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Copyright National Air Filtration Association 2006 Rev. 2 Clean Spaces
Copyright National Air Filtration Association2006 Rev. 2
Clean Spaces
Copyright National Air Filtration Association2006 Rev. 2
Do you have a clean room or a cleanroom
A clean room is what your mother always wanted from you
And a cleanroom is what we are discussing today
Copyright National Air Filtration Association2006 Rev. 2
What is a Cleanroom?
By definition a “Cleanroom” is:• A room in which the air supply, air distribution,
filtration of air supply, materials of construction, and operating procedures are regulated to control particle concentrations so that appropriate air cleanliness levels, as defined in
FED-STD-209, can be met.(IEST-RP-
CC006.2)
Copyright National Air Filtration Association2006 Rev. 2
What is a Cleanroom?
By definition a “Cleanroom” is: “A room in which the concentration of airborne
particles is controlled and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room, and in which the relevant parameters, e.g. temperature, humidity and pressure are controlled as necessary”
--ISO-14644-1
Copyright National Air Filtration Association2006 Rev. 2
Copyright National Air Filtration Association2006 Rev. 2
History of HEPA Filters
HighEfficiencyParticulateAir filter
Copyright National Air Filtration Association2006 Rev. 2
To Be A HEPA Filter
“Throwaway extended-medium dry-type filter in rigid frame having minimum particle-collection efficiency of 99.97% (that is a maximum particle penetration of of 0.03%) for 0.3 µm particles of thermally-generated DOP particles or specified alternative aerosol.”
--IEST
Copyright National Air Filtration Association2006 Rev. 2
Background on HEPA Filters
Copyright National Air Filtration Association2006 Rev. 2
Background on HEPA FiltersBackground on HEPA Filters
Atomic Energy Commission
Microelectronics Pharmaceutical
Medical DeviceFood Processing
Copyright National Air Filtration Association2006 Rev. 2
Background on HEPA Filters
Copyright National Air Filtration Association2006 Rev. 2
IMPACTION
DIFFUSIONINTERCEPTION
RELATIVE EFFECT OF PARTICLE COLLECTION MECHANISMS
9998
95
40
6070
50
3020
0.1 1.0 10.00.01
PARTICLE DIAMETER (MICRONS)
COLLECTIONEFFICIENCY(%)
OVERALL EFFICIENCY
Typical Air Filtration PrinciplesTypical Air Filtration Principles
Copyright National Air Filtration Association2006 Rev. 2
PARTICLE DIAMETER (MICRONS)
THEORETICAL HEPA FILTER COLLECTION EFFICIENCY
0.3µm99.999
0.1 1.0 10.00.01
99.99
99.97
99
90
50
10
COLLECTION EFFICIENCY(%)
HEPA Filter MechanismsHEPA Filter Mechanisms
Copyright National Air Filtration Association2006 Rev. 2
99.999%
UltraLowPenetrationAir
Copyright National Air Filtration Association2006 Rev. 2
99.9999%
SuperUltraLowPenetrationAir
Copyright National Air Filtration Association2006 Rev. 2
Testing at the FACTORY for grading of the filters –
IEST-RP-CC001.4
A, B, C, D, E, F, G H, I, J, K
Type of HEPA Filters
Copyright National Air Filtration Association2006 Rev. 2
Industry Standards
Copyright National Air Filtration Association2006 Rev. 2
In-Situ Integrity Testing
what is the difference between hand scanned and total penetration ?
total penetration will take a 1cfm (28.3L/m) sample from the entire flow volume of the tested filter -- approximately a 1:750 ratio
hand scanned will sample more on an-- approximate 1:1 ratio
Copyright National Air Filtration Association2006 Rev. 2
HEPA Filter Integrity Testing
Copyright National Air Filtration Association2006 Rev. 2
Why Test a HEPA Filter
Copyright National Air Filtration Association2006 Rev. 2
• In-Place Integrity (full media
scan)
also includes joints, frames, ceiling, gaskets and other seals
HEPA Filter Integrity Testing Methodology
Copyright National Air Filtration Association2006 Rev. 2
Laskin Laskin nozzle nozzle generatorgenerator
HEPA Filter Integrity Testing
Copyright National Air Filtration Association2006 Rev. 2
thermal thermal generator generator for for challengechallenge
HEPA Filter Integrity Testing
Copyright National Air Filtration Association2006 Rev. 2
Who Designed Your Facility?
Copyright National Air Filtration Association2006 Rev. 2
Copyright National Air Filtration Association2006 Rev. 2
Summary
Systems using HEPA or ULPA filters that are both factory and in-situ tested provide the cleanest air to the space.
