CGH Aspheric Null “DEMOCGH” - Diffraction International · 2018. 9. 26. · CGH Aspheric Null...

$Page 1: CGH Aspheric Null “DEMOCGH” - Diffraction International · 2018. 9. 26. · CGH Aspheric Null “DEMOCGH” Job No. C03XX Purchase Order No. 1234567 Release No. 50R-0595 22 January$
ENCODING AND FABRICATION REPORT

CGH Aspheric Null

“DEMOCGH”

Job No. C03XX Purchase Order No. 1234567

Release No. 50R-0595

22 January 2004

Submitted to:

Your Name

Your Company

Prepared by:

Diffraction International 11345 Highway 7, #421

Minnetonka, Minnesota 55305-5300 Tel: 952-945-9912


CERTIFICATE OF COMPLIANCE

Job No. C03XX Purchase Order No. 1234567

22 January 2004

Part Names:

“DEMOCGH”, Release No. 50R-0595

Submitted to:

Your Name

Your Company

This is to certify that the above referenced parts conform to all specifications outlined in above referenced purchase order except as noted herein. Additional documentation supporting this

certification is on file and available for review upon request.

_______________________________ Quality Assurance Manager

Exception: None.

Instructions for Use, CGH Null S/N: 50R-0595, “DEMOCGH”

Instructions will assume that the interferometer is horizontal and the CGH is oriented with the frame logo upright.

1. Attach Zygo 4-inch F/1.5 transmission sphere to interferometer.

2. Install HA50D0 Alignment CGH and 6-axis CGH positioner in converging test beam at 90 mm before cat's eye focus with CGH logo facing interferometer. We recommend attaching the CGH positioner to a linear slide (i.e. radius slide) traveling parallel to the interferometer axis. Use one of two keyed orientations in attaching CGH to positioner.

3. If you require that pupil mapping be deterministic, you must align the CGH perpendicular to the interferometer axis. Temporarily remove transmission sphere—this may require that you remove or axially translate the CGH. With interferometer in align mode, adjust CGH tilt and tip as if testing a flat. Replace transmission sphere and return CGH to its nominal location.

4. Adjust CGH focus and decenter to acquire the alignment interferogram. Acquisition may be easiest with the interferometer in alignment mode. The segmented aperture should look like three blades of a propeller. Adjust HA50D0 clock to align the horizontal and vertical alignment aperture edges to the sensor array of your camera. Fine adjust HA50D0 translation to minimize tilt and focus fringes in the alignment interferogram. The CGH is flat to only about 1 micron so you may observe 2 to 3 fringes of irregularity.

5. Replace HA50D0 Alignment CGH with custom CGH null. Fine adjust CGH centration to remove tilt fringes from reflective retro aperture. You should not need to further adjust the CGH null.

6. Mount test optic in 5-axis or 6-axis positioner at 140.900 mm beyond the CGH face or 50.900 mm beyond the cat's eye focus. The test optic vertex should be 2.000 mm below the interferometer and CGH axes. To assist with alignment, the CGH produces a focused spot at the test optic vertex.

7. Place an opaque white flag with 2.0 mm aperture at 0.5 mm after the cat's eye position. From the interferometer side you should observe a diffraction pattern. The well-focused spot that remains if the CGH is removed is zero order. The spot 2.0 mm below zero order is first order. Position the aperture flag to pass only this first order focused spot.

8. Adjust test optic alignment to direct the test beam onto the white aperture flag. Continue adjusting test optic alignment to better focus the test beam and direct it back through the aperture flag. After acquiring interferogram, adjust interferometer focus and zoom.

9. Adjust test optic alignment to null the interferogram.

10. Record the interferogram.

11. If the test optic is mounted on a radius slide, you may check its base radius. Remove the CGH null and translate the test optic to cat's eye null. The translation is nominally 50.854 mm.

29Jul03 sma/ccl




DOUBLE PASS RAYTRACE MODEL

Surfaces and Apertures *LENS DATA DEMO CGH SRF RADIUS THICKNESS APERTURE RADIUS GLASS SPE NOTE OBJ -- 4.772047 1.000000 AIR Cat's Eye 1 -4.772047 -- 1.592520 K AIR * 4-inch F/1.5 AST -- -- 1.000000 AK SILICA C * CGH Carrier 3 -- P -0.118110 0.760000 K SILICA C * CGH Phase 4 -- -- 1.000000 K AIR * CGH Backside 5 -- -- 0.039370 K AIR * Field Stop RFS 1.692913 -- 0.450000 RK REFLECT * ASPHERIC 7 -- P -- 0.039370 PK AIR P * Field Stop 8 -- P -- 1.000000 PK SILICA P * CGH Backside 9 -- P -- 0.760000 PK SILICA P * CGH Phase 10 -- P -- 1.000000 PK AIR P * CGH Carrier 11 -4.772047 P -4.772047 P 1.592520 PK AIR P * 4-inch F/1.5 IMS -- -- 1.000002 S Cat's Eye *CONIC AND POLYNOMIAL ASPHERIC DATA SRF CC AD AE AF AG 6 -1.000000 -0.167791 0.216942 -0.318496 0.295477 *HOLOGRAPHIC OPTICAL ELEMENT DATA 2 HOR -1 HWV 0.632820 HV1 1 HX1 -- HY1 -0.078740 HZ1 -3.543307 HV2 1 HX2 -- HY2 -- HZ2 -3.543307 *TILT/DECENTER DATA 2 DT 1 DCX -- DCY -- DCZ -1.228740 GC 1 TLA -- TLB -- TLC -- 3 DT 1 DCX -- DCY -0.078740 DCZ -- TLA -- TLB -- TLC -- 4 DT 1 DCX -- DCY 0.078740 DCZ -- TLA -- TLB -- TLC -- 5 DT 1 DCX -- DCY -0.078740 DCZ -4.791732 GC 1 TLA -- TLB -- TLC -- 6 DT 1 DCX -- DCY -0.078740 DCZ -6.775984 GC 1 TLA -- TLB -- TLC -- *PERFECT LENS DATA NO PERFECT LENS DATA *APERTURES SRF TYPE APERTURE RADIUS 1 SPC 1.592520 CHK 2 SPC 1.000000 CHK 3 SPC 0.760000 CHK 4 SPC 1.000000 CHK 5 SPC 0.039370 CHK 6 SPC 0.450000 CHK *REFRACTIVE INDICES SRF GLASS RN1 TCE 1 AIR 1.000000 -- 2 SILICA 1.457017 6.000000 3 SILICA 1.457017 6.000000 4 AIR 1.000000 236.000000 5 AIR 1.000000 236.000000 6 REFLECT 1.000000 236.000000

Global Vertex Coordinates and Directions *VERTEX COORDINATES AND DIRECTIONS w.r.t. CGH FACE (mm,deg) X Y Z TLA TLB TLC Cat's Eye -- -- -90.000000 4-inch F/1.5 -- -- 31.210000 -- -- -- CGH Carrier -- -- -- -- -- -- CGH Phase -- -2.000000 -- -- -- -- CGH Backside -- -- -3.000000 -- -- --

Field Stop -- -2.000000 -90.500000 -- -- -- ASPHERIC -- -2.000000 -140.900000 -- -- -- *VERTEX COORDINATES AND DIRECTIONS w.r.t. ASPHERIC (inches,deg) X Y Z TLA TLB TLC Cat's Eye -- 0.078740 2.003937 -- -- -- 4-inch F/1.5 -- 0.078740 6.775984 -- -- -- CGH Carrier -- 0.078740 5.547244 -- -- -- CGH Phase -- -- 5.547244 -- -- -- CGH Backside -- 0.078740 5.429134 -- -- -- Field Stop -- -- 1.984252 -- -- --

Field (Source) Point and Sample Ray Trace *TEST WAVELENGTH 0.632820 um *RAY AIMING Mode: Central Reference Ray Type: Aplanatic *RAYSET FPT FBY/FY1 FBX/FY2 FBZ/FX1 FYRF/FX2 FXRF/WGT CFG/GRP F 1 -- -- -- -- -- - -1.000000 1.000000 -1.000000 1.000000 1.000000 - *TRACE RAY - LOCAL COORDS - FBY 0.00, FBX 0.00, FBZ 0.00 SRF Y/L X/K Z/M YANG/IANG XANG/RANG D/OPL 1 -0.097702 -- -0.001000 -1.173141 -- -- -0.020474 -- 0.999790 -- -- -- 2 -0.072560 -- -- 0.068588 -- -1.227997 0.001197 -- 0.999999 1.173141 0.068588 -1.229610 3 0.006180 -- -- 0.063666 -- -- 0.001111 -- 0.999999 0.068588 0.063666 -1.229610 4 -0.072691 -- -- 0.092763 -- -0.118110 0.001619 -- 0.999999 0.063666 0.092763 -1.401699 5 0.000472 -- -- 0.092763 -- -3.444886 0.001619 -- 0.999999 0.092763 0.092763 -4.846585 6 -0.002741 -- 2.2188e-06 -179.907237 -- -1.984252 -0.001619 -- -0.999999 -- -5.5881e-08 -6.830837 7 0.000472 -- -- -179.907237 -- -1.984252 -0.001619 -- -0.999999 -0.092763 -0.092763 -8.815090 8 -0.072691 -- -- -179.936334 -- -3.444886 -0.001111 -- -0.999999 -0.092763 -0.063666 -12.259976 9 0.006180 -- -- -179.931411 -- -0.118110 -0.001197 -- -0.999999 -0.063666 -0.068589 -12.432065 10 -0.072560 -- -- 178.826859 -- -- 0.020474 -- -0.999790 -0.068589 -1.173141 -12.433678 11 -0.097702 -- -0.001000 178.826859 -- -1.227997 0.020474 -- -0.999790 -- -3.6820e-08 -13.661675 12 3.0673e-09 -- -- 178.826859 -- 4.772047 0.020474 -- -0.999790 -1.173141 -1.173141 -8.889628 PUPIL FY FX RAY AIMING OPD -- -- CENTRAL REF RAY -1.0752e-07



SAG TABLESurface 3 ASPHERICDEMO CGHNote: Negative Sag into Part

R Z (SAG) dZ/dR 0.00000 0.000000 0.000000 0.02500 0.000185 0.014757 0.05000 0.000737 0.029451 0.07500 0.001656 0.044022 0.10000 0.002937 0.058411 0.12500 0.004575 0.072565 0.15000 0.006563 0.086434 0.17500 0.008894 0.099976 0.20000 0.011559 0.113156 0.22500 0.014548 0.125943 0.25000 0.017852 0.138314 0.27500 0.021460 0.150254 0.30000 0.025361 0.161752 0.32500 0.029544 0.172800 0.35000 0.033998 0.183398 0.37500 0.038710 0.193547 0.40000 0.043671 0.203253 0.42500 0.048869 0.212528 0.45000 0.054294 0.221388

CGH Phase Table, DEMO CGH X Y PHASE -0.4000 0.6000 -440.403989 -0.2000 0.6000 -423.049282 -0.0000 0.6000 -422.564416 0.2000 0.6000 -423.049282 0.4000 0.6000 -440.403989 -0.6000 0.4000 -258.254182 -0.4000 0.4000 -250.638280 -0.2000 0.4000 -269.730070 -0.0000 0.4000 -279.133509 0.2000 0.4000 -269.730070 0.4000 0.4000 -250.638280 0.6000 0.4000 -258.254182 -0.6000 0.2000 -71.613410 -0.4000 0.2000 -99.921869 -0.2000 0.2000 -134.390729 -0.0000 0.2000 -148.320495 0.2000 0.2000 -134.390729 0.4000 0.2000 -99.921869 0.6000 0.2000 -71.613410 -0.6000 0.0000 99.053265 -0.4000 0.0000 58.287018 -0.2000 0.0000 18.134065 -0.0000 0.0000 2.507890 0.2000 0.0000 18.134065 0.4000 0.0000 58.287018 0.6000 0.0000 99.053265 -0.6000 -0.2000 275.655049 -0.4000 -0.2000 237.819787 -0.2000 -0.2000 199.253028 -0.0000 -0.2000 184.136987 0.2000 -0.2000 199.253028 0.4000 -0.2000 237.819787 0.6000 -0.2000 275.655049 -0.6000 -0.4000 454.152922 -0.4000 -0.4000 435.322907 -0.2000 -0.4000 405.826456 -0.0000 -0.4000 393.481619 0.2000 -0.4000 405.826456 0.4000 -0.4000 435.322907 0.6000 -0.4000 454.152922 -0.4000 -0.6000 629.093345 -0.2000 -0.6000 619.430703 -0.0000 -0.6000 612.943797 0.2000 -0.6000 619.430703 0.4000 -0.6000 629.093345

MAPPING OF TEST PUPIL --> ASPHERIC --> CGH --> EXIT PUPIL (v6.31)DEMO CGHJob: Align: HA50D0 S/N: 50R- Zygo 4-inch F/1.5

TEST PUPIL ASPHERIC CGH FACE (mm) EXIT PUPIL (cosine) X Y X Y Z X Y K L 0.00 -0.40 -- -0.400000 0.043671 0.0000 16.0572 0.000000 0.175640 0.00 -0.30 -- -0.300000 0.025361 0.0000 12.9121 0.000000 0.142014 0.00 -0.20 -- -0.200000 0.011559 0.0000 8.7231 0.000000 0.096472 0.00 -0.10 -- -0.100000 0.002937 0.0000 3.6307 0.000000 0.040309 0.00 -0.00 -- -0.000000 0.000000 0.0000 -2.0000 0.000000 -0.022217 0.00 0.10 -- 0.100000 0.002937 0.0000 -7.6307 0.000000 -0.084483 0.00 0.20 -- 0.200000 0.011559 0.0000 -12.7231 0.000000 -0.139976 0.00 0.30 -- 0.300000 0.025361 0.0000 -16.9121 0.000000 -0.184680 0.00 0.40 -- 0.400000 0.043671 0.0000 -20.0572 0.000000 -0.217522

0.10 -0.40 0.100000 -0.400000 0.046202 -4.4559 15.8238 -0.048705 0.172958 0.10 -0.30 0.100000 -0.300000 0.028045 -4.8998 12.6993 -0.053830 0.139516 0.10 -0.20 0.100000 -0.200000 0.014373 -5.2781 8.5562 -0.058283 0.094481 0.10 -0.10 0.100000 -0.100000 0.005842 -5.5377 3.5377 -0.061367 0.039203 0.10 -0.00 0.100000 -0.000000 0.002937 -5.6307 -2.0000 -0.062426 -0.022173 0.10 0.10 0.100000 0.100000 0.005842 -5.5377 -7.5377 -0.061200 -0.083304 0.10 0.20 0.100000 0.200000 0.014373 -5.2781 -12.5562 -0.057985 -0.137942 0.10 0.30 0.100000 0.300000 0.028045 -4.8998 -16.6993 -0.053452 -0.182173 0.10 0.40 0.100000 0.400000 0.046202 -4.4559 -19.8238 -0.048295 -0.214857

0.20 -0.40 0.200000 -0.400000 0.053679 -8.5795 15.1590 -0.093591 0.165365 0.20 -0.30 0.200000 -0.300000 0.035956 -9.3980 12.0970 -0.102942 0.132505 0.20 -0.20 0.200000 -0.200000 0.022653 -10.0878 8.0878 -0.110947 0.088951 0.20 -0.10 0.200000 -0.100000 0.014373 -10.5562 3.2781 -0.116416 0.036152 0.20 -0.00 0.200000 -0.000000 0.011559 -10.7231 -2.0000 -0.118280 -0.022061 0.20 0.10 0.200000 0.100000 0.014373 -10.5562 -7.2781 -0.116118 -0.080059 0.20 0.20 0.200000 0.200000 0.022653 -10.0878 -12.0878 -0.110410 -0.132300 0.20 0.30 0.200000 0.300000 0.035956 -9.3980 -16.0970 -0.102252 -0.175139 0.20 0.40 0.200000 0.400000 0.053679 -8.5795 -19.1590 -0.092836 -0.207313

0.30 -0.30 0.300000 -0.300000 0.048713 -13.1973 11.1973 -0.143998 0.122176 0.30 -0.20 0.300000 -0.200000 0.035956 -14.0970 7.3980 -0.154238 0.080943 0.30 -0.10 0.300000 -0.100000 0.028045 -14.6993 2.8998 -0.161108 0.031782 0.30 -0.00 0.300000 -0.000000 0.025361 -14.9121 -2.0000 -0.163423 -0.021918 0.30 0.10 0.300000 0.100000 0.028045 -14.6993 -6.8998 -0.160730 -0.075446 0.30 0.20 0.300000 0.200000 0.035956 -14.0970 -11.3980 -0.153549 -0.124151 0.30 0.30 0.300000 0.300000 0.048713 -13.1973 -15.1973 -0.143101 -0.164788

0.40 -0.20 0.400000 -0.200000 0.053679 -17.1590 6.5795 -0.186801 0.071627 0.40 -0.10 0.400000 -0.100000 0.046202 -17.8238 2.4559 -0.194199 0.026759 0.40 -0.00 0.400000 -0.000000 0.043671 -18.0572 -2.0000 -0.196669 -0.021783 0.40 0.10 0.400000 0.100000 0.046202 -17.8238 -6.4559 -0.193790 -0.070192 0.40 0.20 0.400000 0.200000 0.053679 -17.1590 -10.5795 -0.186046 -0.114708

Virtual cat's eye focus at CGH (X,Y,Z) = (0.0000,0.0000,-90.0000)

Morph 199 of 208 rays from surf 3 (ASPHERIC) to surf 7 (CGH Carrier)

x(X,Y) = mu[i][j]*X**i*Y**j + RMS (sum over i,j)y(X,Y) = nu[i][j]*X**i*Y**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 -7.873998233e-021 0 -2.247057765e+00 0.000000000e+000 1 0.000000000e+00 -2.246852598e+002 0 0.000000000e+00 0.000000000e+001 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 3.565512265e+00 0.000000000e+002 1 0.000000000e+00 3.555296121e+001 2 3.555559464e+00 0.000000000e+000 3 0.000000000e+00 3.558959296e+004 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 -3.906569019e+00 0.000000000e+004 1 0.000000000e+00 -3.856196618e+003 2 -7.717889078e+00 0.000000000e+002 3 0.000000000e+00 -7.686523400e+001 4 -3.843913179e+00 0.000000000e+000 5 0.000000000e+00 -3.872436427e+006 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+00

0 6 0.000000000e+00 0.000000000e+00RMS 1.883475327e-04 1.947358628e-04

Morph 199 of 208 rays from surf 7 (CGH Carrier) to surf 3 (ASPHERIC)

x(X,Y) = mu[i][j]*X**i*Y**j + RMS (sum over i,j)y(X,Y) = nu[i][j]*X**i*Y**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 -4.703124404e-021 0 -4.348974665e-01 0.000000000e+000 1 0.000000000e+00 -4.246553131e-012 0 0.000000000e+00 0.000000000e+001 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 -1.802818998e-01 0.000000000e+002 1 0.000000000e+00 -2.754395742e-011 2 -3.254476996e-01 0.000000000e+000 3 0.000000000e+00 -3.474638460e-014 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 -1.539517890e-01 0.000000000e+004 1 0.000000000e+00 -2.142777567e-023 2 6.805973495e-02 0.000000000e+002 3 0.000000000e+00 1.898866004e-011 4 1.842230278e-01 0.000000000e+000 5 0.000000000e+00 1.790614501e-016 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+000 6 0.000000000e+00 0.000000000e+00RMS 6.079052950e-03 8.701521882e-03

Morph 199 of 208 rays from surf 3 (ASPHERIC) to surf 9 (Cat's Eye)

K(X,Y) = mu[i][j]*X**i*Y**j + RMS (sum over i,j)L(X,Y) = nu[i][j]*X**i*Y**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 -2.160969629e-021 0 -6.331591609e-01 0.000000000e+000 1 0.000000000e+00 -6.327717268e-012 0 0.000000000e+00 0.000000000e+001 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 1.098688613e+00 0.000000000e+002 1 0.000000000e+00 1.094964440e+001 2 1.095062568e+00 0.000000000e+000 3 0.000000000e+00 1.094849424e+004 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 -1.330231771e+00 0.000000000e+004 1 0.000000000e+00 -1.316452388e+003 2 -2.644747099e+00 0.000000000e+002 3 0.000000000e+00 -2.609126957e+001 4 -1.299521030e+00 0.000000000e+000 5 0.000000000e+00 -1.311446206e+006 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+000 6 0.000000000e+00 0.000000000e+00RMS 2.427566185e-04 3.757859679e-04

Morph 199 of 208 rays from surf 9 (Cat's Eye) to surf 3 (ASPHERIC)

X(K,L) = mu[i][j]*K**i*L**j + RMS (sum over i,j)Y(K,L) = nu[i][j]*K**i*L**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 -4.702688713e-021 0 -1.543078188e+00 0.000000000e+000 1 0.000000000e+00 -1.500880747e+002 0 0.000000000e+00 0.000000000e+00

1 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 -8.364159326e+00 0.000000000e+002 1 0.000000000e+00 -1.313566982e+011 2 -1.544602090e+01 0.000000000e+000 3 0.000000000e+00 -1.681363056e+014 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 -1.177673327e+02 0.000000000e+004 1 0.000000000e+00 -3.234116909e+013 2 9.358268290e-01 0.000000000e+002 3 0.000000000e+00 8.588806938e+011 4 9.807358652e+01 0.000000000e+000 5 0.000000000e+00 9.894559451e+016 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+000 6 0.000000000e+00 0.000000000e+00RMS 6.078378899e-03 8.698825022e-03

Morph 199 of 208 rays from surf 7 (CGH Carrier) to surf 9 (Cat's Eye)

K(X,Y) = mu[i][j]*X**i*Y**j + RMS (sum over i,j)L(X,Y) = nu[i][j]*X**i*Y**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 -7.361963138e-091 0 2.822208901e-01 0.000000000e+000 1 0.000000000e+00 2.822205451e-012 0 0.000000000e+00 0.000000000e+001 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 -1.122499956e-02 0.000000000e+002 1 0.000000000e+00 -1.122268350e-021 2 -1.122277345e-02 0.000000000e+000 3 0.000000000e+00 -1.122159466e-024 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 6.262254909e-04 0.000000000e+004 1 0.000000000e+00 6.230768515e-043 2 1.246289473e-03 0.000000000e+002 3 0.000000000e+00 1.242031961e-031 4 6.210965891e-04 0.000000000e+000 5 0.000000000e+00 6.202446116e-046 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+000 6 0.000000000e+00 0.000000000e+00RMS 6.057685652e-08 7.931709198e-08

Morph 199 of 208 rays from surf 9 (Cat's Eye) to surf 7 (CGH Carrier)

X(K,L) = mu[i][j]*K**i*L**j + RMS (sum over i,j)Y(K,L) = nu[i][j]*K**i*L**j + RMS

i j mu[i][j] nu[i][j]0 0 0.000000000e+00 2.487912860e-081 0 3.543324368e+00 0.000000000e+000 1 0.000000000e+00 3.543328964e+002 0 0.000000000e+00 0.000000000e+001 1 0.000000000e+00 0.000000000e+000 2 0.000000000e+00 0.000000000e+003 0 1.769253243e+00 0.000000000e+002 1 0.000000000e+00 1.768849616e+001 2 1.768867310e+00 0.000000000e+000 3 0.000000000e+00 1.768660532e+004 0 0.000000000e+00 0.000000000e+003 1 0.000000000e+00 0.000000000e+002 2 0.000000000e+00 0.000000000e+001 3 0.000000000e+00 0.000000000e+000 4 0.000000000e+00 0.000000000e+005 0 1.423834884e+00 0.000000000e+004 1 0.000000000e+00 1.431012464e+00

3 2 2.861592261e+00 0.000000000e+002 3 0.000000000e+00 2.871412549e+001 4 1.435497952e+00 0.000000000e+000 5 0.000000000e+00 1.437460272e+006 0 0.000000000e+00 0.000000000e+005 1 0.000000000e+00 0.000000000e+004 2 0.000000000e+00 0.000000000e+003 3 0.000000000e+00 0.000000000e+002 4 0.000000000e+00 0.000000000e+001 5 0.000000000e+00 0.000000000e+000 6 0.000000000e+00 0.000000000e+00RMS 2.203939638e-07 2.892198380e-07


GHOST DIFFRACTION ANALYSIS v6.31Job: Align: HA50D0 S/N: 50R- Zygo 4-inch F/1.5DEMO CGH

Interferometer FOV: 1.300 mm dia. at focus (+/- 486 fringes tilt)Retro Reflection: 0.050 REFLECT CGH Reflectivity: 0.035CGH EFFICIENCY 0th order: 0.0300 T 0.0241 R 1st order: 0.4050 T 0.0044 R 2nd order: 0.0010 T 0.0000 R 3rd order: 0.0450 T 0.0005 R

P-V, RMS and Tilts in units of fringes for pupil diameter 57.38 mm at CGH

Out Back Rays P-V RMS X Tilt Y Tilt %inFOV Return -1 -3 172 214.706516 64.070091 0.00 2920.64 0.00 0.000849

-1 -2 4 -- -- 0.00 1458.15 0.00 0.000019

-1 -1 6322 0.000055 0.000010 0.00 0.00 82.71 0.007644 <--TEST WVF

-1 0 120 101.261805 31.276549 0.00 -1455.99 0.00 0.000566

-1 1 1568 205.512546 62.705888 0.00 -2911.99 0.00 0.007644

-7 18 8.0791e+03 2.7005e+03 0.00 9565.54 0.00 0.000090 -6 4 0.000000 -- 0.00 8175.95 0.00 0.000004 -5 36 7.6025e+03 2.4072e+03 0.00 6797.14 0.00 0.000176 -4 4 0.000000 -- 0.00 5427.21 0.00 0.000009 -3 104 7.5041e+03 2.2925e+03 0.00 4064.31 0.00 0.000490 -2 6 2.9528e+03 1.3469e+03 0.00 2706.65 0.00 0.000035 -1 2 -- -- 0.00 1352.46 0.05 0.004408 0 4 -- -- 0.00 0.00 0.02 0.024115 1 2 -- -- 0.00 -1352.46 0.05 0.004408 2 6 2.6206e+03 1.1957e+03 0.00 -2706.65 0.00 0.000035 3 104 4.7918e+03 1.5031e+03 0.00 -4064.31 0.00 0.000490 4 4 0.000000 -- 0.00 -5427.21 0.00 0.000009 5 36 4.2267e+03 1.3556e+03 0.00 -6797.14 0.00 0.000176 6 4 0.000000 -- 0.00 -8175.95 0.00 0.000004 7 18 3.9625e+03 1.2643e+03 0.00 -9565.54 0.00 0.000090

DOUBLE PASS SENSITIVITY ANALYSIS v6.31Job: Align: HA50D0 S/N: 50R- Zygo 4-inch F/1.5

*LENS DATADEMO CGH SRF RADIUS THICKNESS APERTURE RADIUS GLASS SPE NOTE OBJ -- 4.772047 1.000000 AIR Cat's Eye

1 -4.772047 -- 1.592520 K AIR * 4-inch F/1.5

AST -- -- 1.000000 AK SILICA C * CGH Carrier 3 -- P -0.118110 0.760000 K SILICA C * CGH Phase 4 -- -- 1.000000 K AIR * CGH Backside

5 -- -- 0.039370 AIR * Field Stop

RFS 1.692913 -- 0.450000 RK REFLECT * ASPHERIC

7 -- P -- 0.039370 AIR P * Field Stop

8 -- P -- 1.000000 PK SILICA P * CGH Backside 9 -- P -- 0.760000 PK SILICA P * CGH Phase 10 -- P -- 1.000000 PK AIR P * CGH Carrier

11 -4.772047 P -4.772047 P 1.592520 PK AIR P * 4-inch F/1.5

IMS -- -- 1.000002 S Cat's Eye

*TILT/DECENTER DATA 2 DT 1 DCX -- DCY -- DCZ -1.228740 GC 1 TLA -- TLB -- TLC -- 3 DT 1 DCX -- DCY -0.078740 DCZ -- TLA -- TLB -- TLC -- 4 DT 1 DCX -- DCY 0.078740 DCZ -- TLA -- TLB -- TLC -- 5 DT 1 DCX -- DCY -0.078740 DCZ -4.791732 GC 1 TLA -- TLB -- TLC -- 6 DT 1 DCX -- DCY -0.078740 DCZ -6.775984 GC 1 TLA -- TLB -- TLC --

*RAYSETFPT FBY/FY1 FBX/FY2 FBZ/FX1 FYRF/FX2 FXRF/WGT CFG/GRPF 1 -- -- -- -- -- - -1.000000 1.000000 -1.000000 1.000000 1.000000 -

*VARIABLES VB SN CF TYP MIN MAX DAMPING INCR VALUEV 1 6 - DCZ -7.453583 -6.098386 1.000000 0.000693 -6.775984V 2 6 - DCY -0.123740 -0.033740 1.000000 3.9370e-05 -0.078740V 3 6 - DCX -0.045000 0.045000 1.000000 3.9370e-05 -- V 4 6 - TLA -1.000000 1.000000 1.000000 0.003172 -- V 5 6 - TLB -1.000000 1.000000 1.000000 0.003172 --

DESIGN DESIGN P-V RMS CHANGE IN COMPENSATOR VARIABLES (lens units)PARAMETER VALUE INCREMENT fringes fringes V 1 V 2 V 3 V 4 V 5

Baseline 0.00006 0.00001 0.0000 0.0000 -0.0000 -0.0000 -0.0000 Source N.A.(F/2.17) 0.2303 5.0000 % 0.00005 0.00001 0.0000 0.0000 0.0000 -0.0000 0.0000 Wavelength 632.8200 nm 0.1000 nm 0.05716 0.01470 0.0005 0.0000 -0.0000 -0.0001 -0.0000 Source Zernike #1 0.0000 wv 5.0000 wv 0.00211 0.00046 0.0000 0.0000 0.0000 -0.0000 0.0000 Source Zernike #2 0.0000 wv 5.0000 wv 0.00212 0.00046 0.0000 0.0000 -0.0000 -0.0000 -0.0000 Source Zernike #3 0.0000 wv 5.0000 wv 0.00683 0.00190 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 Source Zernike #4 0.0000 wv 1.0000 wv 0.00017 0.00003 -0.0000 -0.0000 0.0000 0.0000 0.0000 Source Zernike #5 0.0000 wv 1.0000 wv 0.00020 0.00003 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 Source Zernike #6 0.0000 wv 1.0000 wv 0.00058 0.00014 0.0000 0.0000 0.0000 -0.0000 0.0000 Source Zernike #7 0.0000 wv 1.0000 wv 0.00059 0.00013 0.0000 0.0000 0.0000 -0.0000 0.0000 Source Zernike #8 0.0000 wv 1.0000 wv 0.00190 0.00040 0.0000 -0.0000 0.0000 0.0000 0.0000

*Cat's Eye (X) 0.0000 mm 0.1000 mm 0.35533 0.06260 0.0000 -0.0000 0.0061 0.0000 0.0625*Cat's Eye (Y) 0.0000 mm 0.1000 mm 0.32251 0.06263 -0.0002 0.0061 -0.0000 -0.0624 -0.0000*Cat's Eye (Z) -90.0000 mm 0.1000 mm 0.51086 0.13311 0.0037 0.0001 0.0000 -0.0018 0.0000 Pattern Distortion 0.0000 um 1.0000 um 0.08805 0.02009 Substrate Thickness 3.0000 mm 0.1000 mm 0.00881 0.00239 -0.0013 -0.0000 0.0000 0.0000 0.0000 Substrate Index 1.4570 0.0010 0.00016 0.00004 -0.0001 -0.0000 -0.0000 0.0000 0.0000 Substrate Wedge TLA 0.0000 frg 10.0000 frg 0.01624 0.00210 0.0000 0.0004 -0.0000 -0.0031 0.0000 Substrate Wedge TLB 0.0000 frg 10.0000 frg 0.01630 0.00210 0.0000 -0.0000 -0.0004 0.0000 -0.0031*Substrate Power 0.0000 frg 1.0000 frg 0.06040 0.01516 0.0005 0.0000 -0.0000 -0.0001 -0.0000 Substrate Meniscus 0.0000 frg 10.0000 frg 0.02185 0.00476 -0.0001 -0.0000 -0.0000 0.0000 -0.0000

*DCZ 6 -172.1100 mm 0.1000 mm 7.53702 2.11544 0.0039 -0.0000 -0.0000 0.0011 -0.0000*Radius 6 1.6929 0.1000 % 0.49606 0.12517 -0.0024 -0.0000 0.0000 0.0001 0.0000 CC 6 -1.000000 0.0001 0.00342 0.00080 0.0000 0.0000 -0.0000 -0.0000 -0.0000 AD 6 -1.677910e-01 1.0000 % 2.17781 0.51504 -0.0025 -0.0000 0.0000 0.0005 0.0000 AE 6 2.169420e-01 1.0000 % 0.83239 0.17344 0.0005 0.0000 0.0000 -0.0002 0.0000

AF 6 -3.184960e-01 1.0000 % 0.29239 0.05525 -0.0001 -0.0000 0.0000 0.0001 0.0000 AG 6 2.954770e-01 1.0000 % 0.06057 0.01055 0.0000 0.0000 0.0000 -0.0000 0.0000*DCY 6 -2.0000 mm 0.1000 mm 13.18826 1.96140 -0.0000 0.0039 0.0000 -0.1332 0.0000*DCX 6 0.0000 mm 0.1000 mm 13.25083 1.95678 0.0000 0.0000 0.0039 -0.0001 0.1332*TLA 6 0.0000 deg 0.0100 deg 1.02216 0.15160 0.0000 -0.0003 -0.0000 0.0100 -0.0000*TLB 6 0.0000 deg 0.0100 deg 1.03931 0.15153 0.0000 0.0000 0.0003 -0.0000 0.0100 TLC 6 0.0000 deg 0.1000 deg 0.00006 0.00001 0.0000 -0.0000 -0.0000 -0.0000 0.0000

*Horizontal Fringes 0.0000 frg 10.0000 frg 0.02113 0.00407 -0.0000 0.0004 -0.0000 -0.0043 -0.0000*Vertical Fringes 0.0000 frg 10.0000 frg 0.02441 0.00431 0.0000 0.0000 0.0004 -0.0000 0.0043

Baseline Again 0.00006 0.00001 0.0000 0.0000 -0.0000 -0.0000 -0.0000

*denotes synthetic interferogram plotted

One fringe corresponds to 0.5000 waves figure at surface 6



DEMOCGH Tolerance Analysis of CGH Null TestJob: C03XX Interferometer Scale Factor (waves of test optic figure per fringe): 0.50000S/N: 50R-0595 48 CGH Illumination: F/ 1.5Surface Raytrace Model Sensitivity Analysis Tolerance Analysisor Design Design P-V RMS Budgeted P-V RMS P-V RMSGroup Parameter Unit Value Increment fringes fringes Tolerance fringes fringes Percent Percent NotesGlobal Baseline Model wv 0.00000 Actual: 0.00006 0.00001 0.000 0.000 0.0% 0.0%Global Wavelength nm 632.820 0.100 0.05716 0.01470 0.010 0.006 0.001 1.4% 1.7%Fizeau Fizeau Reference frg 0.000 Budgeted: 0.20000 0.04000 0.200 0.040 48.6% 45.7% 1Fizeau Zernike #1 wv 0.000 5.000 0.00211 0.00046 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #2 wv 0.000 5.000 0.00212 0.00046 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #3 wv 0.000 5.000 0.00683 0.00190 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #4 wv 0.000 1.000 0.00017 0.00003 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #5 wv 0.000 1.000 0.00020 0.00003 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #6 wv 0.000 1.000 0.00058 0.00014 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #7 wv 0.000 1.000 0.00059 0.00013 0.000 0.000 0.000 0.0% 0.0% 1Fizeau Zernike #8 wv 0.000 1.000 0.00190 0.00040 0.000 0.002 0.000 0.5% 0.5% 1Fizeau:CGH Cat's Eye X mm 0.000 0.100 0.35533 0.06260 0.000 0.001 0.000 0.3% 0.2% 3Fizeau:CGH Cat's Eye Y mm 0.000 0.100 0.32251 0.06263 0.000 0.001 0.000 0.2% 0.2% 3Fizeau:CGH Cat's Eye Z mm -90.000 0.100 0.51086 0.13311 0.010 0.051 0.013 12.4% 15.1% 4,5HA50:CGH Transfer X mm 0.000 0.100 0.35533 0.06260 0.000 0.000 0.000 0.0% 0.0% 6,18HA50:CGH Transfer Y mm 0.000 0.100 0.32251 0.06263 0.000 0.000 0.000 0.0% 0.0% 6,18HA50:CGH Transfer Z mm 0.000 0.100 0.51086 0.13311 0.010 0.051 0.013 12.4% 15.2% 5,6,14CGH Encoding & Digitization cycle 0.000 EdgeChk: 0.00340 0.00080 0.007 0.002 1.7% 1.8% 7,11CGH E-beam Registration um 0.000 1.000 0.08805 0.02009 0.038 0.003 0.001 0.8% 0.9% 7,12CGH Contact Printing um 0.000 1.000 0.08805 0.02009 0.400 0.035 0.008 8.6% 9.2% 7CGH Thickness mm 3.000 0.100 0.00881 0.00239 0.048 0.004 0.001 1.0% 1.3% 7,8CGH Index Silica 1.45702 0.001 0.00016 0.00004 0.0001 0.000 0.000 0.0% 0.0% 7CGH Substrate Wedge TLA frg 0.000 10.000 0.01624 0.00210 0.000 0.000 0.000 0.0% 0.0% 7CGH Substrate Wedge TLB frg 0.000 10.000 0.01630 0.00210 0.000 0.000 0.000 0.0% 0.0% 7CGH Substrate Power frg 0.000 1.000 0.06040 0.01516 0.039 0.002 0.001 0.6% 0.7% 7,9CGH Substrate Meniscus frg 0.000 10.000 0.02185 0.00476 0.000 0.000 0.000 0.0% 0.0% 7,17CGH Substrate TWD Net frg 0.000 Measured: 0.04790 0.00660 0.048 0.007 11.6% 7.5% 7,9,16,17Test Optic Vertex Radius inch 1.693 0.10% 0.49606 0.12517 0.00% 0.000 0.000 0.0% 0.0%Test Optic Conic Constant -1.000000 0.0001 0.00342 0.00080 0.000 0.000 0.000 0.0% 0.0%NOTES Sum 0.412 0.088 frg

1 Interferometer errors can be measured and subtracted. RSS 0.221 0.045 frg3 Budgeted decenter (or tilt) error of 1.0 fringe over CGH alignment aperture.4 Budgeted defocus error of 1.0 fringe over CGH alignment aperture.5 Could be improved using radius slide to set CGH to cat's eye distance.6 CGH framing errors limit alignment transfer; budgeted tolerances assume preferred (keyed) orientation.7 CGH fabrication errors.8 Budgeted tolerance from measured CGH thickness of 3.048 mm.9 Tolerance for TWD excludes power and was measured over CGH clear aperture.

11 Budgeted encoding and digitization from EdgeChk log file, converted from CGH fringes to interferogram fringes12 Budgeted registration from Nikon verification14 Budgeted Z transfer is user verifiable by checking CGH null vs. HA50 Alignment CGH at cat's eye position.16 Measured transmission interferograms of zeroth order chrome patterned CGH, empty cavity reference subtracted.17 Fringes at 633 nm.18 Retro alignment annulus provides alignment transfer with no degradation of centration.

C03XX.DEMOCGH.xls

50R.sn433.flat.opd Acquisition S/N:0127-1058813068

Date/Time:Mon Jul 21, 2003 13:44:28Title:50R Substrate Job:WIP

Serial Number:433 Surface:Flatness

Operator:sma Instrument:GPI w/ 97591

ActualWavelength:

632.82 nm

Frame Size:296 × 300 × 10 bitsNotes:

Flatness Interferogram

Durango Interferometry Software v3.10.1028

Surface Flatness (fringes)

Analysis OptionsPhase Algorithm:P6 16×45° (1 sets)Calculation Mask:YesReject Saturated:No

Min Intensity:68Min Modulation:0.34058

Erode:5 pixelsMax Phase Slope:45 deg/pixel

UC Modes:data median; physical; scaleUC Diameter:48.0000 mmBitmap Scale:0.2000 mm/pixel

Smoothing:Yes (median 3×3 )Healing:No

Fitting Algorithm:discrete orthogonal polynomials (degree 4)

Fitting Zone:0 to 100% of Unit CircleAberration Mode:discrete orthogonal polynomials

ReferenceWavelength:

546.07 nm

Scale Factor:0.5 wv/frgAberration Removal:PST TLT RES

Seidel Value ClockTilt: 3.2510 -164.45°

Power: -0.2744

Statistic ValueP-V: 0.3126 fringes

RMS: 0.0802 fringes

Fiducials

Transmitted Wavefront Distortion Filename:50R.sn433.twd.opd

Acquisition S/N:0127-1058821586Date/Time:Mon Jul 21, 2003 16:06:26

Title:50R Substrate Job:WIP

Serial Number:433 Surface:TWD

Operator:al Instrument:GPI w/ 97591 Wavelength:632.82 nmFrame Size:296 × 300 × 10 bits


Transmission

Empty Cavity (REF)

50R.030721.ref.opdAcquisition S/N: 0127-1058819226Representation: bitmap




UC Modes:data median; physical; scaleUC Diameter:48.0000 mmBitmap Scale:0.2000 mm/pixel


Fitting Algorithm:discrete orthogonal polynomials (degree 8)


ReferenceWavelength:

546.07 nm

Scale Factor:0.5 wv/frgAberration Removal:REF PST TLT PWR RES

Transmitted Wavefront StatisticsWedge: 0.6580 fringes @ 14.39°

Transparent Wedge: 1.#INF fringes/mm @ 14.39°Power: 0.0332 fringes

Astigmatism: 0.0142 fringes @ -69.84°Coma: 0.0094 fringes @ -87.64°

Spherical: -0.0002 fringesIrregularity: 0.0498 fringes

RMSi: 0.0057 fringes

Transmitted Wavefront Distortion Filename:DEMOCGH.sn433.twd.opd

Acquisition S/N:0127-1059490886Date/Time:Tue Jul 29, 2003 10:01:26

Title:DEMOCGH Job:C03XX

Serial Number:433 Surface:Patterning before etching

Operator:al Instrument:Zygo GPI Wavelength:632.82 nmFrame Size:296 × 300 × 10 bits


Transmission

Empty Cavity (REF)





UC Modes:physical; physical; scaleUC Center:(x,y) = (0.0000,-2.0000) mm

UC Diameter:38.6100 mmBitmap Scale:0.2000 mm/pixel


Fitting Algorithm:discrete orthogonal polynomials (degree 8)Fitting Zone:0 to 100% of Unit Circle

Aberration Mode:discrete orthogonal polynomialsReference Wavelength:546.07 nm


Transmitted Wavefront StatisticsWedge: 5.0368 fringes @ -40.19°

Transparent Wedge: 1.#INF fringes/mm @ -40.19°Power: 0.0298 fringes

Astigmatism: 0.0127 fringes @ 30.53°Coma: 0.0156 fringes @ -138.81°

Spherical: 0.0060 fringesIrregularity: 0.0471 fringes


Fiducials

Object Image Morphed Image

WgtX Y x y res x y res

1 -19.70 0.0000 -19.80 0.0435 0.1090 -19.80 0.0435 0.1090 1

2 19.70 0.0000 19.80-

0.02320.1027 19.80

-0.0232

0.1027 1

Transmitted Wavefront Distortion Filename:DEMOCGH.sn433.rie.opd

Acquisition S/N:0127-1060712758Date/Time:Tue Aug 12, 2003 13:25:58


Serial Number:433 Surface:TWD after etching

Operator:al Instrument:Zygo GPI Wavelength:632.82 nmFrame Size:296 × 300 × 10 bits


Transmission

Empty Cavity (REF)





UC Modes:physical; physical; scaleUC Center:(x,y) = (0.0000,-2.0000) mm






Transmitted Wavefront StatisticsWedge: 0.6935 fringes @ -25.53°

Transparent Wedge: 1.#INF fringes/mm @ -25.53°Power: 0.0509 fringes

Astigmatism: 0.0374 fringes @ 0.21°Coma: 0.0144 fringes @ -104.00°

Spherical: 0.0110 fringesIrregularity: 0.0636 fringes


Fiducials

Object Image Morphed Image

WgtX Y x y res x y res

1 -19.70 0.0000 -19.70 0.3002 0.3002 -19.70 0.3002 0.3002 1

2 19.70 0.0000 19.70-

0.29980.2998 19.70

-0.2998

0.2998 1

CGH Null Substrate Aberration Map For chrome-type CGHs, a zero-order transmission interferogram maps the substrate aberrations. Subtraction of an empty-cavity reference interferogram makes thisan “absolute” test.

For phase-type CGHs, a second interferogram acquired with the chrome etch mask in place maps aberrations of only the etched portions. The effective substrate aberrations (for all but zero-order diffraction) are then the average of the before-etch and after-etch interferograms. Their difference is a map of etch depth variation.

If the air space between CGH and return flat is short and/or the CGH is of large aperture or low spatial frequency, then the zero-order interferograms may show some diffraction ghosts.

Diffraction International, Durango Interferometry Software v3.10.1028

Document IdentificationFilename:DEMOCGH.sn433.net.opd

Acquisition S/N:E643-1061224832Date/Time:Mon Aug 18, 2003 11:40:32


Serial Number:433 Operator:al

Instrument:Zygo GPI Mnem ACQ S/N Filename StatusARIE 0127-1060712758 DEMOCGH.sn433.rie.opd LoadedBTWD 0127-1059490886 DEMOCGH.sn433.twd.opd Loaded

Analysis OptionsOPD Arithmetic:AVG(ALL), physical scaling

Actual Wavelength:632.82 nmCalculation Mask:Yes

UC Modes:pixel address; physical; scaleUC Center:(x,y) = (0.0000,-2.0000) mm


Smoothing:Yes (median 3×3 )Fitting Algorithm:discrete orthogonal polynomials (degree 8)


Scale Factor:0.5 wv/frgRemoval:PST TLT PWR RES

OPD Statistics

Wedge:0.0003 fringes @14.19°Power:0.0392 fringesIrreg:0.0479 fringesRMSi:0.0066 fringes

U of Az (FRINGE) Zernikesf ValueDefinition (A is x to y)0 -0.012811 -0.0000R cos A2 -0.0008R sin A3 0.02132R2-14 0.0119R2 cos 2A5 0.0028R2 sin 2A6 -0.0032(3R3-2R) cos A7 -0.0063(3R3-2R) sin A8 0.00596R4-6R2+19 0.0030R3 cos 3A10 -0.0093R3 sin 3A11 0.0028(4R4-3R2) cos 2A12 0.0004(4R4-3R2) sin 2A13 0.0023(10R5-12R3+3R) cos A14 -0.0008(10R5-12R3+3R) sin A15 0.002020R6-30R4+12R2-1

DEMOCGH.50R-0595.retro.opd Acquisition S/N:0127-1061931321

Date/Time:Tue Aug 26, 2003 15:55:21Title:DEMOCGH Job:C03XX

Part Number:50R-0595 Serial Number:433

Surface:Retro-reflection after framing Operator:al

Instrument:Zygo GPI Actual Wavelength:632.82 nm








UC Modes:pixel address; data extent; diameterUC Diameter:44.0000 mmBitmap Scale:0.1201 mm/pixel




Scale Factor:0.5 wv/frgAberration Removal:PST TLT PWR


Power: -1.1575


RMS: 0.1728 fringes

Fiducials


DEMOCGH.50R-0595.flat.opd Acquisition S/N:0127-1061929958

Date/Time:Tue Aug 26, 2003 15:32:38Title:DEMOCGH Job:C03XX

Part Number:50R-0595 Serial Number:433

Surface:Flatness after framing Operator:al

Instrument:Zygo GPI Actual Wavelength:632.82 nm








UC Modes:pixel address; physical; scaleUC Diameter:48.0000 mmBitmap Scale:0.2000 mm/pixel




Scale Factor:0.5 wv/frgAberration Removal:PST TLT


Power: -0.2352


RMS: 0.2339 fringes

Fiducials

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