Applied Materials Confidential

Chabot ENGR 45 AMAT TourB85 Maydan Technology Center

Nic CelesteSRP Chamber Engineering

30 September 2013

Applied Materials Confidential2

Contents General Rules Introduction

– Nic Celeste– How does ENGR 45 relate to my job?

About Applied Materials Clean Room Safety

– Gowning– Hazards– Emergency Protocol

Tour

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General Rules:

• NO PHOTOGRAPHY-• Keep your Phones away.

• Visitor badges on at all times.• Be Respectful-

• This is a real lab, people are here trying to do their job.• Don’t Touch-

• This is a research lab. The equipment is dangerous, and things are expensive.

• Be alert-• This is a big group, don’t be in the way of people trying to work. • There are many potential hazards in the lab. • Pay attention to where you are and what is moving around you.

• Ask Questions!

Applied Materials Confidential

Introduction

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Introduction Nic Celeste, EITnicholas_celeste@amat.com

– Mechanical Engineer• Selective Removal Products

– R&D Hardware engineer: I solve hardware problems and design parts for a Plasma CVD machine that etches silicon wafers.

– Really cool stuff I get to do:• Build brand new parts & machines that have never existed before• Work with sophisticated tools and brilliant people• Shape the future of material technology

– San Francisco State Graduate, BS ME 2012• Transfer from Chabot/ Las Positas 2004-2010• Thermal/Fluids Emphasis at SF State

– Background in Welding, Fabrication, Quality Control, Assistive Mobility technology, Automotive & Construction (Electrical)

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How does ENGR 45 relate to my job? Every problem that we solve is related to materials.

– Particularly their Electrical, Chemical, Thermal, & Mechanical properties.

The tool I work on removes silicon by creating and removing oxides.

Our main Mechanical Engineering challenges: – Uniformity & Particles

• Uniformity:– Our process is thermally sensitive. – Parts need to transfer heat to maintain thermal uniformity across the wafer.

• Particles:– Our parts cannot corrode or sputter in the chamber.– We must design with materials that react predictably with our process

chemistry and plasma.

Applied Materials Confidential

About Applied MaterialsSlides From “Corporate Overview” Presentation

Applied Materials Confidential

WHAT WE DO

We make the equipment that makes the components that change the world.

8 Corporate Overview – Data as of Q3 FY13

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2011 Rank 2012 Rank CY2012Sales ($M)* Company

2 1 5,513.4 Applied Materials

1 2 4,887.5 ASML

3 3 4,219.0 Tokyo Electron

5 4 2,834.6 Lam Research4 5 2,463.5 KLA-Tencor6 6 1,483.6 Dainippon Screen Manufacturing

9 7 1,423.4 Advantest

11 8 1,137.7 Hitachi High-Technologies

7 9 1,006.8 Nikon

8 10 965.2 ASM International N.V.

12,226.3 Others

38,161.0 Total Market

358.4 OEM Elimination

37,802.6 Net Total Market

Top 10 Worldwide Semiconductor Equipment Manufacturers

* Includes service and spares. flat panel display equipment not included.Source: Gartner ( Published annually in April)

Semi Industry Status – Data as of Q3 FY13

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LCD display

9.7” LED

backlit panel

Touch panel

capacitive

multitouch

Applied’s Technology Enabling Tablet PC

DisplayEnabled by Applied Materials’PE-CVD, PVD, test,and Roll-to-Roll equipment(>30% of tablet BOM*)

SemiconductorEnabled by Applied Materials’Silicon Systemsequipment - microprocessor256MB DRAM16GB MLC NAND FlashI/O controllermulti-touch controller(>20% of tablet BOM*)

Source: iFixit, UBS, Applied Materials* Refers to % of Bill of Materials processed by Applied Materials equipment

Corporate Overview – Data as of Q3 FY13

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Enabling and Accelerating Innovation

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Applied Materials is theglobal leader in providing manufacturing solutions for the semiconductor, flat panel display and solar photovoltaic industries

OUR STRENGTHSPrecision materials engineeringCommercializing sophisticated systemsGlobal reach

Corporate Overview – Data as of Q3 FY13

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R&D Investment

FOR THE PAST DECADE,

~$1Billion invested annually in RD&E

Corporate Overview – Data as of Q3 FY13

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Solar

The Most Exciting Industries on Earth

20,000,000xreduction in

COST PER TRANSISTOR in 30 years1

20xreduction in

COST PER AREA in 15 years2

5xreduction in

COST PER WATT in 4 years3

In 1976, a 32GB smartphone would have cost more than 4 BILLION DOLLARS

1 Source: SIA, IC Knowledge LLC2 Source: Display Search, Nikkei BP, Applied Materials3 Source: Photon Consulting 2012

DisplaySemiconductor

Corporate Overview – Data as of Q3 FY13

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Performance atLow PowerNew ArchitecturesMore Transistors

Enabling Mobility Age

Mobile EndMarkets

3DTransistors

Moore’s Law Scaling

Corporate Overview – Data as of Q3 FY13

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Business Segments

Display Energy and Environmental

Solutions

Silicon Systems Group

Applied Global Services

15 Corporate Overview – Data as of Q3 FY13

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A global leader in the manufacture of advanced semiconductor equipment

Applied equipment is enabling the key advancements in semiconductor processing technology that make tomorrow’s devices possible.

With unmatched expertise in precision materials engineering, we help our customers address consumer demand for higher performance and lower power consumption solutions.

Silicon Systems Group

Global expansion of the consumer base is driving demand for mobile PCs, smart phones and other types of consumer electronics

Corporate Overview – Data as of Q3 FY13

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World class TFT-LCD* equipment and services

Extending core equipment technology into new mobility and other high-performance Display segments

The equipment we build uses scale to help make flat panel TVs more than 20% larger each year without price increase

Display

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Exploring emerging display technologies, such as touch panel, flexible substrate and OLED which will drive the future of the screen

* Thin film transistor – liquid crystal display

Corporate Overview – Data as of Q3 FY13

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Energy and Environmental Solutions

Powering the c-Si Roadmap

Driving technology & innovation to solve today’s photovoltaic (PV) manufacturing challenges

Delivering advanced wafering and integrated cell manufacturing equipment

Continually improving cell efficiency while lowering manufacturing costs Accelerating global PV adoption by delivering cost-effective

solutions that integrate technology, equipment and materials to increase cell efficiency, improve factory productivity and lower operating costs.

Corporate Overview – Data as of Q3 FY13

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Applied Global Services

Collaborate with customers to predict and solve problems. Improve equipment and fab productivity.

Broad, flexible portfolio for custom solutions

Advanced predictive and diagnostic technologies

Innovative technology extension and conversion

World-class expertise and knowledge-base systems

Optimizing efficiency of semiconductor, display and solar factories through integrated services, spares, equipment and automation software.

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Clean Room Safety

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Contamination is:

A foreign substance that has a detrimental effect on products or

processes.

BASIC CONTAMINATION CONTROL

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BASIC CONTAMINATION CONTROL

WIDTH OF A HUMAN HAIR60 microns

601 207 30 40 5010

SMALLEST VISIBLE PARTICLE (20 MICRONS)

RELATIVE SIZES

MICRON SCALE

BLOOD CELL (7 MICRONS)

1 MICRON CONTAMINANTE

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BASIC CONTAMINATION CONTROL

Skin Flake Defect - 1 micron line width

SKIN FLAKE EXAMPLE

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CLASS 10,000 CLASS 1,000 CLASS 100 CLASS 10

CLASS 1

PARTICLES PER CUBIC FOOT AT 0.5 MICRON

With the improvement of clean room technology and design these standards will have to be upgraded.

BASIC CONTAMINATION CONTROLCLEAN ROOM CLASIFICATIONS

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Clean Room Safety

• Once we leave this room we will head up to the Clean Room• Gowning-

• I will demonstrate proper Gowning for the clean room upstairs.• Room 1:

• Shoe Covers• Hair Net• Face Mask/ Beard Cover• Gloves

• Room 2:• Gown Head to Toe:

• Head Cover• Coveralls• Boots• Safety Glasses.

• IN CASE OF EMERGENCY: DO NOT DEGOWN. EXIT PROMPTLY

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Let’s Start The Tour!