Cleanroom Energy Efficiency Research Activities

March, 2006

Research ActivitiesResearch Activities

Research Roadmap for PIERResearch Roadmap for PIER Cleanroom Programming GuideCleanroom Programming Guide Benchmarking/Case studies involving 28 Benchmarking/Case studies involving 28

cleanroom spacescleanroom spacessee: http://hightech.lbl.gov/cr-benchmarking-see: http://hightech.lbl.gov/cr-benchmarking-results.htmlresults.html

Energy Design Resources – Collaboration with Energy Design Resources – Collaboration with PG&E and Rumsey Engineers to develop PG&E and Rumsey Engineers to develop Design Guides based upon observed best Design Guides based upon observed best practices practices see: see: Energy Design Resources andEnergy Design Resources andhttp://hightec.lbl.gov/cleanrooms_bpg.htmlhttp://hightec.lbl.gov/cleanrooms_bpg.html

Research Activities, con’tResearch Activities, con’t

Demand controlled filtration – control based Demand controlled filtration – control based upon particle counts upon particle counts – Completed pilot study - see: Completed pilot study - see:

http://hightech.lbl.gov/dc-filtration_case.htmlhttp://hightech.lbl.gov/dc-filtration_case.html– Demonstration project in progressDemonstration project in progress

Minienvironment study see: Minienvironment study see: http://hightech.lbl.gov/mini-env.htmlhttp://hightech.lbl.gov/mini-env.html

Fan-filter UnitsFan-filter Units– Draft test procedure completedDraft test procedure completed– Testing of 15 or more units in progressTesting of 15 or more units in progress

Makeup Air System Efficiency

0.0

0.2

0.4

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28

Cleanroom ID

Po

wer

Inte

nsi

ty (

W/c

fm)

(Lo

wer

is b

ette

r)

Overall average 0.91

* Recirculation efficiency could not be measured for 21-24. System consisted of central air handler and fan-filter units cascading through four rooms.

Recirculation System Efficiency

0.0

0.2

0.4

0.6

0.8

1.0

1.2

1 3 5 7 9 11 13 15 17 19 21 23 25 27

Cleanroom ID

Po

wer

Inte

nsi

ty (

W/c

fm)

(Lo

wer

is b

ette

r)

Average 0.49

* Recirculation efficiency could not be measured for 21-24. System consisted of central air handler and fan-filter units cascading through four rooms.

Types of Recirculation Systems and Their Efficiency

0.0

0.2

0.4

0.6

0.8

1.0

1.2

1 3 5 7 9 11 13 15 17 19 21 23 25 27

Cleanroom ID

Po

wer

Inte

nsi

ty (

W/c

fm)

(Lo

wer

is b

ette

r)

AveragesFFU: 0.63

Ducted HEPA: 0.58Pressurized Plenum: 0.43

Air Velocity at Filter Face

0

20

40

60

80

100

120

140

160

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28

Cleanroom ID

Air

Vel

oci

ty (

fpm

)

ISO Class 5 Cleanrooms

0

100

200

300

400

500

600

700

2 3 4 5 6 7 9 10 15 17 21 24

Cleanroom ID

Air

Ch

ang

es p

er H

ou

r

Chilled Water System Comparison

0

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

1.8

WaterCooled 42°F

Air Cooled42°F

Air Cooled40°F

Air Cooled48°F

Air Cooled50°F

WaterCooled 40°F

WaterCooled 38°F

WaterCooled 36°F

WaterCooled 44°F

WaterCooled 43°F

Facility ACleanrooms

1,2

Facility B.1Cleanrooms

3,4

Facility B.2Cleanrooms

5,6

Facility B.2Cleanrooms

5,6

Facility B.2Cleanrooms

5,6

Facility CCleanroom

7

Facility DCleanroom

8

Facility E.1Cleanroom

9

Facility E.2Cleanroom

10

Facility FCleanrooms11,12,13,14

Facility ID

kW /T

on

(L

ow

er is

bet

ter)

Cooling TowerCW PumpsCHW PumpsChiller

Chilled Water Pumping Comparison

0

0.05

0.1

0.15

0.2

0.25

0.3

0.35

Facility APrimary/

Secondary/Tertriary

Facility B.1Primary

Facility B.2Primary

Facility B.2Primary

Facility C Primary/

Secondary

Facility DPrimary/

Secondary/Tertriary

Facility E.1Primary

Facility F Primary/

Secondary

Facility ID

kW /T

on

(L

ow

er is

bet

ter)

Tertiary Pump

Secondary Pump

Primary Pump

Primary Only Average: 0.13 kW/ton

Primary / Secondary Average: 0.17 kW/ton

Best practice topicsBest practice topicsCleanroom Best Practices topic organization: HVAC – Air Systems

HVAC – Water Systems

Power Systems

Process Systems Cross-cutting / misc. issues

Low pressure drop: face velocity, filter efficiency,

Variable speed Chillers

UPS systems

VOC abatement Motor efficiency

Recirculation system type

Cooling tower/chilled plant controls

Standby generation

minienvironments Steam systems

Air change rates Cooling tower/condenser optimization

Self generation

Vacuum pumps Variable speed drives

Demand controlled filtration

Free cooling Distribution DI water generation

Lighting

Fan efficiency Variable speed pumping

DI water reduction

Maintenance

Fan-filter efficiency

Dual temperature cooling loops

Process chillers Commissioning

Exhaust optimization

Compressed air systems

Heat recovery

Exhaust systems/scrubbers

Right-sizing

Yellow - completed

White - plannedCleanroom Best Practices Topic Organization

Demand Controlled FiltrationDemand Controlled Filtration

Benchmarking confirmed large energy savings by setting back recirculation air

Pilot Studies confirmed ability to control based upon particle concentrations

Market is skeptical

10

100

1,000

10,000

100,000

1,000,000

2/5/2004 0:00 2/5/2004 4:00 2/5/2004 8:00 2/5/2004 12:00 2/5/2004 16:00 2/5/2004 20:00 2/6/2004 0:00

Par

ticl

es p

er c

f at

0.1

-0.1

5 m

icro

ns

50%

60%

70%

80%

90%

100%

Fan

Sp

eed

(P

erce

nt

of

full

sp

eed

)

Fan-filter unit testingFan-filter unit testing

Testing 2’x4’ units

Performance curves based upon pressure rise, airflow, and fan kW

Goal is to integrate results into deployment programs

Minienvironment studiesMinienvironment studies

Study of energy performance of one minienvironment suggests performance can be improved

Study of cleanroom using many

minienvironments addresses overall energy performance

For more informationFor more information

See High-tech Buildings website See High-tech Buildings website for latest publications: for latest publications: http://hightech.lbl.govhttp://hightech.lbl.gov