 3
TreesTrees used to change the detail level of
the report with drill down
Flexible linkage with reports per tree
level
Main menu, sub menus and trees may
be linked together in any combination.
Filtering and SortingA table can be sorted by clicking on the
heading of a table column by which the
data recoreds should be sorted.
You can filter data to only display the sig-
nificant information.
Results AreaResults Area with header, body, and
summary section
Body section with visual components
and their configuration such as tables-
charts, and text. The contents can be
linked, filtered, sorted, or exported in
various file formats.
Drill Down and LinkingDrill down means to create a new report
via clicking on a sensitive area within the
original report. Underlined data items
contain so called drill down links. By
clicking such a link you receive a more
detailed report, based on the selected
item.
8. August 2006 LineWorks iGate 2.3 4
Supported ChartsCharts provide a convenient way to ana-
lyze the data. Especially interactive charts
make work much easier.
By simply clicking on a linked data you
can drill down from a first overview to
various detail views.
LineWorks iGate provides the following
chart types. You can adjust them to your
own needs.
Category chart
Box plot chart
Bar chart
Line chart
Combined line and bar chart
Pie chart
Wafermap chart
XY plot chart
Dynamic NavigationFunctions
Zoom in / out the whole plot area
Zoom in a chart sector
Scroll up / down the value axis
Scroll forward / backward the domain axis
Reset the chart navigation
Scale up / down the chart
8. August 2006 LineWorks iGate 2.3 5
The DashboardThe dashboard provides an easy and fast
way to show how well your production is
performing right now. You will receive
an up-to-date snapshot into production
at various places of your site.
With one mouse-click, you display the
collection of reports of your personal in-
terest.
With a few simple touches you create
your own dashboard with all wanted
reports:
– Defining the number and size of
dashboard segments
– Placing the desired reports in the
dashboard
Creating a dashboard with all
wanted reports
16. August 2006 LineWorks UA 2.3 1
LineWorks UATM
User Administration
LineWorks UA offers the possibility to manage users, user groups, divisions
and permissions. Users have access to an object if they are assigned to a
user group which has the corresponding permissions in the division the
object belongs to.
User Groups ...
... state which access rights to which ob-
jects are granted. Each group defines a
specific permission profile. These permis-
sions have no influence on the data entry
itself, but are related to the administra-
tion, this means the viewing, creating
and editing of objects.
Divisions ...
make up a category above users and user
groups. In each division users can belong
to a certain group, i.e. in each division
they can have specific object permis-
sions.
In the Division »Frontend«, User Meyer belongs to the Group »Gast«, which has the permission to view charts. As member of Group »Expert« in Division »Lithography«, User Meyer can create and delete reports.
If users miss the ’read’ permission
the object will even be invisible
for them.
16. August 2006 LineWorks UA 2.3 2
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family provides
an automation solution with or without
MES system. Like every other LineWorks
product, LineWorks UA is based on the
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM, TIB/Rendez-
vous) are also available to LineWorks UA.
LineWorks UA Server Operating SystemsHP-UX 11.i
Sun Solaris 6, 7
SuSE Enterprise Server 8, 9
MS Windows 2000
Further systems or versions on demand
LineWorks UA Client Operating SystemsMS Windows 2000
Further systems or versions on demand
LineWorks UA MiddlewarecamLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
LineWorks UA RDBMS SupportOracle 9i
Further database systems on demand
LineWorks products include
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
6. September 2006 camLine Application Server – CAPS 1
CAPSTM
camLine Application Server
camLine presents the CAPS framework for your manufacturing infrastruc-
ture. Plug your different IT components together and take advantage of the
CAPS integration capabilities.
Based on a range of field proven middle-
ware and database architectures, CAPS
links your business systems together us-
ing a three-tiered client server architec-
ture. Major advantages are ease of use
and maintenance, fault tolerance, ro-
bustness and high availability, offline and
recovery capabilities, and high transpar-
ency as well as support for a wide range
of software standards.
The user may replace, upgrade or take
off-line a single layer without affecting
the others. This provides the open frame-
work for easy future updates of software
or even of hardware components.
Compared to the more simple message
bus systems a three-tiered client server
architecture provides overall higher relia-
bility. Even complex client server transac-
tions remain simple and easy to monitor
and debug, but are still fully transparent
to the user.
Performance of a transaction is reliable
and stays within predictable ranges. No
matter if you are using CAPS with ten or
a hundreds of clients, if you do one
transaction per hour or a thousand
transactions per minute: the system
keeps up performance, scales with the
requirements, stays reliable and is still
easy to maintain.
Business Logic Layer
,
Communication Layer
camLine Application Server (CAPS) – Architecture
SQLMapping
ORACLE
... others ...
Service 1
Service 2
Service 3
Service 4Service n
CDLB CORBA / IIOP TIB / Rendezvous
Factory Network
Core Layer RDBMS Layer
DB APICAPS Core
Any number of applicationspecific services
True Three Tiered Client Server ArchitectureCAPS is a three-tiered client serv-
er architecture with distinct pre-
sentation, application and data-
base layers.
6. September 2006 camLine Application Server – CAPS 2
Join the Future with Software Standards
In addition to the camLine Dynamic Load
Balancing Protocol (CDLB), CAPS sup-
ports most of the communication stand-
ards that are currently available.
Application servers can be started in
CORBA/IIOP mode, camLine DLB Proto-
col mode, COM (using the CAPS OLE
Gateway) or TIB/Rendezvous mode de-
pending on a startup flag and without
the need for any recompilation.
Multiple instances of the same applica-
tion server image may run in different
communication modes at the same time.
The benefit from this is that it is not de-
pendent on a single middleware strategy
and may use different middleware com-
ponents simultaneously or even change
the underlying middleware component
of a business application at runtime.
The CAPS to database connection con-
forms to the ANSI SQL standard. Other
databases can be supported on custom-
er request.
Building clients with Java ensures that
your application front-ends are highly
portable and run over a variety of plat-
forms with the same look and feel.
Furthermore you can use the de facto
middleware standard CORBA to access
your application servers through an Ob-
ject Request Broker (ORB).
The CAPS COM / OLE Automation Gate-
way enables you to connect to CAPS ob-
jects from popular developing environ-
ments like Microsoft Visual Basic or Bor-
land Delphi without any knowledge of
communication internals.
camLine Application Server (CAPS) – Application Scenarios
Factory Network
CDLB
camLine Application
Server 1
TIB / Rendezvous
camLine Application
Server 1CORBA / IIOP
camLine Application
Server 1
CDLB CDLB CORBA / IIOP
ORB:any supported programming
languagee.g. JAVA
(recommended)C/C++
TIB / Rendezvous
DLL WIN16/32C Lib UNIX /
ANSI C
ORACLE
DLL WIN 16/32(C-Lib UNIX /
ANSI C)
MS Visual C Borland C
MS Visual Basic Smalltalk
DLL WIN 16/32(C Lib UNIX /
ANSI C)
OLE Gateway
RAD:Visual Basic
Borland Delphi
OLE Gateway
CORBA / IIOP
OLE Gateway
RAD:Visual Basic
Borland Delphi
OLE Gateway
6. September 2006 camLine Application Server – CAPS 3
Dynamic Load BalancingThe camLine Dynamic Load Balancing
Protocol (CDLB) is a key feature of the
CAPS framework. CDLB offers various
features like a naming service and adap-
tive client routing.
Based on CDLB and Oracle Parallel Serv-
er, for example, fault tolerant, high avail-
ability systems can be set up.
Together with the advanced offline capa-
bilities CDLB improves overall middle-
ware stability and minimizes administra-
tion overhead on the enterprise frame-
work architecture.
CDLB offers
enterprise wide naming service
application transparent adaptive client
routing
application transparent offline capabil-
ities
fault tolerant and highly available in-
frastructure
highly efficient administration of CDLB
clients on shopfloor level
Performance, Fault Tolerance, High Availability
CAPS provides a fault tolerant middle-
ware architecture based on the camLine
Dynamic Load Balancing Protocol
(CDLB).
Loads are distributed over distinct nodes
and application server instances by a
ticketing mechanism.
Enterprise wide name services and dy-
namic client routing in combination with
Oracle Parallel Server allows for a fault
tolerant and highly available system.
Additional information or technicalspecification: can be found under:
General: http://www.camline.com
CORBA 2.2: http://www.omg.org
ANSI-SQL: http://www.oracle.com
TIB/Rendezvous: http://www.rv.tibco.com
6. September 2006 camLine Application Server – CAPS 4
Adaptive Client RoutingCAPS provides the possibility to start
more than one instance of an application
service. Those CDLB application servers
offer so called ’tickets’ to indicate if they
are currently idle and ready to process
new requests.
In the first phase the CDLB client asks the
naming services on the different nodes
for the address of the application servers
it wants to call.
The naming service on each node pro-
vides a list of application servers that are
currently available. In the second phase
the client tries to obtain a ticket from
one of those application servers.
This is done via a round robin algorithm,
i.e. the client starts at an arbitrary node,
scans the application server(s) – one after
another – for available tickets until it has
successfully got one. This ticket is the
permission to send a request to the ap-
plication server.
For the next request, the CDLB client per-
forms the same tasks again (though for
performance reasons it starts where it
got the ticket last time). This mechanism
assures that – if an application server is
busy or a whole node is down – the cli-
ent is able to perform its request possibly
on another application server or node.
Very Fast and Fully Transparent
The whole task of allocating an applica-
tion server is very fast and fully transpar-
ent to the client.
The client application isn’t aware of a
switch from one application server to an-
other nor does it notice a switch from
one node to another.
6. September 2006 camLine Application Server – CAPS 5
Advanced Offline CapabilitiesIf the network connection from a client
machine to the application server is com-
pletely down for example, clients can’t
obtain tickets. CDLB provides another
useful feature to move around problems
like this.
With the CAPS advanced offline capa-
bilites a client can be configured to log
its data and requests into an offline file in
case of a network breakdown, for exam-
ple.
The data is stored in a local file and can
be uploaded later, when the application
servers are back online. The stored re-
quests are performed when the connec-
tion is working again.
As you see, though there might be no
server connection at all, the client can
continue to process. Furthermore this
feature is fully transparent to the client
application - depending on the configu-
ration the client doesn’t even notice
whether it is currently online or offline.
The offline feature is broadly configura-
ble to provide the following options:
Store all data
Store data for specific applications
only
Try to go online at each new request
Stay offline and try to upload only af-
ter a specified downtime
Full recovery of stored data
Filtered recovery of stored data
Partial recovery of stored data
Not all applications are fully able to work
properly with the advanced offline capa-
bilities. A client that is uploading test
data to an application server would be
able to continue working, but a client
that is downloading data (e.g. recipes)
from the application server may not be
able to continue when the network is
down.
6. September 2006 camLine Application Server – CAPS 6
CAPS OLE GatewayThe CAPS architecture is a leading three-
tier client server environment to build en-
terprise wide CIM frameworks. The
CAPS client provides a dynamic interface
structure similar to the CORBA IDL spec-
ification.
Besides CORBA, the Microsoft COM
specification is an emerging middleware
interface standard. CAPS clients support
the OLE 2.0 Automation specification by
providing a dynamic OLE Automation in-
terface.
Several software development tools such
as Microsoft Visual Basic, Visual C++ or
Borland Delphi are supported.
By using the CAPS OLE Gateway, the end
user can take the advantage of interfac-
ing independent GUI front-ends to the
field proven CAPS client server architec-
ture.
The CAPS OLE Gateway support can only
be used together with the CAPS client
server architecture.
The Common InterfaceStructure
The OLE Gateway offers the common in-
terface structure to several software sys-
tems and applications such as Microsoft
Excel or Java, for example.
The OLE Gateway combines the free
choice between various OLE capable de-
velopment environments on the client
side with the benefits of the CAPS
framework on the server side.
The CAPS OLE Gateway offers
Transparent and dynamic OLE
Automation interface structure
Automated CAPS interface
definition query support
Windows 32-bit support (only)
Automated type library
generator
Compliance to the OLE 2.0
Automation specification
6. September 2006 camLine Application Server – CAPS 7
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errorswhich may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
Jetzendorfer Strasse 685238 Petershausen, Germany
phone: +49-8137-935-0fax: +49-8137-935-235
email: [email protected]: www.camline.com
LineWorks Product FamilyThe LineWorks product family offered by
camLine provides an automation solu-
tion with or without MES system. Each
LineWorks product is based on CAPS. All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM, TIB/Rendez-
vous) are available to all LineWorks prod-
ucts.
CAPS Communication LayerscamLine Dynamic Load Balancing (CDLB)
CORBA/IIOP
COM (via CAPS OLE Gateway)
TIB/Rendezvous TIBCO Load Balancing
CAPS Server Operating SystemsHP-UX 11.i
IBM AIX 4.3.3
Sun Solaris 5.8
SuSE Enterprise Server 8
MS Windows NT, 2000, XP
CAPS Client Operating SystemsWindows NT, 2000, XP and all the server platforms mentioned above
CAPS RDBMS SupportOracle 9i and further databases on demand
Client Programming Language SupportMicrosoft VisualBasic, Microsoft Visual C/C++
Borland C, Borland Delphi
Smalltalk
Java
and all others that are capable of using CORBA/IIOP or COM
LineWorks products include
SPACE – Statistical Process Control
SQM – Supplier Quality Management
STARGATE – SPC Quality ReportingPULSE – Equipment Efficiency and OptimizationRM – Recipe Management
WIP – Work in Process Tracking
ECoFrame – Equipment Connection FrameworkiGate – Information Gateway
UA – User Administration
10-Oct-2005 PAA (Part Average Analysis) 1
PAA (Part Average Analysis)
camLine offers a new self-contained online software solution for the mass
production that is highly specialized in the treatment of abnormal test data
(PAA). The long-term employment inside a productive environment at test
stations enables the consistent evaluation of all (semi finished) goods at se-
rial number level.
The application is designed for high
product variety and also for shortest re-
sponse times to meet the demands of
the electronic and semiconductor indus-
tries. An ORACLE database forms the
backbone of the application and guaran-
tees the complete documentation of all
PAA results.
A powerful web based reporting tool en-
ables all kinds of traceability queries. The
PAA module is easily integrated into al-
ready existing computing environments.
The solution is scalable and applicable
across diverse system platforms.
camLine's LineWorks product family is
complemented by a new and independ-
ently working PAA module that is devel-
oped to implement the part average
analysis into a manufacturing environ-
ment.
The module is designed to facilitate the
early detection of parts with high risk of
later failure. In all test areas abnormal
behavior of good parts that otherwise
would pass the test will be instantly de-
tected at serial number level. Parts with
increased risk are being filtered out and
rejected.
The implementation into the mass pro-
duction requires short response time that
are of particular importance to validate
the parts and their test results in real
time. Every test station sends its test data
to the central PAA server which will in-
stantly analyze the data. These server
calls transfer the PAA results back to the
test stations as return values. At the test
stations the test programs can proceed
and instantaneously make use of the
PAA validations.
The high variety of products and manu-
facturing processes requires parallel
processing of different part average
analyses. The PAA module offers an own
caching mechanism to hold a PAA in-
stance, separately for each analysis.
10-Oct-2005 PAA (Part Average Analysis) 2
The PAA instances follow a specific con-
cept that was originally developed by
camLine and is proven in practice due to
its high flexibility within other LineWorks
products: Each instance, i.e. each PAA
analysis, is identified by an arbitrary set
of key names that enable the introduc-
tion of sorting and grouping criteria.
In the background an online database is
kept as slim as possible to support the
cache mechanism of the PAA instances.
The cache itself is operating with test
data and PAA results that are taken only
from a short-term sliding window.
This approach is essential to guarantee
the required high performance for all
real-time analyses. The long-term docu-
mentation of the PAA results is provided
by an own history database that is being
supplied with data from the online data-
base section by a separate PAA back-
ground server.
The PAA module itself makes use of Line-
Works iGate to provide standardized or
customer specific web reporting. The
data are taken either from the history
but also from the online databases.
To communicate and configure the PAA
module camLine offers a standardized
API that may be integrated into the test
programs. Doing so the programmer is
able to determine and control all PAA in-
stances via the already existing test pro-
grams. The advantage is evident: Using
the API the PAA module becomes totally
configurable from the test stations.
There is no need for an extra GUI to set-
up and administrate PAA.
The application server of the PAA mod-
ule is based on the CAPS (camLine appli-
cation server) middleware architecture.
For many years CAPS has proven itself to
be noticeably well suited for a long-term
usage inside a manufacturing environ-
ment. CAPS is designed to operate and
communicate across diverse platforms
that facilitates the integration into an al-
ready existing IT landscape.
Furthermore CAPS offers a proven con-
cept for dynamic load balancing (DLB)
which is an essential aspect to guarantee
short response times. CAPS consists of
an inherent scaleable architecture that
allows adapting the PAA module to in-
creasing system load and data through-
put. Due to its modularity the deploy-
ment of the server software onto diverse
server hardware permits flexible arrange-
ments and meets all practical demands
for system integration.