Capacitance C = 200 mFSeries resistance ESR = 24 OhmEnergy density E = 0.03 Wh/kgPower density P = 0.1 kW/kg

Electrode width is 25 mmElectrode length is 125 mmAluminum is both side coatedCoating thickness is 5 micrometer

Stainless steel Capacitor (30mm x 20mm x4 mm)

cluster beam

mask substrate

E. Barborini et al. Appl. Phys. Lett. 77, 1059 (2000)

Patterned deposition

Array of 225 nanostructured TiO2 sensors

Nanocarbon capacitive humidity sensor

Test for gene-delivery arrays

The research goal is to produce The research goal is to produce an electronic nose for food an electronic nose for food recognizing purposes. Using the recognizing purposes. Using the PMCS is possible to produce PMCS is possible to produce with a one-step process an array with a one-step process an array of slightly different sensors on a of slightly different sensors on a micro-fabricated array.micro-fabricated array.Analyzing the different response Analyzing the different response a very sensible sensor could be a very sensible sensor could be producedproduced

• Thin film based gas sensors: intelligent sensorsThin film based gas sensors: intelligent sensors

An example of a pattern (225 An example of a pattern (225 sensors with 1 mmsensors with 1 mm22 area) of ns- area) of ns-TiOTiO22 thin films deposited on a thin films deposited on a

micro fabricated array. micro fabricated array.

Prototypes (2)Prototypes (2)

An example of technological partnership:An example of technological partnership:

The Nanowave ConsortiumThe Nanowave Consortium

Member of the consortium:Member of the consortium:

• Marconi Selenia Communication (60%), a major player in the Marconi Selenia Communication (60%), a major player in the telecommunication market for terrestrial, naval and avionic telecommunication market for terrestrial, naval and avionic applicationsapplications

• Lab33 Srl (20%) a former INFM spin-off founded in 1998, involved Lab33 Srl (20%) a former INFM spin-off founded in 1998, involved in the development and production of electronics cards for industrial in the development and production of electronics cards for industrial automationautomation

• Tethis Srl (20%)Tethis Srl (20%)