6 ( Pressure Gauges)

1. 2. 3. /

4.

BOURDON GAUGE

THERMOCOUPLE GAUGE

PIRANI GAUGE

COLD CATHODE GAUGE

RESIDUAL NITROGEN ANALYZER

IONIZATION GAUGE

RESIDUAL GAUGE ANALYZER

CAPACITANCE MANOMETER

TORR 10-14 10-12 10-10 10-8 10-6 10-4 10-2 100 102

10410-2 1 10210-410-610-810-1010-12PASCAL

( order of magnitude) 15 760 torr 10-12 torr transducer vacuum pump 760 torr 10-3 torr 10-4 10-12 torr

(direct gauge) transducer 6.1 6.2 760 -10-3 torr Bourdon Gauge, Capacitance Manometer, Thermocouple Gauge Pirani Gauge 10-4 10-12 torr Ionization Gauge Residual Gas Analyzer

6.1 Bourdon Gauge

0.51

1.5

30

10

15

20

2

0

0

76

30

50

20

25

10

5

USE NO OIL

Bourdon gauge (gear)

(lever) vacuum chamber 6.3

meter scale Bourdon gauge scale calibrated 0-15 psi 0-760 torr 10 torr Bourdon gauge 0.2 torr

Bourdon gauge 10%

6.2 Capacitance Manometer

Capacitance manometer rough vacuum 760 torr 10-4 torr

Sensing unit diaphragm () (sealed) high vacuum cavity processing unit sensing unit

Diaphragm (deflect) () diaphragm diaphragm calibration ( 1%)

( )

6.3 Thermocouple Gauge Thermocouple gauge TC gauge rough vacuum 760 torr 10-3 torr 1 millitorr () 10-4

torr TC gauge TC gauge (convection) (conduction) TC gauge

TC gauge (gauge tube) (control unit) (filament) Thermocouple Thermocouple junction Thermocouple calibrated

vacuum chamber () TC () TC () () TC gauge TC gauge 10-3 torr (radiation) gauges TC gauge (sensing unit) Methanol

TC gauge Mechanical pump Diffusion Turbo molecular pump 10-3 torr (10-4 torr) TC gauge ( 0 0 ) Thermocouple Thermocouple spot weld 6.4 Pirani Gauge Pirani gauge Thermocouple gauge 2 torr 0.001 torr Pirani gauge Thermocouple gauge Pirani gauge Thermocouple gauge () () () vacuum chamber

1 2 calibrate ( Balance meter)

Ionization Gauge Ionization gauge pressure gauge high vacuum (10-4 torr) ultrahigh vacuum (10-11 torr) port vacuum chamber (nude) vacuum chamber

Ionization gauge (filament), grid ion collector grid ion collector Grid Ion collector Ions ion (ion current) grid ( grid - grid ) grid grid - grid

() collector (ion collector)

(ion current) chamber ( ion ) gauge calibrate (P) gauge (S) (Ip) (Ie)

e

p

II

SP = 1

P = S = (gauge sensitivity) Ip = (positive ion current) Ie = (emission current)

Ion gauge gauge x-ray ion gauge grid x-ray x-ray

collector photoelectrons x-ray (x-ray current) () 10-10 torr x-ray current x-ray current gauge 10-11 torr gauge correction factor Ion gauge solvent () degas control degas grid bake gauge tube baking gauge tube chamber vacuum pump(s) Ion gauge grid Ion gauge tube ion gauge operate gauge () 10-4-10-5 torr gauge oxidation Ion collector operate ion pump 10-4-10-5 torr Ion gauge Ion pump () 10-4 torr

Residual Gas Analyzer (RGA) Gauge (partial pressure) RGA RGA operates high vacuum ultrahigh vacuum sample ( 10-4 torr) gauge head operate high vacuum ( ) work chamber

RGA quadrupole (quadrupole sensing head) RGA quadrupole head port RS 232 USB port RGA

RGA peaks peaks () peak () RGA quadrupole ion, quadrupole mass filter Faraday cup collector ion (ionized gas molecules) mass filter Ion quadrupole mass filter Faraday cup collector. Ion ion filter

Quadrupole mass filter array rf dc () filter Ions grounded Ions filter (1-100, 200, 300 mass units scan () work chamber scan 1-100 mass unit 50 mass unit = 14 (N2 = 7x2) mass unit = 18 (H2O = 2x1+16 = 18) peak probe peak peak probe ( peak ) RGA () operate RGA 10-4 torr operate 10-4 torr