Clean Technologies for Controlled Environment

Tengfang (Tim) Xu, Ph.D., PELawrence Berkeley National Laboratory

From Traditional Cleanrooms to Minienvironments and Nano-technology Facilities

Tengfang (Tim) Xu, Ph.D., PE

Environmental Energy Technologies Division

Lawrence Berkeley National Laboratory

June 23, 2005

Issues and Trends in Clean Technologies

- Slide 3

Outline

• Introduction to clean technologies

– Cleanrooms and minienvironments

• Energy saving opportunities

• Case studies

• Issues and trends

• What’s coming?

- Slide 4

Introduction: Cleanroom

• Definition

– A Cleanroom is "a room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation, and retention of particles inside the room and in which other relevant parameters, e.g., temperature, humidity, and pressure, are controlled as necessary."

– ISO Standard 14644-1

- Slide 5

Introduction: Cleanroom• Design

– The design of cleanroom HVAC systems requires the unique understanding of cleanliness requirements, guidelines, airflow, filtration, room pressurization, code requirements, specialty equipment, precise control, and many more details.

– IEST CC RP12.2 Considerations in Cleanroom Design

• Subgroup 1: Cleanroom Design Considerations

• Subgroup 2: Installation of Cleanroom Production Equipment

• Subgroup 3: Cleanroom Electrical Systems

- Slide 6

Introduction: Minienvironment

• Definition

– A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment

• Guidelines

– Separative Devices, ISO Standard 14644-7 (IEST)

– IEST CC RP28.1: Minienvironments

- Slide 7

Minienvironment Applications

• A variety of names

– “Separative devices,” “separative enclosures,” “isolators,” or “barriers” in the microelectronics, chemical, and pharmaceutical industries

– “Safety cabinets” in biomedical and healthcare

– “Gloveboxes” in research and defense industry

- Slide 8

Clean Technologies for Controlled Environment

• Process-driven– contamination

• Planning• Design• Qualifications• Operation

Site plan

Facility

Cleanroom concepts

Contaminationproblem

Cleanroomactivities, e.g.,

process,production, etc

- Slide 9

Cleanroom Measured Power

Cleanroom Electric Power

- Slide 10

Energy Savings Opportunities

• Efficient Air Systems – initial costs – optimized sizing– utility costs and productivity– non-energy benefits

• Energy efficient planning and design – – strategy to achieve cost savings and to

improve bottom lines in the industry

- Slide 11

Case Studies on Minienvironment/Cleanroom

- Slide 12

Why Minienvironment?

- Slide 13

Results

• Total fan power • Power factor• Pressure control• EPI (W/cfm)

– Comparison with Cleanrooms

- Slide 14

Results

0

50

100

150

200

250

0 200 400 600 800 1000

Airflow Rates through the Minienvironment (cfm)

Ele

ctri

c P

ow

er (

W)

- Slide 15

Results

0.00

0.10

0.20

0.30

0.40

0.50

0.60

0.70

0.80

0.90

1.00

0 10 20 30 40 50 60 70 80 90 100 110 120 130

Airflow Speed in Clean Spaces (FPM)

EP

I (W

/cfm

)

Minienvironment

Benchmarked Cleanrooms

- Slide 16

Issues and Trends…

• Issues - Contamination control – Source: particle, molecular, bio, mechanical,

electronic – Preciseness, costs, safety, regulation

• Trends – Multi-level particle retention and/or bio containment– Minienvironments/Bio-safety cabinet– Nano-tech facilities

- Slide 17

Issues and Trends…Standards

The Institute of Environmental Sciences and Technology (IEST)– ISO Standard 14644 (1 through 8): Cleanrooms and

Controlled Environments– ISO Standard 14698 (1 through 3): Bio-contamination

- Slide 18

Issues and Trends… Solutions

• Resources for clean technologies– IEST RPs addressing a variety of cleanroom

technologies http://www.iest.org/technical/ccwgs.html • Design, construction, operation, compliance,

qualifications, procedure, control, etc.

• WG12 > WG28 > New WGs on Nano-tech facilities

– LBNL• Energy related technologies and strategies

- Slide 19

What’s Coming… Stay Tuned

• Cleanrooms• Minienvironments - upcoming workshop to

– Share knowledge and improve performance of minienvironments

– Understand energy implications of minienvironment vs. cleanroom

– Develop and identify strategies in energy efficiency for effective environmental control

Questions

TTXU@LBL.GOV

Lawrence Berkeley National Laboratory